CN204589289U - Novel hot evaporation crucible structure - Google Patents
Novel hot evaporation crucible structure Download PDFInfo
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- CN204589289U CN204589289U CN201520276064.4U CN201520276064U CN204589289U CN 204589289 U CN204589289 U CN 204589289U CN 201520276064 U CN201520276064 U CN 201520276064U CN 204589289 U CN204589289 U CN 204589289U
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- crucible
- inner bag
- crucible body
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- hot evaporation
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Abstract
The utility model discloses a kind of Novel hot evaporation crucible structure; It comprises crucible body, and improvement is: described crucible body inwall is socketed with tubular inner bag, leaves gap between bottom inner bag lower end and crucible body.Main application and advantage: structure that crucible adds " inner bag ", the phenomenon that can suppress " to climb pot " in thermal evaporation process.New crucible structure is simple, easy for installation, with low cost, practical.Use the mass production efficiency of new crucible not only metallized film growth best, also can guarantee thermal evaporation process quality simultaneously.
Description
Technical field
The utility model relates to the technical field that metallized film is produced, and is specifically related to a kind of Novel hot evaporation crucible structure.
Background technology
In metallized film growth, thermal evaporation process is one traditional, the most stable, the most economical technique.
Thermal evaporation is as the term suggests put 1 in crucible 2 (container) by source metal exactly, generated heat by electrode under vacuum conditions, solid metal source 1 is made to be molten into liquid state, final gasification is also moved with molecule or ionic group mode and is attached to target material surface, build up, finally form the metallic membrane of desired thickness, i.e. metallized film growth.
In thermal evaporation process making processes, often there is the phenomenon being referred to as " climbing pot " in industry.Namely the source metal 1 of post liquefaction outwards can be overflowed along sidewall of crucible (container), can cause well heater short circuit, damage equipment time serious.For preventing metal liquid from overflowing, if reduce heater temperature, then source metal 1 can not fully liquefy; If reduce source metal 1 injected volume, then processing quality (film thickness) is difficult to ensure.
Summary of the invention
The utility model is for the deficiency existed in background technology, and the technical problem that solve is: provide a kind of Novel hot evaporation crucible structure suppressing source metal liquid spill.
The utility model is for solving the problems of the technologies described above, and the technical scheme taked is: a kind of Novel hot evaporation crucible structure, comprises crucible body, and its improvement is: described crucible body inwall is socketed with tubular inner bag, leaves gap between bottom inner bag lower end and crucible body.
Further, described crucible body upper diameter is greater than lower diameter, and the intersection of crucible body upper and lower forms step, and inner bag is socketed in the inwall of crucible body bottom, and inner bag upper end is higher than crucible body upper surface.
Compared with prior art, beneficial effect is the utility model: structure that crucible adds " inner bag ", the phenomenon that can suppress " to climb pot " in thermal evaporation process.New crucible structure is simple, easy for installation, with low cost, practical.Use the mass production efficiency of new crucible not only metallized film growth best, also can guarantee thermal evaporation process quality simultaneously.
Accompanying drawing explanation
Fig. 1 is the structural representation of existing crucible;
Fig. 2 is the structural representation of one of the utility model embodiment;
Fig. 3 is the partial enlarged drawing of inner bag and crucible body junction in Fig. 2;
Fig. 4 is that in existing crucible, schematic diagram is overflowed in liquid metal source;
Fig. 5 is the schematic diagram that the crucible of one of the utility model embodiment prevents liquid metal source from overflowing.
In figure: 1, source metal; 2, crucible body; 2-1, step; 3, inner bag; 4, boss; 5, hydrops pond.
Embodiment
Below in conjunction with accompanying drawing, embodiment of the present utility model is described in further detail, but protection domain of the present utility model is not limited to specific embodiment.
See shown in Fig. 1 to Fig. 5, a kind of Novel hot evaporation crucible structure, comprises crucible body 2, and described crucible body 2 inwall is socketed with tubular inner bag 3, leaves gap between bottom inner bag 3 lower end and crucible body 2.Therefore the lower surface of inner bag 3 forms boss 4, when climbing boss 4 in liquid metal source 1, because boss 4 changes its direction of motion, dropping under gravity, just effectively inhibit the liquid metal source 1 of altering to continue to climb.
Crucible body 2 upper diameter is greater than lower diameter, and the intersection of crucible body 2 upper and lower forms step 2-1, and inner bag 3 is socketed in the inwall of crucible body 2 bottom, and inner bag 3 upper end is higher than crucible body 2 upper surface.Gap between the outside surface of inner bag 3 and crucible body 2 inwall forms hydrops pond 5.Those liquid metal sources 1 of being overflowed by inner bag 3 under gravity, will be fallen into hydrops pond 5, then can not spill into outside crucible body 2, this addresses the problem the drawback that conventional crucible liquid metal source 1 is excessive.
Way the easiest is exactly that inner bag 3 adopts tapered cylinder pipe, up big and down small, is directly placed in crucible body 2.Crucible material remains unchanged, and is made up of boron nitride (BN) material.
From completed purposes of statistical process, use Novel crucible and old crucible processing quality to be consistent, individual parameters has a distinct increment as " vaporator rate " compares old crucible.New and old crucible manufacture technics compares sees table 1 below.
Table 1:
Adopt after the utility model, structure that crucible adds " inner bag ", the phenomenon that can suppress " to climb pot " in thermal evaporation process.New crucible structure is simple, easy for installation, with low cost, practical.Use the mass production efficiency of new crucible not only metallized film growth best, also can guarantee thermal evaporation process quality simultaneously.
Claims (2)
1. a Novel hot evaporation crucible structure, comprises crucible body (2), it is characterized in that: described crucible body (2) inwall is socketed with tubular inner bag (3), leaves gap between inner bag (3) lower end and crucible body (2) bottom.
2. Novel hot evaporation crucible structure according to claim 1, it is characterized in that: described crucible body (2) upper diameter is greater than lower diameter, the intersection of crucible body (2) upper and lower forms step (2-1), inner bag (3) is socketed in the inwall of crucible body (2) bottom, and inner bag (3) upper end is higher than crucible body (2) upper surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520276064.4U CN204589289U (en) | 2015-04-30 | 2015-04-30 | Novel hot evaporation crucible structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520276064.4U CN204589289U (en) | 2015-04-30 | 2015-04-30 | Novel hot evaporation crucible structure |
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| Publication Number | Publication Date |
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| CN204589289U true CN204589289U (en) | 2015-08-26 |
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| CN201520276064.4U Active CN204589289U (en) | 2015-04-30 | 2015-04-30 | Novel hot evaporation crucible structure |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105586571A (en) * | 2016-03-09 | 2016-05-18 | 苏州新材料研究所有限公司 | Di-tungsten crucible structure based on electron beam evaporation |
| WO2019033540A1 (en) * | 2017-08-14 | 2019-02-21 | 武汉华星光电半导体显示技术有限公司 | Evaporation crucible and evaporation system |
-
2015
- 2015-04-30 CN CN201520276064.4U patent/CN204589289U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105586571A (en) * | 2016-03-09 | 2016-05-18 | 苏州新材料研究所有限公司 | Di-tungsten crucible structure based on electron beam evaporation |
| CN105586571B (en) * | 2016-03-09 | 2018-03-16 | 苏州新材料研究所有限公司 | Double tungsten crucible structures based on electron beam evaporation |
| WO2019033540A1 (en) * | 2017-08-14 | 2019-02-21 | 武汉华星光电半导体显示技术有限公司 | Evaporation crucible and evaporation system |
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