CN204584947U - A kind of soft start abrasive disk - Google Patents
A kind of soft start abrasive disk Download PDFInfo
- Publication number
- CN204584947U CN204584947U CN201520095872.0U CN201520095872U CN204584947U CN 204584947 U CN204584947 U CN 204584947U CN 201520095872 U CN201520095872 U CN 201520095872U CN 204584947 U CN204584947 U CN 204584947U
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- CN
- China
- Prior art keywords
- lapping liquid
- abrasive disk
- soft start
- cylinder
- transmission shaft
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
A kind of soft start abrasive disk that the utility model relates to, comprise cylinder, gas bar, support, lapping liquid conveying arm, lapping liquid delivery main, power head, power transmission shaft, top lap, lower abrasive disk, liquid bath, work box, magnetic valve, booster pump, sensor, filter adsorbing mechanism, lapping liquid collecting pipe and lapping liquid collecting box, described power head is connected with power transmission shaft, described power transmission shaft is connected with top lap, described lower abrasive disk is fixed in liquid bath, it is characterized in that: described cylinder side is provided with current divider, epicoele and the cavity of resorption of described current divider and cylinder are connected.In the utility model, by the setting of pressure regulator, can before and after adjusting cylinders between draught head, draught head before and after cylinder is reduced, thus cylinder climb acceleration in the process risen is reduced, thus crystal wafer is not easily dropped, reduce scrappage.
Description
Technical field
The utility model relates to a kind of soft start abrasive disk.
Background technology
Existing crystal wafer is in the process of grinding, because the pneumatic means that control cylinder rises before rises too fast in the process making top lap increase, the crystal wafer be fitted on lower work dish is easy to take up, drop and easily make wafer cracked, cause yield rate to reduce, add production cost.
Summary of the invention
The purpose of this utility model is deficiency in order to solve above-mentioned technology and a kind of soft start abrasive disk designed.
A kind of soft start abrasive disk designed by the utility model, comprise cylinder, gas bar, support, lapping liquid conveying arm, lapping liquid delivery main, power head, power transmission shaft, top lap, lower abrasive disk, liquid bath, work box, magnetic valve, booster pump, sensor, filter adsorbing mechanism, lapping liquid collecting pipe, lapping liquid collecting box, pressure regulator, centrifugal filter and radiator, described power head is connected with power transmission shaft, described power transmission shaft is connected with top lap, described lower abrasive disk is fixed in liquid bath, it is characterized in that: described cylinder side is provided with pressure regulator, epicoele and the cavity of resorption of described pressure regulator and cylinder are connected.
Preferred as one, described top lap is provided with multiple uniform lapping liquid transfer passage, is provided with lapping liquid collecting pipe below described liquid bath, and described lapping liquid collecting pipe is connected with centrifugal filter.
Preferred as one, be provided with filtration adsorbing mechanism after described centrifugal filter.
Preferred as one, described filtration adsorbing mechanism is non-woven fabrics filter mechanism.
Preferred as one, described lapping liquid delivery main is connected with the below of lapping liquid collecting box.
Preferred as one, described lapping liquid delivery main is provided with magnetic valve.
Preferred as one, described lapping liquid delivery main is provided with booster pump.
Preferred as one, described lapping liquid conveying arm is provided with sensor.
Preferred as one, described radiator is above lapping liquid collecting box.
In the utility model, by the setting of pressure regulator, can draught head between adjusting cylinders upper and lower cavity, draught head before and after cylinder is reduced, thus cylinder climb acceleration in the process risen is reduced, thus crystal wafer is not easily dropped, reduce scrappage.
Accompanying drawing explanation
Fig. 1 is soft start abrasive disc structure view of the present utility model;
Fig. 2 is soft start abrasive disk pressure regulator partial view of the present utility model;
In figure: 1, cylinder, 1a, epicoele, 1b, cavity of resorption, 2, gas bar, 3, support, 4, lapping liquid conveying arm, 5, lapping liquid delivery main, 6, power head, 7, power transmission shaft, 8, top lap, 9, lower abrasive disk, 10, liquid bath, 11, work box, 12, magnetic valve, 13, booster pump, 14, sensor, 15, filter adsorbing mechanism, 16, lapping liquid collecting pipe, 17, lapping liquid collecting box, 18, pressure regulator, 19, centrifugal filter, 20, radiator.
Detailed description of the invention
Below by embodiment, the utility model will be further described by reference to the accompanying drawings.
Embodiment:
As Fig. 1, shown in 2, a kind of soft start abrasive disk described by the present embodiment, comprise cylinder 1, gas bar 2, support 3, lapping liquid conveying arm 4, lapping liquid delivery main 5, power head 6, power transmission shaft 7, top lap 8, lower abrasive disk 9, liquid bath 10, work box 11, magnetic valve 12, booster pump 13, sensor 14, filter adsorbing mechanism 15, lapping liquid collecting pipe 16, lapping liquid collecting box 17, pressure regulator 18, centrifugal filter 19 and radiator 20, described power head 6 is connected with power transmission shaft 7, described power transmission shaft 7 is connected with top lap 8, described lower abrasive disk 9 is fixed in liquid bath 10, it is characterized in that: described cylinder 1 side is provided with pressure regulator 18, epicoele 1a and the cavity of resorption 1b of described pressure regulator 18 and cylinder 1 are connected.
Further, described top lap 8 is provided with multiple uniform lapping liquid transfer passage, is provided with lapping liquid collecting pipe 16 below described liquid bath 10, and described lapping liquid collecting pipe 16 is connected with centrifugal filter 19.
Further, be provided with after described centrifugal filter 19 and filter adsorbing mechanism 15, described filtration adsorbing mechanism 15 is non-woven fabrics filter mechanism.By filtering the setting of adsorbing mechanism 15, making lapping liquid reach secondary filter and further reducing impurity in lapping liquid.
Further, described lapping liquid delivery main 5 and lapping liquid collecting box 17, below connect.
Further, described lapping liquid delivery main 5 is provided with magnetic valve 12, by the setting of electronic valve 12, ensure that the conveying of lapping liquid delivery main 5 pairs of lapping liquids.
Further, described lapping liquid delivery main 5 is provided with booster pump 13, by the setting of booster pump 13, ensure that the pressure of lapping liquid delivery main 5, ensure that the normal conveying lapping liquid of lapping liquid delivery main 5.
Further, described lapping liquid conveying arm 4 is provided with sensor 14, by the setting of sensor 14, preventing grinder to grind crystal wafer when carrying without lapping liquid, causing the damage of crystal wafer.
Further, described radiator 20 is above lapping liquid collecting box 17.
In the utility model, when lapping liquid is by booster pump 13, after pumping into lapping liquid delivery main 5, by lapping liquid conveying arm 4, lapping liquid is delivered between top lap 8 and lower abrasive disk 9, lapping liquid subsequently in liquid bath 10 is by entering centrifugal filter 19 after lapping liquid collecting pipe 16, lapping liquid after filtering subsequently carries out after secondary filter through non-woven fabrics filter mechanism again, lapping liquid enters radiator 20 and dispels the heat, lapping liquid enters lapping liquid collecting box 14 subsequently, after grinding, cylinder 1 makes gas bar 2 up, drive top lap 8 up, by the setting of pressure regulator 18, make cylinder 1 when pressure release, reach the effect of slow pressure release, rapid pressure release is prevented to cause that top lap 8 has wafer, damage after causing wafer to eminence.
When cylinder 1 carries out pressure release, carry out supercharging by pressure regulator 18 pairs of epicoeles, cause gas bar 2 speed uplink to slow down.
When sensing in lapping liquid conveying arm 4 after without lapping liquid of lapping liquid conveying arm 4 upper sensor 14, signal is sent to controlling organization, grinder is quit work, prevent the damage of crystal wafer.
In the utility model, by the setting of pressure regulator, can before and after adjusting cylinders between draught head, the draught head making cylinder upper and lower reduces, thus cylinder climb acceleration in the process risen is reduced, thus crystal wafer is not easily dropped, reduce scrappage.
Specific embodiment described herein is only to design of the present utility model explanation for example.The utility model person of ordinary skill in the field can make various amendment or supplements or adopt similar mode to substitute to described specific embodiment, but can't depart from spirit of the present utility model or surmount the scope that appended claims defines.
Claims (9)
1. a soft start abrasive disk, comprise cylinder, gas bar, support, lapping liquid conveying arm, lapping liquid delivery main, power head, power transmission shaft, top lap, lower abrasive disk, liquid bath, work box, magnetic valve, booster pump, sensor, filter adsorbing mechanism, lapping liquid collecting pipe, lapping liquid collecting box, pressure regulator, centrifugal filter and radiator, described power head is connected with power transmission shaft, described power transmission shaft is connected with top lap, described lower abrasive disk is fixed in liquid bath, it is characterized in that: described cylinder side is provided with pressure regulator, epicoele and the cavity of resorption of described pressure regulator and cylinder are connected.
2. soft start abrasive disk as claimed in claim 1, is characterized in that: described top lap is provided with multiple uniform lapping liquid transfer passage, is provided with lapping liquid collecting pipe below described liquid bath, and described lapping liquid collecting pipe is connected with centrifugal filter.
3. soft start abrasive disk as claimed in claim 1, is characterized in that: be provided with filtration adsorbing mechanism after described centrifugal filter.
4. soft start abrasive disk as claimed in claim 3, is characterized in that: described filtration adsorbing mechanism is non-woven fabrics filter mechanism.
5. soft start abrasive disk as claimed in claim 1, is characterized in that: described lapping liquid delivery main is connected with the below of lapping liquid collecting box.
6. soft start abrasive disk as claimed in claim 1, is characterized in that: described lapping liquid delivery main is provided with magnetic valve.
7. soft start abrasive disk as claimed in claim 1, is characterized in that: described lapping liquid delivery main is provided with booster pump.
8. soft start abrasive disk as claimed in claim 1, is characterized in that: described lapping liquid conveying arm is provided with sensor.
9. soft start abrasive disk as claimed in claim 1, is characterized in that: described radiator is above lapping liquid collecting box.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520095872.0U CN204584947U (en) | 2015-02-11 | 2015-02-11 | A kind of soft start abrasive disk |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520095872.0U CN204584947U (en) | 2015-02-11 | 2015-02-11 | A kind of soft start abrasive disk |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204584947U true CN204584947U (en) | 2015-08-26 |
Family
ID=53921144
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520095872.0U Expired - Fee Related CN204584947U (en) | 2015-02-11 | 2015-02-11 | A kind of soft start abrasive disk |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204584947U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105364702A (en) * | 2015-10-26 | 2016-03-02 | 国家电网公司 | Automatic oil adding and recycling device of water wheel generator mirror plate grinding machine |
| CN106002504A (en) * | 2016-06-24 | 2016-10-12 | 马鞍山市欧林机械设备有限公司 | Finish machining method for high-strength abrasion-resistant metal blade |
-
2015
- 2015-02-11 CN CN201520095872.0U patent/CN204584947U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105364702A (en) * | 2015-10-26 | 2016-03-02 | 国家电网公司 | Automatic oil adding and recycling device of water wheel generator mirror plate grinding machine |
| CN106002504A (en) * | 2016-06-24 | 2016-10-12 | 马鞍山市欧林机械设备有限公司 | Finish machining method for high-strength abrasion-resistant metal blade |
| CN106002504B (en) * | 2016-06-24 | 2018-01-23 | 马鞍山市欧林机械设备有限公司 | A kind of method for fine finishing of high-strength abrasion-proof metal blade |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150826 Termination date: 20160211 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |