CN204577830U - A kind of semiconductor pumped all solid state laser of high optical quality - Google Patents

A kind of semiconductor pumped all solid state laser of high optical quality Download PDF

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Publication number
CN204577830U
CN204577830U CN201520039783.4U CN201520039783U CN204577830U CN 204577830 U CN204577830 U CN 204577830U CN 201520039783 U CN201520039783 U CN 201520039783U CN 204577830 U CN204577830 U CN 204577830U
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China
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solid state
pump light
laser
state laser
collimation focusing
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CN201520039783.4U
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Chinese (zh)
Inventor
邹桂兰
常亮
张翼
奚晓
姚思一
杨晓红
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DAHENG OPTICS SCIENCE & TECHNOLOGY DEVELOPMENT (BEIJING) Co Ltd
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DAHENG OPTICS SCIENCE & TECHNOLOGY DEVELOPMENT (BEIJING) Co Ltd
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Abstract

The utility model discloses a kind of semiconductor pumped all solid state laser of high optical quality, belong to all-solid state laser field.Semiconductor pumped all solid state laser described in the utility model, comprises laser pumping System law and to shake cavity mirror system.Wherein laser pumping system comprises and is positioned at the pump light collimation focusing part of resonant cavity front end and the pumped crystal part in resonant cavity stage casing, by adopting the design of three-chip type anaberration to pump light collimation focusing mirror system, clear-cut margin can be obtained, the pump spot of concentration of energy, and the design of different enlargement ratio can be adopted to change the size of pump spot, thus achieve pump spot in pumped crystal with the optimum Match of fundamental mode spot, high-rder mode is suppressed to participate in vibration, the stabilized lasers obtaining high optical quality exports, and substantially increase the controllability of Laser output optical quality.

Description

A kind of semiconductor pumped all solid state laser of high optical quality
Technical field
The utility model belongs to all-solid state laser field, relates to a kind of semi-conductor laser pumping all, particularly a kind of semi-conductor laser pumping all of high optical quality.
Background technology
Since the sixties in last century, laser came out, because its intensity is high, good directionality, coherence cause well the extensive concern of people, and be applied to illumination, measure and multiple field such as medical treatment.Over nearly 40 years, along with the development of laser technology, the appearance of locked mode, tune Q and CPA technology, the intensity of laser is constantly improved, its advantage in field of laser processing is also more and more obvious, and all solid state laser is more because its high conversion efficiency, high light beam quality and high stability are subject to the favor of laser processing industry.
The all solid state laser of semiconductor laser pumping is the new laser occurred phase late 1980s.The overall efficiency of all solid state laser is at least high than lamp pumping 10 times, the heat load exported due to unit reduces, higher power can be obtained, lifetime of system and reliability are approximately 100 times of flash-lamp pump pumping system, therefore, diode-end-pumped technology is that solid state laser is filled with new vigor and vitality, make all solid state laser have the dual characteristics of solid state laser and semiconductor laser simultaneously, its appearance and gradually maturation are revolutions of solid state laser, are also the developing direction of solid state laser.And, it has penetrated into every subjects field, such as: laser intelligence store show with process, Materialbearbeitung mit Laserlicht, laser medicine and biology, laser communications, laser printing, laser spectroscopy, laser chemistry, laser isotope separation, laser fusion, laser projection, laser detection and metering and military laser technology etc., greatly facilitate the technological progress in these fields and unprecedented development.The appearance of these interleaving techniquess and subject, has promoted the development of conventional industries and new industry widely.
At present, the country such as the U.S., Japan, Germany in manufacturing industry, as electronics, medical treatment, automobile, Aeronautics and Astronautics, etc. field substantially complete the update of traditional handicraft, step into " light processing " epoch.Laser is as the indispensable instrument in " light processing " epoch, also more and more higher to the requirement of its optical quality and light power.The development trend of all solid state laser of high optical quality is fine, and prospect is boundless.
Current Nd:YVO 4crystal is a kind of often by all solid state laser gain media used, and it can provide the pulse laser of tens watts.By nanosecond Q-regulating technique, it can produce the laser of high strength, high repetition frequency.This crystalloid generally adopt 808 and the semiconductor laser of 888nm as exciting light source.
Nowadays in the design process of laser, (a slice lens are used for collimation generally to adopt two-piece type structure for pump light collimation focusing system, a slice is used for focusing on), pump spot is without aberration optimization, its edge is sharp keen not, energy is not concentrated, and mates bad with cavity modes, and Laser output optical quality is not high.
The utility model is just in order to improve a kind of new design that above shortcoming proposes, under identical enlargement ratio, comparable traditional two-piece type collimation focusing mirror obtains less sharper keen concentrated pump spot, better matching effect can be formed with fundamental mode spot in pumped crystal, thus further improve the optical quality of Output of laser, obtain the laser effect of high-quality.
Utility model content
For the technical problem existed in prior art, the purpose of this utility model is to provide a kind of semiconductor pumped all-solid-state laser resonant cavity; By adopting three novel lens type pump light collimation focusing systems, optimizing the optical quality and spot size that incide in pumped crystal, finally obtaining a kind of laser of high optical quality.
The purpose of this utility model is achieved through the following technical solutions:
The semiconductor pumped all solid state laser of a kind of high optical quality described in the utility model, comprise laser pumping System law to shake cavity mirror system, wherein laser pumping system comprises and is positioned at the pump light collimation focusing mirror part of resonant cavity front end and the laser crystal part in resonant cavity stage casing, and its laser pumping components of system as directed pump light collimation focusing mirror is made up of three lens.The same with existing two panels collimating lens system, the pump light of semiconductor emission can be focused to the pumped crystal center in resonant cavity stage casing, with Fundamental mode of cavity hot spot matched well, the final Laser output obtaining high optical quality.
Wherein, pump light collimation focusing mirror adopts " Negative-Positive-Negative " design, three lens are had: first is planoconvex spotlight in this combination, second is meniscus lens, 3rd is biconvex lens, and by selecting different curvature radius and lens pitch, obtains different enlargement ratios, with the pump spot obtaining the clear-cut margin of different size, energy even is concentrated, realize Optimum Matching flexibly with the fundamental mode spot under different situations.Compared with combining with traditional two-piece type, its Energy harvesting is more effective, and pattern matching is more outstanding, and the optical quality that final laser can be made to export is more excellent, and light light conversion efficiency is higher.
Pump light collimation focusing mirror adopts different plating membrane systems to be applicable to the pump light collimation focusing system of different-waveband, greatly can improve pumping efficiency.
The lens material of pump light collimation focusing mirror is flint glass.
Pump light collimation focusing mirror is fixed in microscope base, can realize the fine setting of all around, up-down adjustment and pitching, beat.
Compared with prior art, good effect of the present utility model is:
The utility model is by adopting three-chip type pump light collimation focusing mirror system, the pump spot of clear-cut margin, concentration of energy can be obtained, and the design of different enlargement ratio can be adopted to change the size of pump spot, thus realize pump spot in pumped crystal with the optimum Match of fundamental mode spot, high-rder mode is suppressed to participate in vibration, the stabilized lasers obtaining high optical quality exports, and substantially increases the controllability of Laser output quality.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of a kind of all-solid-state laser resonant cavity described in the utility model;
11-fiber end face, 12-pump light collimation focusing mirror, 13-speculum, 14-pumped crystal, 15-meniscus lens, 16-concave mirror, 17-outgoing mirror, 18-meniscus lens.
Fig. 2 is the light path schematic diagram of pump light collimation focusing mirror;
21-fiber end face, 22-pump light collimation focusing mirror, 23-pumped crystal center
Fig. 3 is that under identical enlargement ratio, traditional two-piece type compares schematic diagram with three-chip type collimation focusing mirror output facula profile described in the utility model;
The light spot profile of 31-tradition two-piece type structure output, 32-is with the light spot profile of three-chip type structure output described by the utility model under enlargement ratio.
Embodiment
Below, embodiment of the present utility model is described in detail by reference to the accompanying drawings.
Fig. 1 is the schematic diagram of all solid state laser resonant cavity described in the utility model.Speculum 13, meniscus lens 15 and meniscus lens 18, outgoing mirror 17 forms resonant cavity jointly.It is Nd:YVO that 888nm pump light source focuses to operation material by pump light collimation focusing mirror 12 4and doping content is carry out pumping in the pumped crystal 14 of 0.5%, produces the laser of 1064nm, export from outgoing mirror 17.The 888nm pump light missed is back to resonant cavity by concave mirror 16, and pumped crystal again, realizes both-end pumping, improves the light light conversion efficiency of whole resonant cavity.Meniscus lens 15 and meniscus lens 18 couples of Nd:YVO in resonant cavity 4the thermal lens of pumped crystal 14 compensates, and changes cavity length resonant cavity is regulated to the power stage be optimized as the speculum 13 of chamber mirror and outgoing mirror 17.
Wherein, pump light collimation focusing mirror 12 adopts three-chip type structure described in the utility model, and as shown in Figure 2: by 1 planoconvex spotlight, 1 meniscus lens and 1 biconvex lens are formed.Adopt numerical aperture NA=0.2, core diameter is fiber end face 21 position that the pump light of 888nm is caused pump light collimation focusing mirror by the optical fiber of 400 microns, as fiber end face in Fig. 2 21 position; This collimation focusing mirror focal length is about 25.2mm, pump light is focused to pumped crystal center 23, as position, pumped crystal center 23 in Fig. 2.The enlargement ratio of this collimation focusing mirror is 3.2X, can obtain the focal beam spot of applicable size to pumped crystal center.
Pump light collimation focusing mirror 12 adopts three-chip type structure to obtain clear-cut margin, the pump spot of concentration of energy, less than the hot spot of two-piece type structure during identical enlargement ratio, energy evenly.As shown in Figure 3: the light spot profile 31 of traditional two-piece type structure output, with the light spot profile 32 of three-chip type structure output described by the utility model under enlargement ratio, can find out that the latter's hot spot is significantly less than the former, and clear-cut margin, energy is more concentrated, and image quality is obviously better than the former.
The lens of pump light collimation focusing mirror 12 all plate 888nm anti-reflection film, ensure that pump light passes through to greatest extent.
Due to These characteristics, 888nm pump light can accurately be focused to pumped crystal center by pump light collimation focusing mirror, hot spot is evenly sharp keen, and its size is applicable to, finally mate very well with Fundamental mode of cavity hot spot, pumped crystal is fully used, and high-rder mode is better suppressed, and resonant cavity exports 1064nm laser facula steady quality high-quality.
Although make specific descriptions to the utility model with reference to the above embodiments, but for the person of ordinary skill of the art, should be appreciated that and can modify based on content disclosed in the utility model or improve, and these amendments and improvement be all within spirit of the present utility model and scope.

Claims (9)

1. the semiconductor pumped all solid state laser of a high optical quality, comprise laser pumping System law to shake cavity mirror system, wherein laser pumping system comprises and is positioned at the pump light collimation focusing mirror part of resonant cavity front end and the laser crystal part in resonant cavity stage casing, it is characterized in that its laser pumping components of system as directed pump light collimation focusing mirror is made up of three lens.
2. all solid state laser as claimed in claim 1, is characterized in that pump light collimation focusing mirror adopts " Negative-Positive-Negative " design.
3. all solid state laser as claimed in claim 2, is characterized in that the first eyeglass of pump light collimation focusing mirror is planoconvex spotlight.
4. all solid state laser as claimed in claim 2, is characterized in that second eyeglass of pump light collimation focusing mirror is meniscus lens.
5. all solid state laser as claimed in claim 2, is characterized in that the 3rd eyeglass of pump light collimation focusing mirror is biconvex lens.
6. all solid state laser as claimed in claim 2, is characterized in that pump light collimation focusing mirror has different enlargement ratio.
7. all solid state laser as claimed in claim 2, is characterized in that pump light collimation focusing mirror adopts different plating membrane systems to be applicable to the pump light collimation focusing system of different-waveband.
8. all solid state laser as described in claim 3 or 4 or 5, is characterized in that the lens material of pump light collimation focusing mirror is flint glass.
9. all solid state laser as claimed in claim 2, is characterized in that pump light collimation focusing mirror is fixed in microscope base the fine setting that can realize all around, up-down adjustment and pitching, beat.
CN201520039783.4U 2015-01-21 2015-01-21 A kind of semiconductor pumped all solid state laser of high optical quality Expired - Fee Related CN204577830U (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108075346A (en) * 2018-01-11 2018-05-25 苏州紫光伟业激光科技有限公司 A kind of microlaser of ultrashort pulse high-peak power
CN108199250A (en) * 2018-01-12 2018-06-22 大学共同利用机关法人自然科学研究机构 Select amplifying device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108075346A (en) * 2018-01-11 2018-05-25 苏州紫光伟业激光科技有限公司 A kind of microlaser of ultrashort pulse high-peak power
CN108199250A (en) * 2018-01-12 2018-06-22 大学共同利用机关法人自然科学研究机构 Select amplifying device

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CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20150819

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