CN204556208U - Based on the three-component standard vibration machine of static pressure air-bearing decoupling device - Google Patents
Based on the three-component standard vibration machine of static pressure air-bearing decoupling device Download PDFInfo
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Abstract
Based on the three-component standard vibration machine of static pressure air-bearing decoupling device, comprise base, described base is provided with X axis shaking table and X axis return mechanism, Y-axis shaking table and Y-axis return mechanism, Z-axis direction shaking table, and three-dimensional vibrating platform; X axis shaking table is relative with X axis return mechanism across three-dimensional vibrating platform, and Y-axis shaking table is relative with Y-axis return mechanism across three-dimensional vibrating platform; X axis shaking table and Y-axis shaking table are fixed with respective shaking table side static pressure air-bearing plate respectively, have the gap that can form air film between shaking table side static pressure air-bearing plate and three-dimensional vibrating platform; X axis return mechanism and Y-axis return mechanism are made up of respective back-moving spring and spring side static pressure air-bearing plate respectively; Z-axis direction shaking table and Z-axis direction air supporting decoupling device are fixed, and have the gap that can form air film between Z-axis direction air supporting decoupling device and three-dimensional vibrating platform.The utility model has that bearing capacity is large, supporting & stablizing and support the good advantage of homogeneity.
Description
Technical field
The utility model relates to a kind of three-component standard vibration machine based on static pressure air-bearing decoupling device.
Technical background
Adopt one-dimensional vibration calibration system to measure axle to three to the calibration of three-dimensional vibration-measuring sensor at present to carry out successively more, and this method longer, data processing complex consuming time, consider simultaneously three-dimension sensor respectively tie up between intercouple, the method is more difficult to get the sensitivity matrix of reflection retinoic acid syndrome relation.Therefore, develop the three-component standard vibration machine that axially can be excited at the same time three-dimensional vibration-measuring sensor three, to the development of vibration-measuring sensor collimation technique and the progress of corresponding industry technology, all there is important theoretical and practical significance.
Chinese patent 201110207297.5 discloses a kind of three-component standard vibration machine based on bayonet type decoupling device, comprise base, X is to electromagnetic vibration generator system, Y-direction electromagnetic vibration generator system, Z-direction electromagnetic vibration generator system and three-dimensional vibrating platform, each electromagnetic vibration generator system is all connected with three-dimensional vibrating platform by mobile decoupling device; Mobile decoupling device comprises the first frame and the second frame, first frame and the second frame fasten mutually, first frame and the second frame are connected side and second connect side composition by outside, inner edge, first between outside with inner edges, the outside of frame is relative with inner edge, and the inner edge of frame inserts in another frame; The air hole being provided with gas channel in the inner edge of the first frame and being communicated with gas channel, air hole is in communication with the outside; The inner edge of the first frame and all have minim gap between the inner edge of the second frame and outside, minim gap forms the air-float guide rail of the first frame inner edge; The interval preventing from contacting outside the second frame and the first frame is provided with between the inner edge of the second frame and the outside of the first frame; Gas channel is communicated with external compressed air source; The outside of the first frame is connected with electromagnetic vibration generator system, and the outside of the second frame is connected with three-dimensional vibrating platform.This shaking table adopts the transmission of bayonet type structure and static pressure air-bearing supporting realizable force, solves the problem of three-component mobile decoupling.
The shortcoming of this shaking table is: 1, by fixing the first frame on a vibration table, three-dimensional vibrating platform is fixed the second frame, first frame and the second frame mutually fasten and form bayonet type structure, the installation accuracy that there is the first frame and the second frame requires high, air film limited area between first frame and the second frame, and the existence of the second frame increases the quality of three-dimensional vibrating platform.
2, all need when shaking table is of reciprocating vibration to pull three-dimensional vibrating platform by bayonet type structure, easily there is deformation in bayonet type structure, the burden of shaking table is large.
3, adopt the static pressure air-bearing technology based on orifice restriction, orifice restriction mode designs air cavity usually to improve load-bearing capacity in throttle orifice exit, but, the existence of air cavity inevitably makes static pressure air-bearing system produce " pneumatic hammer " oscillation phenomenon in characteristic frequency section, reduce stability of strutting system and the upper limit frequency of utilization of static pressure air-bearing system, in addition, be limited to throttling pore size and machining precision, be difficult to the homogeneity ensureing load-bearing capacity between each throttle orifice, thus make to be produced by the shaking table moving component supported and rotate, three-component vibration platform mobile decoupling is had an impact.
Utility model content
For overcome be difficult to obtain load-bearing capacity preferably when existing orifice restriction technology is used in three-component standard vibration machine mobile decoupling device while the shortcoming that there is higher stability of strutting system and cause owing to supporting lack of homogeneity shaking table moving component to tilt and rotate, the utility model provides that a kind of bearing capacity is large, supporting & stablizing and support the good three-component standard vibration machine based on static pressure air-bearing decoupling device of homogeneity.
Based on the three-component standard vibration machine of static pressure air-bearing decoupling device, comprise base, described base is provided with X axis shaking table and X axis return mechanism, Y-axis shaking table and Y-axis return mechanism, Z-axis direction shaking table, and three-dimensional vibrating platform;
It is characterized in that: X axis shaking table is relative with X axis return mechanism across three-dimensional vibrating platform, Y-axis shaking table is relative with Y-axis return mechanism across three-dimensional vibrating platform;
X axis shaking table and Y-axis shaking table are fixed with respective shaking table side static pressure air-bearing plate respectively, have the gap that can form air film between shaking table side static pressure air-bearing plate and three-dimensional vibrating platform;
X axis return mechanism and Y-axis return mechanism are made up of respective back-moving spring and spring side static pressure air-bearing plate respectively, and back-moving spring and spring side static pressure air-bearing plate are fixed; Z-axis direction shaking table and Z-axis direction air supporting decoupling device are fixed, and have the gap that can form air film between Z-axis direction air supporting decoupling device and three-dimensional vibrating platform.
Further, spring side static pressure air-bearing plate and shaking table side static pressure air-bearing plate are arranged at three-dimensional vibrating platform both sides symmetrically.
Three-dimensional vibrating platform described in X axis shaking table, the acting in conjunction of X axis return mechanism realize vibrates along X axis; Y-axis shaking table, the three-dimensional vibrating platform described in the acting in conjunction of Y-axis return mechanism realizes vibrates along Y-axis; Z-axis direction shaking table vibrates along Z-axis direction for realizing described three-dimensional vibrating platform.
The X axis vibration of three-dimensional vibrating platform is promoted for X axis shaking table and X axis return mechanism, when X axis shaking table is to close three-dimensional vibrating Platform movement, X axis shaking table and and three-dimensional vibrating platform between air film promote three-dimensional vibrating platform and move to the direction of X axis return mechanism, now the back-moving spring of X axis is compressed; When X axis shaking table resets, three-dimensional vibrating platform loses the thrust of X axis shaking table, and the back-moving spring of X axis resets, and three-dimensional vibrating platform is resetted at X axis.The Y-axis vibration that Y-axis shaking table and Y-axis return mechanism promote three-dimensional vibrating platform is identical with X axis.
The back-moving spring of X axis and the back-moving spring of Y-axis are air spring.
Further, spring side static pressure air-bearing plate and shaking table side static pressure air-bearing plate are made up of respective substrate and the porous restriction part be fixed on substrate respectively, are provided with the gas channel be communicated with porous restriction part in substrate.High pressure gas forms uniform air film through gas channel and porous restriction part between static pressure air-bearing plate and three-dimensional vibrating platform.
Further, porous restriction part has multiple, and porous restriction part is uniformly distributed on substrate.
The spring side static pressure air-bearing plate of X axis and shaking table side static pressure air-bearing plate form X axis air supporting decoupling device, and the spring side static pressure air-bearing plate of Y-axis and shaking table side static pressure air-bearing plate form Y-axis air supporting decoupling device.
Further, Z-axis direction air supporting decoupling device is made up of the first web joint, the second web joint, adjusting pad, Z axis static pressure air-bearing plate; Adjusting pad is between the first web joint and the second web joint, and the first web joint, the second web joint and adjusting pad are rigidly connected and surround air flotating chamber, and Z axis static pressure air-bearing plate is positioned in air flotating chamber; Second web joint is provided with breach, and three-dimensional vibrating platform is fixed through breach and Z axis static pressure air-bearing plate; First web joint and the second web joint are respectively equipped with respective gas channel and porous restriction part, and the gas channel of each web joint is communicated with porous restriction part.
Described three-dimensional vibrating platform is provided with connection corner post, the second described web joint is provided with right-angle notch, described three-dimensional vibrating platform is connected with the second web joint by common realization, and and form interval between the first described web joint, meanwhile, between described vertical static pressure air-bearing plate and described adjusting pad, also there is interval, the existence at described each interval makes three-dimensional vibrating platform can along X, Y-axis free vibration.
Described X, Y, Z axis forms Porous static pressure air-bearing decoupling device jointly to air supporting decoupling device, and the three axial standard vibration machines for realizing designing export the decoupling zero of three axially-movables.
The course of work of the present utility model is: when certain axial vibration platform produces motion, because respective shaft is rigidly connected to shaking table and between air spring and air supporting decoupling device by bolt, first vibration is delivered to the air supporting decoupling device be connected with this shaking table and air spring, the more even static pressure air film produced to air supporting decoupling device by respective shaft by vibration passing to three-dimensional vibrating platform; Because described even static pressure air film is good to corresponding axially-movable power transmission performance, and the resistance produced two other axially-movable is little, meet the requirement of mobile decoupling well, so namely the motion that three-dimensional vibrating platform exports is that X, Y, Z three-axial vibration platform exports vibrations synthesis.
The utility model has the advantage of: 1, the air film of X axis and Y-axis is between static pressure air-bearing plate and three-dimensional vibrating platform, and the area that air film can cover is large.
2, in the X axis of three-dimensional vibrating platform and Y-axis vibration processes, shaking table and return mechanism driven three-dimensional vibrating platform, the burden of shaking table alleviates; The static pressure air-bearing slab integral of X axis and Y-axis and shaking table or back-moving spring are fixed, and there is not the problem of distortion.
3, Porous static pressure air-bearing decoupling device, while realizing vibration force transmission well, avoids the interference of non-transmission to motion, completes the decoupling zero that three-component vibration platform exports three-component motion well.Because the orifice size of porous restriction part is much larger than traditional orifice restriction mode, while larger load-bearing capacity can be provided, there is stable and uniform support performance, efficiently solve traditional orifice restriction and produce " pneumatic hammer " vibration and the problem such as the inclination of shaking table moving component and rotation.
Accompanying drawing explanation
Fig. 1 is three-component standard vibration machine structural drawing.
Fig. 2 is X axis shaking table connection layout.
Fig. 3 is X axis return mechanism connection layout.
Fig. 4 is Z-axis direction shaking table connection layout.
Fig. 5 is Z-axis direction air supporting decoupling device structural drawing, and (a) is the front elevation of air supporting decoupling device, and (b) is that the A-A of (a) is to cut-open view.
Fig. 6 is three-dimensional vibrating stage+module figure.
Embodiment
Embodiment one
Based on the three-component standard vibration machine of static pressure air-bearing decoupling device, as shown in Figure 1, comprise base 1, described base 1 is provided with the X axis shaking table 2 and X axis return mechanism 6 that vibrate along X axis, along Y-axis shaking table 3 and the Y-axis return mechanism 7 of Y-axis vibration, along the Z-axis direction shaking table 4 of Z-axis direction vibration, and the three-dimensional vibrating platform 5 be connected with return mechanism with described shaking table; Three-dimensional vibrating platform 5 described in X axis shaking table 2, X axis return mechanism 6 acting in conjunction realize vibrates along X axis; Y-axis shaking table 3, the three-dimensional vibrating platform 5 described in Y-axis return mechanism 7 acting in conjunction realizes vibrates along Y-axis; Z-axis direction shaking table 4 vibrates along Z-axis direction for realizing described three-dimensional vibrating platform 5.
As shown in Figure 2, described X axis shaking table 2 is fixed with shaking table side static pressure air-bearing plate 21, and as shown in Figure 3, X axis return mechanism 6 is made up of X axis air spring 61 and spring side static pressure air-bearing plate 62; X axis shaking table 2 and X axis return mechanism 6 form air film respectively by shaking table side static pressure air-bearing plate 21 and between spring side static pressure air-bearing plate 62 and described three-dimensional vibrating platform 5, for transmitting X axis vibration.
Described shaking table side static pressure air-bearing plate 21 is platy structure, formation first transfer surface 211, second transfer surface 212 on it; Described shaking table side static pressure air-bearing plate 21 is bolted with described X axis shaking table 2 moving component, X axis shaking table 2 is realized to export vibration passing to shaking table side static pressure air-bearing plate 21, minim gap is there is between the second described transfer surface 212 and described three-dimensional vibrating platform 5, and produce air film at this minim gap, further X axis shaking table 2 is exported vibration passing to three-dimensional vibrating platform 5 by air film.
The second described transfer surface 212 is provided with multiple flow controller mounting hole, for porous restriction part 213 is installed on shaking table side static pressure air-bearing plate 21 by bonding mode, described static pressure air-bearing plate 21 inside, shaking table side is provided with the gas circuit structure to porous restriction part 213 air feed, when passing to external compression air to described shaking table side static pressure air-bearing plate 21, due to the throttling action of porous restriction part 213, between described three-dimensional vibrating platform 5 and the second transfer surface 212, form even static pressure air film, realize the transmission to vibration.
Described spring side static pressure air-bearing plate 62 is identical with described shaking table side static pressure air-bearing plate 21 structure, formation the 3rd transfer surface 621, the 4th transfer surface 622 on it; Described spring side static pressure air-bearing plate 62 is bolted with described X axis air spring 61, the restoring force that X axis air spring 61 provides is realized to be delivered to spring side static pressure air-bearing plate 62, minim gap is there is between the 4th described transfer surface 622 and described three-dimensional vibrating platform 5, and produce air film at this minim gap, further the restoring force that X axis air spring 61 provides is delivered to three-dimensional vibrating platform 5 by air film.
The 4th described transfer surface 622 is provided with multiple flow controller mounting hole, for porous restriction part 213 is installed on spring side static pressure air-bearing plate 62 by bonding mode, described static pressure air-bearing plate 62 inside, spring side is provided with the gas circuit structure to porous restriction part 213 air feed, when passing to external compression air to described spring side static pressure air-bearing plate 62, due to the throttling action of porous restriction part 213, between described three-dimensional vibrating platform 5 and the 4th transfer surface 622, form even static pressure air film, realize the transmission to vibration.
Described shaking table side static pressure air-bearing plate 21 forms X axis air supporting decoupling device jointly with spring side static pressure air-bearing plate 62.
The transmission effect of the even static pressure air film produced by described X axis air supporting decoupling device, X axis shaking table 2 is exported vibration passing to three-dimensional vibrating platform 5 with X axis air spring 61 acting in conjunction by described X axis shaking table 2, completes three-dimensional vibrating platform 5 along X axis exciting.
Y-axis air supporting decoupling device is identical with X axis air supporting decoupling device structure, Y-axis shaking table 3 is identical with described X axis shaking table 2 structure, Y-axis air spring is identical with described X axis air spring 61 structure, in like manner, the transmission effect of the even static pressure air film produced by described Y-axis air supporting decoupling device, described Y-axis shaking table 3 realizes Y-axis shaking table to export vibration passing to three-dimensional vibrating platform 5 with the acting in conjunction of Y-axis air spring, completes three-dimensional vibrating platform 5 along Y-axis exciting.
As shown in Figure 4, Z-axis direction shaking table 4 is fixed with Z-axis direction air supporting decoupling device 41.Described Z-axis direction air supporting decoupling device 41 is made up of the first web joint 411, second web joint 412, adjusting pad 413, Z axis static pressure air-bearing plate 414 etc.
As shown in Figure 5, the first described web joint 411 is provided with the first joint face 4111, second joint face 4112; The second described web joint 412 is provided with the 3rd joint face 4121, the 4th joint face 4122; Described vertical static pressure air-bearing plate 414 is provided with the first air bearing surface 4141, second air bearing surface 4142; The first described web joint 411 is bolted, for Z-axis direction shaking table 4 being exported vibration passing to the first web joint 411 with described Z-axis direction shaking table 4; The first described web joint 411, adjusting pad 413 and the second web joint 412 are bolted, and jointly surround air flotating chamber 415 by the second described joint face 4112, the 3rd joint face 4121 and adjusting pad 413; Described Z axis static pressure air-bearing plate 414 is arranged in described air flotating chamber 415, the first described air bearing surface 4141 is relative with the second described joint face 4112, the second described air bearing surface 4142 is relative with the 3rd described joint face 4121, by adjusting the size of described adjusting pad 413, minim gap can be formed between the second described air bearing surface 4142 and the 3rd joint face 4121.
The second described joint face 4112 and the 3rd joint face 4121 are equipped with multiple flow controller mounting hole, for porous restriction part 213 is installed on the first web joint 411 and the second web joint 412 by bonding mode; The first described web joint 411 and the second web joint 412 inside are equipped with the gas circuit structure to porous restriction part 213 air feed, when passing to external compression air to the first described web joint 411 and the second web joint 412, due to the existence of minim gap between the second air bearing surface 4142 and the 3rd joint face 4121 and the throttling action of porous restriction part 213, between the second described joint face 4112 and the first air bearing surface 4141 and between the 3rd joint face 4121 and the second air bearing surface 4142, all form even static pressure air film.
As shown in Figure 6, described three-dimensional vibrating platform 5 is provided with and connects corner post 51, the second described web joint 412 is provided with right-angle notch, described three-dimensional vibrating platform 5 is connected with the second air bearing surface 4142 by common realization, and and form interval between the 4th described joint face 4122, meanwhile, as shown in Figure 5, between described Z axis static pressure air-bearing plate 414 and described adjusting pad 413, also there is interval, the existence at described each interval makes three-dimensional vibrating platform 5 can along X, Y-axis free vibration.
By the acting in conjunction of even static pressure air film formed between the second described joint face 4112 and the first air bearing surface 4141 and between the 3rd joint face 4121 and the second air bearing surface 4142, Z-axis direction shaking table 4 is exported vibration passing to three-dimensional vibrating platform 5 by further realization, completes three-dimensional vibrating platform 5 along Z-axis direction exciting.
Described X, Y, Z axis forms Porous static pressure air-bearing decoupling device jointly to air supporting decoupling device, and the three axial standard vibration machines for realizing designing export the decoupling zero of three axially-movables.
The course of work of the present utility model is: when certain axial vibration platform produces motion, because respective shaft is rigidly connected to shaking table and between air spring and air supporting decoupling device by bolt, first vibration is delivered to the air supporting decoupling device be connected with this shaking table and air spring, the more even static pressure air film produced to air supporting decoupling device by respective shaft by vibration passing to three-dimensional vibrating platform 5; Because described even static pressure air film is good to corresponding axially-movable power transmission performance, and the resistance produced two other axially-movable is little, meet the requirement of mobile decoupling well, so namely the motion that three-dimensional vibrating platform 5 exports is that X, Y, Z three-axial vibration platform exports vibrations synthesis.
The utility model has the advantage of: 1, the air film of X axis and Y-axis is between static pressure air-bearing plate and three-dimensional vibrating platform, and the area that air film can cover is large.
2, in the X axis of three-dimensional vibrating platform and Y-axis vibration processes, shaking table and return mechanism driven three-dimensional vibrating platform, the burden of shaking table alleviates; The static pressure air-bearing slab integral of X axis and Y-axis and shaking table or back-moving spring are fixed, and there is not the problem of distortion.
3, Porous static pressure air-bearing decoupling device, while realizing vibration force transmission well, avoids the interference of non-transmission to motion, completes the decoupling zero that three-component vibration platform exports three-component motion well.Because porous restriction part orifice size is much larger than traditional orifice restriction mode, while larger load-bearing capacity can be provided, there is stable and uniform support performance, efficiently solve traditional orifice restriction and produce " pneumatic hammer " vibration and the problem such as the inclination of shaking table moving component and rotation.
Embodiment two
The difference of the present embodiment and embodiment one is: described shaking table side static pressure air-bearing plate 21, spring side static pressure air-bearing plate 62, first web joint 411 and the second web joint 412 are equipped with 1 flow controller mounting hole, for installing whole piece porous restriction part 213 by bonding mode, realize throttling action.
Content described in this instructions embodiment is only enumerating the way of realization that utility model is conceived; protection domain of the present utility model should not be regarded as being only limitted to the concrete form that embodiment is stated, protection domain of the present utility model also and conceive the equivalent technologies means that can expect according to the utility model in those skilled in the art.
Claims (6)
1. based on the three-component standard vibration machine of static pressure air-bearing decoupling device, comprise base, described base is provided with X axis shaking table and X axis return mechanism, Y-axis shaking table and Y-axis return mechanism, Z-axis direction shaking table, and three-dimensional vibrating platform; It is characterized in that: X axis shaking table is relative with X axis return mechanism across three-dimensional vibrating platform, Y-axis shaking table is relative with Y-axis return mechanism across three-dimensional vibrating platform; X axis shaking table and Y-axis shaking table are fixed with respective shaking table side static pressure air-bearing plate respectively, have the gap that can form air film between shaking table side static pressure air-bearing plate and three-dimensional vibrating platform; X axis return mechanism and Y-axis return mechanism are made up of respective back-moving spring and spring side static pressure air-bearing plate respectively, and back-moving spring and spring side static pressure air-bearing plate are fixed; Z-axis direction shaking table and Z-axis direction air supporting decoupling device are fixed, and have the gap that can form air film between Z-axis direction air supporting decoupling device and three-dimensional vibrating platform.
2., as claimed in claim 1 based on the three-component standard vibration machine of static pressure air-bearing decoupling device, it is characterized in that: spring side static pressure air-bearing plate and shaking table side static pressure air-bearing plate are arranged at three-dimensional vibrating platform both sides symmetrically.
3., as claimed in claim 2 based on the three-component standard vibration machine of static pressure air-bearing decoupling device, it is characterized in that: the back-moving spring of X axis and the back-moving spring of Y-axis are air spring.
4. as claimed in claim 3 based on the three-component standard vibration machine of static pressure air-bearing decoupling device, it is characterized in that: spring side static pressure air-bearing plate and shaking table side static pressure air-bearing plate are made up of respective substrate and the porous restriction part be fixed on substrate respectively, are provided with the gas channel be communicated with porous restriction part in substrate.
5., as claimed in claim 4 based on the three-component standard vibration machine of static pressure air-bearing decoupling device, it is characterized in that: porous restriction part has multiple, porous restriction part is uniformly distributed on substrate.
6., as claimed in claim 5 based on the three-component standard vibration machine of static pressure air-bearing decoupling device, it is characterized in that: Z-axis direction air supporting decoupling device is made up of the first web joint, the second web joint, adjusting pad, Z axis static pressure air-bearing plate; Adjusting pad is between the first web joint and the second web joint, and the first web joint, the second web joint and adjusting pad are rigidly connected and surround air flotating chamber, and Z axis static pressure air-bearing plate is positioned in air flotating chamber; Second web joint is provided with breach, and three-dimensional vibrating platform is fixed through breach and Z axis static pressure air-bearing plate; First web joint and the second web joint are respectively equipped with respective gas channel and porous restriction part, and the gas channel of each web joint is communicated with porous restriction part.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104614137A (en) * | 2015-01-15 | 2015-05-13 | 浙江大学 | Three-component standard vibrating table based on static air floating decoupling device |
| CN112880953A (en) * | 2021-01-21 | 2021-06-01 | 复旦大学 | Vibration test device and vibration test method |
-
2015
- 2015-01-15 CN CN201520028976.XU patent/CN204556208U/en not_active Withdrawn - After Issue
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104614137A (en) * | 2015-01-15 | 2015-05-13 | 浙江大学 | Three-component standard vibrating table based on static air floating decoupling device |
| WO2016112685A1 (en) * | 2015-01-15 | 2016-07-21 | 浙江大学 | Three-component standard shaker based on aerostatic decoupling device |
| CN112880953A (en) * | 2021-01-21 | 2021-06-01 | 复旦大学 | Vibration test device and vibration test method |
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