CN204479257U - Based on the three-component standard vibration machine of push-pull type air supporting decoupling device - Google Patents

Based on the three-component standard vibration machine of push-pull type air supporting decoupling device Download PDF

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Publication number
CN204479257U
CN204479257U CN201520026609.6U CN201520026609U CN204479257U CN 204479257 U CN204479257 U CN 204479257U CN 201520026609 U CN201520026609 U CN 201520026609U CN 204479257 U CN204479257 U CN 204479257U
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air
decoupling device
shaking table
axis
air supporting
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CN201520026609.6U
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何闻
张旭飞
王春宇
贾叔仕
周杰
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Zhejiang University ZJU
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Zhejiang University ZJU
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Abstract

Based on the three-component standard vibration machine of push-pull type air supporting decoupling device, comprise base and be arranged at a pair X axis shaking table on base, a pair Y-axis shaking table, a Z-axis direction shaking table and three-dimensional vibrating platform, two X axis shaking tables are symmetricly set in three-dimensional vibrating platform both sides, two Y-axis shaking tables are symmetricly set in three-dimensional vibrating platform both sides, and X axis shaking table is orthogonal with the direction of motion of Y-axis shaking table; Each shaking table is connected with three-dimensional vibrating platform respectively by respective mobile decoupling device, and mobile decoupling device one end is fixedly connected with corresponding shaking table, has the gap that can form air film between the other end and three-dimensional vibrating platform; The direction of vibration of two X axis shaking tables is identical with vibration frequency; The direction of vibration of two Y-axis shaking tables is identical with vibration frequency.The utility model has expulsive force alternately to be provided by two shaking tables, alleviates the advantage of single shaking table to the burden that load drives.

Description

Based on the three-component standard vibration machine of push-pull type air supporting decoupling device
Technical field
The utility model relates to a kind of three-component standard vibration machine based on push-pull type air supporting decoupling device.
Technical background
Adopt one-dimensional vibration calibration system to measure axle to three to the calibration of three-dimensional vibration-measuring sensor at present to carry out successively more, and this method longer, data processing complex consuming time, consider simultaneously three-dimension sensor respectively tie up between intercouple, the method is more difficult to get the sensitivity matrix of reflection retinoic acid syndrome relation.Therefore, develop the three-component standard vibration machine that axially can be excited at the same time three-dimensional vibration-measuring sensor three, to the development of vibration-measuring sensor collimation technique and the progress of corresponding industry technology, all there is important theoretical and practical significance.
Chinese patent 201110207297.5 discloses a kind of three-component standard vibration machine based on bayonet type decoupling device, comprise base, X axis electromagnetic vibration generator system, Y-axis electromagnetic vibration generator system, Z-axis direction electromagnetic vibration generator system and three-dimensional vibrating platform, each electromagnetic vibration generator system is all connected with three-dimensional vibrating platform by mobile decoupling device; Mobile decoupling device comprises the first frame and the second frame, first frame and the second frame fasten mutually, first frame and the second frame are connected side and second connect side composition by outside, inner edge, first between outside with inner edges, the outside of frame is relative with inner edge, and the inner edge of frame inserts in another frame; The air hole being provided with gas channel in the inner edge of the first frame and being communicated with gas channel, air hole is in communication with the outside; The inner edge of the first frame and all have minim gap between the inner edge of the second frame and outside, minim gap forms the air-float guide rail of the first frame inner edge; The interval preventing from contacting outside the second frame and the first frame is provided with between the inner edge of the second frame and the outside of the first frame; Gas channel is communicated with external compressed air source; The outside of the first frame is connected with electromagnetic vibration generator system, and the outside of the second frame is connected with three-dimensional vibrating platform.This shaking table adopts the transmission of bayonet type structure and static pressure air-bearing supporting realizable force, solves the problem of three-component mobile decoupling.
The shortcoming of this shaking table is: all need when 1, shaking table is of reciprocating vibration to pull three-dimensional vibrating platform by bayonet type structure, bayonet type structure easily occurs deformation, and the burden of shaking table is large.
2, by fixing the first frame on a vibration table, three-dimensional vibrating platform is fixed the second frame, first frame and the second frame mutually fasten and form bayonet type structure, the installation accuracy that there is the first frame and the second frame requires high, air film limited area between first frame and the second frame, and the existence of the second frame increases the quality of three-dimensional vibrating platform.
3, the factor impacts such as mobile decoupling device gas film stiffness in three-component standard vibration machine is unstable, elastic recovery device is non-linear are subject to, thus make three-dimensional vibrating platform in real time, accurately can not follow each axial vibration platform output vibrational excitation signal, affect three-component standard vibration machine and export vibration signal precision.
Utility model content
For overcome prior art exist shaking table of reciprocating vibration time all need to pull three-dimensional vibrating platform by bayonet type structure, easily there is deformation in bayonet type structure, the shortcoming that the burden of shaking table is large, the utility model provides a kind of expulsive force and is alternately provided by two shaking tables, alleviates the three-component standard vibration machine based on push-pull type air supporting decoupling device of single shaking table to the burden that load drives.
Based on the three-component standard vibration machine of push-pull type air supporting decoupling device, comprise base and be arranged at a pair X axis shaking table on base, a pair Y-axis shaking table, a Z-axis direction shaking table and three-dimensional vibrating platform, two X axis shaking tables are symmetricly set in three-dimensional vibrating platform both sides, two Y-axis shaking tables are symmetricly set in three-dimensional vibrating platform both sides, and X axis shaking table is orthogonal with the direction of motion of Y-axis shaking table; Each shaking table is connected with three-dimensional vibrating platform respectively by respective mobile decoupling device, and mobile decoupling device one end is fixedly connected with corresponding shaking table, has the gap that can form air film between the other end and three-dimensional vibrating platform; The direction of vibration of two X axis shaking tables is identical with vibration frequency; The direction of vibration of two Y-axis shaking tables is identical with vibration frequency.
Further, X-motion decoupling device and Y-motion decoupling device comprise respective air-float guide rail respectively, are uniformly distributed in throttling pore on air-float guide rail and are arranged in air-float guide rail, are communicated with the gas channel of throttling pore and source of the gas.
Further, Z-motion decoupling device comprises the gentle kickboard of matrix, has air flotating chamber in matrix, air supporting plate to be positioned in air flotating chamber and with air flotating chamber clearance fit; Air supporting plate is fixed with connecting link, and connecting link and three-dimensional vibrating platform are fixed; The lower throttling pore of upper throttling pore air supporting plate being evenly distributed with the upper air film forming air supporting plate upper surface and the lower air film forming air supporting plate lower surface; Air supporting plate is provided with the air supply channel be communicated with source of the gas, and matrix is provided with gas source interface.
Further, X-motion decoupling device is made up of with the connection air flue being communicated with each air intake duct multiple air intake duct be communicated with source of the gas with the gas channel of Y-motion decoupling device, and throttling pore is along air intake duct array distribution; Air intake duct be communicated with air flue and be made up of the through hole be opened on air-float guide rail and the plug that is arranged at through hole one end respectively, air intake duct one end arranges plug, and the other end is the intake interface be connected with source of the gas; Be communicated with air flue two ends and all plug is set.Air intake duct can be one also can be multiple, and being communicated with air flue can be one, also can be multiple.
Further, the matrix of Z-motion decoupling device is by lower connecting plate, upper cover plate and packing ring composition, lower connecting plate and Z-axis direction shaking table are fixed, lower connecting plate, upper cover plate and packing ring surround air flotating chamber, upper cover plate have allow connecting link through and with the through hole of connecting link clearance fit, gas source interface is opened on packing ring, and gas source interface aims at the air intake opening of air supply channel.
Further, upper cover plate and packing ring one.
Further, the air supply channel of air supporting plate is made up of the longitudinal gas channel intersected and transverse air channel, and longitudinal gas channel is longitudinally uniformly distributed along air supporting plate, and transverse air channel is laterally uniformly distributed along air supporting plate; Upper throttling pore surrounds the first porosity chart, and lower throttling pore surrounds the second porosity chart, and the first porosity chart, the gentle kickboard of the second porosity chart are coaxial; At least one transverse air channel or longitudinal gas channel arrange gas source interface.
X, Y, Z axis forms push-pull type air supporting decoupling device jointly to mobile decoupling device.
The course of work of the present utility model is: when three-component vibration platform all remains static, when not exporting vibration, between X-motion decoupling device and three-dimensional vibrating platform, static pressure air film is formed respectively between Y-motion decoupling device and three-dimensional vibrating platform, air film is formed respectively at the upper surface of the air supporting plate of Z-motion decoupling device and lower surface, so, the direction of vibration X of three-component vibration platform, Y, Z is all formed the two-layer air film with certain rigidity, squeezing action is produced to three-dimensional vibrating platform, for realizing when shaking table exports vibration, transfer vibrations to three-dimensional vibrating platform.
For X axis vibration, suppose that two X axis shaking tables are divided into front side and the rear side of three-dimensional vibrating platform.After X axis shaking table starts, for one-period, the X axis shaking table of front side moves backward, and front side X axis shaking table promotes three-dimensional vibrating platform by air film and moves backward, and meanwhile, rear side X axis shaking table also moves backward; Then, rear side X axis shaking table travels forward, and rear side X axis shaking table promotes three-dimensional vibrating platform by air film and travels forward, and meanwhile, front side X axis shaking table also travels forward.So, the acting in conjunction of two X axis shaking tables, one pushes away one has drawn the motion of three-dimensional vibrating platform in one-period.The mode of motion of two Y-axis shaking tables is identical with X axis.
In one-period, the mode of motion of Z-axis direction is described as follows: the upper surface of air supporting plate and lower surface form uniform air film respectively.When Z-axis direction shaking table moves upward, the gentle kickboard of lower surface air film between lower connecting plate and air supporting plate and the upper surface air film between upper cover plate make air supporting plate and lower connecting plate, Z-axis direction shaking table be synchronized with the movement; Wherein, lower surface air film makes air supporting plate float on lower connecting plate, and upper surface air film makes to keep gap between air supporting plate and upper cover plate, and when lower surface air film and upper surface air film balance, the position of air supporting plate is fixed.
Due to the air film formed between the mobile decoupling device of three axis and three-dimensional vibrating platform, to transmit performance to corresponding axial vibration good, and the resistance produced two other axial vibration is little, meet the requirement of mobile decoupling well, achieve three-dimensional vibrating platform three kinematic axiss to export to the synthesis of vibration signal, thus complete being excited at the same time of axles is measured to three of three-dimensional vibration-measuring sensor.
The utility model adopts five shaking tables, push-pull type air supporting decoupling device and three-dimensional vibrating platform to form three-component standard vibration machine.For level to, coaxial symmetry install two shaking tables and corresponding axial mobile decoupling device by two-layer static pressure air film to three-dimensional vibrating platform produce squeezing action, achieve to three-dimensional vibrating platform more stable air supporting support; Meanwhile, the synchronous vibration signal that coaxial two shaking table outbound courses are identical, realizes one to three-dimensional vibrating platform and pushes away one and draw excitation, thus make three-dimensional vibrating platform have pumping signal trace performance more better than traditional separate unit shaking table energisation mode.
The utility model has the advantage of:
1, X axis and Y-axis arrange shaking table in pairs, push away a type of drive of drawing to three-dimensional vibrating platform one, and expulsive force is alternately provided by two shaking tables, alleviates the burden that single shaking table drives load.
2, the air film of the mobile decoupling device of X axis and Y-axis directly with three-dimensional vibrating contact with platform, the area of air film is large, and support homogeneity is good, and anchorage force is large.
3, the air supporting plate of Z-axis direction and three-dimensional vibrating platform are fixed, and the driving of three-dimensional vibrating platform will be transferred to the driving to air supporting plate, air supporting plate upper surface and lower surface all form air film, and the area of air film is large, and the support homogeneity of air film is good, and anchorage force is large.
Accompanying drawing explanation
Fig. 1 is the three-component standard vibration machine structural drawing based on push-pull type air supporting decoupling device.
Fig. 2 is X-motion structure drawing of device.
Fig. 3 is X-motion decoupling device air-float guide rail structural drawing, and (a) is the front elevation of air-float guide rail, (b) be the A-A of (a) to cut-open view, (c) is that the C-C of (b) is to cut-open view.
Fig. 4 is Z-motion structure drawing of device.
Fig. 5 is Z-motion decoupling device upper cover plate structural drawing.
Fig. 6 is that the air supporting of Z-motion decoupling device is hardened composition, and (a) is the front elevation of air supporting plate, (b) be the B-B of (a) to cut-open view, (c) is that the D-D of (b) is to cut-open view.
Embodiment
Embodiment one
Based on the three-component standard vibration machine of push-pull type air supporting decoupling device, as shown in Figure 1, comprise base 1, base 1 is provided with two X axis shaking tables be mounted opposite 2,3 along X axis vibration, along two Y-axis shaking tables be mounted opposite 4,5 of Y-axis vibration, along the Z-axis direction shaking table 6 of Z-axis direction vibration, and the three-dimensional vibrating platform 7 be connected by push-pull type air supporting decoupling device with five shaking tables.
Push-pull type air supporting decoupling device is divided into the level that X, Y-axis shaking table 2,3,4,5 is connected with three-dimensional vibrating platform 7 to mobile decoupling device 8 and the Z-motion decoupling device 9 that is connected with three-dimensional vibrating platform 7 by Z-axis direction shaking table; Level is divided into X-motion decoupling device and Y-motion decoupling device to mobile decoupling device 8.Composition graphs 2, by two structures, the identical and rectangular air-flotation guide rail 81 be made up of rigid material of symmetrical effect forms X-motion decoupling device.
As shown in Figure 3, for the rectangular air-flotation guide rail 81 be connected with X axis shaking table 3, air-float guide rail 81 is formed the first ventilation face 814, first, supporting surface 811, second supporting surface 812, first ventilation face 813, second installed surface 815 and the second installed surface 816.
First supporting surface 811 and the second supporting surface 812 coordinate with X axis shaking table 3, make air-float guide rail 81 embed in X axis shaking table 3 table top, for Vertical dimension location air-float guide rail 81; Be provided with many air holes 82 between first ventilation face 813 and the second ventilation face 814, every bar air hole 82 one end is communicated with external compressed air source, and other end seal plug 83 seals, and air hole 82 and seal plug 83 form air intake duct.Be provided with intercommunicating pore 84 between first supporting surface 811 and the second supporting surface 812, for being communicated with many air holes 82, intercommunicating pore 84 two ends all seal with seal plug 83, and the seal plug 83 at intercommunicating pore 84 and two ends thereof is formed and is communicated with air flue.
First installed surface 815 is provided with multiple throttle orifice 85, and throttle orifice 85 one end is communicated with air hole 82, and the other end is in communication with the outside, and there is minim gap between the first installed surface 815 and three-dimensional vibrating platform 7; Second installed surface 816 is connected with X axis shaking table 3 table top, and is provided with the fabrication hole 86 corresponding with throttle orifice 85, and fabrication hole 86 one end is connected with throttle orifice 85, and other end seal plug 83 seals.
When external compression air passes into from air hole 82, and when throttle orifice 85 outwards overflows, minim gap forms the air film with certain rigidity, plays air supporting supporting role; Meanwhile, due to the effect of another shaking table 2 of X axis and connected air-float guide rail 81, between three-dimensional vibrating platform 7 and this air-float guide rail 81, also form the air film with certain rigidity, the acting in conjunction of two-layer air film realizes supporting three-dimensional vibrating platform 7 along X axis and transmitting X axis vibration.
Illustrate although the present embodiment is communicated with air flue with multiple air intake duct with one, air intake duct is not limited to the citing of the present embodiment with the quantity being communicated with air flue.
Y-motion decoupling device is identical with X-motion decoupling device structure.
As shown in Figure 4, Figure 5, Z-motion decoupling device 9 is made up of with connecting link 94 lower connecting plate 91, air supporting plate 92, upper cover plate 93, packing ring 931.
Lower connecting plate 91 is rectangular plate-like structure, is connected with Z-axis direction shaking table 6, for supporting the Z-axis direction load of Z-motion decoupling device 9 and three-dimensional vibrating platform 7 generation and transmitting Z-axis direction vibration.As shown in Figure 5, packing ring 931 is rectangular box-like, packing ring 931 and upper cover plate 93 one.Packing ring 931 is fixedly connected with lower connecting plate 91, and upper cover plate 93, packing ring 931 surround rectangular cavity with lower connecting plate 91, and air supporting plate 92 loads in rectangular cavity, and and has minim gap between upper cover plate 93.Connecting link 94 is through the through hole on upper cover plate 93, and connecting link 94 one end connects air supporting plate 92, and the other end connects three-dimensional vibrating platform 7, air supporting plate 92 and three-dimensional vibrating platform 7 is rigidly connected for realizing.Connecting link 94 coordinates with the via clearance of upper cover plate 93, three-dimensional vibrating platform and upper cover plate 93 is isolated, and avoids the motion of upper cover plate 93 pairs of three-dimensional vibrating platforms 7 to cause interference.
As shown in Figure 6, air supporting plate 92 is formed the 3rd ventilation face 921, the 4th ventilation intercommunicating pore face 924, intercommunicating pore face 923, second, face 922, first, the 3rd installed surface 925 and the 4th installed surface 926.
Be provided with many articles of vertical ventilation-holes 95 between 3rd ventilation face 921 and the 4th ventilation face 922, every bar vertical ventilation-hole 95 one end is communicated with external compressed air source, and other end seal plug 83 seals; Be provided with many vertical connection holes 96 between first intercommunicating pore face 923 and the second intercommunicating pore face 924, for being communicated with many vertical ventilation-holes 95, two ends, vertical connection hole 96 all seal with seal plug 83; 3rd installed surface 925 is connected with lower connecting plate 91, and the 4th installed surface 926 is corresponding with the internal face 932 of upper cover plate 93; 3rd installed surface 925, the 4th installed surface 926 are equipped with multiple vertical section discharge orifice 97, and vertical section discharge orifice 97 one end is communicated with vertical ventilation-hole 95 or vertical connection hole 96, and the other end is in communication with the outside; Vertical section discharge orifice 97 on 3rd installed surface 925 is opened in air supporting plate 92 medium position; Vertical section discharge orifice 97 on 4th installed surface 926 is opened in the outer ring position of air supporting plate 92, and corresponding with the internal face 932 of upper cover plate 93; 3rd installed surface 925, the 4th installed surface 926 are equipped with the vertical process hole 98 corresponding with vertical section discharge orifice 97, and one end, vertical process hole 98 is connected with vertical section discharge orifice 97, and other end seal plug 83 seals; When external compression air passes into from vertical ventilation-hole 95, and the vertical section discharge orifice 97 on the 3rd installed surface 925 and the 4th installed surface 926 is when outwards overflowing, owing to there is minim gap between air supporting plate 92 and upper cover plate 93, the air film with certain rigidity is all formed between the internal face 932 of upper cover plate 93, air supporting plate the 4th installed surface 926 and lower connecting plate 91, air supporting plate the 3rd installed surface 925, play air supporting supporting role, for supporting three-dimensional vibrating platform 7 along Z-axis direction and transmitting Z-axis direction vibration.
Air supporting plate the 3rd ventilation face 921, the 4th intercommunicating pore face, ventilation face 922, first 923 and the second intercommunicating pore face 924 respectively and packing ring 931 there is certain interval in the horizontal direction, contact with packing ring 931 when horizontally vibrating for preventing air supporting plate 92.
Packing ring 931 is provided with through hole 933 on the face relative with air supporting plate the 3rd ventilation face 921, the 4th intercommunicating pore face, ventilation face 922, first 923 and the second intercommunicating pore face 924, for through the tracheae passing into external compression air, and the vibration of tracheae to air supporting plate 92 is made not produce interference.
X, Y, Z axis forms three-component standard vibration machine push-pull type air supporting decoupling device to mobile decoupling device.
The course of work of the present utility model is: when shaking table 2,3,4,5,6 all remains static, when not exporting vibration, under the acting in conjunction of the two-layer air film formed to the two-layer static pressure air film formed between mobile decoupling device 8 and three-dimensional vibrating platform 7 and Z-motion decoupling device 9 self in level, shaking table direction of vibration X, Y, Z all form the two-layer air film with certain rigidity, squeezing action is produced to three-dimensional vibrating platform 7, when shaking table exports vibration, three-dimensional vibrating platform 7 is transferred vibrations to for realizing.
When certain horizontal direction shaking table produces vibration, Movement transmit is to air-float guide rail first installed surface be connected with this shaking table, because air-float guide rail is made up of rigid material, the vibration of shaking table is delivered to the second installed surface by the first installed surface, three-dimensional vibrating platform 7 is transferred vibrations to again by the second installed surface and the air film between the second installed surface and three-dimensional vibrating platform, simultaneously, this another shaking table axial produces the synchronous vibration with this shaking table equidirectional, also three-dimensional vibrating platform 7 is passed to by air film, two the shaking table actings in conjunction of this axis realize pushing away one to one of three-dimensional vibrating platform 7 and draw effect, thus achieve this axial vibration signal and be passed to three-dimensional vibrating platform 7 by shaking table, same way can realize three-dimensional vibrating platform 7 and push away one along one of another horizontal direction and draw and move, meanwhile, Z-motion decoupling device and formation thereof two-layer air film one push away one draw effect under, Z-axis direction shaking table 6 promotes three-dimensional vibrating platform 7 and vibrates along Z-axis direction, because the air film formed between installed surface and three-dimensional vibrating platform 7 is good to corresponding axial vibration transmission performance, and the resistance produced two other axial vibration is little, meet the requirement of mobile decoupling well, achieve three-dimensional vibrating platform 7 three kinematic axiss to export to the synthesis of vibration signal, thus complete being excited at the same time of axles is measured to three of three-dimensional vibration-measuring sensor.
The utility model adopts five shaking tables, push-pull type air supporting decoupling device and three-dimensional vibrating platform to form three-component standard vibration machine.For level to for, coaxial symmetry install two shaking tables and corresponding axial mobile decoupling device by two-layer static pressure air film to three-dimensional vibrating platform produce squeezing action, achieve to three-dimensional vibrating platform more stable air supporting support; Meanwhile, the synchronous vibration signal that coaxial two shaking table outbound courses are identical, realizes one to three-dimensional vibrating platform and pushes away one and draw excitation, thus make three-dimensional vibrating platform have pumping signal trace performance more better than traditional separate unit shaking table energisation mode.In sum, the three-component standard vibration machine based on push-pull type air supporting decoupling device of the utility model design can significantly improve three-component standard vibration machine output signal accuracy.
Embodiment two
The difference of the present embodiment and embodiment one is: air hole 82, vertical ventilation-hole 95 two ends seal plug 83 seal; Intercommunicating pore 84, one end, vertical connection hole 96 are communicated with external compressed air source, and other end seal plug 83 seals.
This instructions embodiment content is only enumerating the way of realization that utility model is conceived; protection domain of the present utility model should not be regarded as being only limitted to the concrete form that embodiment is stated, protection domain of the present utility model also and conceive the equivalent technologies means that can expect according to the utility model in those skilled in the art.

Claims (8)

1. based on the three-component standard vibration machine of push-pull type air supporting decoupling device, it is characterized in that: comprise base and be arranged at a pair X axis shaking table on base, a pair Y-axis shaking table, a Z-axis direction shaking table and three-dimensional vibrating platform, two X axis shaking tables are symmetricly set in three-dimensional vibrating platform both sides, two Y-axis shaking tables are symmetricly set in three-dimensional vibrating platform both sides, and X axis shaking table is orthogonal with the direction of motion of Y-axis shaking table; Each shaking table is connected with three-dimensional vibrating platform respectively by respective mobile decoupling device, and mobile decoupling device one end is fixedly connected with corresponding shaking table, has the gap that can form air film between the other end and three-dimensional vibrating platform; The direction of vibration of two X axis shaking tables is identical with vibration frequency; The direction of vibration of two Y-axis shaking tables is identical with vibration frequency.
2. as claimed in claim 1 based on the three-component standard vibration machine of push-pull type air supporting decoupling device, it is characterized in that: X-motion decoupling device and Y-motion decoupling device comprise respective air-float guide rail respectively, be uniformly distributed in throttling pore on air-float guide rail and be arranged in air-float guide rail, be communicated with the gas channel of throttling pore and source of the gas.
3. as claimed in claim 2 based on the three-component standard vibration machine of push-pull type air supporting decoupling device, it is characterized in that: Z-motion decoupling device comprises the gentle kickboard of matrix, have air flotating chamber in matrix, air supporting plate to be positioned in air flotating chamber and with air flotating chamber clearance fit; Air supporting plate is fixed with connecting link, and connecting link and three-dimensional vibrating platform are fixed; The lower throttling pore of upper throttling pore air supporting plate being evenly distributed with the upper air film forming air supporting plate upper surface and the lower air film forming air supporting plate lower surface; Air supporting plate is provided with the air supply channel be communicated with source of the gas, and matrix is provided with gas source interface.
4. as claimed in claim 3 based on the three-component standard vibration machine of push-pull type air supporting decoupling device, it is characterized in that: X-motion decoupling device is made up of with the connection air flue being communicated with each air intake duct multiple air intake duct be communicated with source of the gas with the gas channel of Y-motion decoupling device, and throttling pore is along air intake duct array distribution; Air intake duct be communicated with air flue and be made up of the through hole be opened on air-float guide rail and the plug that is arranged at through hole one end respectively, air intake duct one end arranges plug, and the other end is the intake interface be connected with source of the gas; Be communicated with air flue two ends and all plug is set.
5. as claimed in claim 4 based on the three-component standard vibration machine of push-pull type air supporting decoupling device, it is characterized in that: the quantity of air intake duct is one or more, the quantity being communicated with air flue is one or more.
6. the three-component standard vibration machine based on push-pull type air supporting decoupling device as described in one of claim 3-5, it is characterized in that: the matrix of Z-motion decoupling device is by lower connecting plate, upper cover plate and packing ring composition, lower connecting plate and Z-axis direction shaking table are fixed, lower connecting plate, upper cover plate and packing ring surround air flotating chamber, upper cover plate have allow connecting link through and with the through hole of connecting link clearance fit, gas source interface is opened on packing ring, and gas source interface aims at the air intake opening of air supply channel.
7. as claimed in claim 6 based on the three-component standard vibration machine of push-pull type air supporting decoupling device, it is characterized in that: upper cover plate and packing ring one.
8. as claimed in claim 7 based on the three-component standard vibration machine of push-pull type air supporting decoupling device, it is characterized in that: the air supply channel of air supporting plate is made up of the longitudinal gas channel intersected and transverse air channel, longitudinal gas channel is longitudinally uniformly distributed along air supporting plate, and transverse air channel is laterally uniformly distributed along air supporting plate; Upper throttling pore surrounds the first porosity chart, and lower throttling pore surrounds the second porosity chart, and the first porosity chart, the gentle kickboard of the second porosity chart are coaxial; At least one transverse air channel or longitudinal gas channel arrange gas source interface.
CN201520026609.6U 2015-01-15 2015-01-15 Based on the three-component standard vibration machine of push-pull type air supporting decoupling device Withdrawn - After Issue CN204479257U (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104614138A (en) * 2015-01-15 2015-05-13 浙江大学 Three-component standard vibrating table based on push-pull type air floating decoupling device
CN105137122A (en) * 2015-09-09 2015-12-09 太原理工大学 Triaxial accelerometer calibration platform based on sliding groove and sliding block decoupling devices

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104614138A (en) * 2015-01-15 2015-05-13 浙江大学 Three-component standard vibrating table based on push-pull type air floating decoupling device
CN104614138B (en) * 2015-01-15 2017-05-24 浙江大学 Three-component standard vibrating table based on push-pull type air floating decoupling device
CN105137122A (en) * 2015-09-09 2015-12-09 太原理工大学 Triaxial accelerometer calibration platform based on sliding groove and sliding block decoupling devices

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