CN204498454U - A kind of induction coil for ICP testing stand - Google Patents
A kind of induction coil for ICP testing stand Download PDFInfo
- Publication number
- CN204498454U CN204498454U CN201520120318.3U CN201520120318U CN204498454U CN 204498454 U CN204498454 U CN 204498454U CN 201520120318 U CN201520120318 U CN 201520120318U CN 204498454 U CN204498454 U CN 204498454U
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- Prior art keywords
- induction coil
- testing stand
- fixed head
- utility
- icp
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- Expired - Fee Related
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- Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)
Abstract
The utility model discloses a kind of induction coil for ICP testing stand, described induction coil adopts silver-plated copper pipe coiling, and adopts helical wire form coiling 3 to enclose; Be welded with at the two ends of described induction coil to chew into water and chew with water outlet.Described induction coil adds 4 fixed heads reinforce.And the bore dia of described fixed head equals the diameter of described silver-plated copper pipe, the pitch-row of described fixed head equals the pitch of described induction coil.Apply this induction coil configuration, just can have good stability and cooling effect.
Description
Technical field
The utility model relates to inductive devices technical field, particularly relates to a kind of induction coil for ICP testing stand.
Background technology
Plasma is a kind of grown form that material exists, and be the 4th kind of physical form except solid, liquids and gases, it is extensively present in the activity of universe and the mankind.Along with the development of science and technology, plasma be applied in continuous expansion, be all used widely in fields such as physics, chemistry, material science, microelectronics.
Inductively-coupled discharge plasma (Inductively Coupled Plasma, i.e. ICP) be a kind of method that people obtain plasma, radio-frequency power is input to disresonance induction coil, by inductance coupling high by Energy transfer to the method for plasma inductively-coupled discharge.In order to obtain stable low temperature plasma, need with induction coil, radio-frequency power to be applied in the gas of electric discharge, keep stable for making plasma, the radio-frequency (RF) impedance of ICP induction coil is needed to keep stable, but lack the research of relevant induction coil in prior art, conventional induction coil deficient in stability and cooling effect.
Summary of the invention
The purpose of this utility model is to provide a kind of induction coil for ICP testing stand, and this induction coil has good stability and cooling effect.
For an induction coil for ICP testing stand, described induction coil adopts silver-plated copper pipe coiling, and adopts helical wire form coiling 3 to enclose;
Be welded with at the two ends of described induction coil to chew into water and chew with water outlet.
Described induction coil adds 4 fixed heads reinforce.
Described fixed head adopts polyfluortetraethylene plate to process.
The bore dia of described fixed head equals the diameter of described silver-plated copper pipe.
The pitch-row of described fixed head equals the pitch of described induction coil.
The technical scheme provided as can be seen from above-mentioned the utility model, applies this induction coil configuration, just can have good stability and cooling effect.
Accompanying drawing explanation
In order to be illustrated more clearly in the technical scheme of the utility model embodiment, below the accompanying drawing used required in describing embodiment is briefly described, apparently, accompanying drawing in the following describes is only embodiments more of the present utility model, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawings can also be obtained according to these accompanying drawings.
Fig. 1 is the induction coil structural representation for ICP testing stand described in the utility model;
Fig. 2 is the structural representation of fixed head described in the utility model.
Embodiment
Below in conjunction with the accompanying drawing in the utility model embodiment, be clearly and completely described the technical scheme in the utility model embodiment, obviously, described embodiment is only the utility model part embodiment, instead of whole embodiments.Based on embodiment of the present utility model, those of ordinary skill in the art, not making the every other embodiment obtained under creative work prerequisite, belong to protection range of the present utility model.
Below in conjunction with accompanying drawing, the utility model embodiment is described in further detail, be illustrated in figure 1 the induction coil structural representation for ICP testing stand described in the utility model, include silver-plated copper pipe 1 in Fig. 1, water inlet chew 2,3 and fixed head 4 are chewed in water outlet, concrete structure and consisting of:
This induction coil adopts the coiling of silver-plated copper pipe 1, and silver-plated copper pipe 1 adopts helical wire form coiling 3 to enclose;
For reaching good cooling effect, be welded with at the two ends of described induction coil into water chew 2 and water outlet chew 3, carried out the cooling of induction coil by recirculated water.
Fixed for ensureing the spacing of induction coil, described induction coil can also install additional 4 fixed heads and reinforce, fixed head 4 as shown in Figure 1.
In specific implementation, fixed head 4 can adopt polyfluortetraethylene plate to process, and has both had certain mechanical strength, has again good insulation property.
Be illustrated in figure 2 the structural representation of fixed head described in the utility model, in specific implementation, the bore dia φ of this fixed head can equal the diameter of silver-plated copper pipe 1; Can also limit the pitch of described induction coil with fixed head, during specific implementation, the pitch-row d of fixed head equals the pitch of described induction coil.
In sum, adopt the induction coil structure described in above-described embodiment, good stability and cooling effect can be had; And the spacing of coil is fixed, there are good insulation property.
The above; be only the utility model preferably embodiment; but protection range of the present utility model is not limited thereto; anyly be familiar with those skilled in the art in the technical scope that the utility model discloses; the change that can expect easily or replacement, all should be encompassed within protection range of the present utility model.Therefore, protection range of the present utility model should be as the criterion with the protection range of claims.
Claims (5)
1. for an induction coil for ICP testing stand, it is characterized in that, described induction coil adopts silver-plated copper pipe coiling, and adopts helical wire form coiling 3 to enclose;
Be welded with at the two ends of described induction coil to chew into water and chew with water outlet.
2., according to claim 1 for the induction coil of ICP testing stand, it is characterized in that,
Described induction coil adds 4 fixed heads reinforce.
3., according to claim 2 for the induction coil of ICP testing stand, it is characterized in that,
Described fixed head adopts polyfluortetraethylene plate to process.
4. according to Claims 2 or 3 for the induction coil of ICP testing stand, it is characterized in that,
The bore dia of described fixed head equals the diameter of described silver-plated copper pipe.
5. according to Claims 2 or 3 for the induction coil of ICP testing stand, it is characterized in that,
The pitch-row of described fixed head equals the pitch of described induction coil.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520120318.3U CN204498454U (en) | 2015-02-28 | 2015-02-28 | A kind of induction coil for ICP testing stand |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520120318.3U CN204498454U (en) | 2015-02-28 | 2015-02-28 | A kind of induction coil for ICP testing stand |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204498454U true CN204498454U (en) | 2015-07-22 |
Family
ID=53577722
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520120318.3U Expired - Fee Related CN204498454U (en) | 2015-02-28 | 2015-02-28 | A kind of induction coil for ICP testing stand |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204498454U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110415948A (en) * | 2019-08-09 | 2019-11-05 | 江苏鲁汶仪器有限公司 | A kind of three-dimensional four spiral inductances coupling coil |
-
2015
- 2015-02-28 CN CN201520120318.3U patent/CN204498454U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110415948A (en) * | 2019-08-09 | 2019-11-05 | 江苏鲁汶仪器有限公司 | A kind of three-dimensional four spiral inductances coupling coil |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150722 Termination date: 20200228 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |