CN204462638U - The positioning fixture of exposure and exposure machine thereof - Google Patents
The positioning fixture of exposure and exposure machine thereof Download PDFInfo
- Publication number
- CN204462638U CN204462638U CN201520065300.8U CN201520065300U CN204462638U CN 204462638 U CN204462638 U CN 204462638U CN 201520065300 U CN201520065300 U CN 201520065300U CN 204462638 U CN204462638 U CN 204462638U
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- China
- Prior art keywords
- glass
- film
- fixed
- board
- exposure machine
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Abstract
The utility model relates to a kind of positioning fixture of exposing and exposure machine thereof.Positioning fixture comprises glass and lower-glass.Upper glass is provided with the film, and lower-glass is provided with the lower film, and the upper film is consistent with lower film pattern.Upper glass is fixed with more than one female pin, lower-glass is fixed with the male pin of corresponding female pin, and the external diameter of male pin equals the hole internal diameter of female pin.When exposing, male pin inserts in the hole of female pin, and the upper film overlaps with the lower film, and Workpiece clamping is fixed by upper glass and lower-glass, and workpiece is between the upper film and the lower film.Exposure machine comprises board and positioning fixture.The utility model realizes contraposition by male pin and female pin, the upper and lower film then accurate contraposition when male pin and female pin accurately plug together, and whole aligning structure does not need expensive video camera, reaches the effect that the low precision of cost is high.
Description
Technical field
The utility model relates to exposure sources, particularly relates to a kind of positioning fixture of exposing and exposure machine thereof.
Background technology
Current industry uses manual exposure machine or semi-automatic exposure machine substantially, when using manual exposure machine, manually unstable to sheet aligning accuracy.Adopt the semi-automatic exposure machine aligning accuracy deviation large (>=± 0.02mm) of general camera alignment device.Adopt the automatic exposure machine price of high precision camera alignment device (≤± 0.01mm) too high again.This bottleneck constrains the batch making of domestic sophisticated product to a great extent.
Utility model content
The purpose of this utility model is the defect for overcoming prior art, and provides a kind of positioning fixture of exposing and exposure machine thereof, to provide low cost and the high alignment mode of precision.
For achieving the above object, the utility model is by the following technical solutions:
The positioning fixture of exposure, comprise glass and lower-glass, upper glass is provided with the film, lower-glass is provided with the lower film, the upper film is consistent with lower film pattern, upper glass is fixed with more than one female pin, lower-glass is fixed with the male pin of corresponding female pin, and the external diameter of male pin equals the hole internal diameter of female pin; When exposing, male pin inserts in the hole of female pin, and the upper film overlaps with the lower film, and Workpiece clamping is fixed by upper glass and lower-glass, and workpiece is between the upper film and the lower film.
The invention also discloses a kind of exposure machine, comprise board and above-mentioned positioning fixture, upper glass is positioned on a upper ledge, and upper ledge is fixed on board, is provided with bearing assembly in board, and lower-glass is positioned on bearing assembly; The vertical drive assembly for driving lower-glass to move up and down below upper glass is also provided with in board.
Further, bearing assembly comprises lower frame and back up pad, and lower frame both sides are fixed with support bar, and support bar and lower frame can move up and down by relative support plate, and lower-glass is positioned on lower frame.
Further, lower frame is provided with inner seal ring and outer seal ring, and lower-glass lower surface contacts with inner seal ring, the outer seal ring of lower frame be provided with the pore for vacuumizing be communicated with external vacuum pump between inner seal ring; When exposing, outer seal ring contacts with upper lower glass surface, upper glass, lower-glass, inner seal ring, surround a cavity between lower frame and outer seal ring, cavity is evacuated and forms negative pressure, upper glass and lower-glass clamping work pieces under the effect of external atmospheric pressure.
Further, the vacuum cup for fixing lower-glass is provided with below lower-glass.
Further, vertical drive assembly comprises leading screw, for driving the spindle motor of screw turns and the push rod for driving lower-glass to move up and down, push rod lower end is fixed on a leveling board, and the nut of leading screw is fixed on leveling board; During spindle motor drive screw turns, the nut of leading screw drives leveling board and push rod to move up and down.
Further, vertical drive assembly also comprises the top board be fixed in board, and top board is fixed with guide rod, and guide rod runs through leveling board, and push rod runs through top board.
Further, leading screw is more than 1, and spindle motor drives different screw synchronous to rotate by a Timing Belt.
Further, exposure machine also comprises for bearing assembly and lower-glass reciprocating horizontal drive assembly in the horizontal direction, horizontal drive assembly comprises horizontal motor and belt, belt sleeve is on two belt pulleys, one of them belt pulley and horizontal motor output shaft synchronous rotate, and bearing assembly is fixedly connected with belt by a linking arm.
The utility model beneficial effect is compared with prior art:
The utility model realizes contraposition by male pin and female pin, the upper and lower film then accurate contraposition when male pin and female pin accurately plug together, and whole aligning structure does not need expensive video camera, reaches the effect that the low precision of cost is high.
Accompanying drawing explanation
Fig. 1 is upper glass and lower-glass stereographic map;
Fig. 2 is the mobile schematic diagram of lower-glass relative to upper glass;
Fig. 3 is the sectional arrangement drawing of upper glass, female pin, lower-glass, male pin;
Fig. 4 is upper glass and lower-glass partial sectional view when clamping;
Fig. 5 is the assembling stereogram of lower-glass and bearing assembly;
Fig. 6 is leading screw and the push rod connection diagram of vertical drive assembly;
Fig. 7 is spindle motor and the leading screw connection diagram of vertical drive assembly;
Fig. 8 is horizontal drive assembly schematic top plan view.
Embodiment
In order to more fully understand technology contents of the present utility model, below in conjunction with specific embodiment the technical solution of the utility model being described further and illustrating.
The concrete structure of the utility model embodiment as shown in Figures 1 to 8.
The positioning fixture of exposure comprises glass 10 and lower-glass 20.Upper glass 10 is provided with the film 11, and lower-glass 20 is provided with the lower film 21.The upper film 11 is consistent with the lower film 21 pattern, and upper glass 10 is fixed with 2 female pins 12, lower-glass 20 is fixed with the male pin 22 of corresponding female pin 12, and the external diameter of male pin 22 equals the hole internal diameter of female pin 12.
When making male pin 22 and female pin 12, the Positioning Precision Control of male pin 22 and female pin 12 is within ± 0.005mm.When exposing, male pin 22 inserts in the hole of female pin 12, the upper film 11 overlaps with the lower film 21 (registration accuracy controls within ± 0.01mm), and Workpiece clamping is fixed with lower-glass 20 by upper glass 10, and workpiece is between the upper film 11 and the lower film 21.
The exposure machine of the present embodiment comprises board and above-mentioned positioning fixture.Upper glass 10 is positioned on upper ledge 30, and upper ledge 30 is fixed on board.Be provided with bearing assembly 40 in board, lower-glass 20 is positioned on bearing assembly 40.The vertical drive assembly for driving lower-glass 20 to move up and down below upper glass 10 is also provided with in board.
Bearing assembly 40 comprises lower frame 41 and back up pad 43.Lower frame 41 both sides are fixed with support bar 42, and support bar 42 and lower frame 41 can move up and down by relative support plate 43.Lower-glass 20 is positioned on lower frame 41.Lower frame 41 is provided with inner seal ring 45 and outer seal ring 44.Lower-glass 20 lower surface contacts with inner seal ring 45, the outer seal ring 44 of lower frame 41 be provided with the pore 411 for vacuumizing be communicated with external vacuum pump between inner seal ring 45.When exposing, outer seal ring 44 contacts with upper glass 10 lower surface, upper glass 10, lower-glass 20, inner seal ring 45, between lower frame 41 and outer seal ring 44, surround cavity 47, cavity 47 is evacuated and forms negative pressure, upper glass 10 and lower-glass 20 clamping work pieces under the effect of external atmospheric pressure.
In addition, the vacuum cup 46 for fixing lower-glass 20 is provided with below lower-glass 20.
Vertical drive assembly comprise leading screw 53, for drive leading screw 53 to rotate spindle motor 56, for the push rod 51 that drives lower-glass 20 to move up and down and the top board 52 be fixed in board.Push rod 51 lower end is fixed on leveling board 55, and the nut 531 of leading screw 53 is fixed on leveling board 55.Top board 52 is fixed with guide rod 54, guide rod 54 runs through leveling board 55, and push rod 51 runs through top board 52.When spindle motor 56 drives leading screw 53 to rotate, the nut 531 of leading screw 53 drives leveling board 55 and push rod 51 to move up and down.Push rod 51 jack-up be support bar 42, support bar 42 lifts lower frame 41 and lower-glass 20, and push rod 51 runs through back up pad 43, and moving up and down of push rod 51 can not drive back up pad 43 to move.In the present embodiment, as shown in Figure 7, leading screw 53 has 4, and spindle motor 56 drives different leading screw 53 synchronous axial system by Timing Belt 57.
Exposure machine also comprises for bearing assembly 40 and lower-glass 20 reciprocating horizontal drive assembly in the horizontal direction.Horizontal drive assembly comprises horizontal motor and belt 62, and belt 62 is enclosed within two belt pulleys 61, and one of them belt pulley 61 rotates with horizontal motor output shaft synchronous, and the back up pad 43 of bearing assembly 40 is fixedly connected with belt 62 by linking arm 431.
More than state only with embodiment to further illustrate technology contents of the present utility model; so that reader is easier to understand; but do not represent embodiment of the present utility model and be only limitted to this, any technology done according to the utility model extends or recreation, all by protection of the present utility model.
Claims (9)
1. the positioning fixture of exposure, comprise glass and lower-glass, upper glass is provided with the film, lower-glass is provided with the lower film, the upper film and the lower film in the same size, it is characterized in that, described upper glass is fixed with more than one female pin, lower-glass is fixed with the male pin of corresponding described female pin, and the external diameter of male pin equals the hole internal diameter of female pin; When exposing, male pin inserts in the hole of female pin, and the upper film overlaps with the lower film, and Workpiece clamping is fixed by upper glass and lower-glass, and workpiece is between the upper film and the lower film.
2. an exposure machine, comprises board, it is characterized in that, also comprises positioning fixture according to claim 1, and upper glass is positioned on a upper ledge, and upper ledge is fixed on board, is provided with bearing assembly in board, and lower-glass is positioned on bearing assembly; The vertical drive assembly for driving lower-glass to move up and down below upper glass is also provided with in board.
3. exposure machine as claimed in claim 2, it is characterized in that, described bearing assembly comprises lower frame and back up pad, and lower frame both sides are fixed with support bar, and support bar and lower frame can move up and down by relative support plate, and described lower-glass is positioned on lower frame.
4. exposure machine as claimed in claim 3, it is characterized in that, described lower frame is provided with inner seal ring and outer seal ring, and lower-glass lower surface contacts with inner seal ring, the outer seal ring of lower frame be provided with the pore for vacuumizing be communicated with external vacuum pump between inner seal ring; When exposing, outer seal ring contacts with upper lower glass surface, upper glass, lower-glass, inner seal ring, surround a cavity between lower frame and outer seal ring, cavity is evacuated and forms negative pressure, upper glass and lower-glass clamping work pieces under the effect of external atmospheric pressure.
5. exposure machine as claimed in claim 3, is characterized in that, be provided with the vacuum cup for fixing lower-glass below described lower-glass.
6. exposure machine as claimed in claim 2, it is characterized in that, described vertical drive assembly comprises leading screw, for driving the spindle motor of screw turns and the push rod for driving lower-glass to move up and down, push rod lower end is fixed on a leveling board, and the nut of leading screw is fixed on leveling board; During spindle motor drive screw turns, the nut of leading screw drives leveling board and push rod to move up and down.
7. exposure machine as claimed in claim 6, it is characterized in that, described vertical drive assembly also comprises the top board be fixed in board, and top board is fixed with guide rod, and guide rod runs through leveling board, and push rod runs through top board.
8. exposure machine as claimed in claim 6, is characterized in that, described leading screw is more than 1, and spindle motor drives different screw synchronous to rotate by a Timing Belt.
9. exposure machine as claimed in claim 2, it is characterized in that, also comprise for bearing assembly and lower-glass reciprocating horizontal drive assembly in the horizontal direction, described horizontal drive assembly comprises horizontal motor and belt, belt sleeve is on two belt pulleys, one of them belt pulley and horizontal motor output shaft synchronous rotate, and bearing assembly is fixedly connected with belt by a linking arm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520065300.8U CN204462638U (en) | 2015-01-29 | 2015-01-29 | The positioning fixture of exposure and exposure machine thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520065300.8U CN204462638U (en) | 2015-01-29 | 2015-01-29 | The positioning fixture of exposure and exposure machine thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204462638U true CN204462638U (en) | 2015-07-08 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520065300.8U Expired - Fee Related CN204462638U (en) | 2015-01-29 | 2015-01-29 | The positioning fixture of exposure and exposure machine thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204462638U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105404098A (en) * | 2015-12-04 | 2016-03-16 | 广州兴森快捷电路科技有限公司 | Alignment precision detection method for LDI (Laser Direct Imaging) exposure machine |
-
2015
- 2015-01-29 CN CN201520065300.8U patent/CN204462638U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105404098A (en) * | 2015-12-04 | 2016-03-16 | 广州兴森快捷电路科技有限公司 | Alignment precision detection method for LDI (Laser Direct Imaging) exposure machine |
| CN105404098B (en) * | 2015-12-04 | 2017-12-05 | 广州兴森快捷电路科技有限公司 | A kind of LDI exposure machine alignments accuracy checking method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150708 Termination date: 20200129 |