CN204462524U - A kind of without CaF 240 times of excluding plan apochromatic metallographic microobjectives - Google Patents

A kind of without CaF 240 times of excluding plan apochromatic metallographic microobjectives Download PDF

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Publication number
CN204462524U
CN204462524U CN201420867956.7U CN201420867956U CN204462524U CN 204462524 U CN204462524 U CN 204462524U CN 201420867956 U CN201420867956 U CN 201420867956U CN 204462524 U CN204462524 U CN 204462524U
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China
Prior art keywords
lens
convex lens
convex
caf
concavees
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Expired - Fee Related
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CN201420867956.7U
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Chinese (zh)
Inventor
萧泽新
高兴宇
肖华鹏
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Guilin University of Electronic Technology
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Guilin University of Electronic Technology
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Priority to CN201420867956.7U priority Critical patent/CN204462524U/en
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Abstract

The utility model discloses a kind of without CaF 240 times of excluding plan apochromatic metallographic microobjectives, it is made up of three groups of 8 lens.Operating distance W.D.=0.15mm of the present utility model, enlargement ratio is 40 ×, numerical aperture > 0.7, aperture angle ω > 2 °, effective focal length f '=6.27mm.The utility model can be widely used in all kinds of metallographic equipment.The utility model has the advantages that: 1, not containing CaF2 metallography microscope object lens, reach flat field apochromatism effect; 2, cost performance is high; 3, structure is simple.

Description

A kind of without CaF 240 times of excluding plan apochromatic metallographic microobjectives
Technical field
The present invention relates to microcobjective, particularly a kind of without CaF 240 times of excluding plan apochromatic metallographic microobjectives.
Background technology
Microcobjective is the important composition parts of metaloscope, and the height of its image quality, directly affects the performance of metaloscope.Flat field apochromatic micro objective is the microcobjective that picture element is best, class is the highest.Be correct axial chromatic aberration and second order spectrum in object lens, conventional way in part positive lens, introduces optical crystal, as calcium fluoride CaF simultaneously 2deng as manufactured materials, but special optical material is few, more crisp, and physicochemical property is unstable, and large-sized material is more difficult to obtain." the practical optics technical manual " (2006 of king Zhijiang River chief editor, Beijing: China Machine Press) in mention a kind of domestic similar 40 × flat field achromatic micro objective, be made up of 7 lens, wherein have 2 FK system glass employing low-refraction, cost is higher.
In recent years, someone uses special glass (as TF 3) partly substitute CaF 2manufacture and design flat field apochromatic objective, demonstrate superiority reducing costs and improve in manufacturability, caused inventor to CaF 2the further investigation of apochromatism imaging mechanism, adds the technical progress of domestic glass, impels us to design without CaF 2flat field apochromatic micro objective.
Summary of the invention
It is simple without CaF that the object of the invention is to provide a kind of high performance-price ratio, structure 240 times of flat field apochromatic micro objectives, can correct axial chromatic aberration and second order spectrum simultaneously.
The technical scheme realizing the object of the invention is:
A kind of without CaF 240 times of excluding plan apochromatic metallographic microobjectives, by 8 not containing CaF 2the convex lens made of optical glass and concavees lens be divided into 3 light groups and form, each lens and object plane central coaxial, order is followed successively by infinity image planes, first convex lens, second concave lens, the 3rd concavees lens, the 4th convex lens, the 5th concavees lens, the 6th convex lens, the 7th convex lens, the 8th convex lens from left to right, object plane, distance between 1st to convex lens is infinity, from the 8th convex lens summit to the distance of object plane be W.D.
In described 3 light groups, 1st light group is made up of first convex lens and second concavees lens interval, the three gummed groups that 2nd light group is made up of the 3rd concavees lens, the 4th convex lens, the 5th concave lens and the 6th convex lens are formed, 3rd light group is the 7th convex lens and the 8th convex lens composition, the 8th convex lens wherein near object plane are aplanatic thick meniscus lens, and described second concave lens are positive meniscus shaped lens.
The operating distance W.D.=0.15mm of described lens, enlargement ratio is 40 × (coordinating with f '=250mm tube lens), numerical aperture > 0.7, aperture angle ω > 2 °, focal distance f '=6.27mm, parfocalization distance=45mm.
Advantage of the present invention is: 1, not containing CaF2 metallography microscope object lens, reach flat field apochromatism effect; 2, full photonic glass is formed, and cost performance is high; 3, lens number is few, and structure is simple.
Accompanying drawing explanation
Fig. 1 microcobjective structure;
The geometrical aberration evaluation map of Fig. 2 microcobjective;
The point spread function figure of Fig. 3 microcobjective;
The mtf value of each visual field under the MTF curve of Fig. 4 microcobjective and limiting resolution;
The aberration data of Fig. 5 microcobjective;
The flat-field objective structural drawing of the identical enlargement factor of Fig. 6 Leca;
The flat field apochromatic objective structural drawing of the identical enlargement factor of Fig. 7 USSR (Union of Soviet Socialist Republics);
Domestic like product structural drawing (a) of Fig. 8 and aberration curve figure (b).
In figure: 1, infinity image planes 2, positive lens 3, positive lens 4, negative lens 5, positive lens 6, negative lens 7, positive lens 8, positive lens 9, positive lens 10, object plane.
Embodiment
Below in conjunction with the drawings and specific embodiments, the invention will be further elaborated.
With reference to Fig. 1, the present invention is a kind of without CaF 240 times of excluding plan apochromatic metallographic microobjectives, by 8 not containing CaF 2the convex lens made of optical glass and concavees lens be divided into 3 light groups and form, each lens and object plane central coaxial, order is followed successively by infinity image planes 1, first convex lens 2, second concave lens 3, the 3rd concavees lens 4, the 4th convex lens 5, the 5th concavees lens 6, the 6th convex lens 7, the 7th convex lens 8, the 8th convex lens 9 from left to right, object plane 10, distance between 1st to convex lens is infinity, from the 8th convex lens 9 summit to the distance of object plane be W.D..
In described 3 light groups, 1st light group is be made up of the first convex lens 2 and second concave lens 3 with certain intervals, its spacing is 1.57mm, the three gummed groups that 2nd light group is made up of the 3rd concavees lens 4, the 4th convex lens 5, the 5th concave lens 6 and the 6th convex lens 7 are formed, the spacing of three gummed groups and the 6th convex lens is 0.2mm, 3rd light group is that the 7th convex lens 8 and the 8th convex lens 9 form, and its spacing is 0.1mm; The spacing of the 1st light group and the 2nd light group is 5.23mm, and the spacing of the 2nd light group and the 3rd light group is 0.1mm; The 8th convex lens 9 wherein near object plane are aplanatic thick meniscus lens, and described second concave lens 3 are positive meniscus shaped lens.
Use OSLO optical design CAD software, optimize " r, d, n " (r is the radius of lens, and d is the thickness of lens, and n is the refractive index of lens) textural element, have devised without CaF 240 × excluding plan apochromatic metallographic microobjective.
Operating distance W.D.=0.15mm; Enlargement ratio 40 ×; Numerical aperture 0.718; Aperture angle 2.06 °; Focal distance f '=6.27mm.
The objective lens design Aberration Analysis that the present invention provides is shown in accompanying drawing 2, accompanying drawing 5 is PTZ3 tables of data of these object lens, from accompanying drawing 2 and accompanying drawing 5, can reflect that d, F, c light almost intersects at a point on tape intuitively, the spherochromatism of three kinds of wavelength is also less, flat field effect is quite satisfaction also, a thatch ten thousand curvature of field (PTZ3)=-0.000907.Visible is a quite outstanding optical texture.Carried out contrasting rear (see accompanying drawing 6, accompanying drawing 7) with the product of multiplying power with German Lay thatch, USSR (Union of Soviet Socialist Republics), it has goodish cost performance.Germany's Lay thatch object lens form by 5, are flat-field achromatic objective lens; USSR (Union of Soviet Socialist Republics) flat field apochromatic objective forms by 8, and wherein contains CaF2.The numerical aperture of these two object lens is 0.65, is all less than the present invention.

Claims (3)

1. one kind without CaF 240 times of excluding plan apochromatic metallographic microobjectives, comprise lens, it is characterized in that: by 8 not containing CaF 2the convex lens made of optical glass and concavees lens be divided into 3 light groups and form, each lens and object plane central coaxial, order is followed successively by infinity image planes, first convex lens, second concave lens, the 3rd concavees lens, the 4th convex lens, the 5th concavees lens, the 6th convex lens, the 7th convex lens, the 8th convex lens from left to right, object plane, distance between 1st to convex lens is infinity, from the 8th convex lens summit to the distance of object plane be W.D..
2. microcobjective according to claim 1, it is characterized in that: in described 3 light groups, 1st light group is made up of first convex lens and second concavees lens interval, the three gummed groups that 2nd light group is made up of the 3rd concavees lens, the 4th convex lens, the 5th concave lens and the 6th convex lens are formed, 3rd light group is the 7th convex lens and the 8th convex lens composition, the 8th convex lens wherein near object plane are aplanatic thick meniscus lens, and described second concave lens are positive meniscus shaped lens.
3. microcobjective according to claim 1, it is characterized in that: the operating distance W.D.=0.15mm of described lens, enlargement ratio is 40 times, coordinate with f '=250mm tube lens, numerical aperture > 0.7, aperture angle ω > 2 °, focal distance f '=6.27mm, parfocalization distance=45mm.
CN201420867956.7U 2014-12-31 2014-12-31 A kind of without CaF 240 times of excluding plan apochromatic metallographic microobjectives Expired - Fee Related CN204462524U (en)

Priority Applications (1)

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CN201420867956.7U CN204462524U (en) 2014-12-31 2014-12-31 A kind of without CaF 240 times of excluding plan apochromatic metallographic microobjectives

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Application Number Priority Date Filing Date Title
CN201420867956.7U CN204462524U (en) 2014-12-31 2014-12-31 A kind of without CaF 240 times of excluding plan apochromatic metallographic microobjectives

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104570310A (en) * 2014-12-31 2015-04-29 桂林电子科技大学 Flat-field apochromatic metallographic microscope objective with magnification power being 40 and without CaF2

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104570310A (en) * 2014-12-31 2015-04-29 桂林电子科技大学 Flat-field apochromatic metallographic microscope objective with magnification power being 40 and without CaF2

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GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20150708

Termination date: 20151231

EXPY Termination of patent right or utility model