No CaF
2In times flat field apochromatism metallography microscope object lens
Technical field
The utility model relates to microcobjective, particularly a kind of no CaF
2In times flat field apochromatism metallography microscope object lens.
Background technology
Microcobjective is the most important parts of metaloscope, and the height of its image quality directly influences the performance of metaloscope.The flat field apochromatic micro objective is the microcobjective that picture element is best, class is the highest.For proofreading and correct elementary axial chromatic aberration and second order spectrum simultaneously, conventional way is to introduce the optical crystal of low-refraction, low chromatic dispersion in the part positive lens, as calcium fluoride (CaF in object lens
2) wait as manufactured materials, but will make that like this manufacturing cost increases greatly.Consider manufacturing cost and manufacturability, in recent years, use special glass (as TF3) to substitute or partly substitute CaF2 to manufacture and design the flat field apochromatic objective, shown superiority aspect the manufacturability reducing cost and improve.But this special optical material yield is few, more crisp, physicochemical property is unstable, and large-sized material more is difficult to obtain.The German Lycra object lens of external like product are made up of 7 lens, and object lens are made up of 6 lens, have wherein all adopted CaF
2Material, so price is higher, and also this two object lens operating distance is also little.
The utility model content
The purpose of this utility model is to provide a kind of high performance-price ratio, no CaF simple in structure
2In times flat field apochromatism metallography microscope object lens, can proofread and correct the axial elementary aberration of C light (656.3nm), F light (486.1nm) and the second order spectrum of d light (587.6nm) simultaneously.
The utility model is realized by following know-why: according to combined light focal power formula φ=φ
1+ φ
2-d φ
1φ
2(φ
1, φ
2Be respectively light group 1,2 focal powers, d is the distance between first interarea of second interarea of light group 1 and light group 2) as can be known, in doubly flat field apochromatic micro objective can be by two low powers the combination of flat field apochromatic micro objective carry out complicated the structure, by the suitable focal length convergent-divergent and the optimization of aberration, finally obtain picture element good in times flat field apochromatic micro objective.
The utility model does not have CaF
2In times flat field apochromatism metallography microscope object lens, do not contain CaF by 6
2The convex lens of optical glass and concavees lens form, put in order from right to left and be object plane → first convex lens → second concavees lens → 3rd convex lens → the 4th convex lens → 5th concave lens → the 6th convex lens, and each lens is coaxial with the object plane center, and object plane is imaged on unlimited distance after system.Distance from the summit of first convex lens to object plane is operating distance W.D.
With two low power flat field apochromatism metallography microscope object lens is initial configuration, use OSLO optical design CAD software, by the focal length convergent-divergent, optimize " r; d; and n (r: lens radius, d: lens thickness, n: the index of refraction in lens) " textural element to be to reach the requirement of flat field apochromatism, designed times infinity image distance flat field apochromatism metallography microscope object lens among the no CaF2.
Operating distance W.D of the present utility model>10mm;
Enlargement ratio β=8 *~10 *;
Numerical aperture NA>0.2;
Aperture angle>2 °;
Focal distance f '=20mm~32mm.
The utility model has the advantages that:
1, do not contain CaF
2In times metallography microscope object lens, reach flat field apochromatism effect;
2, long reach;
3, cost performance height;
4, simple in structure.
Description of drawings:
Fig. 1 is a times flat field apochromatic micro objective structural drawing in the Lycra;
Fig. 2 is a times flat field apochromatic micro objective structural drawing in the Olympus;
Fig. 3 is the utility model microcobjective structural drawing;
Fig. 4 is a geometrical aberration curve map of the present utility model;
Fig. 5 is a geometrical aberration tables of data of the present utility model.
Embodiment
As shown in Figure 3, the utility model does not have CaF
2In times flat field apochromatism metallography microscope object lens, do not contain CaF by 6
2Convex lens that the optical glass of material is made and concavees lens arranged in co-axial alignment are formed, put in order and be: object plane 1, first convex lens 2, second concave lens 3, the 3rd convex lens 4, the 4th convex lens 5, the 5th concavees lens 6, the 6th convex lens 7, and each lens is coaxial with the object plane center, and imaging is at infinity after said system for object plane.
The objective lens design Aberration Analysis that the utility model provides is seen accompanying drawing 4, and accompanying drawing 5 is PTZ3 tables of data of these object lens.Fig. 4 reflects that intuitively C, d, F light intersect on 0.707 aperture band, the spherochromatism of three kinds of wavelength is very little, has reached apochromatic requirement fully; Show three a rank thatch ten thousand curvature of field (PTZ3)=-0.001778 among Fig. 5, the flat field effect is also quite satisfied.All things considered the utility model flat field apochromatism effect is fine, and picture element is better than having reached the level of international advanced person's like product with homemade flat field half apochromatic micro objective of multiplying power.