CN104570309B - One kind is without CaF210 × long working distance excluding plan apochromatic metallographic microobjective - Google Patents

One kind is without CaF210 × long working distance excluding plan apochromatic metallographic microobjective Download PDF

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Publication number
CN104570309B
CN104570309B CN201410848600.3A CN201410848600A CN104570309B CN 104570309 B CN104570309 B CN 104570309B CN 201410848600 A CN201410848600 A CN 201410848600A CN 104570309 B CN104570309 B CN 104570309B
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China
Prior art keywords
lens
concavees
convex lens
object plane
convex
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CN201410848600.3A
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CN104570309A (en
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肖华鹏
萧泽新
马姝靓
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Guangxi Normal University
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Guangxi Normal University
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/02—Objectives
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Lenses (AREA)

Abstract

The invention discloses one kind without CaF210 × long working distance excluding plan apochromatic metallographic microobjective, CaF is free of by 82Optical glass convex lens and concavees lens be divided into 5 light groups and form, each lens and object plane central coaxial, put in order from left to right for：First convex lens, second concave lens, the 3rd concavees lens, the 4th concavees lens, the 5th convex lens, the 6th concavees lens, the 7th concavees lens, the 8th convex lens, object plane.Object plane is imaged on unlimited distance after system.Operating distance W.D=the 17.53mm of this microcobjective, enlargement ratio β=10 ×（When coordinating with f '=200mm tube lenses）, focal length f '=20mm, numerical aperture NA=0.28, angular aperture ω=3.15 °（Image space φ 22mm）.Its advantage is：1. be free of CaF2In times metallography microscope object lens, reach flat field apochromatism effect；2. big visual field, long reach；It is 3. cost-effective；4. parfocalization distance, it is 60mm.

Description

One kind is without CaF210 × long working distance excluding plan apochromatic metallographic microobjective
Technical field
The present invention relates to microcobjective, and particularly one kind is without CaF210 × long working distance flat field apochromatism metallography microscope thing Mirror.
Background technology
Microcobjective is the most important part of metallographic microscope, and the height of its image quality directly affects metallographic microscope Performance.Flat field apochromatic micro objective is as best in quality, class highest microcobjective.It is to correct simultaneously in object lens Primary axial chromatic aberration and second order spectrum, conventional method are that low-refraction, the optics crystalline substance of low dispersion are introduced in the positive lens of part Body；More crisp, physicochemical property is unstable but this special optical material yield is few, large-sized material is more difficult to obtain.It is external same Class product Germany Lycra object lens are made up of 7 lens, and Olympus object lens are made up of 6 lens, wherein employing CaF2Material Material, therefore price is higher, and also this two object lens operating distance is also short.In recent years, using special glass (such as TF3) substituting or Partly substitute CaF2Manufacture and design flat field apochromatic objective, shown in terms of reducing cost and improving manufacturability superior Property.This has triggered inventor further in depth to study this, designs one kind finally without CaF210 × long working distance flat field is answered Achromatism metallography microscope object lens.It is worthy of note that along with modern metallographic microscope in the continuous of industrial circle application Expand, it is desirable to which the operating distance of metallography microscope object lens is increasingly longer, causes its structure complicated all the more, and traditional parfocalization is away from for 45mm Object lens can not meet to require.Then, the former Soviet Union and Japanese Nikon use long reach object lens long parfocalization away from structure.Such as Nikon employs 60mm parfocalization away from making 100 × object lens operating distance reach 1mm.The design is as complete long reach thing The low power objective of mirror, also use 60mm parfocalizations away from.Certainly, long parfocalization brings new challenge away from structure to objective lens design and manufacture With the opportunity for obtaining innovation achievement.
The content of the invention
It is an object of the invention to provide a kind of high performance-price ratio without CaF210 × long working distance flat field apochromatism metallographic Microcobjective, the two of C light (656.3nm), the primary aberration in axial direction of F light (486.1nm) and D light (589.3nm) can be corrected simultaneously Level spectrum.
The present invention is optimized by appropriate focal length scaling and aberration, finally give as it is of fine quality it is good in a times long working distance put down Field apochromatic micro objective.
This is without CaF210 × long working distance excluding plan apochromatic metallographic microobjective, CaF is free of by 82Optical glass Convex lens and concavees lens are divided into 5 light groups and formed, each lens and object plane central coaxial, put in order from left to right for：First Convex lens, second concave lens, the 3rd concavees lens, the 4th concavees lens, the 5th convex lens, the 6th concave lens, the 7th Piece concavees lens, the 8th convex lens, object plane.Object plane is imaged on unlimited distance after system.From the summit of the 8th convex lens to The distance of object plane is operating distance W.D.
In 5 light groups, the 1st light group is first convex lens；2nd light group is recessed by second concave lens and the 3rd Double gluing units of lens composition；3rd light group be by the 4th concavees lens and the 5th convex lens group into double gluing units；4th light Group is the 6th concavees lens；5th light group be the 7th concavees lens and the 8th convex lens group into double gluing units.8th convex lens The spacing of its sphere top of mirror and object plane is 17.53mm；
First convex lens are thick bent moon monolithic；
6th concavees lens are thin bent moon monolithic；
8th convex lens are aplanatic thick bent moon；
Spacing is between each light group：2nd light group is smaller to spacing between the 5th light group, is 0.1-0.7mm；Wherein：1st light group It is compartment farther out away from being 9.35mm with the 2nd light group.
The operating distance W.D=17.53mm of the present invention；
Enlargement ratio β=10 × (when coordinating with f '=200mm tube lenses)；
Numerical aperture NA=0.28；
3.15 ° of angular aperture ＞ (image space φ 22mm)；
Focal length f '=20mm；
Parfocalization is away from=60mm.
It is an advantage of the invention that：
(1) CaF is free of2In times metallography microscope object lens, reach flat field apochromatism effect；
(2) big visual field, long reach；
(3) full photonic glass is formed, cost-effective；
(4) parfocalization distance.
Brief description of the drawings
Fig. 1 is Lycra 10 × flat field apochromatic micro objective structural representation；
Fig. 2 is Olympus 10 × flat field apochromatic micro objective structural representation；
Fig. 3 is parfocalization in " Nikon microcobjective specifications list " away from the complete object lens parameter of 60mm long reach；
Fig. 4 is microcobjective structural representation of the present invention；
Fig. 5 is the geometrical aberration curve map of the present invention；
Fig. 6 is the geometrical aberration tables of data of the present invention；
Fig. 7 is the optical transfer function MTF curve figure of the present invention；
Fig. 8 is the optical transfer function MTF tables of data of the present invention.
In figure：1. first 2. second, convex lens the 4th concave lens of concavees lens 4. of concavees lens 3. the 3rd 5. the 5th the 6th, convex lens 6. the 8th object plane of convex lens 9. of concavees lens 8. of concavees lens 7. the 7th.
Embodiment
Make the elaboration of a step to the present invention below in conjunction with the accompanying drawings.
As shown in figure 4, the present invention is without CaF210 × long working distance excluding plan apochromatic metallographic microobjective, be free of by 8 CaF2Optical glass convex lens and concavees lens composition, put in order from left to right for：First convex lens (1), second Concavees lens (2), the 3rd concave lens (3), the 4th concave lens (4), the 5th convex lens (5), the 6th concave lens (6), Seven concavees lens (7), the 8th convex lens (8) and object plane (9).And each lens and object plane central coaxial, object plane is through said system After be imaged on unlimited distance.
The objective lens design Aberration Analysis that the present invention provides is shown in accompanying drawing 5, and accompanying drawing 6 is this object lens PTZ3 tables of data, and Fig. 5 is intuitively It is intersecting to reflect that C, D, F light take in 0.707 aperture, the spherochromatism very little of three kinds of wavelength, fullys meet apochromatic want Ask；The curvature of field of three rank thatch ten thousand (PTZ3)=- 0.003605 is shown in Fig. 6, flat field effect is also quite satisfied with；Fig. 7 sees, represents 0 ω, 0.707 ω (ts) and 1 ω (ts) three visual fields 5 MTF curves, it is close to each other, reflect homogenization in whole visual field into As quality；According to visual limiting resolution formula σ=0.61 λ/NA, N=1/ σ=NA/0.61 λ, then Nmax=780lp/mm, and this When mtf value 0 ω be 0.0884,0.707 ωtWith 0.707 ωsRespectively 0.0751 and 0.0539；1ωtWith 1 ωsRespectively 0.0521 and 0.0403, as matter is gratifying.In terms of comparativity, in addition to numerical aperture is more smaller than Nikon, remaining performance Maintain an equal level with Nikon；And it is better than Lycra and the similar camera lens of Olympus.

Claims (3)

1. one kind is without CaF2 10 × long working distance excluding plan apochromatic metallographic microobjective, including lens, it is characterized in that：By 8 Without CaF2Optical glass convex lens and concavees lens be divided into 5 light groups and form, each lens and object plane central coaxial, from image planes To object plane put in order for：First convex lens, second concave lens, the 3rd concavees lens, the 4th concavees lens, the 5th it is convex Lens, the 6th concavees lens, the 7th concavees lens, the 8th convex lens, object plane, the lens that object plane forms through above-mentioned eight lens Unlimited distance is imaged on after group, is operating distance W.D from the summit in the close object space face of the 8th convex lens to the distance of object plane；
In 5 light groups, the 1st light group is first convex lens；2nd light group is by second concave lens and the 3rd concavees lens Double gluing units of composition；3rd light group be by the 4th concavees lens and the 5th convex lens group into double gluing units；4th light group is 6th concavees lens；5th light group be the 7th concavees lens and the 8th convex lens group into double gluing units.
2. microcobjective according to claim 1, it is characterized in that：Between described its sphere top of 8th convex lens and object plane Away from for 17.53mm.
3. microcobjective according to claim 1, it is characterized in that：Long reach W.D=17.53mm of the object lens, amplification Multiplying power β=10 ×, focal length f '=20mm, numerical aperture NA=0.28, angular aperture ω=3.15 °；Parfocalization is away from=60mm.
CN201410848600.3A 2014-12-31 2014-12-31 One kind is without CaF210 × long working distance excluding plan apochromatic metallographic microobjective Expired - Fee Related CN104570309B (en)

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Publication number Priority date Publication date Assignee Title
CN112180579B (en) * 2020-09-11 2021-11-16 中国科学院西安光学精密机械研究所 Microscopic imaging assembly, device and system adopting array type objective lens and imaging method
CN114397751A (en) * 2021-12-31 2022-04-26 北方信息控制研究院集团有限公司 Guidance self-checking division photoelectric imaging detection microscope objective

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3315419B2 (en) * 1991-11-20 2002-08-19 キヤノン株式会社 Achromatic lens system
CN102023377A (en) * 2010-12-07 2011-04-20 桂林电子科技大学 CaF2-free medium flat-field apochromatic metallographic microobjective
CN102200629A (en) * 2011-05-26 2011-09-28 桂林电子科技大学 100*CaF2-excluding plan apochromatic metallographic microobjective
CN103592744A (en) * 2013-10-23 2014-02-19 柳州欧维姆机械股份有限公司 High-resolution video telephoto objective lens
CN204462525U (en) * 2014-12-31 2015-07-08 广西师范大学 A kind of without CaF 210 × long working distance excluding plan apochromatic metallographic microobjective

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6510007B1 (en) * 2001-08-21 2003-01-21 Becton Dickinson And Company Flow cytometry lens system

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3315419B2 (en) * 1991-11-20 2002-08-19 キヤノン株式会社 Achromatic lens system
CN102023377A (en) * 2010-12-07 2011-04-20 桂林电子科技大学 CaF2-free medium flat-field apochromatic metallographic microobjective
CN102200629A (en) * 2011-05-26 2011-09-28 桂林电子科技大学 100*CaF2-excluding plan apochromatic metallographic microobjective
CN103592744A (en) * 2013-10-23 2014-02-19 柳州欧维姆机械股份有限公司 High-resolution video telephoto objective lens
CN204462525U (en) * 2014-12-31 2015-07-08 广西师范大学 A kind of without CaF 210 × long working distance excluding plan apochromatic metallographic microobjective

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