CN204449631U - Laser machine - Google Patents
Laser machine Download PDFInfo
- Publication number
- CN204449631U CN204449631U CN201420724177.1U CN201420724177U CN204449631U CN 204449631 U CN204449631 U CN 204449631U CN 201420724177 U CN201420724177 U CN 201420724177U CN 204449631 U CN204449631 U CN 204449631U
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- component
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- linear unit
- processing head
- rotary unit
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/0665—Shaping the laser beam, e.g. by masks or multi-focusing by beam condensation on the workpiece, e.g. for focusing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/0869—Devices involving movement of the laser head in at least one axial direction
- B23K26/0876—Devices involving movement of the laser head in at least one axial direction in at least two axial directions
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/20—Bonding
- B23K26/21—Bonding by welding
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- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
Abstract
The utility model relates to a kind of laser machine (1), it has lasing light emitter (2), processing head (5), moving cell (4), one light guide cables (3), moving cell has linear unit (6) and supporting rotary unit (7) thereon, light guide cables (3) is connected with linear unit, rotary unit comprises the first component (8) rotated around first axle (C) and the second component (9) rotated around the second axis (B), rotary unit by the first member supporting on linear unit and processing head is fixed on rotary unit by second component, linear unit is installed the first device of rotation driving (14) for rotating the first component, linear unit is installed the second device of rotation driving (15) for rotating second component (9), itself and the interior pipe (16) be bearing in described first component rotate and to be coupled and interior pipe (16) to rotate with second component (9) by angled transmission device (19) and is coupled.
Description
Technical field
The utility model relates to a kind of laser machine.
Background technology
This kind of laser machine is such as open by document RU 2 386 523 C1.In this published laser machine, the first component has the second device of rotation driving for rotating second component, thus the second device of rotation driving is rotated around first axle.
Utility model content
Task of the present utility model is, avoids the second device of rotation driving to rotate around first axle in laser machine.
In the laser machine starting the type mentioned, this task solves in the following manner: on described linear unit, install the second device of rotation driving for rotating described second component, described second device of rotation driving and one can rotating support in described first component in pipe rotate and to be coupled and described interior pipe to rotate with described second component by angled transmission device and is coupled.
According to the utility model, propose a kind of laser machine, it has: one for generation of the lasing light emitter of laser beam, one processing head, penetrates described laser beam from described processing head, one moving cell for making described processing head carry out linear movement and rotary motion, one light guide cables, described light guide cables one end is connected on described lasing light emitter and the other end is connected on described moving cell, to carry described laser beam for described processing head in laser runs, wherein, described moving cell has linear unit and a rotationally supported rotary unit on described moving cell of an energy linear movement, described processing head is fixed on described rotary unit, described light guide cables is connected with described linear unit, wherein, described rotary unit comprises first component that can rotate around first axle and a second component that can rotate around the second axis, wherein, described rotary unit to be bearing in rotatably on described linear unit by described first component and described processing head is fixed on described rotary unit by described second component, and wherein, described linear unit is installed the first device of rotation driving for rotating described first component, it is characterized in that, described linear unit is installed the second device of rotation driving for rotating described second component, described second device of rotation driving and an interior pipe that can be bearing in rotationally in described first component rotate and to be coupled and described interior pipe to rotate with described second component by angled transmission device and is coupled.
Advantageously, described first axle and described second axis orientation mutual vertically.
Advantageously, described linear unit and/or described rotary unit have the optical element of orientation for described laser beam and shaping.
Advantageously, in order to adjust laser spot, described linear unit and/or described rotary unit have a retractor device, and described retractor device has at least one can along the optical element of optical axial movement.
Advantageously, in order to adjust the focal position of described laser beam, described linear unit and/or described rotary unit have at least one self-adapting reflection mirror.
According to the utility model, by the second device of rotation driving be arranged on described linear unit and angled transmission device to drive second component.Described first drive unit and the second drive unit in position and functionally do not show as motion-impeding interference profile thus from the region disconnecting of the enforcement directed movement of machining tool.In the particularly advantageous design of one, the processing head itself only with preposition beam deflecting apparatus shows as directed element.
Preferably, described linear unit and/or described rotary unit have such optical element, and described optical element is used for orientation and the shaping of described laser beam, the especially transmissible calibration lens of described optical element, speculum, condenser lens etc.Arrange that to have at least one can be favourable along the retractor device (Teleskope) of the optical element of described first axle movement to adjust laser spot.Further preferably, in order to adjust the focal position of described laser beam, described linear unit and/or described rotary unit have at least one self-adapting reflection mirror.This self-adapting reflection mirror especially can by can heat conduction, the material of high strength is made and is provided with for wavelength is the high reflectance coating of the radiation of 1.06 μm.A kind of special compact structure is achieved wherein in the described optical element embodiment that described retractor device is arranged in described linear unit and/or described rotary unit in other words.By such mode, namely simple structure, the retractor device of optical function that had also has quite long structure length, obtain a kind of structure with little interference profile by this way, wherein, processing optical device easily contacts on workpiece.In addition, a kind of structure with relatively little inertia is achieved by this way.The amplitude of oscillating motion is relatively little, thus can realize accurate machine movement and then high machining accuracy when making the drive system of the setting of size at the same time littlely and have the structure of relatively little stability.
For the first retractor device, such as imaging type self-adapting reflection mirror or non-self-adapting speculum can combine as optical element and diverging lens or condenser lens.Can revise thus and compensate in other words possibly by the optical deviation in other words imaging errors of pyrogen because occurring.In the particularly advantageous embodiment of one, by transmissible collimation optical elements and a self-adapting steering arrangement of mirrors, described steering reflection mirror makes laser beam turn to be less than 45 ° in the complete particularly preferred embodiment of one.
In a preferred embodiment, described retractor device is configured to without burnt (afokales) retractor device, thus make it possible to produce described laser beam can manual or self-adjusting beam diameter, described beam diameter has very little divergence.This retractor device is used for independently, not by the possibility that second order effect affects, for adjusting the focus diameter in focus for Laser Processing and Rayleigh range.This when saving the processing optical device of a large amount of different focal for the adaptive cutting task of equipment or weld task.
Described laser beam and the first mechanical orientation axis and/or the second mechanical orientation axis extend with one heart and directly or indirectly by one preferably tubular, that there is beam through hole component surround, the actuation movement of two orientated axis is delivered to and is in front compared with on the optical element in distant positions along beam direction by described component.
Before described retractor device can be arranged in described driven through hole component completely in its optical functional element or afterwards, or cross this through hole component on its functionality in the following manner to extend, before namely each optical element is arranged in, each optical element is arranged in after inside and each optical element be arranged in.
By described frame mode, laser beam can not only be made and actuation movement can be made to be directed on the second orientated axis.Described two orientated axis intersect on a point.Outlet side relative to the second orientated axis has the cutting part for coupling processing optical device.In described cutting part, beam carries out another time and turns to and focus in job spotlight.Can carry out adjusting along the position of the job spotlight of beam direction by the second retractor device, or undertaken by a self-adapting steering speculum, described steering reflection mirror preferably makes beam towards the second orientated axis deflection and is arranged on the intersection point of two orientated axis if desired simultaneously.
In one embodiment, not only be integrated in transmissible collimation optical device without burnt retractor device, and be integrated in following adaptive optics, described collimation optical device in this case can be mobile along beam direction (manually or automatically), and described adaptive optics has also been taken in this case by the task of the decentralization adaptation of the second flexible Optical devices saved except implementing focus adjustment.The free beam area of minimum decentralization does not then exist and is restricted in other words on other aspect.Described retractor device between the input side and outlet side of functional unit virtually extend produce described directed movement.
Accompanying drawing explanation
Other advantages of the utility model theme and favourable embodiment is drawn by description, claims and accompanying drawing.Similarly, the feature that the characteristic sum mentioned before this is also further elaborated can each independent or multiple feature be applied with the form of any combination.Shown be not construed as final enumerating with described embodiment, but be that there is the exemplary characteristic be described the utility model more.Figure in accompanying drawing shows according to theme of the present utility model and not to scale (NTS) in strong schematically mode.
Wherein:
Fig. 1 shows the rip cutting figure passed according to laser machine of the present utility model according to the first embodiment;
Fig. 2 shows the rip cutting figure passed according to laser machine of the present utility model according to the second embodiment;
Fig. 3 shows the rip cutting figure passed according to laser machine of the present utility model according to the 3rd embodiment.
In description below accompanying drawing, identical Reference numeral is used for identical or that function is identical component.
Detailed description of the invention
Figure 1 illustrates a laser machine 1, described laser machine comprises lasing light emitter 2, light guide cables 3, moving cell 4 and a processing head 5.Described moving cell 4 has one can carry out linear movement linear unit 6 and a rotationally supported rotary unit 7 on described linear unit 6 along x, y and z direction, the second component 9 that described rotary unit has outer the first component 8 that is tubular, that can rotate around first axle C and can rotate around the second axis B.Described outer tube 8 is bearing on described linear unit 6 rotatably by a upper bearing (metal) and a lower bearing 10.Described second component 9 can be supported rotationally around described second axis B relative to described outer tube 8 by another bearing 11.Described processing head 5 is fixed on described second component 9.
Described lasing light emitter 2 is for generation of a laser beam 12 and be such as configured to solid state laser (YAG laser).Described light guide cables 3 one end is connected on described lasing light emitter 2 and the other end is connected on described linear unit 6 and is connected with described linear unit 6 in other words, to carry described laser beam 12 for described linear unit 6.Can coiling cable longitudinal direction rigidity rotation or described light guide cables 3 can be carried out freely to rotate to the connection on described linear unit 6.The described laser beam 12 penetrated by described light guide cables 3 to be injected in described linear unit 6 and along described first axle C through linear unit 6.Next, described laser beam 12 is injected in described rotary unit 7, is injected in described processing head 5 towards the directional steering of described second axis B in laser beam described in described rotary unit.There, described laser beam 12 is again turned to and is focused on subsequently, so that in order to process (laser cutting, laser weld) workpiece 13 and penetrate from described processing head 5.
By making described processing head 5 rotate around described first axle and described second axis C, B by described rotary unit 7, the beam axis A of the described laser beam 12 of injection can be made along any direction in space orientation.By carrying out the Linear-moving superposed if desired of described processing head 5 by described linear unit 6, the described focal point F of described laser beam 12, especially described laser beam 12 can move in any position of the working space of described laser machine 1.
In order to the independent rotational movement around described first axle and described second axis C, B can be realized, be provided with for making described outer tube 8 carry out the first motor 14 of rotating and for making described second component 9 carry out the second motor 15 rotated around described second axis B around described first axle C.These two motors 14,15 to be separately fixed on described linear unit 6 and can individually to manipulate.In order to the rotational motion of described second motor 15 is delivered on described second component 9, be provided with the driving element of interior pipe 16 form, described interior pipe around described first axle C concentric to be bearing in described outer tube 8 and not only with described second motor 15 and also with the described second component 9 of described rotary unit 7 mechanically (such as by intermeshing angular wheel) rotate and couple.Described interior pipe 16 to be bearing in rotational motion on described linear unit 6 by a upper bearing (metal) 17 in its upper end that described outer tube 8 stretches out of crossing and can be bearing in described outer tube 8 to rotational motion by a lower bearing 18 in its lower end.Described driving tube 16 and described second component 9 form an angled transmission device 19 jointly, described processing head 5 can be made to rotate around the second axis B extended perpendicular to first axle C by this angled transmission device.
If described outer tube and described interior pipe 8,16 are with identical rotational speed, so described processing head 5 rotates around described first axle C with corresponding rotating speed.If described outer tube and interior pipe 8,16 are with different rotational speed, then described processing head 5 rotates around described second axis B corresponding to speed discrepancy.This rotation around described second axis B can superpose the rotation around described first axle C.Carry out described linear movement by the described processing head 5 of described linear unit and/or rotary unit 6,7 and/or rotary motion by NC control unit (not shown) with controlling through NC, described NC control unit correspondingly manipulate described linear unit 6 at this unshowned drive unit and described motor 14,15.
In laser machine 1 shown in FIG, due to two unit 6,7 be not be interconnected rigidly but can relative rotation motion of driving system ground supported, described linear unit 6 takes off coupling with described rotary unit 7.That is, described linear unit 6 and parts (such as the stator of described motor 14,15) fixing are not thereon rotated in order to work pieces process only carries out linear movement.In contrast, described rotary unit 7 and processing head 5 fixing thereon are also rotated.This de-coupling makes to realize in an advantageous manner, can than following situation smaller size design be used for the required parts of the rotary motion of described processing head 5, in this case, described linear unit 6 and described rotary unit 7 mutually can be rigidly connected and be configured to integral type moving cell in other words.By less size design, also reduce produced by these rotational motions and the moment of inertia be applied on the described linear unit 6 of supporting, thus make also can must be less by described linear unit 6 size design.Because described linear unit 6 only implements linear movement, another advantage of this de-coupling is: described light guide cables 3 remains at orientation on same (vertical at this) direction to the connection on described linear unit 6 and can significantly reduce or stop completely the oscillating motion of described light guide cables 3 thus.
In the region of the described connection of described light guide cables 3, described linear element 6 has transmissible calibration lens 20, and described calibration lens collimates is injected into the described laser beam 12 in described linear unit 6 by described light guide cables 3 divergence expression.Through the laser beam 12 of calibration along described axis C direction through described interior pipe 16 and be mapped on self-adapting reflection mirror 21 in the point of intersection S of mutually vertical orientated axis B, C, described self-adapting reflection mirror be arranged in stretching out in the bottom of described interior pipe 16 of described outer tube 8 and make described laser beam 12 along axis B directional steering to described second component 9 on and redirect to further on described processing head 5.In described processing head 5, described laser beam 12 to be focused on (focal point F) by transmissible condenser lens 23 towards described axis A directional steering by another speculum 22.
Described calibration lens 20 can move along described first axle C, to adjust a predetermined laser spot, and cooperatively form a retractor device with described condenser lens 23 in described moving cell 4.The described self-adapting reflection mirror 21 of its curvature can be changed targetedly for adjusting the predetermined position of the described focal point F of described laser beam 12 and also can be used in the adaptive beam dispersion degree occurred except the adjustment of this focus.
Laser machine 1 shown is in fig. 2 with the difference of the described laser machine of Fig. 1, and described light guide cables 3 is connected on described linear unit 6 via linkage unit 24 at this.At this, calibration lens 20 are integrated in linkage unit 24, and described linkage unit itself is fixed on described linear unit 6.In order to make to be turned to by the direction of the calibrated described laser beam 12 of injection in described linkage unit 24 towards described first axle C, in the intersection point K of described first axle C and Incident beams axis D, arrange an additional self-adapting reflection mirror 25.Be arranged in the beam light path before described pipe 106, in addition with described first axle C synteny arrange a transmissible biconcave lens 26.
Described laser machine 1 shown is in figure 3 with the difference of the described laser machine of Fig. 2, substitutes described biconcave lens 26 arrange a transmissible biconvex lens 27 at this.In addition, the described self-adapting reflection mirror 21 of alternative arrangement in the described point of intersection S of described first axle and described second axis C, B, two self-adapting reflection mirrors 28,29 are arranged in figure 3 at described outer tube 8 place, these two self-adapting reflection mirrors so construct, and the laser beam 12 incided on described first speculum 28 are redirect on described second speculum 29 and by this second speculum towards described second axis B directional steering.
Claims (5)
1. laser machine (1), it has: one for generation of the lasing light emitter (2) of laser beam (12); One processing head (5), penetrates described laser beam (12) from described processing head; One moving cell (4) for making described processing head (5) carry out linear movement and rotary motion; one light guide cables (3), described light guide cables one end is connected to that described lasing light emitter (2) is upper and the other end is connected on described moving cell (4), to carry described laser beam (12) for described processing head (5) in laser runs, wherein, described moving cell (4) has linear unit (6) and a rotationally supported rotary unit (7) on described moving cell of an energy linear movement, described processing head (5) is fixed on described rotary unit, described light guide cables (3) is connected with described linear unit (6), wherein, described rotary unit (7) comprises first component (8) that can rotate around first axle (C) and a second component (9) that can rotate around the second axis (B), wherein, described rotary unit (7) is bearing in that described linear unit (6) is upper rotatably by described first component (8) and described processing head (5) is fixed on described rotary unit (7) by described second component (9), and wherein, at upper the first device of rotation driving (14) installed for rotating described first component (8) of described linear unit (6), it is characterized in that, at upper the second device of rotation driving (15) installed for rotating described second component (9) of described linear unit (6), described second device of rotation driving (15) and the one interior pipe (16) that can be bearing in rotationally in described first component (8) rotates and to be coupled and described interior pipe (16) to rotate with described second component (9) by angled transmission device (19) and is coupled.
2. according to laser machine according to claim 1, it is characterized in that, described first axle and described second axis orientation mutual vertically.
3. according to the laser machine described in claim 1 or 2, it is characterized in that, described linear unit (6) and/or described rotary unit (7) have the optical element of orientation for described laser beam (12) and shaping.
4. according to laser machine according to claim 3, it is characterized in that, in order to adjust laser spot, described linear unit (6) and/or described rotary unit (7) have a retractor device, and described retractor device has at least one can along the optical element of optical axial movement.
5. according to laser machine according to claim 3, it is characterized in that, in order to adjust the focal position (F) of described laser beam (12), described linear unit (6) and/or described rotary unit (7) have at least one self-adapting reflection mirror.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102013224207.7A DE102013224207B4 (en) | 2013-11-27 | 2013-11-27 | Laser processing machine |
| DE102013224207.7 | 2013-11-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204449631U true CN204449631U (en) | 2015-07-08 |
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ID=53045443
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420724177.1U Active CN204449631U (en) | 2013-11-27 | 2014-11-26 | Laser machine |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN204449631U (en) |
| DE (1) | DE102013224207B4 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107408789A (en) * | 2015-03-04 | 2017-11-28 | 通快激光与系统工程有限公司 | Irradiation system for the equipment for increasing material manufacturing |
| CN108145309A (en) * | 2018-02-09 | 2018-06-12 | 北京大学口腔医学院 | Multiple degrees of freedom laser process equipment |
| CN109070354A (en) * | 2016-03-09 | 2018-12-21 | 通快激光与系统工程有限公司 | The axis calibration of beam processing machine |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102016103578B4 (en) * | 2016-02-29 | 2021-08-12 | Gehring Technologies Gmbh + Co. Kg | Device and method for roughening substrates |
| DE102017125941B4 (en) * | 2017-11-07 | 2020-01-16 | Weil Engineering Gmbh | Method for producing a shaped body in a material processing machine and material processing machine for carrying out the method |
| DE102018206729A1 (en) * | 2018-05-02 | 2019-11-07 | Trumpf Werkzeugmaschinen Gmbh + Co. Kg | Laser processing head and laser processing machine with it |
| US11880045B2 (en) | 2020-10-02 | 2024-01-23 | Paul Kratzke | Motion generator |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02108489A (en) * | 1988-10-17 | 1990-04-20 | Fanuc Ltd | Wrist mechanism for articulated laser robot |
| ATE431216T1 (en) * | 2005-12-23 | 2009-05-15 | Trumpf Werkzeugmaschinen Gmbh | SCANNER HEAD AND PROCESSING MACHINE WITH IT |
| RU2386523C1 (en) * | 2008-12-25 | 2010-04-20 | Открытое акционерное общество Национальный институт авиационных технологий (ОАО НИАТ) | Device for cutting of volume parts with fibre laser |
-
2013
- 2013-11-27 DE DE102013224207.7A patent/DE102013224207B4/en active Active
-
2014
- 2014-11-26 CN CN201420724177.1U patent/CN204449631U/en active Active
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107408789A (en) * | 2015-03-04 | 2017-11-28 | 通快激光与系统工程有限公司 | Irradiation system for the equipment for increasing material manufacturing |
| CN107408789B (en) * | 2015-03-04 | 2019-12-20 | 通快激光与系统工程有限公司 | Illumination system for an apparatus for additive manufacturing |
| CN109070354A (en) * | 2016-03-09 | 2018-12-21 | 通快激光与系统工程有限公司 | The axis calibration of beam processing machine |
| US11167372B2 (en) | 2016-03-09 | 2021-11-09 | Trumpf Laser- Und Systemtechnik Gmbh | Axis calibration of beam processing machines |
| CN109070354B (en) * | 2016-03-09 | 2021-12-03 | 通快激光与系统工程有限公司 | Shaft alignment for beam processing machines |
| CN108145309A (en) * | 2018-02-09 | 2018-06-12 | 北京大学口腔医学院 | Multiple degrees of freedom laser process equipment |
Also Published As
| Publication number | Publication date |
|---|---|
| DE102013224207B4 (en) | 2016-08-18 |
| DE102013224207A1 (en) | 2015-05-28 |
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