CN204442191U - Band arc-initiating device arc power - Google Patents
Band arc-initiating device arc power Download PDFInfo
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- CN204442191U CN204442191U CN201520154995.7U CN201520154995U CN204442191U CN 204442191 U CN204442191 U CN 204442191U CN 201520154995 U CN201520154995 U CN 201520154995U CN 204442191 U CN204442191 U CN 204442191U
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Abstract
Band arc-initiating device arc power, comprises high-frequency inverter-type DC arc power supply, arc automatic starting circuit, short circuit delay circuit, pwm control circuit, it is characterized by: described high-frequency inverter-type DC arc power supply is connected with arc automatic starting circuit, pwm control circuit respectively; Described short circuit delay circuit output is connected with described pwm control circuit input; Striking pin one end that described short circuit delay circuit input and striking resistance, striking coil drive is connected.Beneficial effect: this arc-initiating device striking power supply reliability is high, stable performance, reduce costs.
Description
Technical field
The utility model relates to field of power supplies, particularly relates to a kind of band arc-initiating device arc power device.
Background technology
Multi sphere ion plating technology is that the one of vacuum ionic coating technology is improved one's methods, and it is using the surface-coating technology of arc discharge as metal evaporation sources.Cathodic arc evaporation source generally adopts the three-electrode structure form of band striking pin.Because Anode-cathode Distance is far away, needs first contacting ignition arc between striking pin and negative electrode, then arc discharge could occur between main anode and cathode.What realize cathodic arc discharge is called arc power.
As Chinese patent application (application number: CN201310368295) discloses a kind of differential of the arc ion electroplating method in prior art, and disclose a kind of supply unit adopting the method, this supply unit utilize three phase full wave rectification, IGBT inversion and high frequency transformer boosting main circuit open up mend structure the output characteristic of power supply is reached: voltage-900V ~-1200V, frequency 0.5KHz ~ 60KHz, pulsewidth 0.5 μ s ~ 30 μ s; Then power-output is loaded on the rectangle plane cathode target being of a size of 300mm × 100mm, positive output end puts on the cylinder vacuum cavity shell side surface that is positioned at φ 450mm × H400mm and is of a size of the rectangle 304L stainless steel framework of 386mm × 189mm (vacuum chamber side surface has 4 empty frames altogether, mutually be uniformly distributed in 90 °, surface roughness is lower than 0.8 μm), framework distance cathode target outer 3mm.
But existing arc power, be actually high-frequency inverter-type DC arc power supply, by three-phase 380 volts of alternating currents, be transformed to the direct current with constant-current characteristics that output current is adjustable.In multi-arc ion coating, due to the needs of equipment and technology, be generally realize arc ignition by the contact of striking pin and cathode targets.Existing arc power is separated with arc ignition circuit and striking resistance; arc ignition circuit and striking resistance wire are placed on power supply outside; and there is no short circuit, overtemperature protection; cause cannot adopting an effective measure after striking pin and cathode targets adhesion in arc process; striking resistance and striking pin are easily burnt because of overheated; cause plated film to produce to incur loss through delay, film quality declines.
Utility model content
The utility model is for the deficiencies in the prior art, provide a kind of stable performance, efficiency high, with the band arc-initiating device arc power of multiple protective.
Band arc-initiating device arc power, comprises high-frequency inverter-type DC arc power supply, arc automatic starting circuit, short circuit delay circuit, pwm control circuit, it is characterized by: described high-frequency inverter-type DC arc power supply is connected with arc automatic starting circuit, pwm control circuit respectively; Described short circuit delay circuit output is connected with described pwm control circuit input; Striking pin one end that described short circuit delay circuit input and striking resistance, striking coil drive is connected.
Be preferably: described high-frequency inverter-type DC arc power supply, namely with the DC power supply circuit structure that the output current of constant-current characteristics is adjustable be: three-phase 380 volts of voltages are through three-phase full-bridge rectifier rectification, high-frequency inverter circuit is sent into after capacitor filtering, after high frequency transformer step-down, output to rectifier, export after reactor and capacitor filtering.
Be preferably: described arc automatic starting circuit is made up of comparator, oscillating circuit; The output voltage signal of arc power is connected with an input of described comparator; Given striking voltage threshold signal is connected with another input of described comparator; The output of described comparator is connected with oscillating circuit; The output of described oscillating circuit is connected with striking coil.
Be preferably: described short circuit delay circuit comprises and being made up of diode D, electric capacity C and resistance R; Described diode D and electric capacity C forms rectification circuit, and electric capacity C and resistance R forms delay circuit; The negative electrode of described diode D is connected with one end of electric capacity C, resistance R and is connected with pwm control circuit afterwards.
Be preferably: described pwm control circuit, is made up of integral control circuit; Be preferably the SG3525 chip that AM General semiconductor company produces.
Be preferably: described three-phase 380V power output end is connected with three-phase full-bridge rectifier input after connecting air switch, fast recovery protective tube again.
Beneficial effect: with multiple protective, reliability is high, stable performance, reduce costs.
Accompanying drawing explanation
Fig. 1 is the circuit structure diagram of the utility model band arc-initiating device arc power;
Fig. 2 is the circuit structure diagram of the utility model band arc-initiating device arc power medium-high frequency contravariant DC arc power supply;
Fig. 3 is the circuit structure diagram of arc automatic starting circuit in the utility model band arc-initiating device arc power;
Fig. 4 is the circuit diagram of short circuit delay circuit in the utility model band arc-initiating device arc power.
Embodiment
Shown in accompanying drawing 1-4.The utility model is realized by following key technology:
One of key technology: high-frequency inverter-type DC arc power supply; Key technology two: arc automatic starting circuit; Key technology three: short circuit delay circuit; Key technology four: pwm control circuit.
Describe function and the feature of each key technology below respectively:
1, high-frequency inverter-type DC arc power supply, namely with the DC power supply that the output current of constant-current characteristics is adjustable.As shown in Figure 2.Three-phase 380 volts of voltages, through rectifier rectification, through capacitor filtering, are sent into high-frequency inverter circuit and (are comprised the semiconductor switch of IGBT (Insulated Gate Bipolar transistor) or MOS (field-effect transistor).) output to rectifier through high frequency transformer, export after reactor and capacitor filtering.Due to the switching frequency high (can more than 20kHz be reached) that high-frequency inversion adopts, transformer and reactor volume are reduced greatly, and then reduces power volume.
2, arc automatic starting circuit, is made up of comparison circuit, oscillating circuit.It is formed as shown in Figure 3.Due to high-frequency inverter-type DC arc power supply, with constant-current characteristics, when after arc ignition, output voltage 20 ~ 30 volts, when after arc extinction, output voltage more than 65 volts, can be set as a certain value between 30 to 65 volts by striking voltage threshold value.Output voltage compares with striking voltage threshold signal by arc ignition circuit, and when output voltage being detected higher than its value, comparison circuit is to oscillator circuit signal, and oscillating circuit exports the unipolar pulse square wave of certain frequency.And then the striking coil be attached thereto obtains multiple potential pulse, striking coil drives striking pin and cathode contacts to perform repeatedly striking action, until the electric arc that ignites.
3, short circuit delay circuit, comprises and being made up of diode, electric capacity and resistance.It is formed as shown in Figure 4.Diode D and electric capacity C forms rectification circuit, and electric capacity C and resistance R forms delay circuit.During striking, before striking pin and cathode contacts, arc power charge to electric capacity C by diode D, and after striking pin and cathode contacts, due to the effect of diode D, electric capacity C is discharged to resistance R, and electric capacity C both end voltage slowly declines.If there is striking pin and negative electrode adhesion or striking pin and cathode contacts overlong time, be reduced to the duration of short circuit threshold value of pwm control circuit setting under causing electric capacity C voltage, pwm control circuit blocks and exports, and realizes the protection to striking resistance and striking pin.
4, pwm control circuit, is made up of integral control circuit and peripheral protective circuit.Its function: 1. realize signal operation function, 2. PWM pulse-width modulation function completes every defencive function of arc power, overheated, overvoltage, under-voltage, short circuit, overcurrent protection.
Below in conjunction with accompanying drawing, the utility model embodiment is further described.
Three-phase alternating-current supply (A, B, C) enters high-frequency inverter-type DC arc power supply and controls to export with the adjustable direct current of output current, for providing the energy of arc burning through pwm control circuit.When arc ignition circuit detects without arc burning, when output voltage namely being detected higher than striking voltage threshold value, send striking signal immediately, striking needle thread loop obtains pulse voltage and controls, and drags striking pin and cathode contacts and to carry out igniting the action of electric arc.The striking pulse voltage duration should lower than the duration of short circuit threshold value of pwm control circuit setting.When there is striking fault, when striking pin and cathode contacts exceed the duration of short circuit threshold value that pwm control circuit sets, namely judge striking pin and cathode targets adhesion, pwm control circuit blocks and exports, and high-frequency inverter-type DC arc power supply stops output.After blocking interval (being set by inside circuit), pwm circuit automatically terminates blockade afterwards, make high-frequency inverter-type DC arc power work, when arc ignition circuit detects output voltage higher than striking voltage threshold value, send striking pulse voltage signal immediately, perform striking action, and send signal to pwm control circuit, the signal of shielding short circuit delay circuit; If the still adhesion of striking pin and negative electrode, then pwm circuit blocks output immediately, goes round and begins again.Namely power supply enters discontinuous operation state, reaches the object of protection striking resistance and striking pin, improves plated film production efficiency, ensures film quality.
The major function of pwm control circuit is: 1. 2. set point and output current value compare by the generation of PWM pulse-width signal; produce the pulse duration 3. voltage and current signal collection that control signal removes to adjust inverter circuit; the running status of monitoring arc power; comprise overheated, overvoltage, under-voltage, short circuit, overcurrent protection 4. through interface circuit and host computer transmitted in both directions analog quantity and quantity of state, host computer realizes electric current adjustment and setting in coating process by interface.
Set forth a lot of detail in the above description so that fully understand the utility model.But above description is only preferred embodiment of the present utility model, the utility model can be much different from alternate manner described here to implement, and therefore the utility model is not by the disclosed concrete restriction implemented above.Any those skilled in the art are not departing under technical solutions of the utility model ambit simultaneously, the Method and Technology content of above-mentioned announcement all can be utilized to make many possible variations and modification to technical solutions of the utility model, or be revised as the Equivalent embodiments of equivalent variations.Every content not departing from technical solutions of the utility model, according to technical spirit of the present utility model to any simple modification made for any of the above embodiments, equivalent variations and modification, all still belongs in the scope of technical solutions of the utility model protection.
Claims (6)
1. a band arc-initiating device arc power, comprise high-frequency inverter-type DC arc power supply, arc automatic starting circuit, short circuit delay circuit, pwm control circuit, it is characterized by: described high-frequency inverter-type DC arc power supply is connected with arc automatic starting circuit, pwm control circuit respectively; Described short circuit delay circuit output is connected with described pwm control circuit input; Striking pin one end that described short circuit delay circuit input and striking resistance, striking coil drive is connected.
2. one band arc-initiating device arc power according to claim 1, it is characterized by: described high-frequency inverter-type DC arc power supply, namely with the DC power supply circuit structure that the output current of constant-current characteristics is adjustable be: three-phase 380V voltage is through three-phase full-bridge rectifier rectification, high-frequency inverter circuit is sent into after capacitor filtering, after high frequency transformer step-down, output to rectifier, export after reactor and capacitor filtering.
3. one band arc-initiating device arc power according to claim 1, is characterized by: described arc automatic starting circuit is made up of comparator, oscillating circuit; The output voltage signal of arc power is connected with an input of described comparator; Given striking voltage threshold signal is connected with another input of described comparator; The output of described comparator is connected with oscillating circuit; The output of described oscillating circuit is connected with striking coil.
4., according to the arbitrary described one band arc-initiating device arc power of claim 1-3, it is characterized by: described short circuit delay circuit comprises and being made up of diode D, electric capacity C and resistance R; Described diode D and electric capacity C forms rectification circuit, and electric capacity C and resistance R forms delay circuit; The negative electrode of described diode D is connected with one end of electric capacity C, resistance R and is connected with pwm control circuit afterwards.
5. one band arc-initiating device arc power according to claim 4, is characterized by: described pwm control circuit is the SG3525 chip that AM General semiconductor company produces.
6. one band arc-initiating device arc power according to claim 2, is characterized by: described three-phase 380V power output end is connected with three-phase full-bridge rectifier input after connecting air switch, fast recovery protective tube again.
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN113776081A (en) * | 2021-09-08 | 2021-12-10 | 广州珠江电力有限公司 | Plasma ignition device and ignition method thereof |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN113776081A (en) * | 2021-09-08 | 2021-12-10 | 广州珠江电力有限公司 | Plasma ignition device and ignition method thereof |
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