CN111146967B - High-reliability edge surface breakdown discharge trigger type pulse arc striking power supply - Google Patents
High-reliability edge surface breakdown discharge trigger type pulse arc striking power supply Download PDFInfo
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- CN111146967B CN111146967B CN201911353705.0A CN201911353705A CN111146967B CN 111146967 B CN111146967 B CN 111146967B CN 201911353705 A CN201911353705 A CN 201911353705A CN 111146967 B CN111146967 B CN 111146967B
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- photothyristor
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03K—PULSE TECHNIQUE
- H03K3/00—Circuits for generating electric pulses; Monostable, bistable or multistable circuits
- H03K3/02—Generators characterised by the type of circuit or by the means used for producing pulses
- H03K3/53—Generators characterised by the type of circuit or by the means used for producing pulses by the use of an energy-accumulating element discharged through the load by a switching device controlled by an external signal and not incorporating positive feedback
- H03K3/57—Generators characterised by the type of circuit or by the means used for producing pulses by the use of an energy-accumulating element discharged through the load by a switching device controlled by an external signal and not incorporating positive feedback the switching device being a semiconductor device
Abstract
The invention discloses an edge surface breakdown discharge trigger type pulse arc striking power supply, which is designed to comprise a rectifying circuit, a capacitor charge-discharge circuit and a trigger control circuit; when the output voltage of the arc main power supply is higher than 75% of the no-load output voltage or the output current is lower than 30A, the trigger control circuit judges that the cathode arc source is in an arc extinction state and triggers a pulse signal, the rectification circuit synchronously converts alternating current 220V into direct current 360V and starts to charge a capacitor, when the charging voltage reaches 360V, the photothyristor VS1 is automatically turned off, the photothyristor VS1 is reliably turned off for 2ms, the trigger control circuit sends a conducting trigger pulse signal to the photothyristor VS2, and the voltage of the capacitor is applied to a ceramic trigger electrode of the cathode arc source through the photothyristor VS2 to provide pulse discharge voltage for surface breakdown of the ceramic surface.
Description
Technical Field
The invention belongs to the technical field of power pulse power supplies, and relates to a special power supply matched with an edge surface breakdown discharge trigger type pulse arc striking device.
Background
The vacuum cathode arc ion source is a core component of the multi-arc ion plating equipment, and as arc discharge of the vacuum cathode arc ion source needs to undergo an arc striking process, initial plasma initiation arc discharge can be provided by a surface breakdown discharge trigger type arc striking technology. The triggered pulse power supply is a key technology for causing arc discharge, and is usually used for controlling the on and off of a circuit by adopting an IGBT module circuit. However, in the actual multi-arc ion coating process, the coating is additionally deposited on the trigger electrode of the arc striking device, the insulation performance of the edge position of the arc striking device is reduced along with the increase of the deposition thickness of the coating, the current is rapidly increased, the high current change rate dI/dt can cause overcurrent impact on the IGBT device, the voltage and the current capacity of the commercial IGBT device are limited, the breakdown voltage is low, the overcurrent resistance is small, and the IGBT is possibly overheated or damaged, so that the trigger pulse arc striking power supply is short-circuited and damaged.
Disclosure of Invention
Aiming at the defects of the prior art, the invention aims to provide a trigger type pulse power supply circuit designed by adopting a photothyristor module, which aims to solve the problems of reliability and efficiency of a surface breakdown trigger type arc striking power supply. And the circuit structure is simple in design, safe, reliable, low in cost, space-saving and convenient to popularize and apply.
The invention solves the problems mainly by the following technical proposal: an edge breakdown discharge triggered pulse arc striking power supply comprising: the capacitor charging and discharging circuit comprises a rectifying circuit, a capacitor charging and discharging circuit and a trigger control circuit; the rectification circuit comprises a fuse FU1, a transformer TV and a rectification bridge U1, and is used for converting alternating current into direct current; the capacitor charging and discharging circuit comprises a resistor R1, a resistor R2, a resistor R3, a photothyristor VS1, a photothyristor VS2, a capacitor C1, a capacitor C2, a capacitor C3, a follow current diode U2 and an inductor L, wherein the cathode of the photothyristor VS1 is connected with the anodes of the capacitors C1, C2 and C3, three groups of capacitors are connected in parallel and then connected to the anode of the photothyristor VS2 through R2, the cathode of the photothyristor VS2 is respectively connected with the inductor L and the follow current diode U2, the inductor L is connected with the ceramic edge surface of a cathode arc source through the current limiting resistor R3, and the capacitor charging and discharging circuit provides pulse voltage required by the trigger discharge of the edge surface breakdown; the trigger control circuit comprises an integrated trigger control circuit board, and two paths of pulse signal output ends of the trigger control circuit board are respectively connected with signal trigger poles of the photothyristors VS1 and VS2 and are used for controlling the time sequence of charging and discharging of the capacitor.
Furthermore, the charging and discharging frequency of the capacitor is 0.5Hz, namely, the trigger pulse arc striking power supply circuit applies pulse voltage to the ceramic edge surface of the trigger electrode at the frequency of 0.5Hz until the arc striking of the edge surface breakdown discharging is successful.
Further, when the output voltage of the arc main power supply is higher than 75% of the no-load output voltage or the output current is lower than 30A, the trigger control circuit judges that the cathodic arc source is in an arc-extinguishing state and triggers a pulse signal.
Further, when the pulse signal is triggered, the rectification circuit synchronously converts alternating current 220V into direct current 360V, and the capacitors C1, C2 and C3 are charged; when the charging voltage reaches 360V, the photothyristor VS1 is automatically turned off; after the photothyristor VS1 is reliably turned off for 2ms, the trigger control circuit sends a conduction trigger pulse signal to the photothyristor VS2, and the voltages of the capacitors C1, C2 and C3 are applied to the ceramic trigger electrode of the cathode arc source through the photothyristor VS2 to provide pulse discharge voltage for the surface breakdown of the ceramic surface.
Further, the starting interface and the counting pulse signal interface of the trigger control panel are both connected with the PLC.
Further, the trigger control board is connected to the main arc loop and used for feeding back the voltage and the current of the main loop.
In summary, the trigger type pulse power supply circuit obtained by the photo-thyristor module with the special design replaces the on-off control circuit of the IGBT module circuit in the prior art, so as to solve the reliability and efficiency problems of the edge-surface breakdown trigger type arc striking power supply in the prior art. The invention has the following beneficial effects: the power supply has the advantages of simple structure, safety, durability, convenient realization and product miniaturization, low economic cost, and improvement of the reliability of trigger work and the arc striking stability, and can be widely matched with the surface breakdown discharge arc striking device.
Drawings
Fig. 1 is a schematic diagram of an arc striking power supply circuit triggered by an edge-on breakdown discharge in an embodiment of the invention.
Fig. 2 is a schematic block diagram of the operation of the arc ignition power supply triggered by the surface breakdown discharge in the embodiment of the invention.
Detailed Description
In order to make the technical scheme of the invention easier to understand and grasp, the invention is further described in detail below with reference to the drawings and the embodiments. The specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
Fig. 1 shows a schematic diagram of an arc striking power supply circuit triggered by an edge breakdown discharge according to an embodiment of the present invention, including: the capacitor charging and discharging circuit comprises a rectifying circuit, a capacitor charging and discharging circuit and a trigger control circuit; the rectification circuit comprises a fuse FU1, a transformer TV and a rectification bridge U1; the capacitor charge-discharge circuit comprises a resistor R1, a resistor R2, a resistor R3, a photothyristor VS1, a photothyristor VS2, a capacitor C1, a capacitor C2, a capacitor C3, a freewheel diode U2 and an inductor L, can provide pulse voltage required by the surface breakdown trigger discharge, and naturally ends the charge process and the discharge process through the self-turn-off characteristic control of the photothyristor, so that overvoltage impact caused by forced turn-off is avoided; the trigger control circuit comprises an integrated trigger control circuit board and controls the time sequence of charging and discharging of the capacitor.
When the output voltage of the arc main power supply is higher than 75% of the no-load output voltage or the output current is lower than 30A, the trigger control circuit judges that the cathode arc source is in an arc extinction state and triggers a pulse signal, meanwhile, the rectification circuit synchronously converts alternating current 220V into direct current 360V, the direct current is connected to the anode of the photo-thyristor VS1 through a current limiting resistor R1, the cathode of the photo-thyristor VS1 is connected with the anodes of capacitors C1, C2 and C3, three groups of capacitors are connected in parallel and then connected to the anode of the photo-thyristor VS2 through R2, the cathode of the photo-thyristor VS2 is respectively connected with an inductor L and a freewheeling diode U2, and the inductor L is connected with the ceramic edge surface of the cathode arc source trigger electrode through the current limiting resistor R3.
As can be seen from fig. 1, two paths of pulse signal output ends of the trigger circuit control board are respectively connected with signal trigger poles of the photothyristors VS1 and VS2, when the charging voltage reaches 360V, the photothyristors VS1 are turned off by themselves, after the photothyristors VS1 are reliably turned off for 2ms, the trigger control circuit sends a conducting trigger pulse signal to the photothyristors VS2, and voltages of the capacitors C1, C2 and C3 are applied to the ceramic trigger pole of the cathode arc source through the photothyristors VS2 to provide pulse discharge voltage for surface breakdown of the ceramic surface.
In addition, the start-stop and count pulse signals of the trigger control board are connected with the PLC, the trigger control board is connected with the main arc loop, and the voltage and the current of the main loop are fed back. The frequency of the capacitor charge and discharge is 0.5Hz, namely the trigger type pulse arc striking power supply circuit applies pulse voltage to the ceramic edge surface of the trigger electrode at the frequency of 0.5Hz until the arc striking of the edge surface breakdown discharge is successful.
With the application of the embodiment, as shown in fig. 2, when the output voltage of the arc main power supply is higher than 75% of the no-load output voltage or the output current is lower than 30A, the trigger control circuit determines that the cathode arc source is in an arc-extinguishing state and triggers the pulse signal, the rectification circuit synchronously converts the alternating current 220V into the direct current 360V and starts to charge the capacitors C1, C2 and C3, when the charging voltage reaches 360V, the photothyristor VS1 turns off automatically, and after the photothyristor VS1 turns off reliably for 2ms, the trigger control circuit sends a conducting trigger pulse signal to the photothyristor VS2, and the voltages of the capacitors C1, C2 and C3 are applied to the ceramic trigger electrode of the cathode arc source through the photothyristor VS2 to provide pulse discharging voltage for the surface breakdown of the ceramic surface.
The foregoing description of the embodiments of the invention is not intended to limit the scope of the invention, but rather to cover any modifications, equivalents, improvements, etc. that fall within the spirit and scope of the present invention.
Claims (4)
1. The utility model provides a following surface breakdown discharge trigger formula pulse arc striking power which characterized in that: the triggering pulse arc striking power supply comprises a rectifying circuit, a capacitor charging and discharging circuit and a triggering control circuit; the rectifier circuit comprises a fuse FU1, a transformer TV and a rectifier bridge U1, and is used for converting alternating current into direct current; the capacitor charging and discharging circuit comprises a resistor R1, a resistor R2, a resistor R3, a photothyristor VS1, a photothyristor VS2, a capacitor C1, a capacitor C2, a capacitor C3, a follow current diode U2 and an inductor L, wherein the cathode of the photothyristor VS1 is connected with the anodes of the capacitors C1, C2 and C3, three groups of capacitors are connected in parallel and then connected to the anode of the photothyristor VS2 through R2, the cathode of the photothyristor VS2 is respectively connected with the inductor L and the follow current diode U2, the inductor L is connected with the ceramic edge surface of a cathode arc source through the current limiting resistor R3, and the capacitor charging and discharging circuit provides pulse voltage required by the trigger discharge of the edge surface breakdown; the trigger control circuit comprises an integrated trigger control circuit board, and two paths of pulse signal output ends of the trigger control circuit board are respectively connected with signal trigger poles of the photothyristors VS1 and VS2 and are used for controlling the time sequence of charging and discharging of the capacitor;
the frequency of the capacitor charge and discharge is 0.5Hz, namely, the trigger type pulse arc striking power supply circuit applies pulse voltage to the ceramic edge surface of the trigger electrode at the frequency of 0.5Hz until the arc striking of the edge surface breakdown discharge is successful;
when the output voltage of the arc main power supply is higher than 75% of the no-load output voltage or the output current is lower than 30A, the trigger control circuit judges that the cathode arc source is in an arc extinction state and triggers a pulse signal.
2. An edge breakdown discharge triggering type pulse arc striking power supply according to claim 1, wherein: when the pulse signal is triggered, the rectification circuit synchronously converts alternating current 220V into direct current 360V and starts to charge capacitors C1, C2 and C3; when the charging voltage reaches 360V, the photothyristor VS1 is automatically turned off; after the photothyristor VS1 is reliably turned off for 2ms, the trigger control circuit sends a conduction trigger pulse signal to the photothyristor VS2, and the voltages of the capacitors C1, C2 and C3 are applied to the ceramic trigger electrode of the cathode arc source through the photothyristor VS2 to provide pulse discharge voltage for the surface breakdown of the ceramic surface.
3. An edge breakdown discharge triggering type pulse arc striking power supply according to claim 1, wherein: the starting interface and the counting pulse signal interface of the trigger control panel are both connected with the PLC.
4. An edge breakdown discharge triggering type pulse arc striking power supply according to claim 1, wherein: the trigger control board is connected to the main arc loop and used for feeding back the voltage and the current of the main loop.
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| CN112795874B (en) * | 2020-12-14 | 2022-07-26 | 兰州空间技术物理研究所 | Strike formula striking structure along surface breakdown |
| CN115189586A (en) * | 2022-09-07 | 2022-10-14 | 新铂科技(东莞)有限公司 | Power supply device capable of realizing multi-energy conversion output in pulse |
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