CN204422971U - 一种无积液喷淋显影装置 - Google Patents
一种无积液喷淋显影装置 Download PDFInfo
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- CN204422971U CN204422971U CN201520109074.9U CN201520109074U CN204422971U CN 204422971 U CN204422971 U CN 204422971U CN 201520109074 U CN201520109074 U CN 201520109074U CN 204422971 U CN204422971 U CN 204422971U
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CN201520109074.9U CN204422971U (zh) | 2015-02-13 | 2015-02-13 | 一种无积液喷淋显影装置 |
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CN201520109074.9U CN204422971U (zh) | 2015-02-13 | 2015-02-13 | 一种无积液喷淋显影装置 |
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CN204422971U true CN204422971U (zh) | 2015-06-24 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107065454A (zh) * | 2017-04-26 | 2017-08-18 | 京东方科技集团股份有限公司 | 消除光刻工艺过程中显影残留的方法和显示面板的制作方法 |
CN116618352A (zh) * | 2022-11-18 | 2023-08-22 | 南通创峰光电设备有限公司 | 一种基于垂直输送方式喷涂效果可控的显影设备 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107065454A (zh) * | 2017-04-26 | 2017-08-18 | 京东方科技集团股份有限公司 | 消除光刻工艺过程中显影残留的方法和显示面板的制作方法 |
CN116618352A (zh) * | 2022-11-18 | 2023-08-22 | 南通创峰光电设备有限公司 | 一种基于垂直输送方式喷涂效果可控的显影设备 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CB03 | Change of inventor or designer information | ||
CB03 | Change of inventor or designer information |
Inventor after: Liu Qinghua Inventor before: He Rongte |
|
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20180118 Address after: 435000 Hubei city of Huangshi Province Economic and Technological Development Zone Jinshan Street Jinhong Road No. 1 Patentee after: Huangshi Electronic Technology Co., Ltd. Address before: 517000 Guangdong Province, Heyuan city high tech Development Zone, No. eight Fumin Industrial Park A District B building Patentee before: Riverhead Xi Pu Electronics Co., Ltd. |
|
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150624 Termination date: 20190213 |