CN204397617U - Wafer bevelling fixed clamp device - Google Patents

Wafer bevelling fixed clamp device Download PDF

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Publication number
CN204397617U
CN204397617U CN201420866061.1U CN201420866061U CN204397617U CN 204397617 U CN204397617 U CN 204397617U CN 201420866061 U CN201420866061 U CN 201420866061U CN 204397617 U CN204397617 U CN 204397617U
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China
Prior art keywords
clamp device
wafer
fixed clamp
block
bevelling
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Active
Application number
CN201420866061.1U
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Chinese (zh)
Inventor
张卫兴
杨庆华
袁豪杰
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jiangsu Ke Run Electro-Optical Technology Inc (us) 62 Martin Road Concord Massachusetts 017
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Jiangsu Ke Run Electro-Optical Technology Inc (us) 62 Martin Road Concord Massachusetts 017
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Application filed by Jiangsu Ke Run Electro-Optical Technology Inc (us) 62 Martin Road Concord Massachusetts 017 filed Critical Jiangsu Ke Run Electro-Optical Technology Inc (us) 62 Martin Road Concord Massachusetts 017
Priority to CN201420866061.1U priority Critical patent/CN204397617U/en
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Publication of CN204397617U publication Critical patent/CN204397617U/en
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  • Mechanical Treatment Of Semiconductor (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)

Abstract

The utility model relates to a kind of wafer bevelling fixed clamp device, and described wafer bevelling fixed clamp device is the L shape device be made up of block and back-up block, and the angle of described block and back-up block is acute angle.Use the utility model wafer bevelling fixed clamp device, not high to operator's skill requirement, as long as the angle of wafer bevelling fixed clamp device is set to 45 °, just can pour out 45 ° of chamferings up to specification, this both saved cost of labor, substantially increased production efficiency, also ensured the quality of Total Product, reduce costs of production and operation, suitable popularity uses.

Description

Wafer bevelling fixed clamp device
Technical field
The utility model relates to a kind of wafer bevelling fixed clamp device, for fixed wafer during wafer bevelling.
Background technology
The peripheral edge portion of boule wafer (thin slice of the material such as glass, crystal, pottery, sapphire or silicon chip) is generally comparatively sharp keen right angle, for ease of packaging and the post-production of wafer, so wafer needs to carry out bevelling process.At present, the bevelling equipment of existing many brand and models both at home and abroad, but its price is but very high, for the processing enterprise that some are little, mostly select price material benefit edge-falled machine, existing edge-falled machine adopts driven by motor emery wheel, and on emery wheel, artificial bevelling is carried out in water filling, and this kind equipment compares to be favored by medium-sized and small enterprises.In the process of bevelling, common edge-falled machine needs skilled workman to carry out manual individual wafers to carry out bevelling, the method of this bevelling, require very high to operator, need it to rely on skilled experience, pour out 45 ° of chamferings up to specification, this both added cost of labor, also cannot ensure the quality of Total Product, add costs of production and operation.
Utility model content
The purpose of this utility model is the defect overcoming prior art existence, when providing one for wafer bevelling, and the fixed clamp device of fixed wafer.
The technical scheme realizing the utility model object is: a kind of wafer bevelling fixed clamp device, and described wafer bevelling fixed clamp device is the L shape device be made up of block and back-up block, and the angle of described block and back-up block is acute angle.
As optimization, the angle of described block and back-up block is 45 °.
As optimization, the angle face of described block and back-up block is respectively equipped with cushion pad and position adjusting pad.
As optimization, three turnings outside described wafer bevelling fixed clamp device L clevis angle are set to curved surface.
The utility model has positive effect: boule wafer is in the process of bevelling, still common edge-falled machine is selected, use the utility model wafer bevelling fixed clamp device simultaneously, during use, several wafers are arranged neatly, gradient along angle is put, the face of needs polishing is the one side away from block, wafer to be placed on together with wafer bevelling fixed clamp device on horizontal panel after tidy, polish on the water filling emery wheel needing the face of polishing to be placed on running, in the process of polishing, workman one hand steered wafer, one hand steered wafer bevelling fixed clamp device, because the angle face of baffle plate and back-up block is provided with cushion pad and position adjusting pad respectively, in bruting process, play good buffering, regulating action, broken when avoiding wafer polishing occurs, lose phenomenon.Use the utility model wafer bevelling fixed clamp device, not high to operator's skill requirement, as long as the angle of wafer bevelling fixed clamp device is set to 45 °, just can pour out 45 ° of chamferings up to specification, this both saved cost of labor, substantially increased production efficiency, also ensured the quality of Total Product, reduce costs of production and operation, suitable popularity uses.
Accompanying drawing explanation
In order to make content of the present utility model more easily be clearly understood, below according to specific embodiment also by reference to the accompanying drawings, the utility model is described in further detail, wherein
Fig. 1 is structural representation of the present utility model;
Fig. 2 is structural representation of the present utility model;
Fig. 3 is the utility model using state figure when carrying out wafer chamfering;
Fig. 4 is the structural representation of boule wafer before chamfering;
Fig. 5 is the structural representation of wafer after chamfering.
Wherein: 1, block, 2, cushion pad, 3, wafer, 4, position regulator, 5, back-up block, 6, emery wheel, A, angle.
Detailed description of the invention
As shown in Figure 1, 2, the utility model is a kind of wafer bevelling fixed clamp device, described wafer bevelling fixed clamp device is the L shape device be made up of block 1 and back-up block 5, the included angle A of described block 1 and back-up block 5 is acute angle, the included angle A of described block 1 and back-up block 5 is 45 °, the angle face of described block 1 and back-up block 5 is respectively equipped with cushion pad 2 and position adjusting pad 4, three turnings outside described wafer bevelling fixed clamp device L shape included angle A are set to curved surface, corner is set to curved surface, during in order to use, mellow and full turning can not scratch the hand of workman.
As Fig. 3, 4, shown in 5, boule wafer 3 is in the process of bevelling, still common edge-falled machine is selected, use the utility model wafer bevelling fixed clamp device simultaneously, during use, several wafers 3 are arranged neatly, gradient along included angle A is put, the face of needs polishing is the one side away from block 1, wafer 3 to be placed on together with wafer bevelling fixed clamp device on horizontal panel after tidy, polish on the water filling emery wheel 6 needing the face of polishing to be placed on running, in the process of polishing, workman one hand steered wafer 3, one hand steered wafer bevelling fixed clamp device, because the angle face of baffle plate 1 and back-up block 5 is provided with cushion pad 2 and position adjusting pad 4 respectively, in bruting process, play good buffering, regulating action, broken when avoiding wafer polishing occurs, lose phenomenon.Use the utility model wafer bevelling fixed clamp device, not high to operator's skill requirement, as long as the angle of wafer bevelling fixed clamp device is set to 45 °, just can pour out 45 ° of chamferings up to specification, this both saved cost of labor, substantially increased production efficiency, also ensured the quality of Total Product, reduce costs of production and operation, suitable popularity uses.
Above-described specific embodiment; the purpose of this utility model, technical scheme and beneficial effect are further described; be understood that; the foregoing is only specific embodiment of the utility model; be not limited to the utility model; all within spirit of the present utility model and principle, any amendment made, equivalent replacement, improvement etc., all should be included within protection domain of the present utility model.

Claims (4)

1. a wafer bevelling fixed clamp device, it is characterized in that: described wafer bevelling fixed clamp device is the L shape device be made up of block (1) and back-up block (5), and the angle (A) of described block (1) and back-up block (5) is acute angle.
2. wafer bevelling fixed clamp device according to claim 1, is characterized in that: the angle (A) of described block (1) and back-up block (5) is 45 °.
3. wafer bevelling fixed clamp device according to claim 1 and 2, is characterized in that: the angle face of described block (1) and back-up block (5) is respectively equipped with cushion pad (2) and position adjusting pad (4).
4. wafer bevelling fixed clamp device according to claim 3, is characterized in that: described wafer bevelling fixed clamp device L clevis angle (A) three turnings are outward set to curved surface.
CN201420866061.1U 2014-12-31 2014-12-31 Wafer bevelling fixed clamp device Active CN204397617U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201420866061.1U CN204397617U (en) 2014-12-31 2014-12-31 Wafer bevelling fixed clamp device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201420866061.1U CN204397617U (en) 2014-12-31 2014-12-31 Wafer bevelling fixed clamp device

Publications (1)

Publication Number Publication Date
CN204397617U true CN204397617U (en) 2015-06-17

Family

ID=53421514

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201420866061.1U Active CN204397617U (en) 2014-12-31 2014-12-31 Wafer bevelling fixed clamp device

Country Status (1)

Country Link
CN (1) CN204397617U (en)

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