CN204375712U

CN204375712U - Closed wafer box

Info

Publication number: CN204375712U
Application number: CN201420801753.8U
Authority: CN
Inventors: 江枝茂; 邱铭隆; 简克誌
Original assignee: Chung King Enterprise Co ltd
Current assignee: Chung King Enterprise Co ltd
Priority date: 2014-01-09
Filing date: 2014-12-17
Publication date: 2015-06-03
Anticipated expiration: 2024-12-17
Also published as: TWM489156U

Abstract

A closed wafer cassette comprising: a hollow box body, a cover body and at least one buckling mechanism; wherein, one end of the box body is provided with an opening for placing at least one wafer frame into the box body through the opening; the cover body is arranged at the opening of the box body, corresponds to the opening and covers the opening; each buckling mechanism is arranged on the cover body, a rotary table is pivoted at the center of the cover body, an upper movable arm and a lower movable arm are arranged on two symmetrical eccentric slideways at the upper part and the lower part of the inner surface of the rotary table, and the tail ends of the upper movable arm and the lower movable arm are respectively provided with a buckle; therefore, when the cover body covers the opening of the box body, the turntable can be rotated to enable the upper movable arm and the lower movable arm to move linearly up and down, and the buckles of the upper movable arm and the lower movable arm are clamped on the upper edge and the lower edge of the opening, so that the cover body is fixed on the opening of the box body in a sealing manner. The utility model discloses can protect the wafer frame that has the wafer and be difficult for the roll-off wafer box in the transport to cushion and fixed wafer frame, avoid the wafer fragment.

Description

Closed wafer cassette

Technical field

The utility model is about a kind of closed wafer cassette, and particularly a kind of have lid has wafer wafer frame with protection, not easily skids off the closed wafer cassette of wafer cassette in handling process.

Background technology

Be designed with enclosing cover according to the wafer cassette used in Contemporary semiconductor processing procedure, to cover wafer cassette, and protect the several wafers be carried in wafer cassette, make wafer cassette when carrying or moving process, need handle with care or move, in order to avoid cause wafer to sustain damage.

Because wafer is after completing, be to belong to breakables, wafer is moved on to next processing procedure, need wafer be put in wafer cassette, to avoid wafer to cause damage in handling process, make wafer carry out next processing procedure.

Therefore, how wafer cassette being strengthened box body structure, allow being carried on wafer in wafer cassette and stability in wafer cassette, not easily can causing damage in handling process, is the urgently problem to solve of industry.

As can be seen here, above-mentioned existing article still have many disappearances, a real non-kindhearted design, and are urgently improved.

Utility model content

In view of the shortcoming of aforementioned prior art, this case creator is manufacturing experience and the technology accumulation of being engaged in various wafer cassette according to it, concentrate one's attention on to study the method for various solution for above-mentioned disappearance, through constantly study, test with improve after, finally development and Design goes out a kind of closed wafer cassette of the present utility model, to the disappearance that prior art of forgoing produces.

Main purpose of the present utility model, is providing a kind of closed wafer cassette, and the wafer frame utilizing lid protection to have wafer not easily skids off wafer cassette in handling process.

According to above-mentioned object, closed wafer cassette of the present utility model, it mainly includes: a hollow box, a lid and at least one engaging support mechanism, wherein, this box body has the accommodation space of an accommodating wafer frame, an opening is offered in one end of this box body, it has the wafer frame of wafer to insert this accommodation space via this opening at least a slice, make this box body with carrying respectively this wafer frame, wherein wafer is connected to this wafer frame by glued membrane by this wafer frame, this lid is located at the opening part of this box body, and it is corresponding with this opening, and is covered on this opening, thus makes this box body be an airtight box body, respectively this engaging support mechanism is located on this lid, it to be pivoted a rotating disk in this lid centre, on this rotating disk inner face, under two symmetrical eccentric slideways on, to be provided with on one lever arm and once lever arm, wherein, a cylinder of lever arm front end inner face on this, eccentric slideway slippage above being positioned at, and another cylinder of this lower lever arm front end inner face, be positioned at the eccentric slideway slippage of below, and the pivot of these two symmetry eccentric slideway one end these rotating disks closer, the other end is then gradually away from the pivot of this rotating disk, when rotating this rotating disk, on this, lower lever arm, because of its cylinder, the slippage in eccentric slideway of another cylinder, and on producing, lower rectilinear movement, again, the end of this upper and lower lever arm is respectively equipped with a buckle, whereby, when on the opening that this lid is covered on this box body, rotatably this rotating disk makes this upper and lower lever arm because of upper and lower rectilinear movement, and its buckle is sticked on the upper and lower edge of this opening, and so as to making, this lid is airtight to be fixed on the opening of this box body.

So, lid can be utilized to protect wafer frame not easily to skid off wafer cassette in handling process.

Secondary objective of the present utility model, is providing a kind of closed wafer cassette, is being provided with the first elastic clamping pieces and the second elastic clamping pieces in its box, in order to buffering and fixing wafer frame, and then avoids the risk of wafer fragmentation.

According to above-mentioned object, closed wafer cassette of the present utility model, it further includes the first elasticity and seizes part on both sides by the arms and the second elasticity seizes part on both sides by the arms, wherein this first elasticity seizes the medial surface that part is located at this box body on both sides by the arms, and this second elasticity seizes the medial surface that part is located at this lid on both sides by the arms, in order to buffering and fixing respectively this wafer frame, respectively this wafer frame is avoided to collide the inner side of wafer cassette.In addition, this second elasticity is seized part on both sides by the arms and is included several spacer bar, wherein respectively the side of this spacer bar presents a V-type opening, with guide and be resisted against respectively this wafer frame relative to the subtend limit of this lid inner face, and there is a gap, for the subtend limit of each this wafer frame of each this spacer bar Elastic Contact between two these spacer bars adjacent.In addition, two adjacent edges of two these spacer bars adjacent, are arranged with several protuberances of each this recess institute projection of several recess and correspondence respectively along this gap, wherein respectively this protuberance in order to guiding location respectively this wafer frame.

The beneficial effects of the utility model are: closed wafer cassette of the present utility model, and the wafer frame utilizing lid protection to have wafer by said structure not easily skids off wafer cassette in handling process; In its box, be provided with the first elastic clamping pieces and the second elastic clamping pieces by said structure again, in order to buffering and fixing wafer frame, thus avoid the risk of wafer fragmentation.

For just your juror to the purpose of this utility model, shape, constructing apparatus feature and effect thereof, can do further understanding and understanding, hereby coordinate graphic for embodiment, be described in detail as follows.

Accompanying drawing explanation

Fig. 1 is the schematic perspective view of the utility model wafer cassette.

Fig. 2 is the part enlarged diagram of the utility model wafer cassette.

Fig. 3 is the three-dimensional exploded view of the utility model wafer cassette.

Fig. 4 is the use schematic diagram of the utility model wafer cassette.

The schematic diagram of the wafer frame that Fig. 5 uses for the utility model wafer cassette.

Fig. 6 seizes the schematic diagram of part on both sides by the arms for elasticity that the utility model wafer cassette uses.

[main element symbol description]

Hollow box 10

Accommodation space 11

Support chip 116

First elastic clamping pieces 117

Opening 12

Fixture block 121

Lid 20

Keeper 201

Second elastic clamping pieces 21

Spacer bar 210

Gap 211

Recess 212

Protuberance 213

Wafer 3

Engaging support mechanism 30

Rotating disk 31

Eccentric slideway 311

Upper lever arm 32

Lower lever arm 33

Buckle 321,331

Cylinder 322

Another cylinder 332

Handle rotary head 34

Guide rail 35

Elastomer 36

Concave inward structure 37

Wafer frame 4

Glued membrane 5.

Embodiment

The utility model is relevant a kind of " closed wafer cassette ", and refer to shown in Fig. 1, Fig. 2, Fig. 3, Fig. 5, it mainly includes: hollow box 10, lid 20 and an at least one engaging support mechanism 30.

Wherein, this box body 10 has an accommodation space 11, an opening 12 is offered in one end of this box body 10, it inserts this accommodation space 11 for a slice or several pieces wafer frames via this opening 12, make this box body 10 with carrying respectively this wafer frame 4, wafer 3 is connected to above-mentioned each wafer frame by a glued membrane 5 by every wafer framework 4.

This lid 20 is located at opening 12 place of this box body 10, and it is corresponding with this opening 12, and is covered on this opening 12, to make this box body 10 in an airtight box body.

Respectively this engaging support mechanism 30 is located on this lid 20, it to be pivoted a rotating disk 31 in this lid 20 centre, on this rotating disk 31 inner face, under two symmetrical eccentric slideways 311 on, to be provided with on one lever arm 32 and once lever arm 33, wherein, a cylinder 322 of lever arm 32 front end inner face on this, eccentric slideway 311 slippage above being positioned at, and another cylinder 332 of this lower lever arm 33 front end inner face, be positioned at eccentric slideway 311 slippage of below, and the pivot of this closer rotating disk 31 in two symmetrical eccentric slideway 311 one end, the other end is then gradually away from the pivot of rotating disk 31, when making to rotate this rotating disk 31, by this cylinder 322, the slippage in this two symmetrical eccentric slideway 311 of another cylinder 332, and gradually away from/near the pivot of rotating disk, thus make lever arm 32 on this, the end of lower lever arm 33, because of this cylinder 322, another cylinder 332 gradually away from/near the pivot of rotating disk, and on producing, lower rectilinear movement, again, the end of this upper and lower lever arm 32,33 is respectively equipped with a buckle 321,331.

By the composition of above-mentioned component, refer to shown in Fig. 4, when on the opening 12 that this lid 20 is covered on this box body 10, this rotating disk 31 rotatable makes this upper and lower lever arm 32,33 because of upper and lower rectilinear movement, and its buckle 321,331 is sticked on this upper and lower edge of opening 12, so as to making, this lid 20 is airtight to be fixed on the opening 12 of this box body 10.

Thus, lid 20 can be utilized to protect wafer frame not easily to skid off wafer cassette in handling process.

Refer to shown in Fig. 1, Fig. 2, Fig. 3, this rotating disk 31 is provided with a handle rotary head 34 gripped for hand, makes and rotates this handle rotary head 34 this rotating disk 31 rotatable with hand again.

Refer to Fig. 1 again, Fig. 2, shown in Fig. 3, this lid 20 is to being arranged with a guide rail 35 by the outer of rotating disk 31, and this rotating disk 31 is provided with at least one group of elastomer 36 matched with this guide rail 35, make respectively this elastomer 36 end slippage on this guide rail 35, on this guide rail 35, under be respectively equipped with a concave inward structure concaved 37 (as shown in Figure 4), when making this rotating disk 31 by rotation, can import among this concave inward structure 37 by each this elastomer 36, interfere because this elastomer 36 forms frictional property with the surface of this concave inward structure 37, and make this rotating disk 31 be located in this lid 20 to open/airtight position on, and then make on this, lower lever arm 32, 33 are located in and engage/open on this opening 12, on the position of lower limb.

Refer to again shown in Fig. 1, Fig. 2, Fig. 3, this upper and lower edge of opening 12 is provided with a fixture block 121 matched with the buckle 321,331 of this upper and lower lever arm 32,33, makes the buckle 321,331 of this upper and lower lever arm 32,33 can be sticked on this fixture block 121.

Refer to shown in Fig. 1, Fig. 2, Fig. 3, this lid 20, to the position of upper and lower lever arm 32,33 being provided with at least one pair of keeper 201, only can do upper and lower rectilinear movement so as to locating this upper and lower lever arm 32,33 again.

Refer to shown in Fig. 5, Fig. 6, the medial surface of this box body 10 is provided with several first elastic clamping pieces 117, can in order to buffering and fixing each wafer framework 4, and then avoid each wafer frame 4 to collide the medial surface of this box body 10.And be respectively equipped with several support chip 116 be parallel to each other at the symmetrical inner wall of this box body 10, after this closed wafer cassette is opening, wafer frame 4 just can insert in this box body 10 along these support chips 116.In addition, the medial surface of this lid 20 is provided with the second elastic clamping pieces 21, also can, with for buffering and fixing each wafer framework 4, avoid respectively this wafer frame to collide the medial surface of this lid.

Refer to shown in Fig. 5, Fig. 6, respectively this wafer frame 4 is mainly subject to the support of respectively this support lamellar body 116 and the accommodation space be distributed in this box body 10 again.In order to avoid sliding and raw collision in direction along each this support chip 116 in handling process of each this wafer frame 4, this the first elastic clamping pieces 117 and this second elastic clamping pieces 21 just provide the clamping action on other directions, the effect of buffering is provided by elasticity simultaneously, avoids respectively this wafer frame 4 in transport process, be subject to excessive slip stress and impaired.Because above-mentioned support chip 116, first elastic clamping pieces 117 and the second elastic clamping pieces 21 do not contact respectively this wafer 3, therefore guarantee that the appearance of wafer 3 avoids impaired.

Refer to shown in Fig. 5, Fig. 6, the second elasticity is seized part 21 on both sides by the arms and is included plural spacer bar 210 again.These spacer bars 210 formed in horizontal array mode, wherein the side of each spacer bar 210 presents a V-type opening, to guide and to be resisted against the subtend limit of each wafer frame 4 relative to this lid 20 inner face, and there is between two adjacent spacer bars 210 gap 211 of a preset length, the subtend limit of each each wafer frame 4 of spacer bar 210 Elastic Contact is provided, in addition two adjacent edges of two adjacent spacer bars 210, multiple protuberances 213 of multiple recess 212 and these recesses corresponding 212 projections are respectively arranged with along this gap 211, wherein this each protuberance 213 correctly can be placed in non-gap 211 in this V-type opening in order to guide each wafer frame of location accurately.

This closed wafer cassette material used be selected from by plastic cement, aluminium, metal alloy form at least one material in group.

Closed wafer cassette provided by the utility model, when mutually comparing with aforementioned prior art, has more following advantage:

1, make that this lid is airtight to be fixed on the opening of this box body, and utilize lid to protect wafer frame not easily to skid off wafer cassette in handling process.

2, make the inside of this wafer cassette be respectively equipped with the first elastic clamping pieces and the second elastic clamping pieces, in order to buffering and fixing wafer frame, and then avoid the risk of wafer fragmentation.

In sum, closed wafer cassette of the present utility model, has unprecedented innovative structure really, and it had not both seen any publication, and on the market also there are no any similar product, therefore its there is novelty should without doubt.In addition, the specific characteristic that the utility model has and function are far from prior art and can compare, so it has more its progressive than prior art really, and meet the regulation of China's Patent Law about the application important document of utility model patent, be mention patent application in accordance with the law.

The above, be only the best specific embodiment of the utility model, only structural feature of the present utility model is not limited thereto, and is anyly familiar with this those skilled in the art in the utility model field, can think easily and change or modification, all can be encompassed in following the scope of the claims of the present utility model.

Claims

1. a closed wafer cassette, is characterized in that comprising:

A hollow box, this box body has the accommodation space of an accommodating wafer frame, an opening is offered in one end of this box body, at least one wafer framework passes in and out this accommodation space via this opening, this box body carries this wafer frame, and wherein wafer is connected to this wafer frame by glued membrane by this wafer frame;

A lid, this lid is located at the opening part of this box body, and it is corresponding with this opening, makes this box body be an airtight box body when being covered on this opening; And

At least one engaging support mechanism, this engaging support mechanism is located on this lid, it to be pivoted a rotating disk in this lid centre, on this rotating disk inner face, under two eccentric slideways of symmetry on, be provided with a upper lever arm and a lower lever arm, wherein, a cylinder of lever arm front end inner face on this, eccentric slideway slippage above being positioned at, and another cylinder of this lower lever arm front end inner face, be positioned at the eccentric slideway slippage of below, and the pivot of one end this rotating disk closer of these two eccentric slideways of symmetry, the other end is then gradually away from the pivot of this rotating disk, when rotating this rotating disk, on this, lower lever arm, because of its cylinder, the slippage in eccentric slideway of another cylinder, and on producing, lower rectilinear movement, again, the end of this upper and lower lever arm is respectively equipped with a buckle, when on the opening that this lid is covered on this box body, rotates this rotating disk when making this upper and lower lever arm because of upper and lower rectilinear movement, its buckle is sticked on the upper and lower edge of this opening, and this lid is airtight to be fixed on the opening of this box body.

2. the closed wafer cassette as described in claim 1, is characterized in that: this lid is to being arranged with a guide rail by the outer of rotating disk, and this rotating disk is provided with at least one group of elastomer matched with this guide rail.

3. the closed wafer cassette as described in claim 2, is characterized in that: respectively this elastomeric end slippage on the guideway, and this guide rail is upper and lower is arranged with a concave inward structure concaved.

4. the closed wafer cassette as described in claim 3, is characterized in that: when this rotating disk is rotated, and imports among this concave inward structure by each this elastomer, and this rotating disk is located in because of interference on the position of this Cover opening/airtight.

5. the closed wafer cassette as described in claim 4, is characterized in that: this upper and lower lever arm is located in and engages/open on the position at the upper and lower edge of this opening.

6. the closed wafer cassette as described in claim 4, is characterized in that: this rotating disk is provided with one and grips the handle rotary head of rotating this rotating disk for hand.

7. the closed wafer cassette as described in claim 4, is characterized in that: the upper and lower edge of this opening is provided with a fixture block matched with the buckle of this upper and lower lever arm, and the buckle of this upper and lower lever arm can be sticked on this fixture block.

8. the closed wafer cassette as described in claim 4, is characterized in that: this lid is to the position of upper and lower lever arm being provided with at least one pair of keeper, and respectively this keeper limits this upper and lower lever arm and only does upper and lower rectilinear movement.

9. closed wafer cassette as claimed in claim 4, it is characterized in that: the medial surface of this box body is provided with severally avoids respectively this wafer frame to collide the first elastic clamping pieces of the medial surface of this box body in order to buffering and fixing respectively this wafer frame, the medial surface of this lid is provided with severally avoids respectively this wafer frame to collide the second elastic clamping pieces of the medial surface of this lid with for buffering and fixing respectively this wafer frame, and respectively this second elasticity is seized part on both sides by the arms and included several spacer bar.

10. closed wafer cassette as claimed in claim 9, it is characterized in that: respectively the side of this spacer bar presents a V-type opening, this V-type opening guide and be resisted against respectively this wafer frame relative to the subtend limit of this lid inner face, between two these spacer bars adjacent, there is a gap, be arranged with several recess along this gap respectively simultaneously or be convexly equipped with several protuberance along each this recess correspondence, respectively this protuberance guides location respectively this wafer frame respectively.