CN114639627A

CN114639627A - Wafer box

Info

Publication number: CN114639627A
Application number: CN202210533790.4A
Authority: CN
Inventors: 叶莹; 张冬峰; 王旭晨; 祝佳辉; 王文广
Original assignee: Wuhan Branch Of Shanghai Guona Semiconductor Technology Co ltd
Current assignee: Wuhan Branch Of Shanghai Guona Semiconductor Technology Co ltd
Priority date: 2022-05-17
Filing date: 2022-05-17
Publication date: 2022-06-17
Anticipated expiration: 2042-05-17
Also published as: WO2023221286A1; CN114639627B

Abstract

The invention discloses a wafer box, which comprises a box body, a door plate and a door plate opening and closing mechanism, wherein an opening is formed in one side of the box body, and the door plate can close or open the opening under the driving of the door plate opening and closing mechanism; the box body comprises an annular side plate positioned on the side face of the box body, the annular side plate is formed by surrounding a side plate body, a transition plate and an opening plate, a circle of the cross section of the outer side wall of the side plate body and a circle of the cross section of the outer side wall of the opening plate are eccentrically arranged, and the circle of the cross section of the outer side wall of the side plate body is positioned in the circle of the cross section of the outer side wall of the opening plate; the door plant includes the door plant body that can follow annular side panel removal, and the inside wall of door plant body matches with the lateral wall shape of opening the board. The wafer box reduces the space required by the movement and placement of the door body, and simplifies the action stroke of the wafer loader by utilizing the self-provided door body opening and closing mechanism.

Description

Wafer box

Technical Field

The invention relates to the technical field of semiconductor processing, in particular to a wafer box with a door body opening and closing driving mechanism.

Background

The wafer box is a sealed container for storing and transferring wafers and comprises a box body with an opening and a door body capable of sealing the opening. When a wafer is taken out of or placed in the wafer box, the door body of the wafer box needs to be opened through the wafer loading machine, so that a space for the door body to move and place needs to be reserved inside the wafer loading machine, and when the wafer loading machine detects the pose of the wafer in the wafer box, a detection sensor on the wafer loading machine needs to penetrate into the wafer box, and the wafer loading machine opens or closes the door body, so that the wafer loading machine needs more actions for driving, and the stroke is complex.

Disclosure of Invention

In order to overcome the defects, the invention aims to provide a wafer box, which reduces the space required by the movement and placement of a door body, and utilizes a self-contained door plate opening and closing mechanism to realize the automatic opening and closing of the wafer box, thereby simplifying the action stroke of a wafer loader.

In order to achieve the above purposes, the invention adopts the technical scheme that: a wafer box comprises a box body, a door plate and a door plate opening and closing mechanism, wherein an opening is formed in one side of the box body, and the door plate can close or open the opening under the driving of the door plate opening and closing mechanism;

the box body comprises an annular side plate positioned on the side face of the box body, the annular side plate is formed by surrounding a side plate body, a transition plate and an opening plate, a circle of the cross section of the outer side wall of the side plate body and a circle of the cross section of the outer side wall of the opening plate are eccentrically arranged, and the circle of the cross section of the outer side wall of the side plate body is positioned in the circle of the cross section of the outer side wall of the opening plate; the door plant includes the door plant body that can follow annular curb plate removal, and the inside wall of door plant body matches with the lateral wall shape of opening board.

The invention has the beneficial effects that:

1. the circle of the cross section of the outer side wall of the side plate body is eccentrically arranged with the circle of the cross section of the outer side wall of the opening plate, and the shape of the inner side wall of the door plate body is matched with that of the outer side wall of the opening plate, so that when the door plate body moves to the opening plate along the annular side plate, the inner side wall of the door plate body can be completely attached to the outer side wall of the opening plate, and the closing effect of an opening on the opening plate is further ensured; in the door opening process, namely when the door panel body moves to the transition plate along the annular side plate, the contact friction between the inner side wall of the door panel body and the transition plate can be effectively reduced through the eccentric arrangement, when the door panel body moves to the side plate body, a certain distance is kept between the door panel body and the side plate body, so that particles generated by the contact friction between the door panel body and the transition plate and between the door panel body and the side plate body are reduced, and the cleanliness is improved;

2. the opening and closing actions of the door plate on the opening are set to move along the outer side wall direction of the annular side plate, so that the space occupied by the door plate in moving can be effectively reduced, and the space required for placing the wafer box into the wafer loader is further saved;

3. the door plate and the door plate opening and closing mechanism are directly integrated on the wafer box, so that opening and closing of the opening are guaranteed, and the action stroke of the wafer loader can be simplified.

Further, when the opening is in a closed state, one transition plate abuts against the inner side wall of the door panel body, and the other transition plate is extruded on the inner side wall of the door panel body; and the circle of the cross section of the inner side wall of the door plate body and the circle of the cross section of the outer side wall of the opening plate are concentrically arranged, and the door plate body takes the axial lead of the outer side wall of the side plate body as a rotating axial lead.

In the prior art, a door panel body (and an opening plate) is usually designed to be concentric with a side plate body, and the design can cause the door panel body to be always in contact friction with a transition plate close to one side of an opening direction in the opening and closing process of the door panel body until the door panel body is completely opened; in the past, not only produce the granule easily, moreover because of the wearing and tearing that the continuous friction of the in-process of opening and shutting can cause cab apron and door plant body inside wall, lead to the door plant body can't close the opening completely. Therefore, the door panel body (and the opening plate) is arranged to be eccentric with the side plate body, so that friction between the door panel body and the transition plate can be effectively reduced, and the sealing performance is improved while the generation of particles is reduced.

When the opening is in a closed state, because the inner side wall of the door panel body and the outer side wall of the opening plate are concentrically arranged and are eccentrically arranged with the side panel body, the door panel body rotates in the center of a circle where the side panel body is located, namely the door panel body eccentrically rotates, at the moment, the motion track of the inner side wall of the door panel body deviates from the circle where the outer side wall of the opening plate is located, and through adjustment of the eccentric distance, when the opening is in the closed state, the inner side wall of the door panel body can be just abutted to the transition plate on one side close to the opening direction and can be slightly extruded on the transition plate on one side far away from the opening direction; when the opening is opened, the inner side wall of the door panel body starts to rotate along the corresponding motion track, the inner side wall of the door panel body and the transition plate on one side far away from the opening direction are separated (instantly, the inner side wall of the door panel body and the transition plate on one side close to the opening direction are in contact friction firstly and then are separated gradually (because the inner side wall of the door panel body and the outer side wall of the opening plate are in eccentric consistency, when the door panel body rotates around the center of the side panel body, the motion track of the inner side wall of the door panel body is crossed with the transition plate on one side close to the opening direction, therefore, when the door is opened, the inner side wall of the door panel body and the transition plate on one side close to the opening direction are in contact friction firstly and then are separated gradually), the door plate body slightly extrudes the transition plate on one side far away from the opening direction and is just abutted against the transition plate on one side close to the opening direction, so that the sealing effect is improved. Set up like this and can effectively reduce the in-process that the opening was opened, the contact friction between door plant body and the cab apron, and then reduce the phenomenon because of the granule that continuous contact friction leads to increases, can improve the cleanliness factor to a certain extent.

Further, when the opening is in a closed state, one transition plate abuts against the inner side wall of the door panel body, and the other transition plate is extruded on the inner side wall of the door panel body; the circle of the cross section of the inner side wall of the door panel body and the circle of the cross section of the outer side wall of the opening plate are eccentrically arranged; the door plate body takes the axial lead of the inner side wall of the door plate body as a rotating axial lead.

Because the inner side wall of the door panel body and the outer side wall of the opening plate are eccentrically arranged, when the opening is in a closed state, the inner side wall of the door panel body can be just abutted to the transition plate close to one side of the opening direction and can be slightly extruded on the transition plate far away from one side of the opening direction; when the opening is opened, the door plate body rotates by taking the circle center of the inner side wall of the door plate body as a rotation center, the inner side wall of the door plate body and the outer side wall of the opening plate are eccentrically arranged, namely the motion track of the inner side wall of the door plate body deviates from the circle of the outer side wall of the opening plate, when the door plate body starts to rotate, the inner side wall of the door plate body can be instantly separated from the transition plates on two sides, and then the inner side wall of the door plate body can not contact the transition plates and the side plate body in the opening process, namely a certain distance can be kept between the door plate body and the transition plates and between the door plate body and the side plate body in the whole opening process, so that friction is avoided, and the generation of particles is reduced; similarly, when the opening is closed, the inner side wall of the door panel body can gradually approach the transition plate on one side far away from the opening direction, and the motion track of the inner side wall of the door panel body can gradually approach the circle where the opening plate is located; when the inner side wall of the door panel body contacts the transition plate far away from one side of the opening direction, the door panel body can extrude the transition plate far away from one side of the opening direction, and at the moment, the transition plate close to one side of the opening direction can be just attached to the inner side wall of the door panel body to form sealing.

Furthermore, the door plate further comprises a driving connecting plate located at the bottom of the box body, the driving connecting plate comprises a driving connecting plate which is of an arc-shaped structure, the outer arc surface of the driving connecting plate is connected with the door plate body, the inner arc surface of the driving connecting plate is provided with a driving connecting lug, and the driving connecting lug is rotatably arranged at the bottom of the box body and connected with the door plate opening and closing mechanism. The door plate is connected with the door plate opening and closing mechanism through the driving connecting plate, and the door plate opening and closing mechanism can be further utilized to drive the door plate to move.

Further, the rotating axis of the driving engaging lug coincides with the rotating axis of the door panel body, so as to ensure the concentric rotation of the driving engaging lug and the door panel body.

Further, door plant starting and stopping mechanism is including driving gear, driven gear that can mesh transmission, and the driving gear is installed in the box body bottom, and driven gear installs on the drive engaging lug. The door plate moves along the box body through the matching of the driving gear and the driven gear.

Furthermore, the door plate opening and closing mechanism also comprises a micro-moving assembly, the micro-moving assembly comprises a convex block and a shifting piece which are matched, and the convex block is integrally arranged on the outer wall of the driving connecting lug; the shifting piece is coaxially arranged on the driving gear and can push the convex block to move.

Due to the meshing transmission of the driving gear and the driven gear, at least one tooth width error exists, and the door plate is difficult to drive to move to the opening position of the completely sealed box body. Therefore, when the door plate is about to close the opening, the micro-moving assembly is additionally arranged, the meshing transmission of the driving gear and the driven gear is cancelled, and the shifting piece and the protruding block are matched to drive the door plate to completely close the opening.

Further, the plectrum comprises a plectrum connecting part fixedly connected to the driving gear, and a fan-shaped body in a fan-shaped structure is integrally arranged on one side of the plectrum connecting part; the convex block is provided with a butt arc surface for the fan-shaped body to butt against, and the butt arc surface can be tangent to the outer arc surface of the fan-shaped body. And when the outer arc surface of the fan-shaped body is tangent to the abutting arc surface, the door plate is adjusted to the position of completely sealing the opening.

Further, the outer wall of the driving gear consists of a toothed part and a toothless part, and when the plectrum is fixedly connected to the driving gear, the fan-shaped body faces to one side of the toothless part. During actual design, the fan-shaped body can be arranged between two end points of a boundary between the toothed part and the toothless part, so that the micro-moving assembly starts to be started after the toothed part of the driving gear is completely disengaged from the driven gear.

In an initial state, the door panel completely closes the opening, the outer arc surface of the fan-shaped body is tangent to the abutting arc surface of the convex block, and the toothless part of the driving gear faces the driven gear; the driving gear rotates anticlockwise and drives the shifting piece to rotate synchronously, the outer arc surface of the fan-shaped body moves in the direction away from the abutting arc surface, and at the moment, the door plate keeps a static state; along with the continuous rotation of the driving gear, the toothed part of the driving gear starts to be meshed with the driven gear, so that the driven gear is driven to rotate, the door plate rotates along with the driven gear, and the opening is opened (at the moment, the convex block rotates to the non-working area of the shifting piece along with the door plate); when the door plate is closed from an open state, the driving gear rotates clockwise and drives the shifting piece to rotate synchronously, the toothed part of the driving gear is reversely meshed with the driven gear and drives the door plate (comprising the convex block) to move towards the direction of the closed opening until the toothless part of the driving gear rotates to one side facing the driven gear, so that the driving gear is disengaged from the driven gear, at the moment, the driven gear and the door plate stop rotating, and the convex block rotates along with the door plate to the working area of the shifting piece; along with the continuation of driving gear rotates, the plectrum (the lateral wall of fan-shaped body) can contact on the butt arc surface of protruding piece and support and push away protruding piece and rotate, and then drive the door plant and continue to remove to closed open-ended direction, until the extrados of fan-shaped body is tangent with the butt arc surface of protruding piece, and at this moment, the door plant has closed the opening completely, and fan-shaped body also can't promote protruding piece rotation again. And when exerting the power of opening the door to the door plant, because the extrados of fan-shaped body is tangent with the butt arc surface of protruding piece, the butt arc surface of protruding piece only can form the power along radial direction to the extrados of fan-shaped body, consequently, also can't drive the driving gear and rotate, and the protruding piece is because being withstood by the plectrum and can't rotate, and then guarantee door plant sealing state's stability.

Further, the radial dimension of the driving gear is smaller than the radial dimension of the driven gear. And then avoid at door plant operating mechanism driven in-process, the no tooth portion of driving gear leads to because of many times of the rotatory one side of moving gear that leads to of many circles, causes the problem of the frequent tooth that takes off of moving gear.

Furthermore, the starting end of the toothed part is provided with movable teeth which can stretch out and draw back along the radial direction of the driving gear. When the toothed part of the driving gear is just meshed with the driven gear, the starting end of the toothed part is set as the movable gear, so that the phenomenon that the driving gear and the driven gear are mutually extruded to cause blocking due to the fact that the tooth top of the driving gear is opposite to the tooth top of the driven gear can be avoided.

Further, on the driving gear, a spring groove, a limiting through hole and a movable tooth groove are sequentially arranged along the radial direction of the starting end of the toothed part, and movable teeth connected with the spring are movably arranged in the limiting through hole in a penetrating mode. The moving direction of the movable teeth can be limited by the limiting through holes.

When the starting end of the tooth part of the driving gear is meshed with the driven gear, the tooth tip of the movable tooth is stressed to retract, the movable tooth rod moves towards the spring groove along the limiting through hole, the spring is driven to compress until the tooth tip of the movable tooth leaves the driven gear, and at the moment, the movable tooth is driven to return due to the resilience force of the spring.

Further, the movable teeth include a movable rack bar, one end of which extends into the spring groove and the other end of which extends to the toothed portion and forms a tooth tip capable of meshing with the driven gear.

Furthermore, the spring is arranged in a spring groove along the radial direction of the driving gear, one end of the spring is abutted against the spring groove, and the other end of the spring is abutted against the movable rack bar; when the spring is in a natural state, a gap is reserved between the movable toothed bar and the bottom of the spring groove to provide space for retraction of the movable toothed bar.

Furthermore, an annular groove is formed in the side wall of the movable toothed bar, the spring is sleeved on the movable toothed bar, one end of the spring abuts against the annular groove, and the other end of the spring abuts against the spring groove. Set up through annular groove had both realized the spacing connection of spring with the activity ratch, cup jointed the spring on the activity ratch moreover, can utilize the activity ratch to carry on spacingly to the removal of spring, effectively improve the stability of spring moving direction.

Furthermore, the door plate further comprises an upper driven plate fixedly connected to the upper end of the door plate body, the upper driven plate is rotatably connected with the top of the box body, and the rotating axis of the driven plate coincides with the rotating axis of the door plate body. The upper end and the lower end of the door plate body can be guaranteed to be stressed in a rotating process through the matching of the upper driven plate and the driving connecting plate, the upper end and the lower end of the door plate body are limited, and the moving stability of the door plate body can be improved.

Furthermore, the top of the box body is also provided with a positioning plate fixedly connected with the upper driven plate, and the side wall of the positioning plate is symmetrically provided with positioning bosses which are convenient for identifying the closed position of the door plate.

The positioning plate is movably sleeved at the top of the bearing mounting shaft on the top plate, and the side surface of the positioning plate is fixedly connected with the upper driven plate through a plurality of screws. When actually designing, can set up the locating plate into circular structure, and set up the radial dimension of locating plate into the radial dimension that is greater than door plant body lateral wall to the realization is to the full coverage of door plant body. When the opening is in a completely closed state, the positioning bosses on the positioning plate can be respectively aligned with the junctions of the side plate bodies and the transition plates; when the door panel rotates, the positioning plate can synchronously rotate along the bearing mounting shaft. The arrangement of the positioning plate and the positioning boss can intuitively observe whether the door plate completely seals the opening or not.

Further, the sealing strips capable of being abutted to the inner side wall of the door panel body are uniformly distributed around the opening. The sealing performance when the opening is closed is further improved through the setting of sealing strip, can reduce the wearing and tearing to this internal lateral wall of door plant through elastic extrusion moreover, improves the life of door plant body to a certain extent.

Further, the circle at the outer side wall cross section of the door plate body and the circle at the outer side wall cross section of the side plate body are concentrically arranged, so that the door plate body is in the rotating process, the distance between the outer side wall of the door plate body and the outer side wall of the side plate body is the same, the occupied space of the outer side wall of the door plate body in the opening and closing process is effectively reduced, and the whole occupied space of the wafer box is more compact.

Further, the circle that the lateral wall cross section of door plant body was located and the circle that the inside wall cross section of door plant body was located set up with one heart for the thickness of door plant body is even, effectively reduces the processing degree of difficulty of door plant body.

Drawings

Fig. 1 is a schematic structural diagram of a wafer cassette according to a first embodiment of the present invention;

fig. 2 is an exploded view of a wafer cassette according to a first embodiment of the present invention;

fig. 3 is a schematic structural view of the wafer cassette according to the first embodiment of the present invention after the positioning plate is removed;

FIG. 4 is a schematic structural diagram of a cassette according to a first embodiment of the present invention;

FIG. 5 is a bottom view of the annular side plate in accordance with a first embodiment of the present invention;

FIG. 6 is a schematic structural diagram of a door panel according to a first embodiment of the present invention;

FIG. 7 is a bottom view of a door panel according to a first embodiment of the present invention;

FIG. 8 is a sectional view of the door panel and the annular side panel when the opening is closed according to the first embodiment of the present invention;

FIG. 9 is a sectional view of the door panel and the annular side panel during the opening process according to the first embodiment of the present invention;

FIG. 10 is a schematic view of a driving gear and a driven gear engaged with each other when the opening is closed according to a first embodiment of the present invention;

FIG. 11 is an enlarged view of a portion A of FIG. 10;

FIG. 12 is a schematic structural diagram illustrating the engagement of the driving gear and the driven gear according to the first embodiment of the present invention;

FIG. 13 is a partial enlarged view of portion B of FIG. 12;

FIG. 14 is a schematic view of a driving gear and a driven gear engaged with each other when the opening is opened according to a first embodiment of the present invention;

FIG. 15 is a schematic view of a driving gear according to a first embodiment of the present invention;

FIG. 16 is a schematic structural diagram of a movable tooth according to a first embodiment of the present invention;

FIG. 17 is a bottom view of a door panel in accordance with a third embodiment of the present invention;

FIG. 18 is a sectional view of the door panel and the annular side panel with the opening closed according to the second embodiment of the present invention;

fig. 19 is a sectional view of the door panel and the annular side plate during the opening process in the second embodiment of the invention.

In the figure:

1-box body; 11-opening; 12-a wafer storage rack; 13-a top plate; 14-annular side plates; 141-side plate body; 142-a transition plate; 143-opening plate; 15-a base plate;

2-door panel; 21-door panel body; 22-a drive connection plate; 221-a drive connection pad; 222-a drive lug; 223-bearing mounting holes; 23-a bearing; 24-an upper driven plate; 241-an upper connecting sheet; 242-upper engaging lugs;

3-door plate opening and closing mechanism; 31-a drive gear; 311-a key-socket; 312-toothed portion; 313-no teeth; 32-a driven gear; 33-raised blocks; 331-abutting circular arc surface; 34-a shifting piece; 341-paddle connecting part; 342-a sector-shaped body; 35-moving teeth; 351-a movable toothed bar; 3511-annular groove; 352-tooth tip;

4-a wafer;

51-a spring groove; 52-a movable gullet; 53-a spring;

6, positioning a plate; 61-positioning the boss.

Detailed Description

The following detailed description of the preferred embodiments of the present invention, taken in conjunction with the accompanying drawings, will make the advantages and features of the invention easier to understand by those skilled in the art, and thus will clearly and clearly define the scope of the invention.

Example one

Referring to the attached drawings 1-3, the wafer box of the invention comprises a box body 1, a door plate 2 and a door plate opening and closing mechanism 3, wherein one side of the box body 1 is provided with an opening 11, a containing cavity is arranged in the box body 1, and a wafer storage rack 12 for storing wafers 4 is arranged in the containing cavity; the door plate 2 is movably arranged on the outer side of the box body 1 and can close or open the opening 11 under the driving of the door plate opening and closing mechanism 3.

Specifically, referring to fig. 4-5, the box body 1 is a hollow cylindrical structure, and includes an integrally formed top plate 13, an annular side plate 14 and a bottom plate 15, wherein the annular side plate 14 is surrounded by a side plate body 141, a transition plate 142 and an opening plate 143. Two transition plates 142 are provided to connect both ends of the side plate body 141 and both ends of the opening plate 143, respectively. The opening plate 143 is provided with an opening 11 for the wafer 4 to enter and exit, and two ends of the opening 11 respectively extend to the edges of the two transition plates 142. The side plate body 141 and the opening plate 143 are both arc-shaped structures.

The both ends of the inside wall of the opening plate 143 extend to the transition plate 142 direction respectively to enhance the strength of the opening plate 143, the circle of the outside wall cross section of the opening plate 143 and the circle of the outside wall cross section of the side plate body 141 are eccentrically arranged, and the circle of the outside wall cross section of the side plate body 141 is located inside the circle of the outside wall cross section of the opening plate 143. As shown in fig. 5, R is a radius of a circle in which the cross section of the outer sidewall of the side plate body 141 is located, R is a radius of a circle in which the cross section of the outer sidewall of the opening plate 143 is located, and e is a distance between a center of the circle in which the cross section of the outer sidewall of the opening plate 143 is located and a center of the circle in which the cross section of the outer sidewall of the side plate body 141 is located, which is hereinafter referred to as an eccentric distance (i.e., a distance between two centers of the circles).

Referring to fig. 6-7, the door panel 2 includes an integrally formed door panel body 21, a driving connecting plate 22, the driving connecting plate 22 is located below the box 1 and connected to the door panel opening and closing mechanism 3, the door panel body 21 is located outside the annular side plate 14 and can move along the outer side wall of the annular side plate 14 under the driving of the door panel opening and closing mechanism 3 to open or close the opening 11 on the opening plate 143. Specifically, door plant body 21 is convex structure, and the inside wall of door plant body 21 and the outside wall shape phase-match of opening plate 143 and the concentric setting, the circle at the outside wall cross section place of door plant body 21 and the concentric setting of the circle at the outside wall cross section place of curb plate body 141 to make the inside wall of door plant body 21, the lateral wall be eccentric settings, and eccentric distance is the same with the eccentric distance between the outside wall of opening plate 143, the lateral wall of curb plate body 141. In fig. 7, M is a radius of a circle in which the cross section of the outer side wall of the door panel body 21 is located.

In the embodiment, the door panel body 21 is rotated around the axis of the side panel body 141, and when the opening 11 is closed, the door panel body 21 can abut against the transition plate 142 on one side and press the transition plate 142 on the other side.

Referring to fig. 8-9, the counterclockwise direction in the drawings is the door opening direction of the door panel body 21, in fig. 8, the opening 11 is in a closed state, because both the inner side wall of the door panel body 21 and the outer side wall of the opening plate 143 are eccentrically arranged with the side panel body 141 (in fig. 8, the circle centers of the inner side wall of the door panel body 21 and the outer side wall of the opening plate 143 are the same, and the circle centers are located on the left side of the circle center of the outer side wall of the side panel body 141), and the door panel body 21 rotates around the circle center of the side panel body 141, that is, the motion trajectory of the inner side wall of the door panel body 21 deviates from the circle of the outer side wall of the opening plate 143, and by adjusting the eccentric distance, when the opening 11 is in the closed state, the inner side wall of the door panel body 21 can just abut against the transition plate 142 on the right side, and can slightly press the transition plate 142 on the left side; when the opening 11 is opened, as shown in fig. 9, the door panel body 21 rotates counterclockwise, the inner side wall of the door panel body 21 starts to rotate along its corresponding movement track, the inner side wall of the door panel body 21 is instantaneously separated from the transition plate 142 on the left side, and the inner side wall of the door panel body 21 is gradually separated from the transition plate on the right side. Because the motion track of the inner side wall of the door panel body 21 is crossed with the vicinity of the transition plate 142 on the right side of the circle where the outer side wall of the opening plate 143 is located, when the door panel body starts to rotate, the inner side wall of the door panel body 21 is extruded on the transition plate 142 on the right side, when the motion track of the inner side wall of the door panel body 21 moves to the circle where the outer side wall of the opening plate 143 is gradually deviated from, the door panel body 21 is separated from the transition plate 142 on the right side, and then the inner side wall of the door panel body 21 does not contact and rub with the transition plate 142 and the side panel body 141 any more, namely a certain distance can be kept between the door panel body 21 and the transition plate 142 and the side panel body 141, so that the increase of particles caused by continuous friction in the door opening process is greatly reduced, and the cleanliness is improved; also when the opening 11 is closed, the door panel body 21 will contact and rub the transition plate 142 on the right side only when the door panel body is closed quickly, and at the moment when the door panel body is completely closed, the door panel body 21 will slightly press the transition plate 142 on the left side and just abut against the transition plate 142 on the right side, so as to improve the sealing effect.

It should be noted that, if the door panel body 21 (and the opening plate 143) is concentrically disposed with the side plate body 141, the door panel body 21 is always in contact with and rubbed against the transition plate 142 on the right side in the opening and closing process of the door panel body 21, which is likely to generate particles and may cause the door panel body 21 to be unable to seal the opening 11 due to the wear of the transition plate 142 caused by long-term friction. Therefore, in the present embodiment, the door panel body 21 (and the opening plate 143) is disposed eccentrically from the side panel body 141, which can effectively reduce friction between the door panel body 21 and the transition plate 142, thereby reducing particle generation and improving sealing performance. In addition, in this embodiment, in order to achieve the engagement between the eccentrically disposed side plate body 141 and the opening plate 143, the widths of the two transition plates 142 are different, and the transition plate 142 close to the opening direction side of the door panel body 21 is narrower.

In this embodiment, set up door plant body 21 lateral wall to be concentric then can make door plant body 21 rotate the in-process with curb plate body 141 lateral wall, door plant body 21 lateral wall is the same with curb plate body 141 lateral wall interval, effectively reduces door plant body 21 switching in-process, the shared space of door plant body 21's lateral wall for whole occupation space of wafer box is compacter.

For example, in order to improve the sealing performance when the opening 11 is closed, a sealing strip is further arranged around the opening 11.

In one example, referring to fig. 6, the driving connecting plate 22 includes a driving connecting piece 221 having a circular arc structure, and the outer arc surface and the inner arc surface of the driving connecting piece 221 are concentrically arranged. Specifically, the outer arc surface of the driving connecting piece 221 and the lower end of the door panel body 21 are integrally formed, and the circle of the outer arc surface and the circle of the cross section of the outer side wall of the door panel body 21 are located on the same axis. The drive connecting lug 222 for connecting the door plate opening and closing mechanism 3 is integrally arranged on the inner arc surface of the drive connecting sheet 221, the drive connecting lug 222 is of a cylindrical structure, and the center of the drive connecting lug 222 is provided with a bearing mounting hole 223 coaxially arranged with the axial lead of the outer side wall of the door plate body 21. A bearing 23 for reducing the rotation friction of the driving engaging lug 222 is installed in the bearing installation hole 223, and a bearing installation shaft corresponding to the bearing 23 is fixedly connected to the bottom plate 15 at the bottom of the box body 1. The arrangement is such that the driving engaging lug 222 can drive the door panel body 21 to rotate around the axis of the outer sidewall of the side panel body 141, so as to reduce the friction between the door panel body 21 and the transition plate 142 when the door panel body 21 rotates.

In one example, referring to fig. 10, the door opening and closing mechanism 3 includes a driving gear 31 and a driven gear 32 capable of meshing transmission. The drive gear 31 is rotatably mounted on the bottom plate 15 of the bottom of the cassette 1 and is provided with a key socket 311 for driving a driving source (the driving source is usually a driving device of a wafer loader). The driven gear 32 is fitted around a corresponding bearing mounting shaft of the bearing 23 and is coaxially fixed to the driving lug 222 of the driving connection piece 221 by a screw. The driving connecting plate 22 is driven to rotate by the cooperation of the driving gear 31 and the driven gear 32, so that the door panel body 21 moves along the annular side plate 14.

Due to the meshing transmission of the driving gear 31 and the driven gear 32, there is an error of at least one tooth width, resulting in difficulty in driving the door panel body 21 to move to a position where the opening 11 is completely closed. Therefore, in an example, the door opening and closing mechanism 3 is additionally provided with a micro-moving component, so that when the door body 21 is about to close the opening 11, the meshing transmission between the driving gear 31 and the driven gear 32 is cancelled, and the micro-moving component is used for driving the door body 21 to completely close the opening 11.

Specifically, the micro-moving assembly comprises a convex block 33 and a shifting piece 34 which are matched with each other, wherein the convex block 33 is integrally arranged on the outer wall of the driving connecting lug 222, and an abutting arc surface 331 for abutting against the shifting piece 34 is arranged on one side of the convex block 33. The shifting piece 34 is coaxially arranged on the driving gear 31 and can synchronously rotate along with the driving gear 31. And when the driving gear 31 is mounted to the base plate 15, the pick 34 is located at the same height as the boss 33. The pick 34 includes a pick connecting portion 341 fixedly connected to the driving gear 31, a fan-shaped body 342 having a fan-shaped structure and coaxially disposed with the driving gear 31 is integrally disposed on one side of the pick connecting portion 341, and an outer arc surface of the fan-shaped body 342 can be tangent to the abutting arc surface 331. And when the outer arc surface of the sector-shaped body 342 is tangent to the abutting arc surface 331, the door panel 2 is adjusted to a position of completely closing the opening 11.

In one example, the outer arc surface of the sector body 342 corresponds to the same radius as the abutting circular arc surface 331.

In order to match the action of the dial 34, referring to fig. 15, the driving gear 31 is configured as a non-full-tooth gear, that is, the outer wall of the driving gear 31 is composed of a toothed portion 312 and a non-toothed portion 313, and the toothed portion 312 can be meshed with the driven gear 32, and the non-toothed portion 313 cannot be meshed with the driven gear 32. When the pulling piece 34 is mounted, the sector-shaped body 342 faces one side of the non-toothed portion 313, and the sector-shaped body 342 is located between two end points of the boundary between the non-toothed portion 313 and the toothed portion 312.

Referring to fig. 10-11, in the initial state, the door panel body 21 completely closes the opening 11, the outer arc surface of the fan-shaped body 342 is tangent to the abutting arc surface 331 of the protrusion 33, and the toothless portion 313 of the driving gear 31 is aligned with the driven gear 32 (at this time, the driving gear 31 and the driven gear 32 are in a non-meshed state); the driving device of the wafer loader drives the driving gear 31 to rotate anticlockwise and drives the shifting piece 34 to rotate synchronously, the outer arc surface of the fan-shaped body 342 moves towards the direction far away from the abutting arc surface 331, at the moment, the driven gear 32 is not moved, and the door panel 2 and the convex block are kept in a static state; as shown in fig. 12-13, as the driving gear 31 continues to rotate, the toothed portion 312 of the driving gear 31 starts to align with the driven gear 32 and enter into a meshed state with the driven gear 32, so as to drive the driven gear 32 to rotate synchronously, the door panel 2 rotates therewith and starts to open the opening 11, and at this time, the protruding block 33 rotates with the door panel 2 to a non-working area of the pick 34 (see fig. 14); when the door panel 2 is closed from an open state, the driving device of the wafer loader drives the driving gear 31 to rotate clockwise, the plectrum 34 rotates along with the driving gear, at this time, the toothed part 312 of the driving gear 31 and the driven gear 32 are in an engaged state, the driven gear 32 can rotate along with the driving gear, the convex block 33 rotates along with the driving gear and drives the door panel 2 to move towards the direction of closing the opening 11 until the toothless part 313 of the driving gear 31 rotates to one side close to the driven gear 32, so that the driving gear 31 is disengaged from the driven gear 32, at this time, the driven gear 32 and the door panel 2 stop rotating, and the convex block 33 rotates along with the door panel 2 to the working area of the plectrum 34; with the continuous rotation of the driving gear 31, the pick 34 (the boundary between the side wall of the fan-shaped body 342 and the outer arc surface thereof) can abut against the abutting arc surface 331 of the protrusion 33 and push the protrusion 33 to rotate, thereby driving the door panel 2 to move continuously in the direction of the closed opening 11 until the outer arc surface of the fan-shaped body 342 is tangent to the abutting arc surface 331 of the protrusion 33, at this time, the door panel 2 has completely closed the opening 11, and the fan-shaped body 342 can not push the protrusion 33 to rotate. When a door opening force is applied to the door panel 2, the outer arc surface of the fan-shaped body 342 is tangent to the abutting arc surface 331 of the protruding block 33, and the abutting arc surface 331 of the protruding block 33 only forms a force along the radial direction of the driving gear 31 on the outer arc surface of the fan-shaped body 342, so that the driving gear 31 cannot be driven to rotate, and the protruding block 33 cannot rotate due to being jacked by the shifting piece 34, thereby ensuring the stability of the door panel 2 when the door panel is completely closed to the opening 11.

In order to avoid the problem that the toothless part 313 of the driving gear 31 faces the driven gear 32 for multiple times due to multiple rotations in the driving process of the door panel opening and closing mechanism 3, so that the driven gear 32 is frequently disengaged and power loss is caused, in one example, the radial size of the driving gear 31 is set to be smaller than that of the driven gear 32, and the opening and closing action of the opening 11 can be completed under the single rotation of the driving gear 31.

In one example, in order to avoid the phenomenon that the driving gear 31 and the driven gear 32 are pressed against each other to be locked due to the tooth tops of the driving gear 312 and the driven gear 32 facing each other when the toothed portion 312 of the driving gear 31 and the driven gear 32 are just engaged, the start tooth of the toothed portion 312 may be set as the movable tooth 35 capable of extending and contracting in the radial direction of the driving gear 31.

Specifically, referring to fig. 15, on the driving gear 31, a spring groove 51 and a movable tooth groove 52 are sequentially arranged along a radial direction where a start end of the toothed portion 312 (the start end refers to an end of the toothed portion 312 which is firstly engaged with the driven gear 32) is located, the spring groove 51 is located on one side close to an axis of the driving gear 31, and a limit through hole for communicating the spring groove 51 with the movable tooth groove 52 is further arranged on the driving gear 31 located between the spring groove 51 and the movable tooth groove 52. The limiting through hole is internally provided with movable teeth 35 which can stretch and retract along the radial direction of the driving gear 31 under the action of a spring 53. Specifically, referring to fig. 16, the movable gear 35 includes a movable rack bar 351 disposed in the through hole, one end of the movable rack bar 351 extends into the spring slot 51, and the other end extends to the toothed portion 312 and forms a tooth tip 352 capable of engaging with the driven gear 32. The spring 53 is disposed in the spring groove 51 in the radial direction of the drive gear 31, one end thereof abuts on the groove bottom of the spring groove 51, the other end thereof abuts on the movable rack 351, and when the spring 53 is in a natural state, a gap is left between the movable rack 351 and the groove bottom of the spring groove 51. Illustratively, an annular groove 3511 is formed on a side wall of the movable rack 351, and the spring 53 is sleeved on the movable rack 351 and has one end abutting against the annular groove 3511. The moving direction of the movable teeth 35 can be limited by the limiting through holes, and the springs 53 can be guided to move by sleeving the springs 53 on the movable tooth rods 351.

When the starting end of the toothed portion 312 of the driving gear 31 is engaged with the driven gear 32, the tooth tip 352 of the movable tooth 35 is pressed by the tooth tip of the driven gear 32 and is forced to retract, the movable tooth rod 351 moves along the limiting through hole in the direction of the spring groove 51 and drives the spring 53 to compress until the tooth tip 352 of the movable tooth 35 is disengaged from the driven gear 32 under the rotation of the driving gear 31, at this time, the resilient force of the spring 53 drives the movable tooth 35 to return, and the toothed portion 312 of the driving gear 31 and the driven gear enter the engaged state.

In an example, in order to ensure the stability of the movement of the door panel 2, referring to fig. 3, an upper driven plate 24 is further provided at the upper end of the door panel 2 at the upper end of the top plate 13, and the upper driven plate 24 is connected to the top plate 13 through a bearing assembly. Specifically, the structure of the upper driven plate 24 refers to the structure of the driving connecting plate 22, which includes an upper connecting piece 241 having a circular arc structure, and the outer arc surface and the inner arc surface of the upper connecting piece 241 are concentrically arranged. An upper connecting lug 242 is integrally arranged on the inner arc surface of the upper connecting piece 241, and a bearing mounting hole which is coaxially arranged with the axis of the outer side wall of the door panel body 21 is formed in the axis of the upper connecting lug 242, so that the upper connecting lug 242 coincides with the rotation axis of the driving connecting lug 222. The bearing assembly comprises a bearing mounting shaft arranged in the bearing mounting hole in a penetrating mode, the lower end of the bearing mounting shaft is fixedly connected to the top plate 13, and a bearing is mounted between the bearing mounting shaft and the bearing mounting hole. When the driving connecting plate 22 drives the door panel 2 to rotate under the driving of the door panel opening and closing mechanism 3, the upper driven plate 24 can rotate along the corresponding bearing mounting shaft. The upper driven plate 24 corresponding to the driving connecting plate 22 can ensure that the upper end and the lower end of the door panel body 21 are balanced in stress during the rotation of the door panel 2, the upper end and the lower end of the door panel body 21 can be limited, and the stability of the rotation of the door panel 2 is further improved.

In an example, referring to fig. 1-2, a positioning plate 6 for identifying the closed position of the door panel is further disposed above the upper driven plate 24, the positioning plate 6 is movably sleeved on the top of the bearing mounting shaft on the top plate 13, and the side surface of the positioning plate is fixedly connected to the upper driven plate 24 through a plurality of screws. The positioning plate 6 is set to be of a circular structure, and the radial size of the positioning plate 6 is set to be larger than that of the outer side wall of the door panel body 21. Positioning bosses 61 are symmetrically arranged on the side wall of the positioning plate 6, and when the opening 11 is in a completely closed state, the positioning bosses 61 on the positioning plate 6 can be respectively aligned with the junctions of the side plate bodies 141 and the transition plates 142; when the door plate 2 rotates, the positioning plate 6 can synchronously rotate along the bearing mounting shaft. Whether the door panel 2 completely closes the opening 11 can be visually observed through the arrangement of the positioning plate 6 and the positioning boss 61.

The working process of the embodiment is as follows:

referring to fig. 10-11, in the initial state, the door panel body 21 completely closes the opening 11, the outer arc surface of the sector-shaped body 342 is tangent to the abutting arc surface 331 of the protruding block 33, and the toothless portion 313 of the driving gear 31 is aligned with the driven gear 32 (at this time, the driving gear 31 and the driven gear 32 are in a non-meshing state); a driving device of the wafer loader drives the driving gear 31 to rotate anticlockwise and drives the shifting piece 34 to rotate synchronously, the outer arc surface of the fan-shaped body 342 moves in the direction away from the abutting arc surface 331, at the moment, the driven gear 32 is not moved, and the door panel 2 and the convex block are kept in a static state;

as shown in fig. 12-13, as the driving gear 31 continues to rotate, the starting end of the toothed portion 312 of the driving gear 31 starts to align with the driven gear 32, the tooth tip 352 of the movable tooth 35 is pressed by the tooth tip of the driven gear 32 and is forced to retract, the movable toothed rod 351 moves along the limiting through hole toward the spring slot 51 and drives the spring 53 to compress, until the tooth tip 352 of the movable tooth 35 disengages from the driven gear 32 under the rotation of the driving gear 31, at this time, the movable tooth 35 is returned by the resilience of the spring 53, the toothed portion 312 of the driving tooth 31 and the driven gear enter a meshed state, and further the driven gear 32 is driven to rotate synchronously, the door panel 2 rotates therewith and starts to open the opening 11, and at this time, the protruding block 33 rotates with the door panel 2 to the non-working region of the pick 34 (see fig. 14);

when the door panel 2 is closed from an open state, the driving device of the wafer loader drives the driving gear 31 to rotate clockwise, the plectrum 34 rotates along with the driving gear, at this time, the toothed part 312 of the driving gear 31 and the driven gear 32 are in an engaged state, the driven gear 32 can rotate along with the driving gear, the convex block 33 rotates along with the driving gear and drives the door panel 2 to move towards the direction of closing the opening 11 until the toothless part 313 of the driving gear 31 rotates to one side close to the driven gear 32, so that the driving gear 31 is disengaged from the driven gear 32, at this time, the driven gear 32 and the door panel 2 stop rotating, and the convex block 33 rotates along with the door panel 2 to the working area of the plectrum 34;

with the continuous rotation of the driving gear 31, the pick 34 (the boundary between the side wall of the fan-shaped body 342 and the outer arc surface thereof) can abut against the abutting arc surface 331 of the protrusion 33 and push the protrusion 33 to rotate, thereby driving the door panel 2 to move continuously in the direction of the closed opening 11 until the outer arc surface of the fan-shaped body 342 is tangent to the abutting arc surface 331 of the protrusion 33, at this time, the door panel 2 has completely closed the opening 11, and the fan-shaped body 342 can not push the protrusion 33 to rotate. When a door opening force is applied to the door panel 2, the outer arc surface of the fan-shaped body 342 is tangent to the abutting arc surface 331 of the protruding block 33, and the abutting arc surface 331 of the protruding block 33 only forms a force along the radial direction of the driving gear 31 on the outer arc surface of the fan-shaped body 342, so that the driving gear 31 cannot be driven to rotate, and the protruding block 33 cannot rotate due to being jacked by the shifting piece 34, thereby ensuring the stability of the door panel 2 when the door panel is completely closed to the opening 11.

Example two

The difference between this embodiment and the first embodiment is: the door body has different thicknesses and the door body 21 has different rotation axes.

Referring to fig. 17 to 19, the door panel body 21 is in an arc structure, the inner side wall of the door panel body 21 matches with the outer side wall of the opening plate 143 in shape and is eccentrically disposed, and when the door panel body 21 is attached to the opening plate 143, the door panel body 21 can just abut against the transition plate 142 on one side and can extrude the transition plate 142 on the other side. The arrangement makes the center positions of the circles of the cross sections of the door panel body 21, the opening plate 143 and the side plate body 141 different.

In the present embodiment, the door panel body 21 uses the axis of the inner side wall of the door panel body 21 as the rotation axis. Correspondingly, the bearing mounting holes of the upper engaging lug 242 and the driving engaging lug 222 are coaxially arranged with the axis where the inner side wall of the door panel body 21 is located, so as to ensure that the rotating axes of the upper engaging lug 242 and the driving engaging lug 222 are the same as the rotating axis of the door panel body 21.

Specifically, as shown in fig. 18, when the opening 11 is in a closed state, the inner side wall of the door panel body 21 can abut against the transition plate 142 on the right side and can slightly press against the transition plate 142 on the left side; as shown in fig. 19, when the opening 11 is opened, the door panel body 21 rotates counterclockwise with the center of circle of the inner sidewall thereof as the center of rotation, because the inner sidewall of the door panel body 21 and the outer sidewall of the opening plate 143 are eccentrically arranged, that is, the motion track of the inner sidewall of the door panel body 21 deviates from the circle of the outer sidewall of the opening plate 143, when the door panel body 21 starts to rotate, the inner sidewall of the door panel body 21 can be instantaneously separated from the transition plates 142 at both sides, and thereafter, in the opening 11 opening process, the inner sidewall of the door panel body 21 cannot contact the transition plates 142 and the side panel body 141, that is, in the whole opening 11 opening process, the door panel body 21, the transition plates 142 and the side panel body 141 can keep a certain distance therebetween, thereby avoiding friction and reducing the generation of particles; similarly, when the opening 11 is closed, that is, when the door panel body 21 rotates clockwise, the left side of the inner side wall of the door panel body 21 gradually approaches the transition plate on the left side, and the motion track of the inner side wall of the door panel body 21 gradually approaches the circle of the opening plate 143; when the inner side wall of the door panel body 21 contacts the left transition plate 142, the door panel body 21 can extrude the left transition plate 142, and at the moment, the right side of the door panel body is just attached to the right transition plate 142 to form sealing.

In some examples, the inner side wall of the door panel body 21 matches the shape of the outer side wall of the opening plate 143, and the outer side wall of the door panel body 21 is concentrically disposed with the inner side wall thereof, i.e., the thickness of the door panel body 21 is uniform. The outer side wall of the door plate body and the inner side wall of the door plate body are concentrically arranged, so that the thickness of the door plate body is uniform, and the processing difficulty of the door plate body can be effectively reduced. It should be noted that what is effective in opening and closing the opening is the shape of the inner side wall of the door panel body 21, and therefore, the shape of the outer side wall of the door panel body 21 can be correspondingly adjusted according to actual design requirements.

The above embodiments are provided only for illustrating the technical idea and features of the present invention, and the purpose of the present invention is to provide those skilled in the art with understanding and implementing the present invention, and not to limit the scope of the present invention, and all equivalent changes or modifications made according to the spirit of the present invention should be covered by the scope of the present invention.

Claims

1. A wafer cassette, characterized in that: the box comprises a box body, a door plate and a door plate opening and closing mechanism, wherein an opening is formed in one side of the box body, and the door plate can close or open the opening under the driving of the door plate opening and closing mechanism;

the box body comprises an annular side plate positioned on the side face of the box body, the annular side plate is formed by surrounding a side plate body, a transition plate and an opening plate, a circle of the cross section of the outer side wall of the side plate body and a circle of the cross section of the outer side wall of the opening plate are eccentrically arranged, and the circle of the cross section of the outer side wall of the side plate body is positioned in the circle of the cross section of the outer side wall of the opening plate; the door panel comprises a door panel body which can move along the annular side plate, and the shape of the inner side wall of the door panel body is matched with that of the outer side wall of the opening plate.

2. The wafer cassette according to claim 1, wherein when the opening is in a closed state, one of the transition plates abuts on the door panel body inner side wall, and the other one of the transition plates is pressed against the door panel body inner side wall; and the circle of the cross section of the inner side wall of the door plate body is concentric with the circle of the cross section of the outer side wall of the opening plate, and the door plate body takes the axial lead of the outer side wall of the side plate body as a rotating axial lead.

3. The wafer cassette according to claim 1, wherein when the opening is in a closed state, one of the transition plates abuts on the door panel body inner side wall, and the other one of the transition plates is pressed against the door panel body inner side wall; the circle of the cross section of the inner side wall of the door panel body and the circle of the cross section of the outer side wall of the opening plate are eccentrically arranged; the door plate body takes the axial lead of the inner side wall of the door plate body as a rotating axial lead.

4. The wafer cassette according to claim 2 or 3, wherein the door plate further comprises a driving connecting plate located at the bottom of the cassette body, the driving connecting plate comprises a driving connecting plate in an arc structure, the outer arc surface of the driving connecting plate is connected with the door plate body, the inner arc surface of the driving connecting plate is provided with a driving connecting lug, and the driving connecting lug is rotatably arranged at the bottom of the cassette body and connected with the door plate opening and closing mechanism.

5. The wafer cassette according to claim 4, wherein a rotation axis of the driving engaging lug coincides with a rotation axis of the door panel body.

6. The wafer cassette of claim 5, wherein the door opening/closing mechanism comprises a driving gear and a driven gear capable of engaging with each other, the driving gear is rotatably disposed at the bottom of the cassette body, and the driven gear is fixedly connected to the driving engaging lug.

7. The wafer cassette according to claim 6, wherein the door opening and closing mechanism further comprises a micro-moving assembly, the micro-moving assembly comprises a protrusion block and a shifting piece which are used in a matched mode, and the protrusion block is integrally arranged on the outer wall of the driving connection lug; the shifting piece is coaxially arranged on the driving gear and can push the protruding block to move.

8. The wafer cassette according to claim 7, wherein the paddle comprises a paddle connecting portion fixedly connected to the driving gear, and a fan-shaped body having a fan-shaped structure is integrally disposed on one side of the paddle connecting portion; the protruding block is provided with a butt arc surface for abutting against the fan-shaped body, and the butt arc surface can be tangent to the outer arc surface of the fan-shaped body.

9. The wafer cassette according to claim 8, wherein the outer wall of the driving gear is composed of a toothed portion and a non-toothed portion, and the sector-shaped body faces a side of the non-toothed portion when the paddle is fixed to the driving gear.

10. The wafer cassette according to claim 9, wherein the radial dimension of the driving gear is smaller than the radial dimension of the driven gear.

11. The wafer cassette according to claim 9, wherein the starting end of the toothed portion is provided with a movable tooth capable of extending and retracting in a radial direction of the driving gear.

12. The wafer cassette according to claim 11, wherein a spring groove, a limiting through hole, and a movable tooth groove are sequentially formed in the driving gear in a radial direction of a starting end of the toothed portion, and the movable tooth connected to the spring is movably inserted into the limiting through hole.

13. The wafer cassette according to claim 12, wherein the movable teeth comprise a movable rack bar having one end extending into the spring groove and the other end extending to the toothed portion and forming a tooth tip engageable with the driven gear.

14. The wafer cassette according to claim 13, wherein the spring is disposed in the spring slot along a radial direction of the driving gear, one end of the spring abuts against the spring slot, and the other end abuts against the movable rack; when the spring is in a natural state, a gap is reserved between the movable toothed bar and the groove bottom of the spring groove.

15. The wafer cassette of claim 13, wherein an annular groove is formed on a sidewall of the movable rack, the spring is sleeved on the movable rack, and one end of the spring abuts against the annular groove while the other end abuts against the spring groove.

16. The wafer cassette according to any of claims 5 to 15, wherein the door further comprises an upper driven plate fixedly connected to the upper end of the door body, the upper driven plate is rotatably connected to the top of the cassette body, and the rotation axis of the driven plate coincides with the rotation axis of the door body.

17. The wafer cassette according to claim 16, wherein a positioning plate is fixed to the top of the cassette body, and positioning bosses for identifying the closed position of the door are symmetrically disposed on the sidewalls of the positioning plate.

18. The wafer cassette of claim 1, wherein sealing strips capable of abutting against the inner side wall of the door body are uniformly distributed around the opening.

19. The wafer cassette according to claim 2 or 3, wherein a circle of the outer side wall cross section of the door panel body is concentric with a circle of the outer side wall cross section of the side panel body.

20. The wafer cassette according to claim 2 or 3, wherein a circle of the cross section of the outer sidewall of the door panel body is concentric with a circle of the cross section of the inner sidewall of the door panel body.