CN204342875U - Pedestal and LPCVD boiler tube - Google Patents
Pedestal and LPCVD boiler tube Download PDFInfo
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- CN204342875U CN204342875U CN201420774773.0U CN201420774773U CN204342875U CN 204342875 U CN204342875 U CN 204342875U CN 201420774773 U CN201420774773 U CN 201420774773U CN 204342875 U CN204342875 U CN 204342875U
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- pedestal
- pad
- base
- hail
- silicon carbide
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Abstract
The utility model provides a kind of pedestal, comprises back up pad, every hail pedestal and insulation sub-base.Be provided with fluid inlet, liquid outlet and the cavity structure for liquid circulation in back up pad, in back up pad, pass into the temperature that water coolant makes back up pad keep lower when thin film deposition, reactant gases SiH
4can not decompose lower than when 200 DEG C, polysilicon membrane can not be deposited on the supporting plate, again owing to being incubated sub-base and being silicon carbide every hail pedestal outside surface, even if be formed with Polysilicon film deposition on its surface, the polysilicon membrane deposited and silicon carbide have stronger adsorptive power, can not peel off easily, efficiently avoid the generation of peeling defect; Simultaneously, add asbestos in silicon carbide insulation sub-base and can play good insulation effect, the inside cover is coordinated to have quartz every the silicon carbide of hail pedestal every hail pedestal isolation bottom coohng water mitigation again, make water coolant can not affect temperature control bottom LPCVD boiler tube, and good particulate effect can be brought.
Description
Technical field
The utility model relates to semiconductor manufacturing equipment technical field, particularly relates to a kind of pedestal and LPCVD boiler tube.
Background technology
MEMS (micro electro mechanical system) (Micro-Electro-Mechanic System, be called for short MEMS) technique time a brand-new technical field and industry, MEMS refers to can batch making, integrates micro mechanism, microsensor, micro actuator and signal processing with pilot circuit until interface, to communicate and the microdevice of power supply etc. or system; MEMS has that volume is little, lightweight, low in energy consumption, wearing quality is good, cheap, steady performance, is widely used in numerous areas.
In MEMS technology, Polysilicon film deposition is one of very important operation, and low-pressure chemical vapor deposition (Low-pressure Chemical vapor deposition is called for short CVD) is the most popular method for deposit spathic silicon.In low-pressure chemical vapor deposition process, SiH
4it is one of important reactant gases.
In prior art, as shown in Figure 1, described boiler tube comprises the boiler tube (Furnace) used in low-pressure chemical vapor deposition process: pedestal 10, firm banking 11, interior pipe 12, outer tube 13 and brilliant boat 14; Described pedestal 10 comprises back up pad 100, sub-base 101, magnetic fluid device 103 and sealed base 104; Described outer tube 13 is placed on described interior pipe 12, described interior pipe 12 forms accommodation space with described firm banking 11, described back up pad 100, sub-base 101, magnetic fluid device 11 and described brilliant boat 14 are placed in described accommodation space, and described brilliant boat 14 is placed on described pedestal 10.
Fig. 2 is the three-dimensional structure schematic diagram of shown pedestal 10.As shown in Figure 2, described pedestal 10 also comprises a cover plate 102, described back up pad 100 is provided with multiple first fixed orifices 1001, described cover plate 102 is provided with second fixed orifices 1021 corresponding with described first fixed orifices 1001, and described sub-base 101 is fixed in described back up pad 100 by screw (not shown) through described first fixed orifices 1001 and described second fixed orifices 1021; Described sub-base 101 upper surface is provided with the 3rd fixed orifices 1011, the bottom of described brilliant boat 14 is provided with four fixed orifices 141 fixing with described 3rd fixed orifices 1011 again, and described brilliant boat 14 can be fixed in described sub-base 101 through described 3rd fixed orifices 1011 and described 4th fixed orifices 141 by screw (not shown).
But; due in MEMS technology; the thickness of the polysilicon membrane of low-pressure chemical vapor deposition wants much thick compared to common Logic technique; in the process of deposition; often there will be peeling defect (film separation shape defect), found by sources of particles (particle source) and find on back up pad, cover plate and quartz baffle, have a lot of peeling defect.The method of the described sources of particles of existing removal is back up pad described in periodic cleaning and described cover plate, but board must cause board to shut down for a long time when clearing up described back up pad and described cover plate, this must be unfavorable for the control of production cost, causes the increase of production cost.
Therefore, provide a kind of follow-on pedestal and LPCVD boiler tube very necessary.
Utility model content
The shortcoming of prior art in view of the above, the purpose of this utility model is to provide a kind of pedestal and LPCVD boiler tube, for solving the problem of the appearance peeling defect caused because the polysilicon membrane Thickness Ratio that deposits in MEMS technology is thicker in prior art, and regularly sources of particles clean to the problem of the production cost increase caused in order to avoid there is peeling defect.
For achieving the above object and other relevant objects, the utility model provides a kind of pedestal, described pedestal at least comprises: back up pad, described back up pad offers fluid inlet and liquid outlet, be provided with in described back up pad be connected with described fluid inlet and liquid outlet be suitable for the cavity structure that liquid circulation flows; Be arranged in described back up pad every hail pedestal; Be arranged at described insulation sub-base on hail pedestal.
As a kind of preferred version of pedestal of the present utility model, described back up pad is metal profile.
As a kind of preferred version of pedestal of the present utility model, describedly comprise quartz every hail pedestal and be placed on the silicon carbide of described quartz every hail pedestal periphery every hail pedestal every hail pedestal.
As a kind of preferred version of pedestal of the present utility model, described insulation sub-base is silicon carbide insulation sub-base.
As a kind of preferred version of pedestal of the present utility model, described insulation sub-base is the silicon carbide insulation sub-base that inside is filled with lagging material.
As a kind of preferred version of pedestal of the present utility model, described insulation sub-base is the silicon carbide insulation sub-base that inside is filled with asbestos.
As a kind of preferred version of pedestal of the present utility model, described pedestal also comprises a magnetic fluid device, and described magnetic fluid device is positioned at the below of described back up pad, and forms as one with described back up pad.
As a kind of preferred version of pedestal of the present utility model, described fluid inlet and described liquid outlet are all positioned at the bottom of described back up pad; The first through hole of the up/down perforation corresponding with described fluid inlet and described liquid outlet is provided with in described magnetic fluid device.
As a kind of preferred version of pedestal of the present utility model, described pedestal also comprises a sealed base, and the upper surface of described sealed base is connected with the lower surface of described magnetic fluid device; The second through hole of the up/down perforation corresponding with described first through hole is provided with in described sealed base.
The present invention also provides a kind of LPCVD boiler tube, and described LPCVD boiler tube at least comprises firm banking, interior pipe, outer tube, brilliant boat and the pedestal described in such scheme; Wherein, it is peripheral that described outer tube sleeve is placed in described interior pipe, described interior pipe and described firm banking form accommodation space, described back up pad, are placed in described accommodation space every hail pedestal, insulation sub-base, magnetic fluid device and described brilliant boat, and described brilliant boat is placed on described pedestal.
As mentioned above, pedestal of the present utility model and LPCVD boiler tube, there is following beneficial effect: in back up pad, be provided with fluid inlet, liquid outlet and the cavity structure for liquid circulation, the temperature that water coolant makes back up pad keep lower can be passed in back up pad, due to reactant gases SiH in deposition process
4can not decompose lower than when 200 DEG C, this just ensures that polysilicon membrane can not deposit on the supporting plate, again owing to being incubated sub-base and being silicon carbide every hail pedestal outside surface, even if be formed with Polysilicon film deposition on its surface, the polysilicon membrane deposited and silicon carbide have stronger adsorptive power, can not peel off easily, this just efficiently avoid the generation of peeling defect; Simultaneously, add asbestos in silicon carbide insulation sub-base and can play good insulation effect, the inside cover is coordinated to have quartz every the silicon carbide of hail pedestal every hail pedestal isolation bottom coohng water mitigation again, make water coolant can not affect temperature control bottom LPCVD boiler tube, and good particulate effect can be brought.
Accompanying drawing explanation
Fig. 1 is shown as the vertical section structure schematic diagram of LPCVD boiler tube in prior art.
Fig. 2 is shown as the three-dimensional structure schematic diagram of pedestal in prior art.
Fig. 3 is shown as the three-dimensional structure schematic diagram of the pedestal provided in the utility model embodiment one.
Fig. 4 is shown as the plan structure schematic diagram of the back up pad in the utility model embodiment one.
Fig. 5 is shown as the vertical section structure schematic diagram of the LPCVD boiler tube provided in the utility model embodiment two.
Element numbers explanation
10 pedestals
100 back up pads
1001 first fixed orificess
101 sub-base
1011 the 3rd fixed orificess
102 cover plates
1021 second fixed orificess
103 magnetic fluid devices
104 sealed bases
11 firm bankings
Pipe in 12
13 outer tubes
14 brilliant boats
141 the 4th fixed blocks
20 pedestals
200 back up pads
2001 liquid outlets
2002 fluid inlets
2003 cavity structures
2004 second steady braces
201 every hail pedestal
2011 quartz are every hail pedestal
2012 silicon carbide are every hail pedestal
2013 first fixed orificess
2014 second fixed orificess
202 insulation sub-base
2021 first steady braces
2022 the 3rd fixed orificess
203 magnetic fluid devices
2031 first through holes
204 sealed bases
2041 second through holes
21 firm bankings
Pipe in 22
23 outer tubes
24 brilliant boats
241 the 4th fixed orificess
Embodiment
By particular specific embodiment, embodiment of the present utility model is described below, person skilled in the art scholar the content disclosed by this specification sheets can understand other advantages of the present utility model and effect easily.
Refer to Fig. 3 to Fig. 5.Notice, this specification sheets is appended illustrates the structure, ratio, size etc. that illustrate, content all only in order to coordinate specification sheets to disclose, understand for person skilled in the art scholar and read, and be not used to limit the enforceable qualifications of the utility model, therefore the not technical essential meaning of tool, the adjustment of the modification of any structure, the change of proportionlity or size, do not affecting under effect that the utility model can produce and the object that can reach, still all should drop on technology contents that the utility model discloses and obtain in the scope that can contain.Simultaneously, quote in this specification sheets as " on ", D score, "left", "right", " middle part " and " one " etc. term, also only for ease of understanding of describing, and be not used to limit the enforceable scope of the utility model, the change of its relativeness or adjustment, under changing technology contents without essence, when being also considered as the enforceable category of the utility model.
Embodiment one
The utility model provides a kind of pedestal, refer to Fig. 3 to Fig. 4, described pedestal at least comprises: back up pad 200, described back up pad 200 offers fluid inlet 2002 and liquid outlet 2001, be provided with in described back up pad 200 be connected with described fluid inlet 2002 and liquid outlet 2001 be suitable for the cavity structure 2003 that liquid circulation flows; Be arranged in described back up pad 200 every hail pedestal 201; Be arranged at described insulation sub-base 202 on hail pedestal 201.Described fluid inlet 2002, described liquid outlet 2001 and the described cavity structure 2003 for liquid circulation is provided with in described back up pad 200, in deposition process, can pass into water coolant in described back up pad 200 makes described back up pad 200 keep lower temperature, again due to reactant gases SiH
4can not decompose lower than when 200 DEG C, this just ensures that polysilicon membrane can not deposit in described back up pad 200, namely less sources of particles, and then decreases the appearance of peeling defect (film separation shape defect).
Concrete, described back up pad 200 can be metal profile.Elect the material of described back up pad 200 as metal, because metal has good heat conductivity, in the process that it is cooled, the effect of cooling can be reached fast.
Concrete, describedly comprise quartz every hail pedestal 2011 and be placed on the silicon carbide of described quartz every hail pedestal 2011 periphery every hail pedestal 2012 every hail pedestal 201.
Concrete, the upper surface of described back up pad 200 is provided with several the second steady braces 2004, the position of corresponding described second steady brace 2004 of the described lower surface every hail pedestal 201 is provided with several the second fixed orificess 2014, and described second fixed orifices 2014 matches with corresponding described second steady brace 2004.Describedly to realize and the fixing of described back up pad 200 by described second steady brace 2004 being inserted in corresponding described second fixed orifices 2014 every hail pedestal 201.
Concrete, the described upper surface every hail pedestal 201 is also provided with several first fixed orificess 2013, and described first fixed orifices 2013 is for described fixing every hail pedestal 201 and described insulation sub-base 202.
The described upper surface being arranged at described back up pad 200 every hail pedestal 201, effectively can isolate bottom coohng water to the impact of temperature control bottom LPCVD boiler tube and can bring good particulate effect; Simultaneously, because the described outside every hail pedestal 201 is silicon carbide, even if be formed with Polysilicon film deposition on its surface, the polysilicon membrane deposited and silicon carbide have stronger adsorptive power, can not peel off easily, this just efficiently avoid the generation of peeling defect.
Concrete, described insulation sub-base 202 is silicon carbide insulation pedestal; Preferably, described insulation sub-base 202 is the inner silicon carbide insulation sub-base being filled with lagging material; More preferably, in the present embodiment, described insulation sub-base 202 is the inner silicon carbide insulation sub-base being filled with asbestos.
Concrete, the position of corresponding described first fixed orifices 2013 of lower surface of described insulation sub-base 202 is provided with several the first steady braces 2021, and described first steady brace 2021 matches with corresponding described first fixed orifices 2013.Described insulation sub-base 202 passes through described first steady brace 2021 to insert realization and described fixing every hail pedestal 201 in corresponding described first fixed orifices 2013.
Concrete, the upper surface of described insulation sub-base 202 is also provided with several the 3rd fixed orificess 2022, simultaneously, the bottom of described brilliant boat 24 is provided with several four fixed orificess 241 corresponding with described 3rd fixed orifices 2022, and described brilliant boat 24 can be fixed on the upper surface of described insulation sub-base 202 by described 3rd fixed orifices 2022 and described 4th fixed orifices 241 by screw (not shown).
Described insulation sub-base 202 is arranged at the described upper surface every hail pedestal 201, and it is the inner silicon carbide insulation sub-base being filled with asbestos, combine described every hail pedestal 201 again, more effectively can isolate bottom coohng water to the impact of temperature control bottom LPCVD boiler tube and can bring good particulate effect; Simultaneously, outside due to described insulation sub-base 202 is silicon carbide, even if be formed with Polysilicon film deposition on its surface, the polysilicon membrane deposited and silicon carbide have stronger adsorptive power, can not peel off easily, this just efficiently avoid the generation of peeling defect.
Concrete, described pedestal 20 also comprises a magnetic fluid device 203, and described magnetic fluid device 203 is positioned at the below of described back up pad 200, and forms as one with described back up pad 200.Described magnetic fluid device 203 can drive described back up pad 200 to rotate, and can play vacuum-packed effect simultaneously.
Concrete, described fluid inlet 2002 and described liquid outlet 2001 are all positioned at the bottom of described back up pad 200, are provided with the first through hole 2031 with the up/down perforation of described fluid inlet 2002 and described liquid outlet 2001 relative in described magnetic fluid device 203.
Concrete, described pedestal 20 also comprises a sealed base 204, and the upper surface of described sealed base 204 is connected with the lower surface of described magnetic fluid device 203; The second through hole 2041 of the up/down perforation corresponding with described first through hole 2031 is provided with in described sealed base 204.
It should be noted that, the structure that liquid circulation flows that is suitable for be connected with described liquid outlet 2001 and described fluid inlet 2002 in described back up pad 200 is not limited only to cavity structure one, also can be the circulation waterway that cross section is arbitrary shape, for example, one or more the combination in annular, rectangle, irregular figure.
Embodiment two
Refer to 5, the present embodiment also provides a kind of LPCVD boiler tube, and described LPCVD boiler tube comprises firm banking 21, interior pipe 22, outer tube 23, brilliant boat 24 and pedestal 20; The structure of described pedestal 20 is identical with the structure of the pedestal 20 described in embodiment one, can See Examples one, is not repeated here.
Concrete, described outer tube 23 is placed on the periphery of described interior pipe 22, described interior pipe 22 forms accommodation space with described firm banking 21, described back up pad 200, be placed in described accommodation space every hail pedestal 201, insulation sub-base 202, magnetic fluid device 203 and described brilliant boat 24, and described brilliant boat 24 is placed on described pedestal 20.
In sum, the utility model provides a kind of pedestal and LPCVD boiler tube, fluid inlet, liquid outlet and the cavity structure for liquid circulation is provided with in the back up pad of pedestal, the temperature that water coolant makes back up pad keep lower can be passed in back up pad, due to reactant gases SiH in deposition process
4can not decompose lower than when 200 DEG C, this just ensures that polysilicon membrane can not deposit on the supporting plate, again owing to being incubated sub-base and being silicon carbide every hail pedestal outside surface, even if be formed with Polysilicon film deposition on its surface, the polysilicon membrane deposited and silicon carbide have stronger adsorptive power, can not peel off easily, this just efficiently avoid the generation of peeling defect; Simultaneously, add asbestos in silicon carbide insulation sub-base and can play good insulation effect, the inside cover is coordinated to have quartz every the silicon carbide of hail pedestal every hail pedestal isolation bottom coohng water mitigation again, make water coolant can not affect temperature control bottom LPCVD boiler tube, and good particulate effect can be brought.
Above-described embodiment is illustrative principle of the present utility model and effect thereof only, but not for limiting the utility model.Any person skilled in the art scholar all without prejudice under spirit of the present utility model and category, can modify above-described embodiment or changes.Therefore, such as have in art and usually know that the knowledgeable modifies or changes not departing from all equivalences completed under the spirit and technological thought that the utility model discloses, must be contained by claim of the present utility model.
Claims (10)
1. a pedestal, is characterized in that, described pedestal comprises:
Back up pad, described back up pad offers fluid inlet and liquid outlet, be provided with in described back up pad be connected with described fluid inlet and liquid outlet be suitable for the cavity structure that liquid circulation flows;
Be arranged in described back up pad every hail pedestal;
Be arranged at described insulation sub-base on hail pedestal.
2. pedestal according to claim 1, is characterized in that: described back up pad is metal profile.
3. pedestal according to claim 1, is characterized in that: describedly comprise quartz every hail pedestal and be placed on the silicon carbide of described quartz every hail pedestal periphery every hail pedestal every hail pedestal.
4. pedestal according to claim 1, is characterized in that: described insulation sub-base is silicon carbide insulation sub-base.
5. pedestal according to claim 4, is characterized in that: described insulation sub-base is the silicon carbide insulation sub-base that inside is filled with lagging material.
6. pedestal according to claim 5, is characterized in that: described insulation sub-base is the silicon carbide insulation sub-base that inside is filled with asbestos.
7. pedestal according to claim 1, is characterized in that: described pedestal also comprises a magnetic fluid device, and described magnetic fluid device is positioned at the below of described back up pad, and forms as one with described back up pad.
8. pedestal according to claim 7, is characterized in that: described fluid inlet and described liquid outlet are all positioned at the bottom of described back up pad; The first through hole of the up/down perforation corresponding with described fluid inlet and described liquid outlet is provided with in described magnetic fluid device.
9. pedestal according to claim 8, is characterized in that: described pedestal also comprises a sealed base, and the upper surface of described sealed base is connected with the lower surface of described magnetic fluid device; The second through hole of the up/down perforation corresponding with described first through hole is provided with in described sealed base.
10. a LPCVD boiler tube, is characterized in that: described LPCVD boiler tube comprises: firm banking, interior pipe, outer tube, brilliant boat and pedestal as claimed in any one of claims 1-9 wherein; Wherein, it is peripheral that described outer tube sleeve is placed in described interior pipe, described interior pipe and described firm banking form accommodation space, described back up pad, are placed in described accommodation space every hail pedestal, insulation sub-base, magnetic fluid device and described brilliant boat, and described brilliant boat is placed on described pedestal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420774773.0U CN204342875U (en) | 2014-12-10 | 2014-12-10 | Pedestal and LPCVD boiler tube |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420774773.0U CN204342875U (en) | 2014-12-10 | 2014-12-10 | Pedestal and LPCVD boiler tube |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204342875U true CN204342875U (en) | 2015-05-20 |
Family
ID=53226159
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420774773.0U Active CN204342875U (en) | 2014-12-10 | 2014-12-10 | Pedestal and LPCVD boiler tube |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204342875U (en) |
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2014
- 2014-12-10 CN CN201420774773.0U patent/CN204342875U/en active Active
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |