CN204342445U - A kind of split type tetrafluoro cover insulation seal device - Google Patents
A kind of split type tetrafluoro cover insulation seal device Download PDFInfo
- Publication number
- CN204342445U CN204342445U CN201420735696.8U CN201420735696U CN204342445U CN 204342445 U CN204342445 U CN 204342445U CN 201420735696 U CN201420735696 U CN 201420735696U CN 204342445 U CN204342445 U CN 204342445U
- Authority
- CN
- China
- Prior art keywords
- tetrafluoro
- cover
- inner ring
- ring
- outer shroud
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model discloses a kind of split type tetrafluoro cover insulation seal device, it comprises cylindric inner ring, cylindric outer shroud and ring-type top cover; Inner ring seal is slidably socketed on the electrode outer wall of grafting in tetrafluoro cover, and top is overlapped higher than tetrafluoro in inner ring top; Outer ring seal is slidably socketed on tetrafluoro cover outer wall, and outer shroud bottom and tetrafluoro overlap base end sealing and connect, and outer shroud top and inner ring top are in same level; Top seal is slidably socketed on electrode, and top cover sealing bottom surface is fastened on the top of inner ring and outer shroud.Advantage is: insulation porcelain ring adopts split-type design, is the concentrated damage that the thermal stresses reducing insulation porcelain ring causes, and protects completely in insulation porcelain ring by tetrafluoro cover, namely plays the effect of protection tetrafluoro cover, reduces cost of use again, and it is convenient to change.
Description
Technical field:
The utility model belongs to the production unit field of polysilicon industry, relates to a kind of split type tetrafluoro cover insulation seal device.
Background technology:
Polysilicon hydrogenation furnace is the main equipment that Siemens Method produces in polysilicon process; mainly through to the heating member heating power installed in hydrogenation furnace stove; and silicon tetrachloride and hydrogen are at high temperature reacted; obtain trichlorosilane; hydrogenation furnace is in operational process; often there will be the situation of power-off or material from leakage; the less stable of production unit; cause production efficiency low; the major cause of this situation is caused to be lack tetrafluoro cover protector, so improve this situation in the urgent need to a kind of device.
Utility model content:
The purpose of this utility model is to provide a kind of split type tetrafluoro cover insulation seal device, tetrafluoro can be protected to overlap at high temperature not ablated, increase tetrafluoro and overlap work-ing life in hydrogenation furnace production process.
The utility model is implemented by following technical scheme: a kind of split type tetrafluoro cover insulation seal device, and it comprises cylindric inner ring, cylindric outer shroud and ring-type top cover; Inner ring seal is slidably socketed on the electrode outer wall of grafting in tetrafluoro cover, and top is overlapped higher than tetrafluoro in inner ring top; Outer ring seal is slidably socketed on tetrafluoro cover outer wall, and outer shroud bottom and tetrafluoro overlap base end sealing and connect, and outer shroud top and inner ring top are in same level; Top seal is slidably socketed on electrode, and top cover sealing bottom surface is fastened on the top of inner ring and outer shroud.
Advantage of the present utility model: adopt split-type design; be arranged on tetrafluoro cover around; to tetrafluoro cover formation one independently space; protect completely in insulation porcelain ring by tetrafluoro cover, protection tetrafluoro cover is at high temperature not ablated, reduces the concentrated damage that device thermal stresses causes; namely the effect of protection tetrafluoro cover is played; reduce cost of use again, it is convenient to change, and increases tetrafluoro and overlaps work-ing life.
Accompanying drawing illustrates:
Fig. 1 is that the utility model uses schematic diagram.
Fig. 2 is the utility model inner ring structural representation.
Fig. 3 is the utility model outer ring structure schematic diagram.
Fig. 4 is the utility model cap structure schematic diagram.
Fig. 5 is the utility model structural representation.
Inner ring 1, outer shroud 2, top cover 3, tetrafluoro cover 4, electrode 5, base 6.
Embodiment: as shown in Figures 1 to 5, a kind of split type tetrafluoro cover insulation seal device, its primary structure is as follows: it comprises cylindric inner ring 1, cylindric outer shroud 2 and ring-type top cover 3; Inner ring 1 sealing is slidably socketed on electrode 5 outer wall of grafting in tetrafluoro cover 4, and 4 tops are overlapped higher than tetrafluoro in inner ring 1 top; Outer shroud 2 sealing is slidably socketed overlaps on 4 outer walls at tetrafluoro, and outer shroud 2 bottom and tetrafluoro overlap 4 base 6 end sealings and connect, and outer shroud 2 top and inner ring 1 top are in same level; Top cover 3 sealing is slidably socketed on electrode 5, and top cover 3 sealing bottom surface is fastened on the top of inner ring 1 and outer shroud 2.
The material of inner ring 1, outer shroud 2 and top cover 3 is the high purity AL that purity reaches 99%
2o
3its folding strength: 300MPa, volume density: > 3.70g/cm, specific inductivity: 10GHZ20 DEG C, volume specific resistance: 500 DEG C of >10 Ω .cm disruptive strengths: 15KV/mm, chemical stability: 1:9HCL≤0.7mg/cm.
Claims (1)
1. a split type tetrafluoro cover insulation seal device, it is characterized in that, it comprises cylindric inner ring, cylindric outer shroud and ring-type top cover; Described inner ring seal is slidably socketed on the electrode outer wall of grafting in tetrafluoro cover, and described inner ring top is higher than described tetrafluoro cover top; Described outer ring seal is slidably socketed on described tetrafluoro cover outer wall, and described outer shroud bottom and described tetrafluoro overlap base end sealing and connect, and described outer shroud top and described inner ring top are in same level; Described top seal is slidably socketed on the electrodes, and described top cover sealing bottom surface is fastened on the top of described inner ring and described outer shroud.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420735696.8U CN204342445U (en) | 2014-11-29 | 2014-11-29 | A kind of split type tetrafluoro cover insulation seal device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420735696.8U CN204342445U (en) | 2014-11-29 | 2014-11-29 | A kind of split type tetrafluoro cover insulation seal device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204342445U true CN204342445U (en) | 2015-05-20 |
Family
ID=53225730
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420735696.8U Expired - Fee Related CN204342445U (en) | 2014-11-29 | 2014-11-29 | A kind of split type tetrafluoro cover insulation seal device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204342445U (en) |
-
2014
- 2014-11-29 CN CN201420735696.8U patent/CN204342445U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150520 Termination date: 20211129 |