CN204291551U - The tuning lifting base station of a kind of novel precise - Google Patents
The tuning lifting base station of a kind of novel precise Download PDFInfo
- Publication number
- CN204291551U CN204291551U CN201420743431.2U CN201420743431U CN204291551U CN 204291551 U CN204291551 U CN 204291551U CN 201420743431 U CN201420743431 U CN 201420743431U CN 204291551 U CN204291551 U CN 204291551U
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- China
- Prior art keywords
- base station
- tuning
- reaction cavity
- novel precise
- lifting base
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Abstract
The utility model discloses the tuning lifting base station of a kind of novel precise, fine tune lifting base station and reaction cavity form microwave plasma reaction chamber, be fixed on bottom described reaction cavity on main base station, be positioned at the large tuning base station and little tuning base station that described main base station are arranged with concentric gap cooperation, wherein said little tuning base station is positioned on the axis of reaction cavity, described large tuning base station and main base station matched in clearance, the tuning lifting base station of a kind of novel precise of the present utility model, with two tuning base stations, and make encapsulation process, secondly fine tune can be carried out to microwave plasm reaction cavity, make to obtain stable microwave plasma discharge in cavity, for physical-chemical reaction stable in microwave plasm reaction cavity provides safeguard, last not only can be accurate and complete the tuning of microwave plasm reaction cavity rapidly, thus obtain can the microwave plasma of steady operation, and structure is simple, easy and simple to handle.
Description
Technical field
The present invention relates to the resonance device in microwave plasm reaction cavity, particularly relate to the tuning lifting base station of a kind of novel precise.
Background technology
Microwave plasm reaction cavity is undertaken tuning by lifting base station, and the microwave plasma in reaction chamber relies on exciting of resonant electromagnetic field to carry out work.If microwave plasm reaction cavity lacks accurate tuning, the energy in whole microwave system, by off resonance, not only can make microwave power can not effective feed-in microwave plasm reaction cavity, and can cause microwave plasma discharge instability, even extinguishes.At present, known lifting base station only has a tuning base station, or lifting base station does not have tunning effect.
Summary of the invention
The object of the invention is the problem solving above-mentioned proposition, provide a kind of and can complete the tuning lifting base station of the tuning a kind of novel precise of plasm reaction cavity fast.
The object of the invention is to realize as follows: the tuning lifting base station of a kind of novel precise, fine tune lifting base station and reaction cavity form microwave plasma reaction chamber, be fixed on bottom described reaction cavity on main base station, be positioned at the large tuning base station and little tuning base station that described main base station are arranged with concentric gap cooperation, wherein said little tuning base station is positioned on the axis of reaction cavity, described large tuning base station and main base station matched in clearance.
Further prioritization scheme is, the tuning lifting base station of above-mentioned a kind of novel precise, and described large tuning base station bottom is tightly connected by ring flange and large bellows and small corrugated pipe.
Further prioritization scheme is, the tuning lifting base station of above-mentioned a kind of novel precise, and described little tuning base station bottom is connected by flangeseal with small corrugated pipe one end.
Further prioritization scheme is, the tuning lifting base station of above-mentioned a kind of novel precise, and the diameter dimension claimed range of described little tuning base station is at 30-75 millimeter, and the diameter dimension claimed range of described large tuning base station is at 80-120 millimeter.
Further prioritization scheme is, the tuning lifting base station of above-mentioned a kind of novel precise, and the tuning length range of described large tuning base station and little tuning base station is 90 millimeters and 155 millimeters respectively.
Further prioritization scheme is, the tuning lifting base station of above-mentioned a kind of novel precise, described main base station welds with reaction cavity.
Further prioritization scheme is, the tuning lifting base station of above-mentioned a kind of novel precise, described reaction cavity end connects by microwave transmission to the mode converter in reaction cavity, and described mode converter transverse opening one end connects short-circuit plunger, and its transverse opening other end connects pin adjuster.
Advantage of the present invention: the tuning lifting base station of a kind of novel precise of the present invention, with two tuning base stations, and makes encapsulation process.Secondly can carry out fine tune to microwave plasm reaction cavity, make to obtain stable microwave plasma discharge in cavity, for physical-chemical reaction stable in microwave plasm reaction cavity provides safeguard.Last not only can be accurate and complete the tuning of microwave plasm reaction cavity rapidly, thus obtain can the microwave plasma of steady operation, and structure is simple, easy and simple to handle.
Accompanying drawing explanation
In order to make content of the present invention more easily be clearly understood, below according to specific embodiment also by reference to the accompanying drawings, the present invention is further detailed explanation, wherein
Fig. 1 is structural representation of the present invention.
Embodiment:
As shown in Figure 1, the tuning lifting base station of a kind of novel precise, fine tune lifting base station and reaction cavity 1 form microwave plasma reaction chamber, be fixed on bottom described reaction cavity 1 on main base station 2, be positioned at the large tuning base station 3 and little tuning base station 4 that described main base station 2 are arranged with concentric gap cooperation, wherein said little tuning base station 4 is positioned on the axis of reaction cavity 1, described large tuning base station 3 and main base station 2 matched in clearance.Described large tuning base station 3 bottom is tightly connected by ring flange and large bellows 6 and small corrugated pipe 5.Described little tuning base station 4 bottom is connected by flangeseal with small corrugated pipe 5 one end.The diameter dimension claimed range of described little tuning base station 4 is at 30-75 millimeter, and the diameter dimension claimed range of described large tuning base station 3 is at 80-120 millimeter.The tuning length range of described large tuning base station 3 and little tuning base station 4 is 90 millimeters and 155 millimeters respectively.Described main base station 2 welds with reaction cavity 1.Described reaction cavity 1 end connects by microwave transmission to the mode converter 7 in reaction cavity 1, and described mode converter 7 transverse opening one end connects short-circuit plunger 8, and its transverse opening other end connects pin adjuster 9.
In the embodiment shown in fig. 1, reaction cavity 1 and casing 11 are bolted to connection, substrate 10 is positioned on little tuning base station 4, between large tuning base station 3 and main base station 2, major part adopts matched in clearance, matched in clearance is adopted between large tuning base station 3 and little tuning base station 4, large one end of tuning base station 3, one end of small corrugated pipe 5 are connected by flangeseal with large bellows 6 one end simultaneously, and one end of little tuning base station 4 is connected by flangeseal with the other end of small corrugated pipe 5.Be welded to connect between main base station 2 and reaction cavity 1.During work, one end of main base station 2 is connected by flangeseal with the other end of large bellows 6.Under the flexible cushioning effect of large bellows 6 and small corrugated pipe 5, be elevated base station can be elevated reposefully, realize the fine tune to microwave plasm reaction cavity.
Reaction cavity 1 diameter 180 millimeters, high 220 millimeters, material is 304 stainless steels; The diameter of large tuning base station 3 and little tuning base station 4 is respectively 100 millimeters and 50 millimeters, is highly respectively 350 millimeters and 510 millimeters, and large tuning base station 3 material is 304 stainless steels, and little tuning base station 4 material is 304 stainless steels; Main base station 2 internal diameter is 100 millimeters, is highly 48 millimeters, and material is 304 stainless steels; Large bellows 6 wall thickness 0.25 millimeter, model is ISO80FXC180, and material is 304 stainless steels; Small corrugated pipe 5 wall thickness 0.2 millimeter, model is KF40FXC100, and material is 304 stainless steels.
Above-described specific embodiment; object of the present invention, technical scheme and beneficial effect are further described; be understood that; the foregoing is only specific embodiments of the invention; be not limited to the present invention; within the spirit and principles in the present invention all, any amendment made, equivalent replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (7)
1. the tuning lifting base station of novel precise, it is characterized in that: fine tune lifting base station and reaction cavity (1) form microwave plasma reaction chamber, wherein said reaction cavity (1) bottom is fixed on main base station (2), be positioned at the large tuning base station (3) and little tuning base station (4) that described main base station (2) are arranged with concentric gap cooperation, wherein said little tuning base station (4) is positioned on the axis of reaction cavity (1), described large tuning base station (3) and main base station (2) matched in clearance.
2. the tuning lifting base station of a kind of novel precise according to claim 1, is characterized in that: described large tuning base station (3) bottom is tightly connected by ring flange and large bellows (6) and small corrugated pipe (5).
3. the tuning lifting base station of a kind of novel precise according to claim 2, is characterized in that: described little tuning base station (4) bottom is connected by flangeseal with small corrugated pipe (5) one end.
4. the tuning lifting base station of a kind of novel precise according to claim 3, it is characterized in that: the diameter dimension claimed range of described little tuning base station (4) is at 30-75 millimeter, and the diameter dimension claimed range of described large tuning base station (3) is at 80-120 millimeter.
5. the tuning lifting base station of a kind of novel precise according to claim 4, is characterized in that: the tuning length range of described large tuning base station (3) and little tuning base station (4) is 90 millimeters and 155 millimeters respectively.
6. the tuning lifting base station of a kind of novel precise according to claim 3, is characterized in that: described main base station (2) is welded with reaction cavity (1).
7. the tuning lifting base station of a kind of novel precise according to claim 1 or 6, it is characterized in that: described reaction cavity (1) end connects microwave transmission to the mode converter (7) in reaction cavity (1), described mode converter (7) transverse opening one end connects short-circuit plunger (8), and its transverse opening other end connects pin adjuster (9).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420743431.2U CN204291551U (en) | 2014-12-02 | 2014-12-02 | The tuning lifting base station of a kind of novel precise |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420743431.2U CN204291551U (en) | 2014-12-02 | 2014-12-02 | The tuning lifting base station of a kind of novel precise |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204291551U true CN204291551U (en) | 2015-04-22 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420743431.2U Expired - Fee Related CN204291551U (en) | 2014-12-02 | 2014-12-02 | The tuning lifting base station of a kind of novel precise |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204291551U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104363692A (en) * | 2014-12-02 | 2015-02-18 | 刘小利 | Novel precision tuning lifting base |
-
2014
- 2014-12-02 CN CN201420743431.2U patent/CN204291551U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104363692A (en) * | 2014-12-02 | 2015-02-18 | 刘小利 | Novel precision tuning lifting base |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20170323 Address after: 215011 room, room 4, No. 209, Chuk Yuen Road, high tech Zone, Suzhou, Jiangsu, China Patentee after: Suzhou Bao Xin Mstar Technology Ltd Address before: 200000 Minhang District, Gu Dai Road, Lane 388, room 112, No. 602, room Patentee before: Liu Xiaoli |
|
| TR01 | Transfer of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150422 Termination date: 20171202 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |