CN204291552U - Fine tune lifting base station - Google Patents
Fine tune lifting base station Download PDFInfo
- Publication number
- CN204291552U CN204291552U CN201420752779.8U CN201420752779U CN204291552U CN 204291552 U CN204291552 U CN 204291552U CN 201420752779 U CN201420752779 U CN 201420752779U CN 204291552 U CN204291552 U CN 204291552U
- Authority
- CN
- China
- Prior art keywords
- base station
- fine tune
- reaction cavity
- lifting base
- tune lifting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model discloses a kind of fine tune lifting base station, can not only fine tune microwave plasm reaction cavity, and sealed by O RunddichtringO and metal sealing block between described large tuning base station and main base station, because O type rubber ring material is silicon rubber, silicon rubber has fabulous sealing property, the lower heating of temperature can be set high, indeformable, do not produce harmful substance, good stretching resistance performance, Long-Time Service does not turn yellow colour-fast, corona resistance, arc resistance, ageing-resistant performance is good, high-low temperature resistant, Long-Time Service in temperature ranges can be spent in-60 degree ~+200, during work, reaction chamber air pressure inside is lower, under low voltage situations, O type rubber ring can ensure the sealing in microwave plasm reaction cavity, and cost is lower, easy to maintenance.
Description
Technical field
The utility model relates to the resonance device in microwave plasm reaction cavity, particularly relates to a kind of fine tune lifting base station.
Background technology
Microwave plasm reaction cavity carries out fine tune by the tuning base station of size.At present, be well known that the large bellows by flanged dish between large tuning base station and main base station seals.Large bellows two ends are welded to connect ring flange, and large bellows one end is connected by flangeseal with large tuning base station one end, and the large bellows other end and main base station one end are sealed by rubber seal.Because large bellows material is 304 stainless steels, and reaction chamber inner gassy during work, seal request is higher, so the welding requirements of large bellows and ring flange is high, welding difficulty is large, causes the apparatus cost with large bellows expensive.
Utility model content
The purpose of this utility model is the problem solving above-mentioned proposition, provides a kind of fine tune lifting base station that can keep reducing costs under sealing usefulness condition.
The purpose of this utility model realizes as follows: a kind of fine tune lifting base station, fine tune lifting base station and reaction cavity form microwave plasma reaction chamber, be fixed on bottom described reaction cavity on main base station, be positioned at the large tuning base station and little tuning base station that described main base station are arranged with concentric gap cooperation, wherein said little tuning base station is positioned on the axis of reaction cavity, is sealed between described large tuning base station and main base station by O RunddichtringO and metal sealing block.
Further prioritization scheme is, above-mentioned fine tune lifting base station, described O RunddichtringO is fixed in large tuning base station lateral surface upper annular groove, between large tuning base station and metal sealing block in gap.
Further prioritization scheme is, above-mentioned fine tune lifting base station, described metal sealing block is connected by seal with elastometic washer with between main base station.
Further prioritization scheme is, above-mentioned fine tune lifting base station, described large tuning base station bottom is tightly connected by ring flange and small corrugated pipe.
Further prioritization scheme is, above-mentioned fine tune lifting base station, described little tuning base station bottom is connected by flangeseal with small corrugated pipe one end.
Further prioritization scheme is, above-mentioned fine tune lifting base station, described main base station welds with reaction cavity.
Further prioritization scheme is, above-mentioned fine tune lifting base station, described reaction cavity end connects by microwave transmission to the mode converter in reaction cavity, and described mode converter transverse opening one end connects short-circuit plunger, and its transverse opening other end connects pin adjuster.
Advantage of the present utility model: lifting base station of the present utility model can not only fine tune microwave plasm reaction cavity, and is sealed by O RunddichtringO and metal sealing block between large tuning base station and main base station; Because O type rubber ring material is silicon rubber, silicon rubber has fabulous sealing property, the lower heating of temperature can be set high, indeformable, do not produce harmful substance, good stretching resistance performance, Long-Time Service does not turn yellow colour-fast, corona resistance, arc resistance, ageing-resistant performance are good, high-low temperature resistant, can spend Long-Time Service in temperature ranges in-60 degree ~+200.During work, reaction chamber air pressure inside is lower.Under low voltage situations, O type rubber ring can ensure the sealing in microwave plasm reaction cavity, and cost is lower, easy to maintenance.
Accompanying drawing explanation
In order to make content of the present utility model more easily be clearly understood, below according to specific embodiment also by reference to the accompanying drawings, the utility model is described in further detail, wherein
Fig. 1 is structural representation of the present utility model.
Embodiment:
As shown in Figure 1, a kind of fine tune lifting base station, fine tune lifting base station and reaction cavity 1 form microwave plasma reaction chamber, described reaction cavity 1, bottom is fixed on main base station 2, be positioned at the large tuning base station 3 and little tuning base station 4 that described main base station 2 are arranged with concentric gap cooperation, wherein said little tuning base station 4 is positioned on the axis of reaction cavity 1, is sealed between described large tuning base station 3 and main base station 2 by O RunddichtringO 12 and metal sealing block 13.Described O RunddichtringO 12 is fixed in large tuning base station 3 lateral surface upper annular groove, between large tuning base station 3 and metal sealing block 13 in gap.Be tightly connected by rubber ring 14 between described metal sealing block 13 and main base station 2.Described large tuning base station 3 bottom is tightly connected by ring flange and small corrugated pipe 6.Described little tuning base station 4 bottom is connected by flangeseal with small corrugated pipe 6 one end.Described main base station 2 welds with reaction cavity 1.Described reaction cavity 1 end connects by microwave transmission to the mode converter 7 in reaction cavity 1, and described mode converter 7 transverse opening one end connects short-circuit plunger 8, and its transverse opening other end connects pin adjuster 9.
In the embodiment shown in fig. 1, reaction cavity 1 and casing 11 are bolted to connection, and substrate 10 is positioned on little tuning base station 4, adopts matched in clearance between large tuning base station 3 and little tuning base station 4.Meanwhile, one end of large tuning base station 3 is connected by flangeseal with small corrugated pipe 6 one end, and one end of little tuning base station 4 is connected by flangeseal with the other end of small corrugated pipe 6.Matched in clearance between metal sealing block 13 and large tuning base station 3, O type rubber ring 12 is fixed in large tuning base station 3 lateral surface upper annular groove, between large tuning base station 3 and metal sealing block 13 in gap, play sealing function, be matched in clearance between main base station 2 and large tuning base station 3, be welded to connect between main base station 2 and reaction cavity 1.During work, metal sealing block 13 and main base station 2 are sealed by rubber ring 14, and O type rubber ring 12 slides in the scope of metal sealing block 13, plays the effect sealing large tuning base station 3.Be elevated large tuning base station 3 and little tuning base station 4 respectively, realize the fine tune to microwave plasm reaction cavity.
Reaction cavity 1 diameter 180 millimeters, high 220 millimeters, material is 304 stainless steels; The diameter of large tuning base station 3 and little tuning base station 4 is respectively 100 millimeters and 50 millimeters, is highly respectively 350 millimeters and 510 millimeters, and large tuning base station 3 material is 304 stainless steels, and little tuning base station 4 material is 304 stainless steels; Main base station 2 internal diameter is 100 millimeters, is highly 48 millimeters, and material is 304 stainless steels; Small corrugated pipe 6 wall thickness 0.2 millimeter, model is KF40FXC100, and material is 304 stainless steels.
Above-described specific embodiment; the purpose of this utility model, technical scheme and beneficial effect are further described; be understood that; the foregoing is only specific embodiment of the utility model; be not limited to the utility model; all within spirit of the present utility model and principle, any amendment made, equivalent replacement, improvement etc., all should be included within protection range of the present utility model.
Claims (7)
1. a fine tune lifting base station, it is characterized in that: fine tune lifting base station and reaction cavity (1) form microwave plasma reaction chamber, described reaction cavity (1) bottom is fixed on main base station (2), be positioned at the large tuning base station (3) and little tuning base station (4) that described main base station (2) are arranged with concentric gap cooperation, wherein said little tuning base station (4) is positioned on the axis of reaction cavity (1), sealed by O RunddichtringO (12) and metal sealing block (13) between described large tuning base station (3) and main base station (2).
2. fine tune lifting base station according to claim 1, it is characterized in that: described O RunddichtringO (12) is fixed in large tuning base station (3) lateral surface upper annular groove, is positioned at gap between large tuning base station (3) and metal sealing block (13).
3. fine tune lifting base station according to claim 2, be is characterized in that: be tightly connected by rubber ring (14) between described metal sealing block (13) and main base station (2).
4. fine tune lifting base station according to claim 3, is characterized in that: described large tuning base station (3) bottom is tightly connected by ring flange and small corrugated pipe (6).
5. fine tune lifting base station according to claim 2, is characterized in that: described little tuning base station (4) bottom is connected by flangeseal with small corrugated pipe (6) one end.
6. fine tune lifting base station according to claim 5, is characterized in that: described main base station (2) is welded with reaction cavity (1).
7. fine tune lifting base station according to claim 6, it is characterized in that: described reaction cavity (1) end connects microwave transmission to the mode converter (7) in reaction cavity (1), described mode converter (7) transverse opening one end connects short-circuit plunger (8), and its transverse opening other end connects pin adjuster (9).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420752779.8U CN204291552U (en) | 2014-12-05 | 2014-12-05 | Fine tune lifting base station |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420752779.8U CN204291552U (en) | 2014-12-05 | 2014-12-05 | Fine tune lifting base station |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204291552U true CN204291552U (en) | 2015-04-22 |
Family
ID=52874676
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420752779.8U Expired - Fee Related CN204291552U (en) | 2014-12-05 | 2014-12-05 | Fine tune lifting base station |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204291552U (en) |
-
2014
- 2014-12-05 CN CN201420752779.8U patent/CN204291552U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20170323 Address after: 215011 room, room 4, No. 209, Chuk Yuen Road, high tech Zone, Suzhou, Jiangsu, China Patentee after: Suzhou Bao Xin Mstar Technology Ltd Address before: 200000 Minhang District, Gu Dai Road, Lane 388, room 112, No. 602, room Patentee before: Liu Xiaoli |
|
| TR01 | Transfer of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150422 Termination date: 20201205 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |