CN204255857U - Based on the index sensor of the high sensitivity Wide measuring range of SPR - Google Patents
Based on the index sensor of the high sensitivity Wide measuring range of SPR Download PDFInfo
- Publication number
- CN204255857U CN204255857U CN201420606299.0U CN201420606299U CN204255857U CN 204255857 U CN204255857 U CN 204255857U CN 201420606299 U CN201420606299 U CN 201420606299U CN 204255857 U CN204255857 U CN 204255857U
- Authority
- CN
- China
- Prior art keywords
- microchannel
- spr
- golden film
- microslide
- coated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn - After Issue
Links
Landscapes
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
Based on the index sensor of the high sensitivity Wide measuring range of SPR, feature comprises: LASER Light Source, optoisolator, Polarization Controller, microchannel, and Side polishing fiber single-mode fiber microslide is coated with the chip of golden film, spectrometer, miniflow pump; Described SPR sensing unit forms by microslide being coated with the chip of golden film, microchannel and Side polishing fiber single-mode fiber; Microchannel utilizes optical etching technology to be formed at the remaining covering of Side polishing fiber single-mode fiber; Chip microslide being coated with golden film utilizes ion sputtering to sputter golden film at silicon substrate surface; Due to evanscent field strong in microchannel and SPR effect, when microchannel refractive index subtle change, SPR resonance wavelength produces large drift; The effective refractive index increasing chip and microchannel interface microslide being coated with golden film is poor, improves measurement range.The utility model proposes the index sensor of the high sensitivity Wide measuring range based on SPR of a kind of practicality, low cost.
Description
Technical field
The utility model belongs to technical field of optical fiber sensing, particularly based on the index sensor of the high sensitivity Wide measuring range of SPR.
Background technology
Surface plasma body resonant vibration (Surface Plasmon Resonance, be called for short SPR) refer to the P type polarization polychromatic light that sends when the light source interface through film metal and medium, if meet incident angle to be greater than the cirtical angle of total reflection, define the gradient distribution of electron concentration from the teeth outwards, form plasma oscillation, form surface plasma wave, due to the existence of surperficial evanescent wave field and metal complex index of refraction, the light part meeting resonance wavelength is absorbed, and the light of its commplementary wave length is by the phenomenon reflected.Nineteen sixty-eight, the method that roentgen Otto and Kretschmann adopts separately (Attenuated Total Reflection is called for short ATR) achieves exciting of the surface plasma of optical frequency wave band in an experiment.
In two more than ten years in the past, due to based on surface plasma body resonant vibration (SPR) the sensor high sensitivity of Kretschmann structure and high resolving power characteristic, the concern of more and more people is obtained based on the research of surface plasma (SPR) and application thereof, it is mainly used in biological and chemical sensory field, at present based on the SPR analyser commercialization of Kretschmann structure.Volume ratio based on the spr sensor of Kretschmann structure is comparatively large, and be unfavorable for the integrated of SPR analyser, meanwhile, the measurement range that the spr sensor based on this structure has is narrow.2012, the people such as the Siu Pang Ng of City University of Hong Kong are published in the paper of Optics Express periodical, in conjunction with the change of measuring NaCl solution concentration based on the spr sensor of Kretschmann structure, interference with common path technology and carrier demodulation techniques, the variation range of corresponding refractive index is 1.3333 ~ 1.3648, achieves 3 × 10
-2the measurement of RIU.But light channel structure is complicated in this article, uses birefringece crystal in light path, increase cost.2013, the people such as A.Giorgini delivered the method improving sensing sensitivity based on optical resonator at Optics Letters, refractometry scope is 1.320 ~ 1.332,1.2 × 10
-2the change of RIU.1993, the people such as Jorgenson achieve the optical fiber chemical industry sensor based on SPR experimentally, compared to glass prism SPR sensor, it has, and volume is little, response is fast, cost is low, can be implemented in the advantages such as line Real-Time Monitoring, has larger Research Prospects and economic worth.In recent years, the focus becoming research at present based on the sensitivity of optical fiber surface plasmon resonance body (SPR) sensor and measurement range how is improved.In configuration aspects, structure plasma chamber body structure is a kind of mode of the raising measurement sensistivity based on optical fiber surface plasmon resonance body (SPR).2005, State of Arizona, US found the article that the people such as the Soame Banerji of university deliver Optics Letters and points out, utilizes the sensor of the SPR double-sensing passage based on optical fiber to realize 2 × 10
-4the measurement of RIU resolution, the measurement range 1.328 ~ 1.346,1.8 × 10 of refractive index
-2the measurement range of RIU refractive index.In this article, need on pretreatment at the sensing unit of gold-plated film plating polymkeric substance, and thickness 100nm needs strict control, processing technology and sensing arrangement are very complicated.In sum, surface plasma body resonant vibration (SPR) sensor based on prism structure has high measurement sensistivity, but measurement range is very narrow, and volume is large; Based on the spr sensor of optical fiber structure, in order to improve measurement sensistivity, need to construct new structure, measurement range is also narrow, and, no matter be all 10 based on the refractometry scope of prism structure or the SPR sensor-based system of optical fiber structure
-2once, these shortcomings seriously hinder development based on the surface plasma resonance sensor of optical fiber structure and application to RIU.
The problem such as complicated for the above-mentioned surface plasma body resonant vibration based on optical fiber structure (SPR) sensor sense header structure, measurement range is narrow, sensitivity is low, the utility model proposes a kind of index sensor of the high sensitivity Wide measuring range based on SPR, structure is simple, cost is low, has very strong practical value.
Utility model content
In order to overcome the problems such as complicated based on surface plasma body resonant vibration (SPR) the sensor sense header structure of optical fiber structure, measurement range is narrow, sensitivity is low, the utility model proposes a kind of structure simple, cost is low, has the index sensor of the high sensitivity Wide measuring range based on SPR of very strong practical value.
The technical scheme that the utility model is taked for technical solution problem:
Based on the index sensor of the high sensitivity Wide measuring range of SPR, comprising: wideband light source, optoisolator, Polarization Controller, microchannel, Side polishing fiber single-mode fiber, microslide are coated with the chip of golden film, spectrometer, miniflow pump.
The output terminal of wideband light source is connected with optoisolator input end, the output terminal of optoisolator is connected with Polarization Controller, one end of Side polishing fiber single-mode fiber is connected with the output terminal of Polarization Controller, the other end of Side polishing fiber single-mode fiber is connected with spectrometer, miniflow delivery side of pump is connected with the input end of microchannel, and chip microslide being coated with golden film covers on microchannel.Optical etching technology is utilized to form microchannel at the remaining covering of Side polishing fiber single-mode fiber, microchannel is vertical with the transmission direction of light, the degree of depth of microchannel groove is between 1nm to 15nm, and the width of microchannel is less than or equal to 1 μm, and the maximum sampling volume of microchannel is 10 μ L; Chip microslide being coated with golden film utilizes ion sputtering to sputter golden film in slide surface, and the thickness of golden film is between 30nm to 50nm, and the root mean square of surfaceness is less than or equal to 3nm; The thickness of Side polishing fiber single-mode fiber residue covering, between 100nm to 200nm, ensures that basic mode is coupled to SPR sensing unit; SPR sensing unit forms by microslide being coated with the chip of golden film, microchannel and Side polishing fiber single-mode fiber, the change of refractive index in microchannel, cause the drift of SPR resonance wavelength, increase effective refractive index microslide being coated with the chip 6 of golden film and the interface of microchannel 5 poor, improve measurement range; Spectrometer is as signal test system.
The beneficial effects of the utility model are:
The utility model utilizes chip, microchannel and Side polishing fiber single-mode fiber microslide being coated with golden film to form SPR sensing head, when in microchannel, the refractive index of measurand changes, the generation drift of SPR resonance wavelength, by the drift value of determined wavelength, in conjunction with the characteristic of spr sensor, realize the high-sensitivity measurement of refractive index;
The clearance that the utility model utilizes microchannel to be formed, the interface effective refractive index increasing chip and microchannel microslide being coated with golden film is poor, and the wide region realizing refractive index detects;
The utility model utilizes spectrometer as signal demodulating system, can realize the on-line checkingi that refractive index is real-time.
Accompanying drawing explanation
Fig. 1 is the index sensor structural representation of the high sensitivity Wide measuring range based on SPR.
Fig. 2 is an instantiation lab diagram.
Embodiment
Below in conjunction with accompanying drawing, utility model is further described.
As shown in Figure 1, based on the index sensor of the high sensitivity Wide measuring range of SPR, comprising: wideband light source 1, optoisolator 2, Polarization Controller 3, microchannel 5, Side polishing fiber single-mode fiber 4, microslide are coated with the chip 6 of golden film, spectrometer 7, miniflow pump 8;
Working method of the present utility model is: wideband light source 1 produces flashlight, optoisolator 2 is input to by single-mode transmission optical fiber, the light signal that optoisolator 2 exports controls output by Polarization Controller 3 and becomes P polarized light, P polarized light is coupled to Side polishing fiber single-mode fiber 4, because the thickness of Side polishing fiber single-mode fiber covering reduces, some patterns of fibre core and covering are coupled in microchannel 5 with the form of evanescent wave to be transmitted, at microchannel 5, place forms strong evanscent field, when meeting pattern match condition, the surface that microchannel 5 and microslide are coated with the chip 6 of golden film produces surface plasmon resonance effect, the light wave producing surface plasmon resonance effect exists with the form of surface plasma-wave, remaining light wave continues to propagate, transmission spectrum is received by spectrometer 7, refractive index liquid is activated to microchannel 5 by miniflow pump 8.Microslide is coated with the chip 6 of golden film, microchannel 5 and Side polishing fiber single-mode fiber 4 and forms SPR sensing unit, when in microchannel 5, the refractive index of measurand changes, the generation drift of SPR resonance wavelength, by the drift value of determined wavelength, in conjunction with the characteristic of spr sensor, realize the high-sensitivity measurement of refractive index; When there not being REFRACTIVE LIQUID to flow through microchannel 5, the medium of microchannel 5 is air, increases effective refractive index microslide being coated with the chip 6 of golden film and the interface of microchannel 5 poor, guarantees that this sensor has Wide measuring range.
The gordian technique that this device can realize measuring based on the index sensor of the high sensitivity Wide measuring range of SPR has:
1, the structure of optical fibre refractivity sensing unit.The basis realizing high sensitivity Wide measuring range sensing by microslide being coated with the optical fibre refractivity transducing head structure that the chip of golden film, microchannel and Side polishing fiber single-mode fiber form.
2, the degree of depth of microchannel groove and width.The position of the resonance wavelength of the effect of depth SPR of microchannel groove, the intensity of widths affect evanescent wave evanscent field in microchannel groove of microchannel groove, this will affect the measurement of refractive index sensitivity, therefore, the degree of depth of microchannel groove should be strict controlled between 1nm ~ 15nm, width control system is below 1 μm, and maximum sampling volume controls at 10 below μ L.
3, the thickness of Side polishing fiber single-mode fiber residue covering.Along with the reduction of cladding thickness, increasing core mode can be made to be coupled to clearance, if but covering is too thin, and can cause occurring that pattern is not mated, core mode is revealed completely, loss is too large; Very little, SPR coupling efficiency reduces the too thick pattern causing being coupled to clearance, and the thickness therefore remaining covering should control between 100nm ~ 200nm.
4, microslide is coated with thickness and the roughness of the chip gold film of golden film.Gold film thickness can affect acuity and the extinction ratio of the resonance wavelength harmonic peak of SPR, the degree of roughness on gold film surface can affect the loss of surface plasma, and then affect the performance of SPR, therefore, the thickness of gold film should strictly between control 30nm ~ 50nm, and the root mean square of the roughness on golden film surface should be less than or equal to 3nm.
5, according to surface plasma body resonant vibration theory, only have P polarized light ability excitating surface plasma ripple (SPW), the flashlight of the Side polishing fiber single-mode fiber of input is complete P polarized light therefore to utilize Polarization Controller to ensure; The stability of light source is also the important sources of spr sensor error, should ensure the stability of light source works.
In a specific embodiment of the present utility model, the stable halogen tungsten lamp of Thorlabs, between model SLS201 (/M) output wavelength 300 to 2600nm; Optoisolator model is IO-2D-633-VLPa, and operation wavelength is 560-663nm, isolation between 35-40dB; Polarization Controller model is PLC-900; Side polishing fiber single-mode fiber core diameter is 9 μm, and the thickness of residue covering is 100nm, and axial length is 10 μm; Gold film thickness is 45nm, and surfaceness root mean square is 2.3nm; The degree of depth of microchannel groove is 5nm, and width is 500nm; Refractometry scope is 1.3 ~ 1.4; As shown in Figure 2, experimental data is as shown in table 1 for experimental result picture:
The SPR resonance wavelength that table 1 different refractivity is corresponding
| Refractive index | 1.3 | 1.35 | 1.37 | 1.39 | 1.4 |
| SPR resonance wavelength (nm) | 880.2 | 1009.86 | 1076.03 | 1174.52 | 1247.3 |
Shown in the above and figure is only preferred implementation of the present utility model.Those of ordinary skill in the art, under the prerequisite not departing from principle of the present utility model, can also make some modification and improvement, and these also should be considered as belonging to protection domain of the present utility model.
Claims (1)
1. based on the index sensor of the high sensitivity Wide measuring range of SPR, comprise: LASER Light Source, optoisolator, Polarization Controller, microchannel, Side polishing fiber single-mode fiber, microslide are coated with the chip of golden film, spectrometer, miniflow pump, it is characterized in that:
The output terminal of LASER Light Source is connected with optoisolator input end, the output terminal of optoisolator is connected with Polarization Controller, one end of Side polishing fiber single-mode fiber is connected with the output terminal of Polarization Controller, the other end of Side polishing fiber single-mode fiber is connected with spectrometer, miniflow delivery side of pump is connected with the input end of microchannel, and chip microslide being coated with golden film covers on microchannel;
Optical etching technology is utilized to form microchannel at the remaining covering of Side polishing fiber single-mode fiber, microchannel is vertical with the transmission direction of light, the degree of depth of microchannel groove is between 1nm to 15nm, and the width of microchannel is less than or equal to 1 μm, and the maximum sampling volume of microchannel is 10 μ L; Chip microslide being coated with golden film utilizes ion sputtering to sputter golden film in slide surface, and the thickness of golden film is between 30nm to 50nm, and the root mean square of surfaceness is less than or equal to 3nm; The thickness of Side polishing fiber single-mode fiber residue covering, between 100nm to 200nm, ensures that basic mode is coupled to SPR sensing unit; SPR sensing unit forms by microslide being coated with the chip of golden film, microchannel and Side polishing fiber single-mode fiber, the change of refractive index in microchannel, cause the drift of SPR resonance wavelength, increase effective refractive index microslide being coated with the chip (6) of golden film and the interface of microchannel (5) poor, improve measurement range; Spectrometer is as signal test system.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420606299.0U CN204255857U (en) | 2014-10-20 | 2014-10-20 | Based on the index sensor of the high sensitivity Wide measuring range of SPR |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420606299.0U CN204255857U (en) | 2014-10-20 | 2014-10-20 | Based on the index sensor of the high sensitivity Wide measuring range of SPR |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204255857U true CN204255857U (en) | 2015-04-08 |
Family
ID=52960152
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420606299.0U Withdrawn - After Issue CN204255857U (en) | 2014-10-20 | 2014-10-20 | Based on the index sensor of the high sensitivity Wide measuring range of SPR |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204255857U (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104280363A (en) * | 2014-10-20 | 2015-01-14 | 中国计量学院 | SPR (Surface Plasma Resonance) based reflective index sensor with high sensitivity and wide measurement range |
| CN105259141A (en) * | 2015-10-30 | 2016-01-20 | 山东大学 | Surface plasma resonance high-refractive-index sensor based on porous aluminum membrane structure and application thereof |
| CN104280363B (en) * | 2014-10-20 | 2017-01-04 | 中国计量学院 | The index sensor of high sensitivity Wide measuring range based on surface plasma body resonant vibration |
| CN108872110A (en) * | 2018-07-04 | 2018-11-23 | 暨南大学 | A kind of high refractive index sensitivity optical fiber microfluidic sensor and preparation method thereof |
| CN109443704A (en) * | 2018-09-28 | 2019-03-08 | 北京航空航天大学 | A kind of the optical strength detection method and system of phase enhancing |
| CN112729357A (en) * | 2020-12-28 | 2021-04-30 | 重庆邮电大学 | Polished fiber-microstructure fiber fluid sensing system based on Sagnac interferometer |
-
2014
- 2014-10-20 CN CN201420606299.0U patent/CN204255857U/en not_active Withdrawn - After Issue
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104280363A (en) * | 2014-10-20 | 2015-01-14 | 中国计量学院 | SPR (Surface Plasma Resonance) based reflective index sensor with high sensitivity and wide measurement range |
| CN104280363B (en) * | 2014-10-20 | 2017-01-04 | 中国计量学院 | The index sensor of high sensitivity Wide measuring range based on surface plasma body resonant vibration |
| CN105259141A (en) * | 2015-10-30 | 2016-01-20 | 山东大学 | Surface plasma resonance high-refractive-index sensor based on porous aluminum membrane structure and application thereof |
| CN105259141B (en) * | 2015-10-30 | 2018-08-03 | 山东大学苏州研究院 | It is a kind of based on the surface plasma resonance high refractive index sensor of porous aluminium structure and its application |
| CN108872110A (en) * | 2018-07-04 | 2018-11-23 | 暨南大学 | A kind of high refractive index sensitivity optical fiber microfluidic sensor and preparation method thereof |
| CN109443704A (en) * | 2018-09-28 | 2019-03-08 | 北京航空航天大学 | A kind of the optical strength detection method and system of phase enhancing |
| CN109443704B (en) * | 2018-09-28 | 2021-11-12 | 北京航空航天大学 | Phase-enhanced optical intensity detection method and system |
| CN112729357A (en) * | 2020-12-28 | 2021-04-30 | 重庆邮电大学 | Polished fiber-microstructure fiber fluid sensing system based on Sagnac interferometer |
| CN112729357B (en) * | 2020-12-28 | 2023-09-26 | 重庆邮电大学 | Polished optical fiber-microstructure optical fiber fluid sensing system based on Sagnac interferometer |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN204255857U (en) | Based on the index sensor of the high sensitivity Wide measuring range of SPR | |
| Zhao et al. | Fiber optic SPR sensor for liquid concentration measurement | |
| Jain et al. | Photonic crystal fiber-based SPR sensor for broad range of refractive index sensing applications | |
| Wang et al. | A novel plasmonic refractive index sensor based on gold/silicon complementary grating structure | |
| CN104215610B (en) | Plasma resonance chamber-based fiber surface plasma sensor | |
| CN103558206B (en) | Phasmon strengthens Raman spectrum detection chip and applies its pick-up unit | |
| CN109358038A (en) | Microstructured optical fibers surface plasma body resonant vibration Multifunction Sensor and preparation method thereof | |
| CN205656127U (en) | Reflective SPR refracting index sensor based on tapered fiber long period grating | |
| Zhao et al. | Localized surface plasmon resonance sensing structure based on gold nanohole array on beveled fiber edge | |
| Verma | Sensitivity enhancement of a lossy mode resonance based tapered fiber optic sensor with an optimum taper profile | |
| Wang et al. | Double D-shaped optical fiber temperature and humidity sensor based on ethanol and polyvinyl alcohol | |
| CN105277513A (en) | Surface plasmon resonance refraction index sensor based on optical fiber micro-rings | |
| Wang et al. | High-performance tapered fiber surface plasmon resonance sensor based on the graphene/Ag/TiO2 layer | |
| Zhao et al. | Improvement of the sensitivity of the surface plasmon resonance sensors based on multi-layer modulation techniques | |
| CN109554666A (en) | A kind of preparation method of conical fiber SERS probe | |
| CN110146468B (en) | Surface plasma optical fiber sensor with circular composite hole array structure | |
| Xin et al. | Ultrasensitive optical detection of water pressure in microfluidics using smart reduced graphene oxide glass | |
| Liu et al. | Two-dimensional transition metal dichalcogenides-based high sensitivity lossy mode refractive index sensor | |
| CN104991206B (en) | A kind of Measurement Method for Magnetic Field based on Applications of surface plasmon resonance | |
| Jiang et al. | Specific detection of mercury ions based on surface plasmon resonance sensor modified with 1, 6-hexanedithiol | |
| CN104280363A (en) | SPR (Surface Plasma Resonance) based reflective index sensor with high sensitivity and wide measurement range | |
| Ju et al. | Experimental demonstration of surface plasmon resonance enhancement of the tapered optical fiber coated with Au/Ti thin film | |
| CN104280363B (en) | The index sensor of high sensitivity Wide measuring range based on surface plasma body resonant vibration | |
| CN204165900U (en) | Based on the inclined optical fiber grating surface plasma resonance biosensor that M-Z interferes | |
| CN206594060U (en) | A kind of index sensor for the Michelson structure that CNT is modified based on thin-core fibers |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20150408 Effective date of abandoning: 20161019 |
|
| C25 | Abandonment of patent right or utility model to avoid double patenting |