CN204224690U - A kind of mask plate stereoplasm frame microscope carrier - Google Patents
A kind of mask plate stereoplasm frame microscope carrier Download PDFInfo
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- CN204224690U CN204224690U CN201420559207.8U CN201420559207U CN204224690U CN 204224690 U CN204224690 U CN 204224690U CN 201420559207 U CN201420559207 U CN 201420559207U CN 204224690 U CN204224690 U CN 204224690U
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- mask plate
- pad
- stereoplasm frame
- microscope carrier
- leveling
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Abstract
The utility model discloses a kind of mask plate stereoplasm frame microscope carrier, microscope carrier comprises pedestal, jacking mechanism, levelling gear, back up pad and locating mechanism, the utility model provides the carrying platform of a stereoplasm frame for mask plate assembling process, this carrying platform has stronger maneuvering ability and practicality, can meet the requirement of mask plate assembled with high precision preferably.
Description
Technical field
The utility model belongs to OLED mask plate assembling field, relates to a kind of mask plate stereoplasm frame microscope carrier.
Background technology
Organic light emitting display (Organic Light-Emitting Diode, be called for short OLED) be follow-on technique of display, with liquid-crystal display (the Liquid Crystal Display used at present, being called for short LCD) technique of display compares, there is angle of visibility large, beautiful in colour, the advantage such as low in energy consumption, can substitute the lcd technology of current main flow gradually.
In the making processes of OLED display panel, wherein the deposition of organic layer can use mask plate, Figure 1 shows that the schematic diagram adopting mask plate evaporation organic materials.Mask plate 10, can be assembled on stereoplasm frame 11 by techniques such as welding before evaporation due to thinner, Figure 2 shows that the floor map be fixed on by mask plate 10 on stereoplasm frame.During evaporation, mask plate 10 is fixed on brace table 12 by stereoplasm frame 11, organic materials in vapor deposition source 13 is by below evaporation and diffusion to mask plate 10, mask plate 10 is provided with opening 100 in certain position, organic materials is deposited on position corresponding in deposition substrate 14 by opening 100, forms deposited organic layer.
In order to improve the production efficiency of OLED display panel, need the size of mask plate to do greatly, the positional precision due to mask plate upper shed is the key quality parameters of mask plate, and the requirement that the size increasing mask plate is assembled into stereoplasm frame to mask plate is more and more higher; In addition, the size due to mask plate is done greatly, and the stereoplasm frame quality for permanent mask plate is more and more heavier, and pure artificial loading, adjustment are more restricted.
Based on this, industry needs a kind of technical scheme that can better overcome the above problems badly.
Utility model content
According to this patent background technology, in order to improve the production efficiency of OLED display panel, the size of mask plate is needed to do greatly, positional precision due to mask plate upper shed is the key quality parameters (positional precision of mask plate upper shed directly affects the quality of its evaporation organic materials) of mask plate, and the requirement that the size increasing mask plate is assembled into stereoplasm frame to mask plate is more and more higher; In addition, the size due to mask plate is done greatly, and the stereoplasm frame quality for permanent mask plate is more and more heavier, and pure artificial loading, adjustment are more restricted.
In view of this, the utility model provides a kind of mask plate stereoplasm frame microscope carrier, be intended to for mask plate assembling process provides the carrying platform of a stereoplasm frame, this carrying platform has stronger maneuvering ability and practicality, can meet preferably mask plate assembled with high precision requirement.
A kind of mask plate stereoplasm frame microscope carrier concrete scheme that the utility model provides is as follows, this microscope carrier comprises: pedestal, jacking mechanism, levelling gear, back up pad and locating mechanism, described pedestal is made up of base plate and the side plate be arranged on described base plate, for installing described jacking mechanism and described levelling gear; Described jacking mechanism is made up of with at least 2 top boards be horizontally set on above described lifting drive the lifting drive that at least 4 are vertically set on described pedestal base plate, and described top board completes rising or down maneuver by the motion of described lifting drive; Described levelling gear is vertically set on the YE on described pedestal by least 4 and the leveling board be arranged on above each YE is formed; Described back up pad is arranged on above the leveling board of described levelling gear, and by coordinating the level attitude regulating the described YE of described levelling gear can adjust described back up pad, described back up pad is for carrying described stereoplasm frame; Described locating mechanism is arranged on the top board of described back up pad or described jacking mechanism, and described stereoplasm frame to be positioned in described back up pad allocation really by described locating mechanism.
Further, the base plate forming described pedestal is U-shaped structure or closed skeleton construction, described base plate two offside symmetry be provided with two blocks of side plates perpendicular to described base plate.
Move by preset path to enable jacking mechanism, lifting drive side described in each of described jacking mechanism is also supporting is provided with jack-up liner, described jack-up liner is made up of the jack-up axis of guide and jack-up guide base, one end of the described jack-up axis of guide is fixed on below described top board, described jack-up guide base is fixed on described pedestal, and the described jack-up axis of guide drives described top board to move in the vertical direction under the restriction of described jack-up pedestal.
Further, described jacking mechanism is vertically set on described lifting drive on described pedestal by 4 and 2 top boards be horizontally set on above described lifting drive are formed, near the corner being fixed on described pedestal base plate of 4 described lifting drive dispersion symmetries, described horizontally disposed top board is string configuration, described top board and two overlaps described lifting drive and mates, the upper end of described lifting drive is connected with described top board by floating junction, and described lifting drive is for being electric cylinder or cylinder.
Further the levelling gear of microscope carrier is limited, described levelling gear includes 4 YEs, on the base plate being arranged on described pedestal that described 4 YEs dispersion is symmetrical, each described YE both sides are provided with a leveling liner, described leveling liner comprises fixing leveling guide base and the leveling tail rod of activity, described YE is connected with described leveling board by floating junction, and described in described YE both sides, the two ends of described leveling board are fixed in the leveling tail rod upper end of leveling liner.
The described back up pad of described mask plate stereoplasm frame microscope carrier is fixed on above the described leveling board of described levelling gear, described back up pad is the quadra structure of middle hollow out, its upper surface is provided with the sunk structure adapted with the top board of described jacking mechanism, when making described top board drop to lower-most point, the upper surface of described top board is not higher than the upper surface of described back up pad.
Further, described back up pad is fixed by the screw mated with described levelling gear.
Further, described back up pad is provided with the through hole adapted with the linkage part of described jacking mechanism.
Further, described locating mechanism is made up of preset pieces and cylinder, and described back up pad has at least two adjacent edges to be provided with cylinder.
The invention also discloses the inflation method of the above microscope carrier, it comprises the following steps:
Mask plate stereoplasm frame loads step, the described lifting drive of described jacking mechanism drives described top board to rise, described mask plate stereoplasm frame is placed on above described top board, described lifting drive drives described top board to decline, and described mask plate stereoplasm frame is supported by described back up pad;
Mask plate stereoplasm frame positioning step, by adjusting described locating mechanism, makes described stereoplasm frame to be positioned in described back up pad allocation really;
Mask plate stereoplasm frame leveling step, by coordinating the YE regulating described leveling structure, make described mask plate stereoplasm frame be in certain height location, and the upper surface of described mask plate stereoplasm frame has good planeness.
The jacking mechanism of microscope carrier described in the utility model can solve the problem of the larger mask plate stereoplasm frame of pure artificial loading weight, avoids the potential safety hazard of pure artificial loading; The levelling gear of described microscope carrier has multiple YE to form, and Electronic control has degree of precision, coordinates to regulate multiple YE it can effectively control to be loaded in the position of mask plate stereoplasm frame upper surface place plane on bracing frame; Described stereoplasm frame can be positioned in described back up pad allocation really by the locating mechanism of described microscope carrier.Concentrate above function and advantage, microscope carrier provided by the utility model can assemble for mask plate the operating environment providing a good stability, controlling excellence.
Concrete structure of the present utility model and advantage will part provide in the following description, and part will become obvious from the following description, or be recognized by practice of the present utility model.
Accompanying drawing explanation
Above-mentioned and/or additional aspect of the present utility model and advantage will become obvious and easy understand from the following description of the accompanying drawings of embodiments, wherein:
Figure 1 shows that the schematic diagram adopting mask plate evaporation organic materials;
Figure 2 shows that the floor map of mask plate;
Fig. 3 is a kind of structural representation of the stereoplasm frame fixed for mask plate;
Fig. 4 is a kind of three-dimensional structure diagram that the utility model mask plate stereoplasm frame microscope carrier jacking mechanism rises;
Fig. 5 is a kind of structural representation of pedestal in the utility model mask plate stereoplasm frame microscope carrier;
Fig. 6 is the enlarged diagram of 40 parts in Fig. 4;
Fig. 7 is a modular construction schematic diagram of levelling gear in the utility model mask plate stereoplasm frame microscope carrier;
Fig. 8 is a kind of three-dimensional structure diagram that the utility model mask plate stereoplasm frame microscope carrier jacking mechanism drops to lower-most point;
Fig. 9 is that mask plate stereoplasm frame is placed on schematic diagram above top board;
Figure 10 is that mask plate stereoplasm frame supports schematic diagram by microscope carrier back up pad;
Figure 11 is the schematic diagram of microscope carrier adjustment mask plate stereoplasm frame upper surface position.
In figure, 10 is mask plate, and 100 is mask plate opening, and 11 is that 12 is brace table, and 13 is vapor deposition source, and 14 is deposition substrate, and 130 is organic materials, and 131 is deposited organic layer for the fixing stereoplasm frame of mask plate;
40 is region to be amplified;
41 is pedestal, and 411 is the base plate forming pedestal, and 412 is the side plate forming pedestal, and 413 is auxiliary side plates, and 414 is auxiliary connecting rod;
42 is jacking mechanism, and 421 sink the lifting drive of jacking mechanism for hook, and 422 is the top board forming jacking system, and 423 be the jack-up liner of formation jacking system, and 4231 is the jack-up axis of guide, and 4232 is jack-up guide base;
43 is levelling gear, and 431 is form the YE of levelling gear, 432 for form levelling gear leveling liner, 4321 is leveling guide base, and 4322 is leveling tail rod, and 433 be the leveling board of formation levelling gear;
44 is back up pad;
45 is locating mechanism, and 451 is the cylinder assembly forming locating mechanism 45, and 452 is the preset pieces forming locating mechanism 45;
The planimetric position, upper surface place that O-O ' is mask plate stereoplasm frame 11.
Embodiment
Be described below in detail embodiment of the present utility model, the example of described embodiment is shown in the drawings, and wherein same or similar label represents same or similar element or has element that is identical or similar functions from start to finish.Being exemplary below by the embodiment be described with reference to the drawings, only for explaining the utility model, and can not being interpreted as restriction of the present utility model.
In description of the present utility model, it will be appreciated that, term " on ", D score, the orientation of the instruction such as " side " or position relationship be based on orientation shown in the drawings or position relationship, only the utility model and simplified characterization for convenience of description, instead of the device of instruction or hint indication or element must have specific orientation, with specific azimuth configuration and operation, therefore can not be interpreted as restriction of the present utility model.
In description of the present utility model, it should be noted that, unless otherwise clearly defined and limited, term " connection ", " connection ", " being connected ", " connection ", " cooperation " should be interpreted broadly, and such as, can be fixedly connected with, connecting integratedly, also can be removably connect; It can be the connection of two element internals; Can be directly be connected, also indirectly can be connected by intermediary; " cooperation " can be face and the coordinating of face, and also can be point and the coordinating of face or line and face, also comprise the cooperation of hole axle, for the ordinary skill in the art, particular case can understand the concrete meaning of above-mentioned term in the utility model.
A kind of mask plate stereoplasm frame microscope carrier specific embodiment that the utility model provides is as follows, as shown in Figure 4, this microscope carrier comprises: pedestal 41, jacking mechanism 42, levelling gear 43, back up pad 44 and locating mechanism 45, is below describing in further detail this microscope carrier.
Fig. 5 is the base structure schematic diagram of a specific embodiment, and as shown in Figure 5, pedestal 41 is made up of base plate 411 and the side plate 412 be arranged on base plate 411.In the present embodiment, the overall pattern of base plate 411 is U-shaped structure, the monosymmetric of U-shaped structure base slab is provided with two blocks of side plates 412 perpendicular to base plate 411, the basic structure of this Structure composing pedestal 41, and jacking mechanism 42, levelling gear 43 are arranged in this foundation structure.
In actual application of the present utility model, consider the stability of pedestal 41, in embodiments more of the present utility model, the two blocks of side plates 412 being symmetricly set on base plate 411 are also connected to form an one-piece construction by other auxiliary side plates 413 or auxiliary connecting rod 414, as shown in Figure 5, auxiliary side plates 413 or auxiliary connecting rod 414 can phase trans-substitutions.In other embodiments of the present utility model, the base plate forming pedestal 41 is closed skeleton construction, namely increases by a connecting plate at the non-closed end of U-shaped structure base slab as shown in Figure 5 and forms closed skeleton construction (not shown).
As a specific embodiment of the present utility model, as Fig. 4, shown in Fig. 6 (Fig. 6 is the enlarged diagram of 40 parts in Fig. 4), the jacking mechanism 42 forming mask plate stereoplasm frame microscope carrier vertically arranges lifting drive 421 on pedestal 41 base plate 411 by 4 and 2 top boards 422 be horizontally set on above lifting drive are formed, 4 lifting drives 421 disperse near the symmetrical corner being fixed on pedestal 41 base plate 411, horizontally disposed top board 422 is string configuration, top board 422 and two overlaps lifting drive 421 and mates, namely as shown in Figure 4, the two ends of one block length bar top board 422 are fixed on pedestal 41 the same side two and overlap lifting drive 421 upper end.In an embodiment, the upper end of lifting drive 421 is connected with top board 422 by floating junction, and in the utility model, lifting drive 421 is electric cylinder or cylinder, and as a kind of preferred embodiment, it is cylinder.
In the utility model, the top board 422 forming jacking mechanism 42 needs to move in vertical direction, namely lifting drive 421 can only drive top board 422 to move in vertical direction, can move by preset path to make jacking mechanism 42, in embodiments more of the present utility model, each lifting drive 421 side of jacking mechanism 42 is also supporting is provided with jack-up liner 423, jack-up liner 423 is made up of the jack-up axis of guide 4231 and jack-up guide base 4232 cooperation, as shown in Figure 6, one end of the jack-up axis of guide 4231 is fixed on below top board 422, jack-up guide base 4232 is fixed on the side plate 412 of pedestal 41, the jack-up axis of guide 4231 drives top board 422 to move in the vertical direction under the restriction of described jack-up pedestal 4232.
As another specific embodiment of the utility model, levelling gear 43 is vertically set on the YE 431 on pedestal 41 by 4 and the leveling board 433 be arranged on above each YE 431 is formed, and 4 YEs 431 disperse on the symmetrical base plate 411 being arranged on pedestal 41.Figure 7 shows that a modular construction schematic diagram of levelling gear 43 in the utility model the utility model mask plate stereoplasm frame microscope carrier, it comprises YE 431 and is arranged on the leveling board 433 above each YE 431, YE 431 is connected with leveling board 433 by floating junction (not shown), YE 431 provides power for levelling gear 43, and leveling board 433 is as the external tapping of levelling gear 43.In the present embodiment, each YE 431 both sides are also provided with a leveling liner 432, leveling liner 432 comprises fixing leveling guide base 4321 and the leveling tail rod 4322 of activity, the two ends of leveling board 433 are fixed in leveling tail rod 4322 upper end of leveling liner 432, by the mating reaction of YE 431 both sides leveling liner 432, the effective direction of motion controlling leveling board 433 on levelling gear 43.
In the utility model, back up pad 44 is arranged on above the leveling board 433 of levelling gear 43, in certain embodiments, it is fixed by screw mechanism, by coordinating the YE 431 regulating levelling gear 43, the level attitude being fixed on adjustment plate 433 upper support plate 44 can be adjusted, above back up pad 44, carry stereoplasm frame 11, thus reach the position of adjustment stereoplasm frame 11 upper surface place plane, to meet follow-up mask plate assembling requirement.
In the embodiment above, the back up pad 44 of mask plate stereoplasm frame microscope carrier is the quadra structure of middle hollow out, adapt with the contour structures of the stereoplasm frame 11 of carried, its upper surface is provided with the sunk structure adapted with the top board 422 of jacking mechanism 42, when making top board 422 drop to lower-most point, the upper surface of top board 422 not higher than the upper surface of back up pad 44, as shown in Figure 8.In addition, back up pad 44 is provided with the through hole adapted with the linkage part of jacking mechanism 42 (i.e. the connecting rod of controlroof 422 rise and fall and the jack-up axis of guide 4231), as shown in Figure 6.
In another specific embodiment of the present utility model, as shown in Figure 8, the locating mechanism 45 of mask plate stereoplasm frame microscope carrier is arranged on the top board 422 of back up pad 44 or jacking mechanism 42, locating mechanism 45 is made up of preset pieces 452 and cylinder assembly 451, and the position of preset pieces 452 vertex is higher than the upper surface of back up pad 44.In addition, back up pad 44 has at least two adjacent edges to be provided with cylinder assembly 451, in the present embodiment, two adjacent edges of back up pad 44 are provided with cylinder assembly 451, as shown in Figure 8, back up pad 44 two adjacent edges be respectively provided with two cylinder assemblies 451, be provided with preset pieces 452 not arranging another two adjacent edges of cylinder assembly 451, in the present embodiment, preset pieces 452 is arranged on the top board 422 of back up pad 44 or jacking mechanism 42.Mask plate stereoplasm frame 11 is placed in after in back up pad 44, cylinder assembly 451 pairs of mask plate stereoplasm frames 11 of locating mechanism 45 provide certain pressure, mask plate stereoplasm frame 11 is made to hold out against the preset pieces 452 of locating mechanism 45, thus reach locating mechanism 45 pairs of mask plate stereoplasm frames 11 and fix, make mask plate stereoplasm frame 11 to be positioned in back up pad 44 allocation really.
In the utility model, top board 422 is done by the motion of lifting drive 421 and rises or down maneuver, thus realize being placed in mask plate stereoplasm frame above top board 422 and being loaded in the back up pad 44 of microscope carrier, consider the effect essence of jacking mechanism, as other embodiments of the present utility model, the jacking mechanism 42 forming the utility model microscope carrier can comprise more than 4 lifting drives 421 or the top board 422 that is horizontally set on more than 2 above lifting drive.
In other embodiments of the present utility model, because the size of mask plate stereoplasm frame 11 is comparatively large, the quantity of the YE that levelling gear 43 adopts can more than 4.
In the utility model, all adopt floating junction between the lifting drive 421 of jacking mechanism 42 and top board 422, between the YE 431 of levelling gear 43 and leveling board 433, the joint of bascule is conducive to mechanical adjustment process.
In order to better understand the utility model, below the inflation method of mask plate stereoplasm frame microscope carrier is explained in detail.
The inflation method of microscope carrier involved by the utility model, it comprises the following steps:
Mask plate stereoplasm frame loads step, as shown in Figure 4, the lifting drive 421 of jacking mechanism 42 drives top board 422 to rise, after arriving correct position, with reference to shown in Fig. 9, be placed on by mask plate stereoplasm frame 11 above top board 422, lifting drive 421 drives top board 422 to decline, mask plate stereoplasm frame 11 is supported by described back up pad 44, and design sketch as shown in Figure 10;
Mask plate stereoplasm frame positioning step, by adjusting described locating mechanism 45, namely by the action of cylinder 451, mask plate stereoplasm frame 11 is held out against on the preset pieces 452 of locating mechanism 45, thus arrive stereoplasm frame 11 and to be positioned in back up pad 44 allocation really;
Mask plate stereoplasm frame leveling step, by coordinating the YE 431 regulating leveling structure 43, mask plate stereoplasm frame 11 is made to be in certain height location, and the upper surface of mask plate stereoplasm frame 11 has good planeness, namely as shown in figure 11, plane O-O ' the position, upper surface place (mainly referring to height) of mask plate stereoplasm frame 11 adjusts according to the demand in actual application, and be in course of adjustment, the upper surface of mask plate stereoplasm frame 11 has good planeness.
Concrete component, structure or the feature mentioning that " embodiment ", " embodiment ", " illustrative examples " etc. mean to describe in conjunction with this embodiment any in the utility model is contained at least one embodiment of the present utility model.At this specification sheets, this schematic representation everywhere not necessarily refers to identical embodiment.And when describing concrete component, structure or feature in conjunction with any embodiment, advocate, the embodiment in conjunction with other realizes such component, structure or feature and all drops within the scope of those skilled in the art.
Although be described in detail embodiment of the present utility model with reference to multiple illustrative examples of the present utility model, but it must be understood that, those skilled in the art can design multiple other improvement and embodiment, these improve and embodiment by drop on the utility model principle spirit and scope within.Specifically, within the scope of aforementioned open, accompanying drawing and claim, rational modification and improvement can be made in the layout of component and/or sub-combination layout, and spirit of the present utility model can not be departed from.Except modification and the improvement of component and/or layout aspect, its scope is by claims and equivalents thereof.
Claims (9)
1. a mask plate stereoplasm frame microscope carrier, it comprises: pedestal, jacking mechanism, levelling gear, back up pad and locating mechanism, it is characterized in that: described pedestal is made up of base plate and the side plate be arranged on described base plate, for installing described jacking mechanism and described levelling gear; Described jacking mechanism is made up of with at least 2 top boards be horizontally set on above described lifting drive the lifting drive that at least 4 are vertically set on described pedestal base plate, and described top board completes rising or down maneuver by the motion of described lifting drive; Described levelling gear is vertically set on the YE on described pedestal by least 4 and the leveling board be arranged on above each YE is formed; Described back up pad is arranged on above the leveling board of described levelling gear, and by coordinating the level attitude regulating the described YE of described levelling gear can adjust described back up pad, described back up pad is for carrying described stereoplasm frame; Described locating mechanism is arranged on the top board of described back up pad or described jacking mechanism, and described stereoplasm frame to be positioned in described back up pad allocation really by described locating mechanism.
2. mask plate stereoplasm frame microscope carrier according to claim 1, is characterized in that, the base plate forming described pedestal is U-shaped structure or closed skeleton construction, described base plate two offside symmetry be provided with two blocks of side plates perpendicular to described base plate.
3. mask plate stereoplasm frame microscope carrier according to claim 1 and 2, it is characterized in that, lifting drive side described in each of described jacking mechanism is also supporting is provided with jack-up liner, described jack-up liner is made up of the jack-up axis of guide and jack-up guide base, one end of the described jack-up axis of guide is fixed on below described top board, described jack-up guide base is fixed on described pedestal, and the described jack-up axis of guide drives described top board to move in the vertical direction under the restriction of described jack-up pedestal.
4. mask plate stereoplasm frame microscope carrier according to claim 3, it is characterized in that, described jacking mechanism is vertically set on described lifting drive on described pedestal by 4 and 2 top boards be horizontally set on above described lifting drive are formed, near the corner being fixed on described pedestal base plate of 4 described lifting drive dispersion symmetries, described horizontally disposed top board is string configuration, described top board and two overlaps described lifting drive and mates, the upper end of described lifting drive is connected with described top board by floating junction, described lifting drive is for being electric cylinder or cylinder.
5. mask plate stereoplasm frame microscope carrier according to claim 1 and 2, it is characterized in that, described levelling gear includes 4 YEs, on the base plate being arranged on described pedestal that described 4 YEs dispersion is symmetrical, each described YE both sides are provided with a leveling liner, described leveling liner comprises fixing leveling guide base and the leveling tail rod of activity, described YE is connected with described leveling board by floating junction, described in described YE both sides, the two ends of described leveling board are fixed in the leveling tail rod upper end of leveling liner.
6. mask plate stereoplasm frame microscope carrier according to claim 5, it is characterized in that, described back up pad is fixed on above the described leveling board of described levelling gear, described back up pad is the quadra structure of middle hollow out, its upper surface is provided with the sunk structure adapted with the top board of described jacking mechanism, when making described top board drop to lower-most point, the upper surface of described top board is not higher than the upper surface of described back up pad.
7. mask plate stereoplasm frame microscope carrier according to claim 6, is characterized in that, described back up pad is fixed by the screw mated with described levelling gear.
8. mask plate stereoplasm frame microscope carrier according to claim 6, is characterized in that, described back up pad is provided with the through hole adapted with the linkage part of described jacking mechanism.
9. the mask plate stereoplasm frame microscope carrier according to claim 1 or 6, it is characterized in that, described locating mechanism is made up of preset pieces and cylinder assembly, and described back up pad has at least two adjacent edges to be provided with cylinder assembly.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420559207.8U CN204224690U (en) | 2014-09-27 | 2014-09-27 | A kind of mask plate stereoplasm frame microscope carrier |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420559207.8U CN204224690U (en) | 2014-09-27 | 2014-09-27 | A kind of mask plate stereoplasm frame microscope carrier |
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| Publication Number | Publication Date |
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| CN204224690U true CN204224690U (en) | 2015-03-25 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420559207.8U Withdrawn - After Issue CN204224690U (en) | 2014-09-27 | 2014-09-27 | A kind of mask plate stereoplasm frame microscope carrier |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104294216A (en) * | 2014-09-27 | 2015-01-21 | 昆山允升吉光电科技有限公司 | Mask plate hard frame microscope carrier and adjustment method thereof |
| CN108660415A (en) * | 2018-05-24 | 2018-10-16 | 京东方科技集团股份有限公司 | A kind of preparation method of mask plate, preparation facilities and mask plate |
| CN112647046A (en) * | 2020-11-18 | 2021-04-13 | 昆山工研院新型平板显示技术中心有限公司 | Vapor deposition apparatus and vapor deposition method |
-
2014
- 2014-09-27 CN CN201420559207.8U patent/CN204224690U/en not_active Withdrawn - After Issue
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104294216A (en) * | 2014-09-27 | 2015-01-21 | 昆山允升吉光电科技有限公司 | Mask plate hard frame microscope carrier and adjustment method thereof |
| CN104294216B (en) * | 2014-09-27 | 2019-05-10 | 昆山允升吉光电科技有限公司 | A kind of mask plate stereoplasm frame microscope carrier and its method of adjustment |
| CN108660415A (en) * | 2018-05-24 | 2018-10-16 | 京东方科技集团股份有限公司 | A kind of preparation method of mask plate, preparation facilities and mask plate |
| CN108660415B (en) * | 2018-05-24 | 2020-06-09 | 京东方科技集团股份有限公司 | Preparation method and preparation device of mask plate and mask plate |
| CN112647046A (en) * | 2020-11-18 | 2021-04-13 | 昆山工研院新型平板显示技术中心有限公司 | Vapor deposition apparatus and vapor deposition method |
| CN112647046B (en) * | 2020-11-18 | 2022-05-17 | 昆山工研院新型平板显示技术中心有限公司 | Vapor deposition apparatus and vapor deposition method |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20150325 Effective date of abandoning: 20190510 |