CN204206349U - A kind of semiconductor Fab production-line technique supervisory control system - Google Patents
A kind of semiconductor Fab production-line technique supervisory control system Download PDFInfo
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- CN204206349U CN204206349U CN201420720838.3U CN201420720838U CN204206349U CN 204206349 U CN204206349 U CN 204206349U CN 201420720838 U CN201420720838 U CN 201420720838U CN 204206349 U CN204206349 U CN 204206349U
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Abstract
The utility model belongs to Fab device real-time monitoring technical field, particularly a kind of semiconductor Fab production-line technique supervisory control system.This semiconductor Fab production-line technique supervisory control system comprises: database server, Ethernet switch, N number of Fab Monitor And Control Subsystem; Described Ethernet switch is electrically connected N number of Fab Monitor And Control Subsystem respectively, the output electrical connection database server of Ethernet switch; Each Fab monitoring of tools subsystem comprises video acquisition server, POE switch, multiple web camera; Each web camera is for gathering wafer/chip image, described POE switch is used for powering to each web camera, the signal input part of described POE switch is electrically connected the signal output part of each web camera, described POE switch and video acquisition server form both-way communication and are connected, and the signal output part of described video acquisition server is electrically connected described Ethernet switch.
Description
Technical field
The utility model belongs to Fab device real-time monitoring technical field, particularly a kind of semiconductor Fab production-line technique supervisory control system.
Background technology
At present, when carrying out chip manufacturing, in order to improve the yields of the chip of final production, just need the yields improving each chip manufacturing process.If in the process of chip manufacturing, any one chip preparing process has problems, and the yields of the chip of final production will be caused greatly to reduce, thus chip preparation cost is improved.
Utility model content
The purpose of this utility model is for above-mentioned defect, proposes a kind of semiconductor Fab production-line technique supervisory control system.
For realizing above-mentioned technical purpose, the utility model adopts following technical scheme to be achieved.
A kind of semiconductor Fab production-line technique supervisory control system comprises: database server, Ethernet switch and the 1st Fab monitoring of tools subsystem to N number of Fab Monitor And Control Subsystem, N be greater than 1 natural number; The input of described Ethernet switch is electrically connected the 1st Fab monitoring of tools subsystem respectively to N number of Fab Monitor And Control Subsystem, the output electrical connection database server of described Ethernet switch;
Described each Fab monitoring of tools subsystem comprises video acquisition server, POE switch and multiple web camera; Each web camera is arranged on Fab equipment, each web camera is for gathering wafer/chip image, described POE switch is used for powering to each web camera, the signal input part of described POE switch is electrically connected the signal output part of each web camera, described POE switch and video acquisition server form both-way communication and are connected, and the signal output part of described video acquisition server is electrically connected described Ethernet switch.
Feature of the present utility model and further improvement are:
Described each Fab monitoring of tools subsystem also comprises VGA split screen device, for VGA signal being converted to the VGA/ digital video signal converter of digital video signal and being used for digital video signal to be converted to the digital video signal/RJ45 signal converter of network cable transmission signal; Described VGA split screen utensil has a signal input part and two signal output parts, the VGA output port of the signal input part electrical connection Fab equipment of described VGA split screen device, the signal input part of any one signal output part electrical connection VGA/ digital video signal converter of described VGA split screen device, the signal output part of described VGA/ digital video signal converter is electrically connected the signal input part of described digital video signal/RJ45 signal converter, and the signal output part of described digital video signal/RJ45 signal converter is electrically connected the signal input part of described POE switch.
Described each Fab monitoring of tools subsystem also comprises the signal tower for receiving Fab equipment alarm signal, and described signal tower is arranged on corresponding Fab equipment; The signal input part of the POE switch of the signal output part electrical connection correspondence of described signal tower.
Described a kind of semiconductor Fab production-line technique supervisory control system, it is characterized in that, also comprise host computer, described host computer and database server form both-way communication and are connected.
The beneficial effects of the utility model are:
1) can the full HD and associated video prepared of display chip neatly, meet the specialized procedures demand of semiconductor production.
2) can the walking about and the state information such as early warning of actual chips in display chip Process Production in real time, and be recorded in database server, thus be convenient to inquiry.
Accompanying drawing explanation
Fig. 1 is the general structure schematic diagram of a kind of semiconductor Fab production-line technique supervisory control system of the present utility model;
Fig. 2 is the structural representation of Fab monitoring of tools subsystem of the present utility model.
Embodiment
Below in conjunction with accompanying drawing, the utility model is described in further detail:
With reference to Fig. 1, being the general structure schematic diagram of a kind of semiconductor Fab production-line technique supervisory control system of the present utility model, with reference to Fig. 2, is the structural representation of Fab monitoring of tools subsystem of the present utility model.In the utility model embodiment, a kind of semiconductor Fab production-line technique supervisory control system comprises the 1st Fab monitoring of tools subsystem to N number of Fab Monitor And Control Subsystem, N be greater than 1 natural number, each Fab monitoring of tools subsystem is used for carrying out video monitoring to a Fab equipment, Fab equipment can be process equipment practical in wafer production process, such as, Fab equipment is etch process equipment, CVD (chemical vapor deposition) equipment etc.In the utility model embodiment, each Fab equipment is provided with the signal tower for receiving alarm signal, when signal tower receives alarm signal, explanation wafer production technology goes wrong, need the operation stopping this Fab equipment, now, signal tower outwards can send alarm signal (sound and light alarm signal), thus is convenient to the failure cause that staff finds out Fab equipment in time.
In the utility model embodiment, also be provided with Ethernet switch and database (DB) server, the input of Ethernet switch is electrically connected the 1st Fab monitoring of tools subsystem respectively to N number of Fab Monitor And Control Subsystem (Ethernet switch is electrically connected each Fab monitoring of tools subsystem by RJ45 interface and netting twine), the output electrical connection database server (Ethernet switch is by RJ45 interface and netting twine electrical connection database server) of Ethernet switch.Like this, the video monitoring image that each Fab monitoring of tools subsystem obtains can be sent to database server (video monitoring image be can by the form of network cable transmission) by Ethernet switch, again database server is connected with host computer, now, just by the video image in host computer reading data in real-time server, thus the running status of wafer in Fab equipment can be checked.
In the utility model embodiment, each Fab monitoring of tools subsystem comprise multiple web camera (such as each Fab monitoring of tools subsystem comprises the 1st web camera to M web camera, M be greater than 1 natural number).Each web camera is for gathering wafer/chip image, and in a Fab monitoring of tools subsystem, each web camera is arranged on the zones of different of Fab equipment, for gathering the image in respective region.Watchful along with chip fabrication process, wafer/chip appears in the shooting area of each web camera, and now corresponding web camera just can capture the video image of wafer/chip.
In the utility model embodiment, each Fab monitoring of tools subsystem comprises POE switch and video acquisition server, and POE switch is powered to each web camera, and corresponding web camera is normally worked.The input of POE switch is electrically connected the signal output part of each web camera, and such as, each web camera is by netting twine and RJ45 interface electrical connection POE switch.POE switch and video acquisition server form both-way communication and are connected (POE switch is electrically connected video acquisition server by netting twine and RJ45 interface), and the signal output part of video acquisition server is electrically connected described Ethernet switch (video acquisition server is by netting twine and RJ45 interface electrical connection Ethernet switch).Now, the image of each web camera shooting can transfer to Ethernet switch by POE switch and video acquisition server.
In the utility model embodiment, the break-make of all right net control video camera, its detailed process is: in each Fab monitoring of tools subsystem, the signal input part of the signal output part POE switch of signal tower.Like this, when signal tower receives alarm signal, alarm signal is sent to video acquisition server by POE switch by signal tower.After video acquisition server receives alarm signal, no longer receive the vedio data from POE switch, because now, Fab equipment is in malfunction, needs manually to repair/check, having little significance of the current captured image of web camera.
In the utility model embodiment, each Fab monitoring of tools subsystem also comprises VGA split screen device, and VGA split screen utensil has a signal input part and two signal output parts, the VGA output port of the signal input part electrical connection Fab equipment of described VGA split screen device.The effect of VGA split screen device is 2 split screens carrying out VGA signal.Each Fab monitoring of tools subsystem also comprises VGA/ digital video signal converter, for VGA signal is converted to digital video signal, and the signal input part of any one signal output part electrical connection VGA/ digital video signal converter of VGA split screen device.The digital video signal that VGA/ digital video signal converter exports can various video form, and such as, VGA/ digital video signal converter exports the digital video signal of following a kind of video format: AV video format, DVI video format or HDMI video form.
In the utility model embodiment, each Fab monitoring of tools subsystem also comprises the digital video signal/RJ45 signal converter for digital video signal being converted to network cable transmission signal, the signal output part of VGA/ digital video signal converter is electrically connected the signal input part of described digital video signal/RJ45 signal converter, and the signal output part of digital video signal/RJ45 signal converter is electrically connected the signal input part of described POE switch.Digital video signal/RJ45 signal converter has a digital video input interface (such as, for AV video interface, DVI video interface or HDMI video interface) and a RJ45 interface, digital video signal/RJ45 signal converter is by this RJ45 interface and netting twine electrical connection POE switch.
Obviously, those skilled in the art can carry out various change and modification to the utility model and not depart from spirit and scope of the present utility model.Like this, if these amendments of the present utility model and modification belong within the scope of the utility model claim and equivalent technologies thereof, then the utility model is also intended to comprise these change and modification.
Claims (4)
1. a semiconductor Fab production-line technique supervisory control system, is characterized in that, comprising: database server, Ethernet switch and the 1st Fab monitoring of tools subsystem to N number of Fab Monitor And Control Subsystem, N be greater than 1 natural number; The input of described Ethernet switch is electrically connected the 1st Fab monitoring of tools subsystem respectively to N number of Fab Monitor And Control Subsystem, the output electrical connection database server of described Ethernet switch;
Described each Fab monitoring of tools subsystem comprises video acquisition server, POE switch and multiple web camera; Each web camera is arranged on Fab equipment, each web camera is for gathering wafer/chip image, described POE switch is used for powering to each web camera, the signal input part of described POE switch is electrically connected the signal output part of each web camera, described POE switch and video acquisition server form both-way communication and are connected, and the signal output part of described video acquisition server is electrically connected described Ethernet switch.
2. a kind of semiconductor Fab production-line technique supervisory control system as claimed in claim 1, it is characterized in that, described each Fab monitoring of tools subsystem also comprises VGA split screen device, for VGA signal being converted to the VGA/ digital video signal converter of digital video signal and being used for digital video signal to be converted to the digital video signal/RJ45 signal converter of network cable transmission signal; Described VGA split screen utensil has a signal input part and two signal output parts, the VGA output port of the signal input part electrical connection Fab equipment of described VGA split screen device, the signal input part of any one signal output part electrical connection VGA/ digital video signal converter of described VGA split screen device, the signal output part of described VGA/ digital video signal converter is electrically connected the signal input part of described digital video signal/RJ45 signal converter, and the signal output part of described digital video signal/RJ45 signal converter is electrically connected the signal input part of described POE switch.
3. a kind of semiconductor Fab production-line technique supervisory control system as claimed in claim 1, is characterized in that, described each Fab monitoring of tools subsystem also comprises the signal tower for receiving Fab equipment alarm signal, and described signal tower is arranged on corresponding Fab equipment; The signal input part of the POE switch of the signal output part electrical connection correspondence of described signal tower.
4. a kind of semiconductor Fab production-line technique supervisory control system as claimed in claim 1, it is characterized in that, also comprise host computer, described host computer and database server form both-way communication and are connected.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420720838.3U CN204206349U (en) | 2014-11-26 | 2014-11-26 | A kind of semiconductor Fab production-line technique supervisory control system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420720838.3U CN204206349U (en) | 2014-11-26 | 2014-11-26 | A kind of semiconductor Fab production-line technique supervisory control system |
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| Publication Number | Publication Date |
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| CN204206349U true CN204206349U (en) | 2015-03-11 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201420720838.3U Expired - Fee Related CN204206349U (en) | 2014-11-26 | 2014-11-26 | A kind of semiconductor Fab production-line technique supervisory control system |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112130518A (en) * | 2020-11-30 | 2020-12-25 | 晶芯成(北京)科技有限公司 | Method and system for monitoring parameters in semiconductor production process and computer readable storage medium |
-
2014
- 2014-11-26 CN CN201420720838.3U patent/CN204206349U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112130518A (en) * | 2020-11-30 | 2020-12-25 | 晶芯成(北京)科技有限公司 | Method and system for monitoring parameters in semiconductor production process and computer readable storage medium |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150311 Termination date: 20171126 |
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| CF01 | Termination of patent right due to non-payment of annual fee |