CN204180271U - 一种高灵敏度高信噪比的mems硅麦克风 - Google Patents
一种高灵敏度高信噪比的mems硅麦克风 Download PDFInfo
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- CN204180271U CN204180271U CN201420688767.3U CN201420688767U CN204180271U CN 204180271 U CN204180271 U CN 204180271U CN 201420688767 U CN201420688767 U CN 201420688767U CN 204180271 U CN204180271 U CN 204180271U
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- mems
- pcb board
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 21
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 21
- 239000010703 silicon Substances 0.000 title claims abstract description 21
- 230000035945 sensitivity Effects 0.000 title claims abstract description 20
- 239000002184 metal Substances 0.000 claims abstract description 61
- 239000004568 cement Substances 0.000 claims abstract description 17
- 239000004020 conductor Substances 0.000 claims description 32
- 238000010586 diagram Methods 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 208000034189 Sclerosis Diseases 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
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- Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
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CN201420688767.3U CN204180271U (zh) | 2014-11-18 | 2014-11-18 | 一种高灵敏度高信噪比的mems硅麦克风 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104581588A (zh) * | 2014-11-18 | 2015-04-29 | 上海微联传感科技有限公司 | 一种高灵敏度高信噪比的mems硅麦克风 |
CN104780490A (zh) * | 2015-04-20 | 2015-07-15 | 歌尔声学股份有限公司 | 一种mems麦克风的封装结构及其制造方法 |
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2014
- 2014-11-18 CN CN201420688767.3U patent/CN204180271U/zh active Active
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104581588A (zh) * | 2014-11-18 | 2015-04-29 | 上海微联传感科技有限公司 | 一种高灵敏度高信噪比的mems硅麦克风 |
CN104780490A (zh) * | 2015-04-20 | 2015-07-15 | 歌尔声学股份有限公司 | 一种mems麦克风的封装结构及其制造方法 |
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C14 | Grant of patent or utility model | ||
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Effective date of registration: 20190215 Address after: 213135 F2 Building, 200 Linghu Avenue, Xinwu District, Wuxi City, Jiangsu Province Patentee after: Huajing Technology Wuxi Co.,Ltd. Address before: 201203 2, 3 building, 439 Chunchun Road, Pudong New Area, Shanghai. Patentee before: MICROLINK SENSTECH SHANGHAI Ltd. |
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TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20240424 Address after: 214135 China Sensor Network International Innovation Park F2, 200 Linghu Avenue, Xinwu District, Wuxi City, Jiangsu Province Patentee after: SV SENSTECH (WUXI) CO.,LTD. Country or region after: China Address before: 213135 F2 Building, 200 Linghu Avenue, Xinwu District, Wuxi City, Jiangsu Province Patentee before: Huajing Technology Wuxi Co.,Ltd. Country or region before: China |
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TR01 | Transfer of patent right |