CN204167314U - Prevent the device of sample electrostatic damage - Google Patents
Prevent the device of sample electrostatic damage Download PDFInfo
- Publication number
- CN204167314U CN204167314U CN201420516477.0U CN201420516477U CN204167314U CN 204167314 U CN204167314 U CN 204167314U CN 201420516477 U CN201420516477 U CN 201420516477U CN 204167314 U CN204167314 U CN 204167314U
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- stitch
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- slot
- electrostatic damage
- damage
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Abstract
The utility model relates to semiconductor integrated circuit field, particularly relate to a kind of device preventing sample electrostatic damage, by being provided with some even slots side by side in a housing, all have stitch in each slot, all stitch all carry out short circuit by a metal wire; When the testing sample by with stitch inserts in the slot of this device and carries out test analysis, because of pin-strappings all in this device, electrostatic charge can distribute uniformly, and in testing sample, the electromotive force of different stitch is identical, therefore avoids the damage of static discharge to testing sample to a certain extent; And can also electrostatic defending in real time when carrying out multiple test analysis, improve the efficiency of test analysis simultaneously, save the cost of test analysis.
Description
Technical field
The utility model relates to semiconductor integrated circuit field, particularly relates to a kind of device preventing sample electrostatic damage.
Background technology
Static discharge (Electrostatic Discharge is called for short ESD) is the quiescent current put by a non-conductive surface moment, and it easily causes the damage of semiconductor element and other electron component in integrated circuit.And the damage caused during integrated circuit generation static discharge is often restore permanent being difficult to, the damage energy that it causes can be large enough to the circuit being enough to destroy integrated circuit usually, causes the lost of life of integrated circuit or causes integrated circuit complete failure.
In reliability of technology assessment, in order to improve testing efficiency, need to carry out package level test, package level sample is very easy to be subject to electrostatic damage.Under many circumstances, operating personnel need directly to contact sample, static electricity on human body can cause electrostatic damage to the test structure of sample, therefore follow-up failure analysis (Failure Analysis is carried out to sample, be called for short FA) time, be difficult to distinguish electrostatic damage and still test electrical stress damage, interference is brought to analysis judgement.
In order to prevent sample in packaging technology to be subject to electrostatic damage, this field operating personnel need to carry out electrostatic defending, the main employing electrostatic hand ring of current electrostatic defending and ion fan, and operating personnel wear electrostatic hand ring, effectively can evacuate static electricity on human body; Ion fan can improve air conductivity and avoid sample surfaces to discharge.But due to electrostatic hand ring and ion fan mobility poor, be difficult to realize carrying real-time electrostatic defending when sample carries out multiple test analysis.
Utility model content
For above-mentioned Problems existing, the utility model discloses a kind of device preventing sample electrostatic damage, with solve in prior art because of electrostatic hand ring and ion fan mobility poor, be difficult to realize in the defect of carrying real-time electrostatic defending when sample carries out multiple test analysis.
For achieving the above object, the utility model takes following concrete technical scheme:
Prevent a device for sample electrostatic damage, wherein, described device comprises:
One housing, described case top is provided with the some even slots side by side of two row, and each row slot all overlaps one to one on the same line with another row slot;
In each described slot, all correspondence is provided with a stitch;
One plain conductor, is located in described housing, and described plain conductor is used for stitch described in short circuit.
Preferably, the above-mentioned device preventing sample electrostatic damage, wherein, described plain conductor is with stitch described in the mode short circuit of serial or parallel connection.
Preferably, the above-mentioned device preventing sample electrostatic damage, wherein, the equal plating in short circuit place of described metal wire and described stitch has scolding tin.
Preferably, the above-mentioned device preventing sample electrostatic damage, wherein, the material of described metal wire is tungsten, aluminium or copper.
Preferably, the upper described device preventing sample electrostatic damage, wherein, described slot is DIP slot.
Preferably, the above-mentioned device preventing sample electrostatic damage, wherein, has 48 stitch in described device.
Technique scheme tool has the following advantages or beneficial effect:
By being provided with some even slots side by side in a housing, each slot all has a stitch, and all stitch all carry out short circuit by a metal wire; When the testing sample by with stitch inserts in the slot of this device and carries out test analysis, because of pin-strappings all in this device, electrostatic charge can distribute uniformly, and in testing sample, the electromotive force of different stitch is identical, therefore avoids the damage of static discharge to testing sample to a certain extent; And can also electrostatic defending in real time when carrying out multiple test analysis, improve the efficiency of test analysis simultaneously, save the cost of test analysis.
Concrete accompanying drawing explanation
By reading the detailed description done non-limiting example with reference to the following drawings, the utility model and feature, profile and advantage will become more apparent.Mark identical in whole accompanying drawing indicates identical part.Proportionally can not draw accompanying drawing, focus on purport of the present utility model is shown.
Fig. 1 is the structural representation of the device preventing sample electrostatic damage in the utility model;
Fig. 2 is the internal structure schematic diagram of the device preventing sample electrostatic damage in the utility model;
Fig. 3 a and Fig. 3 b is the operation principle schematic diagram of the device preventing sample electrostatic damage in the utility model.
Embodiment
Core concept of the present utility model is: in a housing, be provided with the some even slots side by side of multiple row, each slot all has a stitch, and all stitch all carry out short circuit by a metal wire.
Below in conjunction with accompanying drawing and specific embodiment, the utility model is further described, but not as restriction of the present utility model.
The structural representation for preventing the device of sample electrostatic damage in the utility model embodiment as shown in Figure 1, the concrete housing 1 comprising a rectangular configuration, this case top is provided with some slots 2, slot 2 housing 1 end face evenly side by side in column-shaped distribution and each row slot all overlap on the same line one to one with another row slot.
Preferably, the length bearing of trend of each slot 2, perpendicular to a long limit of this housing 1 structure, in embodiment of the present utility model, all has a stitch (not shown) in any slot 2.
In embodiment of the present utility model, above-mentioned slot is DIP (Dual Inline-pinPackage, be called for short DIP, i.e. dual in-line package) slot, and as a preferred embodiment, be provided with two row slots 2 in the housing, and the quantity of each row slot 2 is specially 24, namely the total quantity of stitch is 48, certain those skilled in the art can set according to actual process demand the quantity of the shape of above-mentioned housing 1 and slot 2, adapt to equally in actual applications and there is no materially affect to the utility model.
In addition, there is the mid portion 3 divided equally by this housing 1 upper surface in above-mentioned housing 1, this mid portion 3 parallel with the length direction of this housing 1, above-mentioned two row slots 2 lay respectively at this mid portion 3 both sides, be convenient to follow-up to there is the effect supporting this testing sample when testing sample is analyzed, as shown in Figure 1.
The cut-away view of the device for preventing sample electrostatic damage as shown in Figure 2, as seen from the figure, a plain conductor 5 is also comprised in the utility model, this plain conductor 5 is positioned at the inside of above-mentioned housing 1, and this plain conductor 5 is by described pin-strapping, forms primary Ioops between some stitch of mutual short circuit, for the testing sample stitch that short circuit is follow-up, to make the electric charge in testing sample be uniformly distributed, between testing sample stitch, potential-free is poor, avoids static discharge to the damage of testing sample.
In embodiment of the present utility model, this plain conductor 5 can the above-mentioned stitch of serial or parallel connection mode short circuit, as a preferred embodiment, this plain conductor 5 is with the above-mentioned stitch of mode short circuit of series connection, and other connected mode is applicable equally in the utility model, materially affect be there is no to the utility model.
In embodiment of the present utility model, the material of this plain conductor 5 can be tungsten, aluminium or copper and other metal materials, and as a preferred embodiment, the material of this plain conductor 5 is metallic copper.
At plain conductor 5 and pin-strapping place also plating scolding tin 4, this scolding tin 4 is good in electrical contact for ensureing to have between this plain conductor 5 and stitch, is convenient to all stitch of good short circuit.
Below the application of this device is described in detail:
As shown in Figure 3 a, this testing sample can be a field effect transistor, this concrete testing sample has source electrode (S), drain electrode (D), grid (G) and substrate (B) structure, carry out in the process contacted at the stitch of this testing sample with human body, electrical potential difference can be there is between grid and the stitch of substrate, because having a gate oxide 6 between grid and substrate, so electrical potential difference can cause the heat produced because of static discharge on gate oxide 6, and the final gate oxide 6 damaged in testing sample.
Further, this testing sample being positioned over this prevents in the device of sample electrostatic damage, concrete, the grid of this testing sample and stitch corresponding to substrate are inserted slot 2, because the stitch in all slots 2 is all by plain conductor 5 short circuit, as shown in Figure 3 b, the stitch of this testing sample is all indirectly by plain conductor 5 short circuit, i.e. grid and the mutual short circuit of substrate mutually.
In embodiment of the present utility model, in the grid of mutual short circuit and substrate, electrostatic charge is uniformly distributed, electromotive force between the different stitch of sample is identical, there is not electrical potential difference, therefore the damage causing the gate oxide 6 in testing sample because of static discharge is avoided, improve the efficiency of test analysis simultaneously, greatly save the test analysis cost to testing sample.
In sum, the utility model discloses a kind of device preventing sample electrostatic damage, by being provided with some even slots side by side in a housing, each slot all has a stitch, and all stitch all carry out short circuit by a metal wire; When the testing sample by with stitch inserts in the slot of this device and carries out test analysis, because of pin-strappings all in this device, electrostatic charge can distribute uniformly, and in testing sample, the electromotive force of different stitch is identical, therefore avoids the damage of static discharge to testing sample to a certain extent; And can also electrostatic defending in real time when carrying out multiple test analysis, improve the efficiency of test analysis simultaneously, save the cost of test analysis.
It should be appreciated by those skilled in the art that those skilled in the art are realizing described change case in conjunction with prior art and above-described embodiment, do not repeat at this.Such change case does not affect flesh and blood of the present utility model, does not repeat them here.
Above preferred embodiment of the present utility model is described.It is to be appreciated that the utility model is not limited to above-mentioned particular implementation, the equipment wherein do not described in detail to the greatest extent and structure are construed as to be implemented with the common mode in this area; Any those of ordinary skill in the art, do not departing under technical solutions of the utility model ambit, the Method and Technology content of above-mentioned announcement all can be utilized to make many possible variations and modification to technical solutions of the utility model, or being revised as the Equivalent embodiments of equivalent variations, this does not affect flesh and blood of the present utility model.Therefore, every content not departing from technical solutions of the utility model, according to technical spirit of the present utility model to any simple modification made for any of the above embodiments, equivalent variations and modification, all still belongs in the scope of technical solutions of the utility model protection.
Claims (6)
1. prevent a device for sample electrostatic damage, it is characterized in that, described device comprises:
One housing, described case top is provided with the some even slots side by side of two row, and each row slot all overlaps one to one on the same line with another row slot;
In each described slot, all correspondence is provided with a stitch;
One plain conductor, is located in described housing, and described plain conductor is used for stitch described in short circuit.
2. prevent the device of sample electrostatic damage as claimed in claim 1, it is characterized in that, described plain conductor is with stitch described in the mode short circuit of serial or parallel connection.
3. prevent the device of sample electrostatic damage as claimed in claim 1, it is characterized in that, the equal plating in short circuit place of described metal wire and described stitch has scolding tin.
4. prevent the device of sample electrostatic damage as claimed in claim 1, it is characterized in that, the material of described metal wire is tungsten, aluminium or copper.
5. prevent the device of sample electrostatic damage as claimed in claim 1, it is characterized in that, described slot is DIP slot.
6. prevent the device of sample electrostatic damage as claimed in claim 1, it is characterized in that, there are in described device 48 stitch.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420516477.0U CN204167314U (en) | 2014-09-09 | 2014-09-09 | Prevent the device of sample electrostatic damage |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420516477.0U CN204167314U (en) | 2014-09-09 | 2014-09-09 | Prevent the device of sample electrostatic damage |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204167314U true CN204167314U (en) | 2015-02-18 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420516477.0U Active CN204167314U (en) | 2014-09-09 | 2014-09-09 | Prevent the device of sample electrostatic damage |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204167314U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106549006A (en) * | 2016-10-26 | 2017-03-29 | 上海华力微电子有限公司 | Electrostatic discharge protection circuit and test installation method for package level reliability testing |
| CN111430282A (en) * | 2020-03-17 | 2020-07-17 | 上海贞尔实业有限公司 | Storage device is used in field effect transistor production |
-
2014
- 2014-09-09 CN CN201420516477.0U patent/CN204167314U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106549006A (en) * | 2016-10-26 | 2017-03-29 | 上海华力微电子有限公司 | Electrostatic discharge protection circuit and test installation method for package level reliability testing |
| CN106549006B (en) * | 2016-10-26 | 2019-12-24 | 上海华力微电子有限公司 | Electrostatic protection circuit for package-level reliability test and test installation method |
| CN111430282A (en) * | 2020-03-17 | 2020-07-17 | 上海贞尔实业有限公司 | Storage device is used in field effect transistor production |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |