CN204162784U - The special air pipe of a kind of board-like PECVD - Google Patents
The special air pipe of a kind of board-like PECVD Download PDFInfo
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- CN204162784U CN204162784U CN201420598574.9U CN201420598574U CN204162784U CN 204162784 U CN204162784 U CN 204162784U CN 201420598574 U CN201420598574 U CN 201420598574U CN 204162784 U CN204162784 U CN 204162784U
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Abstract
The utility model discloses the special air pipe of a kind of board-like PECVD, it comprises three groups of gas circuits, often organize in gas circuit and two mass flow controller MFC are set, in two groups of gas circuits, often group arranges two groups of special pores above, one group of gas circuit next is arranged four groups of special pores, often organize special pore and comprise the special pore of two silane and a special pore of ammonia.The gas flow that this special air pipe supplies board-like PECVD device Zhong Mei group is more even, too increase the setting range of technical parameter, the coating process of three layers and more multi-layered antireflective coating can be realized, improve the transformation efficiency of battery, and the color homogeneity of film is good, finished product yield is high, significantly reduces the production cost of cell piece.
Description
Technical field
The utility model relates to the special air pipe of a kind of board-like PECVD.
Background technology
Board-like PECVD filming equipment is that silica tube leads to microwave source at two ends, under the condition that surface vacuumizes, ammonia is become energetic ion state with silane decomposes, through series of chemical, at silicon chip surface deposited silicon nitride solid film, the hydrogen ion simultaneously decomposing out, by the equipment of silicon chip surface native defect passivation.Along with the continuous lifting of crystal silicon cell quality and photoelectric transformation efficiency, traditional one deck coating process can not meet processing requirement, and two-layer, three layers and more multi-layered antireflective coating technique become the main flow direction of crystal silicon cell coating process research.Originally board-like PECVD filming equipment only has two groups of gas circuits (as Fig. 1), often organizes special air pipe and comprise two mass flow controllers (MFC), controls the gas flow of ammonia and silane respectively.As shown in Figure 1, often organize special air pipe and control 4 groups of totally 8 groups of special pores 1,2,3,4,5,6,7 and 8(4-4 patterns respectively), often organize special pore 1,2,3,4,5,6,7 or 8 and comprise the special pore 9 of 2 silane and a special pore 10 of ammonia.Such 4 groups of special pores are controlled by one group of two MFC, can not ensure homogeneity and the allocability of the gas flow entering into equipment Zhong Mei group; Due to the existing limitation of PECVD device technical arrangement plan scope and the lack of homogeneity of air feed, the thickness of the every tunic making it plate out is thicker, the thickness of general every tunic is all between 30 ~ 45nm, it can only realize two-layer coating, for three layers and more multi-layered antireflective coating then due to thinner to the thickness requirement of every tunic, requirement and the homogeneity of every tunic thickness more can not be ensured, so, adopt existing special air pipe to control air feed substantially can not realize, the transformation efficiency of battery can not be improved again; Even and if two membranes due to intake uniformity poor, the bad control of color homogeneity of film, causes finished product yield to reduce, adds production cost.
Summary of the invention
The purpose of this utility model solves the above-mentioned problems in the prior art exactly, the special air pipe of a kind of board-like PECVD is provided, the gas flow that this special air pipe supplies board-like PECVD device Zhong Mei group is more even, too increase the setting range of technical parameter, can realize the coating process of three layers and more multi-layered antireflective coating, improve the transformation efficiency of battery, and the color homogeneity of film is good, finished product yield is high, significantly reduces the production cost of cell piece.
For completing above-mentioned purpose, technical solution of the present utility model is: the special air pipe of a kind of board-like PECVD, it comprises three groups of gas circuits, often organize in gas circuit and two mass flow controller MFC are set, in two groups of gas circuits, often group arranges two groups of special pores above, one group of gas circuit next is arranged four groups of special pores, often organize special pore and comprise the special pore of two silane and a special pore of ammonia.
Because the utility model have employed such scheme, the special air pipe of board-like PECVD is connected according to above-mentioned mode of connection, eight groups of special pores are controlled by three groups of mass flow controller MFC, one or two group of special pore is controlled by one group of MFC, three or four group of special pore is controlled by one group of MFC, rear four groups of special pores are controlled by one group of MFC, which adds homogeneity and stability that front four groups of special pores enter ammonia and silane flow rate; And three mass flow controller MFC independently control, add the setting range of technical parameter, the coating process of three layers and more multi-layered antireflective coating can be realized, improve the transformation efficiency of battery, the efficiency of conversion of resultant battery improves 0.2 ~ 0.3%, and then has saved production cost.And the color homogeneity of film is good, finished product yield is high, significantly reduces the production cost of cell piece.
Accompanying drawing explanation
Fig. 1 is the structural representation of the special air pipe of existing board-like PECVD;
Fig. 2 is the structural representation of the special air pipe of board-like PECVD of the present utility model.
Embodiment
Below in conjunction with accompanying drawing and concrete embodiment, the utility model will be further described.
As shown in Figure 2, the present embodiment comprises three groups of gas circuits 11, 12 and 13, often organize gas circuit 11, two mass flow controller MFC are set on 12 or 13, in first group 11 and second group of 12 gas circuit, often group arranges two groups of special pores above: first group 11 is arranged first group, second group of special pore 1 and 2, second group 12 is arranged the 3rd group, 4th group of special pore 3 and 4, one group of gas circuit 13 next is arranged four groups of special pores: the 5th to the 8th group of special pore 5, 6, 7 and 8, often organize special pore 1, 2, 3, 4, 5, 6, 7 or 8 comprise the special pore 9 of two silane and a special pore 10 of ammonia.
Concrete pipeline connects: ammonia NH3 source of the gas is divided into three road ammonia subtubes by ammonia total pipeline by four-way, and every road ammonia subtube installs a mass flow controller MFC; The outlet of the ammonia subtube of the first via above connects the special pore 10 of a group and two group 1 and 2 ammonias respectively, the outlet of the ammonia subtube on the second tunnel connects the special pore 10 of ammonia of three groups and four group 3 and 4 respectively, the outlet of last road ammonia subtube connect respectively five groups to eight group 5,6, the special pore 10 of ammonia of 7 and 8.Silane SiH4 source of the gas is divided into three road silane subtubes by ammonia total pipeline by four-way, and every road silane subtube installs a mass flow controller MFC; The outlet of the silane subtube of the first via above connects the special pore 9 of silane of a group and two group 1 and 2 respectively, the outlet of the silane subtube on the second tunnel connects the special pore 9 of silane of three groups and four group 3 and 4 respectively, the outlet of last road silane subtube connect respectively five groups to eight group 5,6, the special pore 9 of silane of 7 and 8.Often organize special pore and comprise the special pore 9 of two silane and a special pore 10 of ammonia.
Certainly; the utility model also has other multiple example; when without prejudice to the utility model spirit and essence; those of ordinary skill in the art can make change and the distortion of equivalent technologies according to the utility model, change and the distortion of these equivalent technologies all should in the protection domains of the utility model claim.
Claims (1)
1. the special air pipe of a board-like PECVD, it is characterized in that: it comprises three groups of gas circuits, often organize in gas circuit and two mass flow controller MFC are set, in two groups of gas circuits, often group arranges two groups of special pores above, one group of gas circuit next is arranged four groups of special pores, often organize special pore and comprise the special pore of two silane and a special pore of ammonia.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420598574.9U CN204162784U (en) | 2014-10-16 | 2014-10-16 | The special air pipe of a kind of board-like PECVD |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420598574.9U CN204162784U (en) | 2014-10-16 | 2014-10-16 | The special air pipe of a kind of board-like PECVD |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204162784U true CN204162784U (en) | 2015-02-18 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420598574.9U Expired - Fee Related CN204162784U (en) | 2014-10-16 | 2014-10-16 | The special air pipe of a kind of board-like PECVD |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204162784U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105951057A (en) * | 2016-01-11 | 2016-09-21 | 江西展宇新能源股份有限公司 | Method of preparing silicon nitride reflection-reducing film with plate-type PECVD |
-
2014
- 2014-10-16 CN CN201420598574.9U patent/CN204162784U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105951057A (en) * | 2016-01-11 | 2016-09-21 | 江西展宇新能源股份有限公司 | Method of preparing silicon nitride reflection-reducing film with plate-type PECVD |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150218 Termination date: 20201016 |