CN204129402U - A kind of full light based on vertical coupled micro-cyclic laser structure and door and or door - Google Patents
A kind of full light based on vertical coupled micro-cyclic laser structure and door and or door Download PDFInfo
- Publication number
- CN204129402U CN204129402U CN201420666744.2U CN201420666744U CN204129402U CN 204129402 U CN204129402 U CN 204129402U CN 201420666744 U CN201420666744 U CN 201420666744U CN 204129402 U CN204129402 U CN 204129402U
- Authority
- CN
- China
- Prior art keywords
- micro
- nanowire waveguides
- door
- nanowire
- waveguides
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Semiconductor Lasers (AREA)
Abstract
The utility model discloses a kind of full light based on vertical coupled micro-cyclic laser structure and door and or door, comprise: input optical signal is coupled into micro-ring resonant cavity by first direction coupling mechanism by the first Nanowire Waveguides, output optical signal is coupled into the second Nanowire Waveguides through second direction coupling mechanism by micro-ring resonant cavity; First Nanowire Waveguides and the second Nanowire Waveguides are parallel to each other; In the adjacent plane of micro-ring resonant cavity below the first Nanowire Waveguides and the second Nanowire Waveguides, and between the first Nanowire Waveguides and the second Nanowire Waveguides.Technique is simple, cost is low, switch energy is low and high reliability to adopt the all-optical logic gate of the utility model realization to have.
Description
Technical field
The utility model relates to all-optical logic operations devices field, particularly relates to a kind of full light based on vertical coupled micro-cyclic laser structure and door and or door.
Background technology
Along with the develop rapidly of global network speed, the transmission capacity of optical communication and information processing capability are had higher requirement.Conventional optical communication systems also exists the difficult problems such as bulky, complex structure, energy consumption are high, is difficult to adapt to the develop rapidly of network speed and the requirement of energy-saving and environment friendly.One of basic method solved the problem is exactly build optical-elec-tronic integrated chip, directly processes signal in area of light and exchanges.
All-optical logic gate, as the basic logic unit of optical information processing, is very crucial core devices.Therefore, how to design high speed, low-loss all-optical logic unit, and the single-chip integration realizing these functional units is the study hotspot in optical information processing and all optical communication field.
At present, proposed multiple based semiconductor image intensifer (SOA), photon crystal wave-guide, Micro-Opto-Electro-Mechanical Systems (MOEMS), micro-ring resonator and the isostructural all-optical logic gate of ring laser, and obtained experimental verification.Compared with the logic gate of other structure, the all-optical logic gate based on ring laser configuration have simple and compact for structure, switch energy is low, output extinction ratio is high, working stability, with the advantage such as semiconductor technology is compatible.And along with the raising of operating rate, device size and power consumption can reduce further, are thus more suitable for large-scale integrated than the all-optical logic gate of based semiconductor image intensifer (SOA) and Micro-Opto-Electro-Mechanical Systems (MOEMS).
Recently, remaining think of far waits the micro-cyclic laser of people to side direction coupled structure to carry out systematic study, has set forth the wherein origin of the basic physical phenomenon such as nonlinear optical effect and optical bistability, and has achieved all-optical logic gate based on the optical bistability of micro-cyclic laser.But ring resonator and the I/O waveguide of side-coupled micro-cyclic laser are in same plane, and both material structures are identical, and thus the absorption loss of I/O waveguide is large.In addition, in order to realize the efficient coupling between waveguide and ring resonator, the coupling space minimum (0.1 ~ 0.3 μm) of the two, thus must use the semiconductor manufacturing equipment such as electron beam exposure, sense coupling.This not only makes device preparation cost expensive, and craft precision is also difficult to control.
Utility model content
The utility model provide a kind of full light based on vertical coupled micro-cyclic laser structure and door and or door, the utility model achieve that technology difficulty is low, light loss is little and with the all-optical logic gates of semiconductor preparing process compatibility, described below:
Based on the full light of vertical coupled micro-cyclic laser structure and door and or a door, comprising: the first Nanowire Waveguides in same plane, the second Nanowire Waveguides and Y branch coupler,
Input optical signal is coupled into micro-ring resonant cavity by first direction coupling mechanism by described first Nanowire Waveguides, and output optical signal is coupled into described second Nanowire Waveguides through second direction coupling mechanism by described micro-ring resonant cavity; Described first Nanowire Waveguides and described second Nanowire Waveguides are parallel to each other; In the adjacent plane of described micro-ring resonant cavity below described first Nanowire Waveguides and described second Nanowire Waveguides, and between described first Nanowire Waveguides and described second Nanowire Waveguides.
Wherein, the Liang Ge branch of described Y branch coupler is as the input port of light signal, and output port is connected with described first Nanowire Waveguides.
Described micro-ring resonant cavity is manufactured with P-type electrode and N-type electrode.
Further, described first Nanowire Waveguides, described second Nanowire Waveguides, described micro-ring resonant cavity and described Y branch coupler all adopt bar shaped or ridge waveguide structure.
The beneficial effect of the technical scheme that the utility model provides is:
1, the utility model utilizes the optical bistability characteristics of micro-cyclic laser, achieves the logic function of full light "AND" and "or".
2, the all-optical logic gate adopting vertical coupled micro-cyclic laser structure to realize belongs to three-dimensional integrated device, effectively can reduce the lateral dimension of device, be conducive to realizing highdensity device integrated.
3, technique is simple, cost is low, switch energy is low and high reliability, is conducive to practical application to adopt the all-optical logic gate of the technical program realization to have.
Accompanying drawing explanation
The structural representation of vertical coupled micro-cyclic laser structure all-optical logic gate that Fig. 1 provides for the utility model;
The tomograph of vertical coupled micro-cyclic laser that Fig. 2 provides for the utility model;
Fig. 3 is the device architecture figure prepared.
In accompanying drawing, the list of parts representated by each label is as follows:
1: the first Nanowire Waveguides; 2: the second Nanowire Waveguides;
3: micro-ring resonant cavity; 4:Y branch coupler;
5: first direction coupling mechanism; 6: second direction coupling mechanism;
7:N type InP substrate; 8:N type InP under-clad layer;
9:AlGaInAs multiple quantum well active layer; 10:P type InP top covering;
11:P type InGaAs contact layer; 12: polymeric media;
13:P type electrode; 14:N type electrode.
Embodiment
For making the purpose of this utility model, technical scheme and advantage clearly, below the utility model embodiment is described in further detail.
In contrast, ring resonator and the I/O waveguide of vertical coupled micro-cyclic laser are in Different Plane, independent optimization can design, thus can improve device performance, reduce technology difficulty.
Embodiment 1
See Fig. 1, the utility model provides the structural representation of the full optical AND gate based on vertical coupled micro-cyclic laser.This structure comprises: the first Nanowire Waveguides 1, second Nanowire Waveguides 2, micro-ring resonant cavity 3, Y branch coupler 4, first direction coupling mechanism 5 and second direction coupling mechanism 6.
Wherein, the first Nanowire Waveguides 1, second Nanowire Waveguides 2 and Y branch coupler 4 are in same plane, and the first Nanowire Waveguides 1 and the second Nanowire Waveguides 2 are parallel to each other.Micro-ring resonant cavity 3 in the adjacent plane of the first Nanowire Waveguides less than 1, and between the first Nanowire Waveguides 1 and the second Nanowire Waveguides 2.Micro-ring resonant cavity 3 is respectively through first direction coupling mechanism 5 and second direction coupling mechanism 6, critical coupling is there is with the first Nanowire Waveguides 1 and the second Nanowire Waveguides 2, namely light wave that transmit in the first Nanowire Waveguides 1, that meet micro-ring resonant cavity 3 condition of resonance is coupled into micro-ring resonant cavity 3 through first direction coupling mechanism 5, and the resonance wavelength in micro-ring resonant cavity 3 is coupled into the second Nanowire Waveguides 2 through second direction coupling mechanism 6, and output signal at its output terminal E.
The full optical AND gate of the vertical coupled micro-ring laser structure based on polymkeric substance/InP composite system that the utility model embodiment provides is produced on InP/AlGaInAs Multiple Quantum Well epitaxial wafer.Epitaxial wafer comprises: N-type InP substrate 7, N-type InP under-clad layer 8, AlGaInAs multiple quantum well active layer 9, P type InP top covering 10 and P type InGaAs contact layer 11, corresponding epitaxial wafer structure as shown in Figure 2.
First, utilize semiconductor etching techniques on epitaxial wafer, prepare the micro-ring resonant cavity 3 of the ridge waveguide structure of single mode transport.Then, spin on polymers medium 12 planarization wafer surface.Make the P-type electrode graphical window of micro-cyclic laser subsequently by lithography, and prepare P-type electrode 13.Afterwards, spin coating low-loss waveguide polymkeric substance (poly-methyl esters methyl acrylate (PMMA), benzocyclobutane rare (BCB) etc. as fluorinated polyimide (PI), modification), and prepare the polymer nano rice noodles waveguide of single mode transport, Y branch coupler 4 and directional coupler.Finally, N-type InP substrate 7 is thinned to 150 μm, and prepares N-type electrode 14 at chip back surface.The device architecture prepared as shown in Figure 3.
Between the P-type electrode 13 and N-type electrode 14 of micro-cyclic laser, pass to suitable electric current, making it be biased in only has the unidirectional bistable state of clockwise or counterclockwise excitation mode.During work, the optical wavelength of adjustment input signal and control signal, makes it consistent with the excitation wavelength of micro-cyclic laser.
When the luminous power of control signal C is greater than the high luminous power 1 of single input signal, and when being less than the high luminous power 1 of composite signal D, two bundle input signal A and B close after bundle through Y branch coupler 4, transmit into the first Nanowire Waveguides 1, and are coupled into micro-cyclic laser through first direction coupling mechanism 5.
(1) when the luminous power of two bundle input signals is low simultaneously, namely when logical value is " 0 " simultaneously, the luminous power of composite signal D is less than the luminous power of control signal C, the excitation mode of micro-cyclic laser is determined by control signal C, namely excitation mode is counterclockwise, now the luminous power of the second Nanowire Waveguides 2 output terminal E is low, and corresponding logical value is " 0 ".
(2) be high when the luminous power of two bundle input signals is different, namely when the logical value of input signal A and B is respectively " 0 " and " 1 " or " 1 " and " 0 ", luminous power due to now composite signal D is less than the luminous power of control signal C, so the excitation mode of micro-cyclic laser is still determined by control signal C, namely the excitation mode of micro-cyclic laser is still counterclockwise, so the luminous power of the second Nanowire Waveguides 2 output terminal E is still low, corresponding logical value is " 0 ".
(3) when the luminous power of two bundle input signals is high simultaneously, namely when logical value is " 1 " simultaneously, the luminous power being coupled into the composite signal D of micro-cyclic laser is greater than the luminous power of control signal C, now the excitation mode of micro-cyclic laser is determined by composite signal D, namely the excitation mode of micro-cyclic laser switches to clockwise, the luminous power of the second Nanowire Waveguides 2 output terminal E is high, and corresponding logical value is " 1 ".
Therefore, the corresponding relation between input signal light power and output signal luminous power is constructed as follows shown "AND" logic true value table.
| A | 0 | 0 | 1 | 1 |
| B | 0 | 1 | 0 | 1 |
| E＝A∩B | 0 | 0 | 0 | 1 |
In sum, the corresponding relation between input signal light power to output signal luminous power can form corresponding "AND" logical relation.
Embodiment 2
See Fig. 1, the utility model provides the structural representation of the full light OR-gate based on vertical coupled micro-cyclic laser.This structure comprises: the first Nanowire Waveguides 1, second Nanowire Waveguides 2, micro-ring resonant cavity 3, Y branch coupler 4, first direction coupling mechanism 5 and second direction coupling mechanism 6.
Wherein, the first Nanowire Waveguides 1, second Nanowire Waveguides 2 and Y branch coupler 4 are in same plane, and the first Nanowire Waveguides 1 and the second Nanowire Waveguides 2 are parallel to each other.In the adjacent plane of micro-ring resonant cavity 3 below the first Nanowire Waveguides 1, and between the first Nanowire Waveguides 1 and the second Nanowire Waveguides 2.Micro-ring resonant cavity 3 is respectively through first direction coupling mechanism 5 and second direction coupling mechanism 6, critical coupling is there is with the first Nanowire Waveguides 1 and the second Nanowire Waveguides 2, namely light wave that transmit in the first Nanowire Waveguides 1, that meet micro-ring resonant cavity 3 condition of resonance is coupled into micro-ring resonant cavity 3 through first direction coupling mechanism 5, and the resonance wavelength in micro-ring resonant cavity 3 is coupled into the second Nanowire Waveguides 2 through second direction coupling mechanism 6, and output signal at its output terminal E.
The full optical AND gate of the vertical coupled micro-ring laser structure based on polymkeric substance/InP composite system that the present embodiment provides is produced on InP/AlGaInAs Multiple Quantum Well epitaxial wafer.Epitaxial wafer comprises: N-type InP substrate 7, N-type InP under-clad layer 8, AlGaInAs multiple quantum well active layer 9, P type InP top covering 10 and P type InGaAs contact layer 11, corresponding epitaxial wafer structure as shown in Figure 2.
First, utilize semiconductor etching techniques on epitaxial wafer, prepare the micro-ring resonant cavity 3 of the ridge waveguide structure of single mode transport.Then, spin on polymers medium 12 planarization wafer surface.Make the P-type electrode graphical window of micro-cyclic laser subsequently by lithography, and prepare P-type electrode 13.Afterwards, spin coating low-loss waveguide polymkeric substance (poly-methyl esters methyl acrylate (PMMA), benzocyclobutane rare (BCB) etc. as fluorinated polyimide (PI), modification), and prepare the waveguide of polymer nano rice noodles and the directional coupler of single mode transport.Finally, N-type InP substrate 7 is thinned to 150 μm, and prepares N-type electrode 14 at chip back surface.The device architecture prepared as shown in Figure 3.
Between the P-type electrode 13 and N-type electrode 14 of micro-cyclic laser, pass to suitable electric current, making it be biased in only has the unidirectional bistable state of clockwise or counterclockwise excitation mode.During work, the optical wavelength of adjustment input signal and control signal, makes it consistent with the excitation wavelength of micro-cyclic laser.
When the luminous power of control signal C is greater than the low optical power 0 of single input signal, and when being less than the high luminous power 1 of single input signal, two bundle input signal A and B close bundle to the first Nanowire Waveguides 1 through Y branch coupler 4, and are coupled into micro-cyclic laser through first direction coupling mechanism 5.
(1) when the luminous power of two bundle input signals is low simultaneously, namely when logical value is " 0 " simultaneously, the luminous power of composite signal D is less than the luminous power of control signal C, the excitation mode of micro-cyclic laser is determined by control signal C, namely the excitation mode of micro-cyclic laser is counterclockwise, so the Output optical power of the second Nanowire Waveguides 2 output terminal E is low, corresponding logical value is " 0 ".
(2) be high when the luminous power of two bundle input signals is different, namely when the logical value of signal A and B is respectively " 0 " and " 1 " or " 1 " and " 0 ", luminous power due to now composite signal D is greater than the luminous power of control signal C, so the excitation mode of micro-cyclic laser is determined by composite signal D, namely the excitation mode of micro-cyclic laser switches to clockwise, now the Output optical power of the second Nanowire Waveguides 2 output terminal E is high, and corresponding logical value is " 1 ".
(3) when the luminous power of two bundle input signals is high simultaneously, namely when logical value is " 1 " simultaneously, the luminous power being coupled into the composite signal D of micro-cyclic laser is greater than the luminous power of control signal C, so now the excitation mode of micro-cyclic laser is still determined by composite signal D, namely the excitation mode of micro-cyclic laser is clockwise, the Output optical power of the second Nanowire Waveguides 2 output terminal E is high, and corresponding logical value is " 1 ".
Therefore, the corresponding relation between input signal light power and output signal luminous power is constructed as follows shown "or" logic true value table.
| A | 0 | 0 | 1 | 1 |
| B | 0 | 1 | 0 | 1 |
| E＝A∪B | 0 | 1 | 1 | 1 |
In sum, the corresponding relation between input signal light power to output signal luminous power can form corresponding "or" logical relation.
Wherein, micro-ring resonant cavity 3 in embodiment 1 and embodiment 2 is made by group Ⅲ-Ⅴ compound semiconductor material, first nano wire straight wave guide 1, second Nanowire Waveguides 2 and Y branch coupler 4 all adopt low-loss, polymeric material that refractive index is adjustable, and first direction coupling mechanism 5 and second direction coupling mechanism 6 are made by polymkeric substance/group Ⅲ-Ⅴ compound semiconductor compound substance.
Wherein, the first Nanowire Waveguides 1, second Nanowire Waveguides 2, micro-ring resonant cavity 3 and Y branch coupler 4 in embodiment 1 and embodiment 2 all adopt bar shaped or ridge waveguide structure, and above-mentioned bar shaped or ridge waveguide structure all meet single mode transport condition.
The Liang Ge branch of Y branch coupler 4 is as the input port of light signal, and its output port is connected with a port of the first Nanowire Waveguides 1.
Micro-ring resonant cavity 3 is manufactured with P-type electrode 13 and N-type electrode 14.Micro-ring resonant cavity 3, P-type electrode 13 and N-type electrode 14 are all the ingredients of micro-cyclic laser, jointly realize the lase of micro-cyclic laser.
N-type electrode 14 ground connection of micro-cyclic laser, P-type electrode 13 applies suitable bias current (usual bias current gets 2 times of threshold current), to ensure that micro-cyclic laser is operated in the unidirectional bistable state only having clockwise or counterclockwise excitation mode.Input signal A and B closes after bundle through Y branch coupler 4 and forms composite signal D, and transmits in the first Nanowire Waveguides 1, and control signal C inputs from the other end of the first Nanowire Waveguides 1.Control signal C and composite signal D is coupled into micro-cyclic laser through first direction coupling mechanism 5.
Wherein, control signal C decides the switching threshold of composite signal D.The luminous power of adjustment control signal C, to control the excitation mode of micro-cyclic laser, the excitation mode of micro-cyclic laser is coupled into the second Nanowire Waveguides 2 through second direction coupling mechanism 6, by measuring the Output optical power of the second Nanowire Waveguides 2 output terminal E with the variation relation of input optical signal power, corresponding AND gate and OR-gate logical relation can be obtained.
The utility model embodiment is to the model of each device except doing specified otherwise, and the model of other devices does not limit, as long as can complete the device of above-mentioned functions.
It will be appreciated by those skilled in the art that accompanying drawing is the schematic diagram of a preferred embodiment, above-mentioned the utility model embodiment sequence number, just to describing, does not represent the quality of embodiment.
The foregoing is only preferred embodiment of the present utility model, not in order to limit the utility model, all within spirit of the present utility model and principle, any amendment done, equivalent replacement, improvement etc., all should be included within protection domain of the present utility model.
Claims (4)
1. based on the full light of vertical coupled micro-cyclic laser structure and door and or a door, it is characterized in that, comprising: the first Nanowire Waveguides in same plane, the second Nanowire Waveguides and Y branch coupler,
Input optical signal is coupled into micro-ring resonant cavity by first direction coupling mechanism by described first Nanowire Waveguides, and output optical signal is coupled into described second Nanowire Waveguides through second direction coupling mechanism by described micro-ring resonant cavity; Described first Nanowire Waveguides and described second Nanowire Waveguides are parallel to each other; In the adjacent plane of described micro-ring resonant cavity below described first Nanowire Waveguides and described second Nanowire Waveguides, and between described first Nanowire Waveguides and described second Nanowire Waveguides.
2. a kind of full light based on vertical coupled micro-cyclic laser structure according to claim 1 and door and or door, it is characterized in that, the Liang Ge branch of described Y branch coupler is as the input port of light signal, and output port is connected with described first Nanowire Waveguides.
3. a kind of full light based on vertical coupled micro-cyclic laser structure according to claim 1 and door and or door, it is characterized in that, described micro-ring resonant cavity is manufactured with P-type electrode and N-type electrode.
4. a kind of full light based on vertical coupled micro-cyclic laser structure according to claim 1 and door and or door, it is characterized in that, described first Nanowire Waveguides, described second Nanowire Waveguides, described micro-ring resonant cavity and described Y branch coupler all adopt bar shaped or ridge waveguide structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420666744.2U CN204129402U (en) | 2014-11-10 | 2014-11-10 | A kind of full light based on vertical coupled micro-cyclic laser structure and door and or door |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420666744.2U CN204129402U (en) | 2014-11-10 | 2014-11-10 | A kind of full light based on vertical coupled micro-cyclic laser structure and door and or door |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204129402U true CN204129402U (en) | 2015-01-28 |
Family
ID=52385745
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420666744.2U Expired - Fee Related CN204129402U (en) | 2014-11-10 | 2014-11-10 | A kind of full light based on vertical coupled micro-cyclic laser structure and door and or door |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204129402U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20230118909A1 (en) * | 2021-10-19 | 2023-04-20 | Hewlett Packard Enterprise Development Lp | Optical logic gate decision-making circuit combining non-linear materials on soi |
-
2014
- 2014-11-10 CN CN201420666744.2U patent/CN204129402U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20230118909A1 (en) * | 2021-10-19 | 2023-04-20 | Hewlett Packard Enterprise Development Lp | Optical logic gate decision-making circuit combining non-linear materials on soi |
| US11860509B2 (en) * | 2021-10-19 | 2024-01-02 | Hewlett Packard Enterprise Development Lp | Optical logic gate decision-making circuit combining non-linear materials on SOI |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105829933B (en) | Wave-guide polarization separation and polarization converter | |
| CN103091784B (en) | Low-loss four-port non-blocking optics router based on micro-ring resonator | |
| CN101571657B (en) | Photonic crystal all-optical switch | |
| CN204129403U (en) | Based on the all-optical XOR logic door of vertical coupled micro-cyclic laser optical bistability | |
| CN209606662U (en) | 2 × 2 integrated optical switch led based on silicon planar lightwave | |
| CN108227084A (en) | Unrelated integrated optical switch of a kind of polarization based on silicon nitride waveguides and preparation method thereof | |
| CN103513333A (en) | Blended crossing device for silicon-based nanowire | |
| CN103487889A (en) | Mach-Zehnder optical switch structure based on coupling of double resonant cavities | |
| CN106443882B (en) | A kind of silicon substrate Meta Materials photostar shape cross-connect and preparation method thereof | |
| CN102156507A (en) | Two-bit optical decoder based on micro-ring resonator | |
| CN103986671A (en) | Non-blocking 2 * 2 optical switching node based on embedded type silicon substrate micro-ring resonant cavities | |
| CN105549154A (en) | Unidirectional magnetization semiconductor waveguide integration multiple-mode interference magneto-optical isolator | |
| Rajasekar et al. | Numerical analysis of reconfigurable and multifunctional barium titanate platform based on photonic crystal ring resonator | |
| CN105720475A (en) | Unidirectional optical transmitting method and apparatus for photonic crystal based all-optical diode | |
| CN101840031A (en) | Light-operated dynamic all-optical buffer shaper based on composite grating nonreciprocal coupling | |
| CN104317141A (en) | Vertical coupling micro-ring laser structure-based all-optical and gate and or gate | |
| CN204129402U (en) | A kind of full light based on vertical coupled micro-cyclic laser structure and door and or door | |
| CN104360561B (en) | Based on the bistable all-optical XOR logic door of vertical coupled micro-loop laser optical | |
| CN106680933B (en) | A kind of asymmetrical areflexia period waveguide microcavity bandpass filter of transverse direction | |
| CN208721965U (en) | Full photocontrol logic gate device based on nonlinear material medium | |
| WO2023169418A1 (en) | Optical topology duplexer based on coupled topological waveguide | |
| CN102522995A (en) | Silicon-based integrated two-position binary electro-optical encoder | |
| CN104793286B (en) | Phasmon all-optical logic gates based on open pore resonance coupling effect | |
| CN115755275B (en) | Miniaturized slit waveguide mode conversion device based on sub-wavelength structure | |
| CN109240019B (en) | Binary all-optical comparator |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150128 Termination date: 20171110 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |