CN204129396U - A kind of infra-red liquid crystal phased array chip - Google Patents
A kind of infra-red liquid crystal phased array chip Download PDFInfo
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- CN204129396U CN204129396U CN201420654545.XU CN201420654545U CN204129396U CN 204129396 U CN204129396 U CN 204129396U CN 201420654545 U CN201420654545 U CN 201420654545U CN 204129396 U CN204129396 U CN 204129396U
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Abstract
The utility model discloses a kind of infra-red liquid crystal phased array chip.This chip comprises electrically-controlled liquid crystal phase modulation micro-pillar array; It comprises liquid crystal material layer, be successively set on the liquid crystal initial orientation layer of liquid crystal material layer upper surface, electricity isolated layer, patterned electrodes layer, substrate and infrared anti-reflection film, and be successively set on the liquid crystal initial orientation layer of liquid crystal material layer lower surface, electricity isolated layer, common electrode layer, substrate and infrared anti-reflection film; Patterned electrodes layer is made up of the sub-electrode of array distribution, and each sub-electrode is formed by square or rectangular conducting film; Electrically-controlled liquid crystal phase modulation micro-pillar array is divided into the electrically-controlled liquid crystal phase modulation microtrabeculae of array distribution, itself and sub-electrode one_to_one corresponding, and the area of single sub-electrode is 50% ~ 95% with the ratio of the light receiving area of corresponding electrically-controlled liquid crystal phase modulation microtrabeculae.The functions such as this chip can realize expanding, the bundle that contracts, debunching, pack, bundle tuning and bundle scanning, easy and other infrared optics photoelectric mechanical structure Coupling, light field adaptability is good.
Description
Technical field
The utility model belongs to infrared wave beam precision measurement and control technology field, more specifically, relates to a kind of infra-red liquid crystal phased array chip.
Background technology
Up to now, based on electromagnetic wave phasing technique realize electromagnetic beam any Morphogenesis, can tuning delivery, automatically controlled spacescan, particular orientation or spatial domain wave beam cohesion etc. radio frequency phased-array technique, demonstrate powerful usefulness in field of radar.Find the electromagnetic beam phase modulation means being applicable to infrared band, realize that there is with radio frequency electromagnetic similar bundle and build, restraint and deliver and restraint the functions such as spacescan, become the research and development focus of infrared wave beam engineering at present.Along with the sustained and rapid development of infrared beam technique and the continuous expansion of application, development effectively can build the infrared wave beam of cumulative of specific form, flexible realization expands, bundle, debunching or the pack of contracting operation, infrared wave beam is agglomerated to particular orientation or spatial domain, with the flexible modulation Shu Zhixiang of environment, target and demand, realize the automatically controlled bundle spacescan based on priori or target conditions, enhancing is coupled and the infrared phased-array technique mating usefulness etc. with other infrared optics optoelectromechanical device, receives extensive concern and attention.
At present, the infrared wave beam of widespread use build, shaping and delivery technology, most refraction with fixing outline shape based on routine or diffraction lens framework carry out, and attainable bundle builds and bundle shaping limited efficacy, can the projection of tuning bundle generally be completed by mechanical pendulum flowing mode.Major technique defect map is now in the following areas: the volume of (one) optics and auxiliary topworks, quality and inertia are large, function is relatively single, comparatively numerous and diverse driving-controlling device need be configured, low-response, state conversion time is long, and the intrinsic continuity because of mechanical motion is difficult to carry out any structure of pencil state, switching or saltus step; (2) the infrared optics assembly used is as typical prism, lens, catoptron and astigmatoscope, and made multiple optical film is as typically increased anti-, anti-reflection and part reflective semitransparent film etc., all have the spectrum scope of application of relative narrowness, the change existed with infrared spectrum composition is difficult to the aberration of offsetting completely or aberration.Bundle spacescan often realizes based on the reciprocating machine translation between pendulum mirror or microlens array; there is the scan mode that special rotation or translation retrain single; performance index are limited; there is larger machinery inertial; the auxiliary driving-controlling device of relative complex need be configured; state substitutes slow, and bundle scan operation only can be carried out according to the order of setting, and bundle scanning, the regional cohesion that can not realize arbitrary form are difficult to scanning defects such as coexisting or switch fast.
In the last few years, based on the array electrically-controlled liquid crystal micro optical structure of low-power consumption, carry out the structure of the infrared wave beam of specific modality, shaping, swing and delivery technology and obtain remarkable break-throughs, the major function realized at present comprises: the automatically controlled excitation of its refractive index of (one) array liquid crystal microstructure and modulation drive and control signal by applying low-power electricity and launch, the regime shift time constant of refractive index has been low to moderate sub-Millisecond, laboratory-scale be low to moderate Microsecond grade; (2) the automatically controlled switching of wave beam converge and diverge mode can be realized, effectively can perform automatically controlled focusing, focusing and pendulum Jiao and operate, and the automatically controlled adjustment of beam divergence degree; (3) sequential before light wave can effectively be carried out based on the automatically controlled structure of liquid-crystal refractive-index and modulation or space-variant regulates; (4) to the phase modulation of wave beam and shaping conversion can according to the automatically controlled sequential deployment of setting, solidify or modulation, thus possess and carry out based on priori, wave beam situation or demand the ability that retrains, intervene or guide; (5) planar end and have the ultra-thin liquid crystal structure of micron order liquid crystal material thickness, can by flexible access light path or be coupled even integrated with other optical photoconductor physical constructions; (6) have and maintain by regulation and control electrical quantity or change beam configuration, effectively adapt to wave beam spectral change, device supply variation, environmental factor changes and target signature changes this feature.At present, how based on the electrically-controlled liquid crystal structure of little microminiaturization to the automatically controlled change action of infrared wave beam, build and the similar infrared phased array of radio frequency phased array, become infrared wave beam precision measurement and control technology continue to develop needed for the difficulty that solves and bottleneck problem, in the urgent need to new breakthrough.
Utility model content
For above defect or the Improvement requirement of prior art, the utility model provides a kind of infra-red liquid crystal phased array chip, infrared beam configuration can be built flexibly, effectively realize automatically controlledly expanding, the function such as the bundle that contracts, debunching, pack, bundle tuning and bundle scanning, easily and other infrared optics photoelectric mechanical structure Coupling, light field adaptability is good.
For achieving the above object, the utility model provides a kind of infra-red liquid crystal phased array chip, it is characterized in that, comprises electrically-controlled liquid crystal phase modulation micro-pillar array; Described electrically-controlled liquid crystal phase modulation micro-pillar array comprises liquid crystal material layer, be successively set on the first liquid crystal initial orientation layer of described liquid crystal material layer upper surface, the first electricity isolated layer, patterned electrodes layer, the first substrate and the first infrared anti-reflection film, and be successively set on the second liquid crystal initial orientation layer of described liquid crystal material layer lower surface, the second electricity isolated layer, common electrode layer, the second substrate and the second infrared anti-reflection film; Described common electrode layer is made up of the homogeneous conducting film of one deck; The sub-electrode that described patterned electrodes layer is distributed by m × n element array is formed, and each sub-electrode is formed by square or rectangular conducting film, and wherein, m, n are the integer being greater than 1; Described electrically-controlled liquid crystal phase modulation micro-pillar array is divided into the electrically-controlled liquid crystal phase modulation microtrabeculae of m × n element array distribution, described electrically-controlled liquid crystal phase modulation microtrabeculae and described sub-electrode one_to_one corresponding, each sub-electrode is all positioned at the center of corresponding electrically-controlled liquid crystal phase modulation microtrabeculae, form the top electrode of electrically-controlled liquid crystal phase modulation microtrabeculae, the bottom electrode of all electrically-controlled liquid crystal phase modulation microtrabeculaes is provided by described common electrode layer; The area of single sub-electrode is electrode activity coefficient with the ratio of the light receiving area of corresponding electrically-controlled liquid crystal phase modulation microtrabeculae, and described electrode activity coefficient is 50% ~ 95%.
Preferably, described chip also comprises chip carrier; Described electrically-controlled liquid crystal phase modulation micro-pillar array to be encapsulated in described chip carrier and to be connected with described chip carrier, its light entrance face and light-emitting face outside exposed by perforate just right on former and later two end faces of described chip carrier; The side of described chip carrier is provided with multiplely drives control signal input port.
Preferably, the side of described chip carrier is provided with first and drives control signal input port to the 8th; The top electrode of each electrically-controlled liquid crystal phase modulation microtrabeculae is all independently drawn by a wire, and these top electrodes lead-in wire grouping access described first drives control signal input port to the 8th; Described common electrode layer is drawn by eight wires, and these eight common electrode layer lead-in wires access described first respectively and drive control signal input port to the 8th; Each top electrode driven in control signal input port goes between and common electrode layer goes between lays respectively at the two ends of this port.
In general, the above technical scheme conceived by the utility model compared with prior art, has following beneficial effect:
1, the bundle based on phase modulation builds, restraint tuning scans with bundle.The utility model builds specific modality and the trend of purchasing of infrared wave beam based on wavefront modification by electrically-controlled liquid crystal phase modulation micro-pillar array.
2, control mode is flexible.By performing independently power-up operations to each electrically-controlled liquid crystal phase modulation microtrabeculae in electrically-controlled liquid crystal phase modulation micro-pillar array, phase of light wave distributional pattern can be built flexibly, there is control mode advantage flexibly.
3 is intelligent.Shaping that driving the infrared outgoing wave field that the control frequency of voltage signal or amplitude are carried out in electrically-controlled liquid crystal phase modulation micro-pillar array and modulation operation is carried in by modulation, in the constraint of priori or wave beam action effect, intervention or can carry out under guiding, there is intelligent feature.
4, control accuracy is high.The liquid crystal phase modulation framework of control can be driven by accurate electricity because the utility model adopts, there is stability and the control accuracy of high structure, electricity and electro-optical parameters.
5, easy to use.Chip body of the present utility model is the electrically-controlled liquid crystal phase modulation micro-pillar array be encapsulated in chip carrier, patches conveniently in infrared light path, easily mates with conventional infrared optics photoconductive structure, electronics and mechanical hook-up etc. and is coupled.
Accompanying drawing explanation
Fig. 1 (a) and (b) are structural representations of the infra-red liquid crystal phased array chip of the utility model embodiment;
Fig. 2 is the structural representation of electrically-controlled liquid crystal phase modulation micro-pillar array;
Fig. 3 is the light wave conversion schematic diagram of the infra-red liquid crystal phased array chip of the utility model embodiment.
In all of the figs, identical Reference numeral is used for representing identical element or structure, and wherein: 1-first drives control signal input port, 2-second drives control signal input port, 3-the 3rd drives control signal input port, 4-4 wheel driven control signal input port, 5-the 5th drives control signal input port, and 6-the 6th drives control signal input port, 7-the 7th drives control signal input port, 8-the 8th drives control signal input port, 9-electrically-controlled liquid crystal phase modulation micro-pillar array, 10-chip carrier.
Embodiment
In order to make the purpose of this utility model, technical scheme and advantage clearly understand, below in conjunction with drawings and Examples, the utility model is further elaborated.Should be appreciated that specific embodiment described herein only in order to explain the utility model, and be not used in restriction the utility model.In addition, if below in described each embodiment of the utility model involved technical characteristic do not form conflict each other and just can mutually combine.
As shown in Figure 1 (a), (b) shows, the infra-red liquid crystal phased array chip of the utility model embodiment comprises chip carrier 10 and electrically-controlled liquid crystal phase modulation micro-pillar array 9.Electrically-controlled liquid crystal phase modulation micro-pillar array 9 to be encapsulated in chip carrier 10 and to be connected with chip carrier 10, its light entrance face and light-emitting face outside exposed by perforate just right on former and later two end faces of chip carrier 10.The side of chip carrier 10 is provided with first to the 8th and drives control signal input port 1 to 8, and wherein, each side arranges two and drives control signal input port.
As shown in Figures 2 and 3, electrically-controlled liquid crystal phase modulation micro-pillar array 9 comprises liquid crystal material layer, be successively set on the first liquid crystal initial orientation layer of liquid crystal material layer upper surface, the first electricity isolated layer, patterned electrodes layer, the first substrate and the first infrared anti-reflection film, and be successively set on the second liquid crystal initial orientation layer of liquid crystal material layer lower surface, the second electricity isolated layer, common electrode layer, the second substrate and the second infrared anti-reflection film.Common electrode layer is made up of the homogeneous conducting film of one deck.The sub-electrode that patterned electrodes layer is distributed by m × n element array is formed, and each sub-electrode is formed by micro-square or micro-rectangle conducting film, and wherein, m, n are the integer being greater than 1.
Preferably, patterned electrodes layer and public electrode layer material are gold or aluminium etc., and its thickness is in tens to hundreds of nanometer range.First substrate and the second substrate are optical material of the same race.First and second electricity isolated layers by electrical isolation and the membrane material with high IR transmitance make, typical in SiO
2films etc., its thickness is equally in tens to hundreds of nanometer range.Electricity isolated layer is entered the passage of liquid crystal material layer by infiltrate liquid crystal initial orientation layer by the charge carrier (as electronics etc.) overflowed in patterned electrodes layer and public electrode layer material for blocking, prevent the polar group of itself and liquid crystal molecule from mutually neutralizing and causing liquid crystal material to lose efficacy.
Above-mentioned electrically-controlled liquid crystal phase modulation micro-pillar array 9 is divided into the electrically-controlled liquid crystal phase modulation microtrabeculae of m × n element array distribution, electrically-controlled liquid crystal phase modulation microtrabeculae and sub-electrode one_to_one corresponding, each sub-electrode is all positioned at the center of corresponding electrically-controlled liquid crystal phase modulation microtrabeculae, form the top electrode of electrically-controlled liquid crystal phase modulation microtrabeculae, the bottom electrode of all electrically-controlled liquid crystal phase modulation microtrabeculaes is provided by common electrode layer.The area of single sub-electrode is called as electrode activity coefficient with the ratio of the light receiving area of corresponding electrically-controlled liquid crystal phase modulation microtrabeculae, and its representative value is between 50% to 95%.
During work, each electrically-controlled liquid crystal phase modulation microtrabeculae is independently powered up drives control.Particularly, the top electrode of each electrically-controlled liquid crystal phase modulation microtrabeculae is all independently drawn by a wire, these top electrodes lead-in wire grouping access first is driven control signal input port 1 to 8 to the 8th, common electrode layer is drawn by eight wires simultaneously, control signal input port 1 to 8 is driven in the access first to the 8th respectively that these eight common electrode layer gone between, and each top electrode driven in control signal input port goes between and common electrode layer goes between lays respectively at the two ends of this port.According to each position of electrically-controlled liquid crystal phase modulation microtrabeculae in electrically-controlled liquid crystal phase modulation micro-pillar array 9, by first to the 8th drive control signal input port 1 to 8 to each electrically-controlled liquid crystal phase modulation microtrabeculae realize addressable drive control voltage signal load.As shown in Figure 2, to the electrically-controlled liquid crystal phase modulation microtrabeculae that the 6th row n-th in electrically-controlled liquid crystal phase modulation micro-pillar array 9 arranges, the control voltage signal that drives loaded thereon is designated as V
6n, to the electrically-controlled liquid crystal phase modulation microtrabeculae of capable n-th row of m in electrically-controlled liquid crystal phase modulation micro-pillar array 9, the control voltage signal that drives loaded thereon is designated as V
mn.
The infra-red liquid crystal phased array chip of the utility model embodiment can be directly located in optical system for testing, also can be placed in the focal plane place of the infrared optical system be made up of primary mirror or carry out weak out of focus configuration.Its principle of work is as follows.
Gone between and patterned electrodes layer lead-in wire by the first to the 8th top electrode driven in control signal input port 1 to 8, control voltage signal V will be driven
ijbe carried on the electrically-controlled liquid crystal phase modulation microtrabeculae of the i-th row jth row, each electrically-controlled liquid crystal phase modulation microtrabeculae independently powered up and drives control, wherein, i=1,2 ..., m, j=1,2 ..., n.Be distributed in the double layer planar battery lead plate forming liquid crystal microcavity and (comprise infrared anti-reflection film, substrate, electrode layer, electricity isolated layer and liquid crystal initial orientation layer) liquid crystal molecule near inside surface, be fabricated on two relative plane electrode plate surfaces and there is the liquid crystal initial orientation layer secure anchorage of parallel groove orientation, higher than liquid crystal material drive control signal threshold value drive control voltage signal, can the space electric field of modulation by having encouraged in liquid crystal material, the space electric field that liquid crystal molecule in liquid crystal material layer is then encouraged by double layer planar battery lead plate drives, form specific index distribution form.
After infrared incident light wave enters electrically-controlled liquid crystal phase modulation micro-pillar array, electrically-controlled liquid crystal phase modulation micro-pillar array is according to the array scale of wherein electrically-controlled liquid crystal phase modulation microtrabeculae and arrangement situation, infrared incident light wave is divided into the sub-plane incident wavefront of array, liquid crystal molecule in specific refractive index distributional pattern under each sub-plane incident wavefront and electric field drive and control interacts, form the sub-planar exit wavefront with the array of the phase delay of specific degrees, the sub-planar exit wavefront of array forms emerging wavefront through coupling and exports from chip.
As shown in Figure 3, be carried in driving on the electrically-controlled liquid crystal phase modulation microtrabeculae of the i-th row jth row by adjustment and control voltage signal V
ijfrequency or mean square amplitude, the index distribution form of the liquid crystal molecule in modulation liquid crystal material layer, make to be changed because of refractive index variation by the light path of the light wave of liquid crystal material layer, and then make each sub-planar exit wavefront produce by driving the phase delay controlling the specific degrees that voltage signal regulates, each sub-planar exit wavefront coupling forms emerging wavefront, obtains the outgoing beam of the emerging wavefront based on specific modality.Before the light wave exported, the variation of its form retrains the operations such as such as beam shaping, bundle shape modulation, bundle tuning or bundle scanning.Particularly, add after live drives control signal to chip, beam configuration can be built flexibly by the array phase adjusted effect of chip, and perform automatically controlledly to expand, the bundle that contracts, debunching, pack, bundle tuning or restraint the operations such as scanning.For target or environment Fluctuation of Light Field and electrical quantity fluctuation, by and the time modulation multidiameter delay be carried on chip drive control voltage signal, can carry out school tune to the optical parametric of outgoing beam, chip possesses Ability of Resisting Disturbance.Array phase modulation defunctionalization after powering down chips, light wave is by its bundle feature invariant after chip.
Those skilled in the art will readily understand; the foregoing is only preferred embodiment of the present utility model; not in order to limit the utility model; all do within spirit of the present utility model and principle any amendment, equivalent to replace and improvement etc., all should be included within protection domain of the present utility model.
Claims (3)
1. an infra-red liquid crystal phased array chip, is characterized in that, comprises electrically-controlled liquid crystal phase modulation micro-pillar array; Described electrically-controlled liquid crystal phase modulation micro-pillar array comprises liquid crystal material layer, be successively set on the first liquid crystal initial orientation layer of described liquid crystal material layer upper surface, the first electricity isolated layer, patterned electrodes layer, the first substrate and the first infrared anti-reflection film, and be successively set on the second liquid crystal initial orientation layer of described liquid crystal material layer lower surface, the second electricity isolated layer, common electrode layer, the second substrate and the second infrared anti-reflection film; Described common electrode layer is made up of the homogeneous conducting film of one deck; The sub-electrode that described patterned electrodes layer is distributed by m × n element array is formed, and each sub-electrode is formed by square or rectangular conducting film, and wherein, m, n are the integer being greater than 1;
Described electrically-controlled liquid crystal phase modulation micro-pillar array is divided into the electrically-controlled liquid crystal phase modulation microtrabeculae of m × n element array distribution, described electrically-controlled liquid crystal phase modulation microtrabeculae and described sub-electrode one_to_one corresponding, each sub-electrode is all positioned at the center of corresponding electrically-controlled liquid crystal phase modulation microtrabeculae, form the top electrode of electrically-controlled liquid crystal phase modulation microtrabeculae, the bottom electrode of all electrically-controlled liquid crystal phase modulation microtrabeculaes is provided by described common electrode layer; The area of single sub-electrode is electrode activity coefficient with the ratio of the light receiving area of corresponding electrically-controlled liquid crystal phase modulation microtrabeculae, and described electrode activity coefficient is 50% ~ 95%.
2. infra-red liquid crystal phased array chip as claimed in claim 1, it is characterized in that, described chip also comprises chip carrier; Described electrically-controlled liquid crystal phase modulation micro-pillar array to be encapsulated in described chip carrier and to be connected with described chip carrier, its light entrance face and light-emitting face outside exposed by perforate just right on former and later two end faces of described chip carrier; The side of described chip carrier is provided with multiplely drives control signal input port.
3. infra-red liquid crystal phased array chip as claimed in claim 2, it is characterized in that, the side of described chip carrier is provided with first and drives control signal input port to the 8th; The top electrode of each electrically-controlled liquid crystal phase modulation microtrabeculae is all independently drawn by a wire, and these top electrodes lead-in wire grouping access described first drives control signal input port to the 8th; Described common electrode layer is drawn by eight wires, and these eight common electrode layer lead-in wires access described first respectively and drive control signal input port to the 8th; Each top electrode driven in control signal input port goes between and common electrode layer goes between lays respectively at the two ends of this port.
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| CN201420654545.XU CN204129396U (en) | 2014-11-05 | 2014-11-05 | A kind of infra-red liquid crystal phased array chip |
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| CN201420654545.XU CN204129396U (en) | 2014-11-05 | 2014-11-05 | A kind of infra-red liquid crystal phased array chip |
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