CN104330930B - Infrared light-concentrating chip - Google Patents

Infrared light-concentrating chip Download PDF

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Publication number
CN104330930B
CN104330930B CN201410615812.7A CN201410615812A CN104330930B CN 104330930 B CN104330930 B CN 104330930B CN 201410615812 A CN201410615812 A CN 201410615812A CN 104330930 B CN104330930 B CN 104330930B
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liquid crystal
phase modulation
crystal phase
modulation unit
infrared
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CN104330930A (en
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张新宇
雷宇
佟庆
罗俊
桑红石
谢长生
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Huazhong University of Science and Technology
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Huazhong University of Science and Technology
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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1343Electrodes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12Generating the spectrum; Monochromators
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1313Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells specially adapted for a particular application

Abstract

The invention discloses an infrared light-concentrating chip. The chip comprises a cylindrical liquid crystal phase modulation framework; the cylindrical liquid crystal phase modulation framework comprises a liquid crystal material layer, and a first liquid crystal initial orientation layer, a first electric isolation layer, a patterned electrode layer, a first substrate and a first infrared antireflection film which are sequentially arranged on the upper surface of the liquid crystal material layer, and a second liquid crystal initial orientation layer, a second electric isolation layer, a public electrode layer, a second substrate and a second infrared anti-reflection film which are sequentially arranged on the lower surface of the liquid crystal material layer; the patterned electrode layer is composed of a circular conductive film, and at least one circular-circle-shaped conductive film concentrically arranged on the periphery of the circular conductive film; the diameter of the circular conductive film is greater than the radial width of the adjacent circular-circle-shaped conductive film; when a plurality of circular-circle-shaped conductive films are arranged, the plurality of circular-circle-shaped conductive films are sequentially arranged on the periphery of the circular conductive film, and the radial width of each circular-circle-shaped conductive film is progressively decreased. The infrared light-concentrating chip has high focusing efficiency on infrared wave beams and good optical field adaptability and is small in size, light in weight and easy to couple with other optical and photoelectric mechanical structures.

Description

A kind of infrared optically focused chip
Technical field
The invention belongs to infrared waves accurate measurement and control technology field, more particularly, to a kind of infrared optically focused core Piece.
Background technology
So far, by the symmetrical zone plate with one heart of the circle of specific morphology structure, optical axis are performed to infrared incident light wave The discrete pack of multifocal this technology on direction, is lifted in the performance indications for realizing normal optical configuration or system and is expanded with function Exhibition, builds based on ultra-thin chip and the enhanced spotlight processing of light wave Coherent and transform framework, and the development efficiency of light energy utilization is spread out Enhancing is penetrated, and the particular space arrangement based on diffractive phase structure carries out spectrum bunching type spectrum space separation of polychrome light wave etc. Aspect, has obtained extensively application.With miniaturization even chip type infrared optics lens and the sustained and rapid development of systems technology With the continuous extension of application, development can based on environment, target, infrared waves frequency spectrum and beam form situations such as, and time modulation The arrangement form of axial focus, point spread function and realize that the spectrum pack of larger space yardstick is separated, enhancing uses flexibility, Possess based on priori or wave beam situation can modulation pack function, strengthen with the coupling of other optical photoconductor mechanical devices with Matching capacity and reduction structural complexity etc., receive significant attention and pay attention to.
At present, by the symmetrical zone plate with one heart of the circle of specific morphology structure, axial multifocal is performed to directs light wave Discrete type is focused on and bunching type spectrum space isolation technics, and some open defects are presented, including:(1) built based on specific wavelength Vertical special appearance profile and physical dimension zone plate, only for specific wavelength the discrete pack operation of multifocal is carried out, frequency spectrum Faint variation can be greatly reduced discrete pack or spectrum space separation efficiency, compose bad adaptability;(2) the axial bunching type of light wave Multifocal builds or frequency spectrum separates that do not possess can modulation function, it is impossible to which focusing is long and point spread function carries out modulation operation, target And the bad adaptability of working environment and electric circumstance;(3) focusing or modulation point spread function are typically based on zone plate with auxiliary Mechanical Moving between lens launches, and the volume of executing agency, quality and inertia are big, need to configure numerous and diverse driving-controlling device, low-response, State conversion time is long, because mechanical movement reason cannot carry out any incision or saltus step of infrared optics state;(4) it is only capable of holding The axial frequency spectrum lock out operation that traveling wave length differs greatly.
In the last few years, the automatically controlled structure of specific modality infrared beams is carried out based on frivolous and low-power consumption electrically-controlled liquid crystal structure With this technology of modulation, achieved with remarkable break-throughs, the major function for having possessed at present includes:(1) based on the micro- knot of array liquid crystal The infrared waves phase delay of structure, can be launched by applying low-power electric driving control signal;(2) based between adjustable covert bit architecture Matching be coupled into row wavefront construction, can be according to set automatically controlled sequential deployment, solidification or modulation;(3) can be by modulation electricity Delay of the driving control signal to infrared waves phase place is operated into row constraint, intervened or guiding, with intelligent feature;(4) planar ends Face and the ultra-thin liquid crystal zone plate with micron order liquid crystal material thickness, can be by flexible access infrared light path or infrared with other The coupling of optical photoconductor frame for movement is even integrated;(5) driving of array liquid crystal micro-structural and control manipulation can be based on microwatt level The driving control signal of power consumption is carried out;(6) based on electric field excitation build liquid-crystal refractive-index spatial distribution form can with electric field change into Line translation, can by electric modulation operation effectively adapt to infrared incident light wave its frequency spectrum, liquid crystal device supply variation, environmental change, Target signature variation and the controlled change of light wave concentrantion index etc..At present, the how electrically-controlled liquid crystal structure based on small miniaturization Carry out infrared waves can modulation pack operation, realize with particular spatial distribution form array squeezed light field build, Become the difficult and bottleneck problem solved needed for infrared waves accurate measurement develops with control technology continuation, in the urgent need to new is dashed forward It is broken.
The content of the invention
For the disadvantages described above or Improvement requirement of prior art, the invention provides a kind of infrared optically focused chip, with ripple Beam focuses on efficiency height, and light field adaptability is good, and volume and quality are little, the advantage for easily coupling with other optical photoconductor frame for movements.
For achieving the above object, the invention provides a kind of infrared optically focused chip, it is characterised in that including the liquid of cylinder Brilliant phase modulation framework;The liquid crystal phase modulation framework includes liquid crystal material layer, is successively set on the of the liquid crystal material layer upper surface One liquid crystal initial orientation layer, the first electricity isolated layer, patterned electrode layer, the first substrate and the first infrared anti-reflection film, and successively It is arranged on the second liquid crystal initial orientation layer, the second electricity isolated layer, common electrode layer, second base of the liquid crystal material layer lower surface Piece and the second infrared anti-reflection film;The common electrode layer is made up of one layer of homogeneous conducting film;The patterned electrode layer is by circle Conducting film is constituted with least one annular conducting film for being arranged concentrically on the circular conductive film periphery, the circular conductive film The center of circle and the liquid crystal phase modulation framework axis coinciding, the circular conductive film leads with diameter greater than the annular being adjacent The radial width of electrolemma;When the annular conducting film is multiple, multiple annular conducting films are successively set on the circle The periphery of conducting film, and its radial width successively decreases, the radial spacing of adjacent conductive film is equal, wherein, adjacent conductive film includes phase The annular conducting film and adjacent annular conducting film and circular conductive film of neighbour;The liquid crystal phase modulation framework is divided into circle Cylindricality liquid crystal phase modulation unit and at least one cylindrical shape liquid crystal phase modulation unit, circular conductive film Correspondent cy linder shape liquid crystal phase modulation unit And positioned at the center of cylindrical liquid crystal phase modulation unit, form the Top electrode of cylindrical liquid crystal phase modulation unit, annular conducting film with Cylindrical shape liquid crystal phase modulation unit is corresponded, and each annular conducting film is respectively positioned on corresponding cylindrical shape liquid crystal phase modulation unit Center, form the Top electrode of cylindrical shape liquid crystal phase modulation unit, the bottom electrode of all liquid crystal phase modulation units carries by common electrode layer For.
Preferably, infrared incident wave beam is entered after the liquid crystal phase modulation framework, and the liquid crystal phase modulation framework is according to wherein liquid The scale of brilliant phase modulation unit and arrangement situation, by infrared incident wave beam be divided into concentric circles corresponding with each liquid crystal phase modulation unit and The sub- plane incident wavefront of annular, each sub- plane incident wavefront is empty in specific refractive index with each self-corresponding liquid crystal phase modulation unit Between distributional pattern liquid crystal molecule interact, formed with specific degrees phase delay concentric circles and the sub- plane of annular Emerging wavefront, each sub- planar exit wavefront coupling is formed on the axle center of the liquid crystal phase modulation framework and cascades focused state in discrete type Infrared transmission wave beam export from the chip;Wherein, each liquid crystal phase modulation unit is controled by independent power-up, is carried in by adjusting The frequency or mean square amplitude that control voltage signal on each liquid crystal phase modulation unit, the discrete type cascade of energy modulation infrared transmission wave beam The position shape of focal spot and point spread function.
Preferably, the chip also includes chip carrier;The liquid crystal phase modulation framework is encapsulated in the chip carrier simultaneously Be connected with the chip carrier, its light entrance face and light-emitting face by the top of the chip carrier and bottom opening it is exposed Outward;The side of the chip carrier is provided with the first and second control signal input ports, is carried in each liquid crystal for input and adjusts Voltage signal is controled on facies unit.
Preferably, each circular conductive film and annular conducting film are independently drawn by a wire, form Top electrode Lead, these Top electrode leads are grouped two groups of one end for being respectively connected to first and second control signal input port;It is described Common electrode layer is drawn by two wires, and two common electrode layer leads of formation are respectively connected to described first and second and control letter The other end of number input port;By the Top electrode lead and common electrode layer lead, can be to each liquid crystal phase modulation unit independence Loading controls voltage signal.
In general, by the contemplated above technical scheme of the present invention compared with prior art, with following beneficial effect Really:
1st, automatically controlled discrete type cascade optically focused and modulation.Multiple cylindrical shape liquid crystal being arranged concentrically that the present invention is controled based on electricity Phase modulation unit, realizes the discrete convergence of infrared waves multilevel in the direction of the optical axis, with based on phase matched before annular wavelet Build and this advantage of modulation Transmission field execution cascade bunching.
2nd, automatically controlled arrangement axially cascades focal spot.Performed by the cylindrical shape liquid crystal phase modulation unit to being respectively arranged concentrically independent Power-up operations, can be adjusted to the position shape and point spread function of axially cascade focus.
3rd, the infrared efficiency of light energy utilization is high.By automatically controlled modulation based on multiple cylindrical shape liquid crystal phase modulation units being arranged concentrically The phase place of sub- planar exit wavefront, is tuned to the sub- planar exit wavefront of adjacent lcd phase modulation unit vector state in the same direction and realizes The maximization of the efficiency of light energy utilization.
4th, intellectuality is controled.The power-up operations of liquid crystal phase modulation framework can the constraint of priori or wave beam convergence situation, Intervene or carry out under guiding, with intelligent feature.
5th, control accuracy is high.Due to the present invention using can the liquid crystal phase modulation unit that controls of accurate electricity, with high structure, The stability of electricity and electro-optical parameters, has the advantages that control accuracy is high.
6th, it is easy to use.The chip body of the present invention is the liquid crystal phase modulation framework being encapsulated in chip carrier, in the optical path Patch conveniently, easily couple with the matching such as conventional infrared optics photoelectricity and frame for movement.
Description of the drawings
Fig. 1 is the structural representation of the infrared optically focused chip of the embodiment of the present invention;
Fig. 2 is the structural representation of the patterned electrode layer of liquid crystal phase modulation framework;
Fig. 3 is that the infrared optically focused chip of the embodiment of the present invention carries out cascading the schematic diagram of optically focused.
In all of the figs, identical reference be used for represent identical element or structure, wherein:1- first controls letter Number input port, the control signal input ports of 2- second, 3- liquid crystal phase modulation frameworks, 4- chip carriers, the conducting films of 31- first, 32- Second conducting film, the conducting films of 33- the 3rd, the conducting films of 34- the 4th, the conducting films of 35- the 5th, the conducting films of 36- the 6th, 3m- m are conductive Film.
Specific embodiment
In order that the objects, technical solutions and advantages of the present invention become more apparent, it is right below in conjunction with drawings and Examples The present invention is further elaborated.It should be appreciated that specific embodiment described herein is only to explain the present invention, and It is not used in the restriction present invention.As long as additionally, technical characteristic involved in invention described below each embodiment Not constituting conflict each other just can be mutually combined.
As shown in figure 1, the infrared optically focused chip of the embodiment of the present invention includes the liquid crystal phase modulation frame of chip carrier 4 and cylinder Structure 3.Liquid crystal phase modulation framework 3 is encapsulated in chip carrier 4 and is connected with chip carrier 4, and its light entrance face and light-emitting face pass through The top of chip carrier 4 and bottom opening are exposed outside.The side of chip carrier 4 is provided with the first control signal input port 1 With the second control signal input port 2.
As shown in Figures 2 and 3, liquid crystal phase modulation framework 3 includes liquid crystal material layer, is successively set on liquid crystal material layer upper surface The first liquid crystal initial orientation layer, the first electricity isolated layer, patterned electrode layer, the first substrate and the first infrared anti-reflection film, and It is successively set on the second liquid crystal initial orientation layer, the second electricity isolated layer, common electrode layer, second base of liquid crystal material layer lower surface Piece and the second infrared anti-reflection film.Common electrode layer is made up of one layer of homogeneous conducting film.Patterned electrode layer is by the first of micro-circle Conducting film 31 and the second of the peripheral and concentric micro- annular of the first conducting film 31 is successively set on to m conducting films 32 Constitute to 3m, wherein, m is the integer more than 1.Specifically, the second conducting film 32 is arranged on the periphery of the first conducting film 31, and the 3rd Conducting film 33 is arranged on the periphery of the second conducting film 32, and the 4th conducting film 34 is arranged on the periphery of the 3rd conducting film 33, according to this class Push away.The center of circle of the first conducting film 31 and the axis coinciding of liquid crystal phase modulation framework 3.The radial width of the second conducting film 32 is less than first The diameter of conducting film 31, second to m conducting films 32 to 3m radial width is successively decreased, specifically, the radial direction of the 3rd conducting film 33 Width is less than the second conducting film 32, and the radial width of the 4th conducting film 34 is less than the 3rd conducting film 33, and the rest may be inferred;Adjacent conductive The radial spacing of film is equal, is micron order size, to be effectively isolated the independent power-up operations implemented to each conducting film;Wherein, Adjacent conductive film conducting film adjacent in including second to m conducting films 32 to 3m and the first adjacent conducting film 31 and second Conducting film 32.
Preferably, patterned electrode layer and public electrode material are gold or aluminium etc., and its thickness is tens to hundreds of nanometer In the range of.First substrate and the second substrate are same optical material.First and second electricity isolated layers are by being electrically insulated and with Gao Hong The membrane material of outer transmitance is made, typical such as SiO2Film etc., its thickness is equally in tens to hundreds of nanometer range.Electric isolution Layer is for blocking by the carrier (such as electronics) overflowed in patterned electrode layer and public electrode material by oozing liquid crystal Initial orientation layer enters the passage of liquid crystal material layer, prevents it from mutually neutralizing with the polar group of liquid crystal molecule and causing liquid crystal material Material failure.
Above-mentioned liquid crystal phase modulation framework 3 is divided, the first liquid crystal phase modulation unit of micro- cylinder is obtained and is set successively The micro- columnar second to the m liquid crystal phase modulation unit put in the first liquid crystal phase modulation unit periphery and be coaxial therewith.First to m Conducting film and the first to m liquid crystal phase modulation unit are corresponded, and form the Top electrode of liquid crystal phase modulation unit, all liquid crystal phase modulation lists The bottom electrode of unit is provided by common electrode layer.Wherein, the first conducting film 31 is located at the center of the first liquid crystal phase modulation unit, and second leads Electrolemma 32 is located at the center of the second liquid crystal phase modulation unit, and the 3rd conducting film 33 is located at the center of the 3rd liquid crystal phase modulation unit, successively Analogize, m conducting films 3m is located at the center of m liquid crystal phase modulation units.Each liquid crystal phase modulation unit is controled by independent power-up, specifically Ground, first to m conducting films is independently drawn respectively by a wire, forms Top electrode lead, and these Top electrode leads are pressed According to after first to m conducting films put in order and be divided into two groups, it is respectively connected to the first control signal input port 1 and second and controls One end of signal input port 2;Common electrode layer is drawn by two wires, is formed two common electrode layer leads and is respectively connected to The other end of the first control signal input port 1 and the second control signal input port 2.By Top electrode lead and public electrode Layer lead controls voltage signal to each liquid crystal phase modulation unit independent loads.
The infrared optically focused chip of the embodiment of the present invention can be directly located in optical system for testing, it is also possible to be placed in by primary mirror At the focal plane of the infrared optical system of composition or carry out weak out of focus configuration.Its operation principle is as follows.
Each liquid crystal phase modulation is carried in by the first control signal input port 1 and the input of the second control signal input port 2 Voltage signal is controled on unit, each liquid crystal phase modulation unit is controled by independent power-up.As shown in figure 3, the i-th liquid crystal phase modulation unit Control voltage signal for Vi, wherein, i=1,2 ..., m.The double layer planar battery lead plate for constituting liquid crystal microcavity is distributed in (including increasing Permeable membrane, substrate, electrode layer and liquid crystal initial orientation layer) liquid crystal molecule near inner surface, it is fabricated on two relative planes Electrode plate surface and the liquid crystal initial orientation layer secure anchorage being orientated with parallel groove, higher than liquid crystal material driving control signal threshold value Control voltage signal, by encouraged in liquid crystal material can modulation space electric field, the liquid crystal molecule in liquid crystal material layer The cylinder for then being encouraged by double layer planar battery lead plate and cylindrical space electric field driven, form the infrared incident wave beam of adjustable change Specific concentric column and cylindrical shape refractive index spatial distributional pattern.
Infrared incident wave beam enter liquid crystal phase modulation framework after, liquid crystal phase modulation framework according to wherein liquid crystal phase modulation unit scale With arrangement situation, it is divided into concentric circles corresponding with each liquid crystal phase modulation unit and the sub- plane of annular incident infrared incident wave beam Wavefront, each sub- plane incident wavefront and the liquid crystal in specific refractive index spatial distribution form in each self-corresponding liquid crystal phase modulation unit Interaction of molecules, forms the concentric circles and the sub- planar exit wavefront of annular of the phase delay with specific degrees, and each son is flat Face emerging wavefront coupling is formed on the axle center of liquid crystal phase modulation framework and cascades the infrared transmission wave beam of focused state from core in discrete type Piece is exported.
By adjusting the frequency or mean square amplitude that control voltage signal being carried on each liquid crystal phase modulation unit, each liquid of modulation The index distribution form of liquid crystal molecule in brilliant phase modulation unit, makes the light path of the light wave by liquid crystal material layer because refractive index changes And change, the phase delay degree of each sub- planar exit wavefront of modulation, and then modulation is coupled by each sub- planar exit wavefront and formed Infrared transmission wave beam phase distribution form, modulation infrared transmission wave beam discrete type cascade focal spot (focal spot as shown in Figure 3 B1 and focal spot B2) position shape and point spread function so as to be set in specific modality or be tuned to predetermined form.
With the change of infrared its wavelength of incident wave beam, the diameter of the first conducting film can be accordingly adjusted, second to m conducting films Radial width and adjacent conductive film the parameter configuration such as radial spacing.Introduce for electrical quantity disturbance and chip vibration Wavefront changes, and the multichannel that can be carried in by modulation on chip is controled voltage signal and adjusts wavefront, and chip possesses disturbance rejection or anti- The light gathering of vibration.For incident wave beam form change or conditions of demand, by and time modulation be carried in controling on chip Voltage signal carries out wavefront modification, and chip possesses dynamic light gathering.Cascade focussing force after powering down chips to disappear, light beam passes through Its beam feature invariant after chip.
As it will be easily appreciated by one skilled in the art that the foregoing is only presently preferred embodiments of the present invention, not to The present invention, all any modification, equivalent and improvement made within the spirit and principles in the present invention etc. are limited, all should be included Within protection scope of the present invention.

Claims (4)

1. a kind of infrared optically focused chip, it is characterised in that including the liquid crystal phase modulation framework of cylinder;The liquid crystal phase modulation framework bag Include liquid crystal material layer, be successively set on the first liquid crystal initial orientation layer of the liquid crystal material layer upper surface, the first electricity isolated layer, Patterned electrode layer, the first substrate and the first infrared anti-reflection film, and be successively set on the liquid crystal material layer lower surface Two liquid crystal initial orientation layers, the second electricity isolated layer, common electrode layer, the second substrate and the second infrared anti-reflection film;The common electrical Pole layer is made up of one layer of homogeneous conducting film;The patterned electrode layer is by circular conductive film and is arranged concentrically on the circular conductive At least one annular conducting film of film periphery is constituted, the axle center of the center of circle of the circular conductive film and the liquid crystal phase modulation framework Overlap, the radial width with diameter greater than the annular conducting film being adjacent of the circular conductive film;Lead in the annular When electrolemma is multiple, multiple annular conducting films are successively set on the periphery of the circular conductive film, and its radial width is successively decreased, The radial spacing of adjacent conductive film is equal, wherein, adjacent conductive film includes adjacent annular conducting film and adjacent annulus Shape conducting film and circular conductive film;
The liquid crystal phase modulation framework is divided into cylindrical liquid crystal phase modulation unit and at least one cylindrical shape liquid crystal phase modulation unit, circle Shape conducting film Correspondent cy linder shape liquid crystal phase modulation unit and positioned at the center of cylindrical liquid crystal phase modulation unit, forms cylindrical liquid crystal and adjusts The Top electrode of facies unit, annular conducting film is corresponded with cylindrical shape liquid crystal phase modulation unit, each equal position of annular conducting film In the center of corresponding cylindrical shape liquid crystal phase modulation unit, the Top electrode of cylindrical shape liquid crystal phase modulation unit, all liquid crystal are formed The bottom electrode of phase modulation unit is provided by common electrode layer.
2. infrared optically focused chip as claimed in claim 1, it is characterised in that infrared incident wave beam enters the liquid crystal phase modulation frame After structure, the liquid crystal phase modulation framework splits infrared incident wave beam according to the wherein scale of liquid crystal phase modulation unit and arrangement situation Into concentric circles corresponding with each liquid crystal phase modulation unit and the sub- plane incident wavefront of annular, each sub- plane incident wavefront is right with respective The liquid crystal molecule in specific refractive index spatial distribution form interacts in the liquid crystal phase modulation unit answered, and is formed and has specific degrees Phase delay concentric circles and the sub- planar exit wavefront of annular, each sub- planar exit wavefront coupling is formed in the liquid crystal and adjusts The infrared transmission wave beam for cascading focused state in discrete type on the axle center of phase framework is exported from the chip;
Wherein, each liquid crystal phase modulation unit is controled by independent power-up, and by adjusting to be carried on each liquid crystal phase modulation unit electricity is controled The frequency or mean square amplitude of pressure signal, the position shape and point spread function of the discrete type cascade focal spot of energy modulation infrared transmission wave beam.
3. infrared optically focused chip as claimed in claim 1 or 2, it is characterised in that the chip also includes chip carrier;It is described Liquid crystal phase modulation framework is encapsulated in the chip carrier and is connected with the chip carrier, and its light entrance face and light-emitting face pass through The top of the chip carrier and bottom opening are exposed outside;The side of the chip carrier is provided with first and second and controls letter Number input port, is carried on each liquid crystal phase modulation unit for input and controls voltage signal.
4. infrared optically focused chip as claimed in claim 3, it is characterised in that each circular conductive film and annular conducting film are equal Independently drawn by a wire, form Top electrode lead, these Top electrode leads are grouped two groups and are respectively connected to first He One end of second control signal input port;The common electrode layer is drawn by two wires, forms two common electrode layers Lead is respectively connected to the other end of first and second control signal input port;By the Top electrode lead and common electrical Each liquid crystal phase modulation unit independent loads can be controled voltage signal by pole layer lead.
CN201410615812.7A 2014-11-05 2014-11-05 Infrared light-concentrating chip Active CN104330930B (en)

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CN109445146B (en) * 2018-12-29 2021-05-07 南京奥谱依电子科技有限公司 Electric control liquid crystal plane diffraction micro-mirror and preparation method thereof
CN117918004A (en) * 2022-08-23 2024-04-23 京东方科技集团股份有限公司 Phase modulation surface unit, phase modulation surface structure and terminal equipment

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