CN204129369U - A kind of single channel bandwidth tuned filter based on micro-ring - Google Patents

Abstract

A kind of single channel bandwidth tuned filter based on micro-ring, comprise waveguide substrate, input straight wave guide, micro-ring waveguide, straight wave guide output, separation layer and METAL HEATING PROCESS sheet, described input straight wave guide, micro-ring waveguide and straight wave guide output are positioned in waveguide substrate side by side successively, described separation layer is positioned on input straight wave guide, micro-ring waveguide and straight wave guide output, and described METAL HEATING PROCESS sheet is deposited on separation layer; Have between described input straight wave guide, micro-ring waveguide and meet narrow slit wave-guide condition and the highest input interval of slit coupled zone energy, have between described micro-ring waveguide and straight wave guide output and meet narrow slit wave-guide condition and the highest output gap of slit coupled zone energy, described METAL HEATING PROCESS sheet is positioned at the top of described input interval and output gap.The utility model provides the single channel bandwidth tuned filter based on micro-ring that a kind of dynamic is tuning, integrated level is high, structure is simple, exciting voltage is little.

Description

A kind of single channel bandwidth tuned filter based on micro-ring

Technical field

The utility model relates to a kind of integrated-type optical device, especially a kind of wave filter of dynamic tuning bandwidth of integrated-type.

Background technology

The life of the mankind more and more depends on the optical communication network of high speed, Large Copacity, dynamic flexible.Simple voice and data transmission is carried out from utilizing network at first, to carrying out Private Banking's account process now on the net, participating in interactive network game, participating in real-time video meeting etc., towards utilizing the future development that network carries out dynamically, distributed information transmits and exchanges.Communication network and the urban information infrastructure of this generation of will looking for novelty possess high speed, Large Copacity, and can carry out dynamic bandwidth tuning to adapt to that terminal user is dynamic, different bandwidth granularity and the transmission of different types of information and the demand of exchange.Therefore the dynamic tuning how carrying out bandwidth based on optical communication technique has just become Key technique problem urgently to be resolved hurrily, and meanwhile, it is also extremely urgent with the requirement meeting New Generation of Communication network that research and development can carry out the tuning optic communication device of Bandwidth Dynamic.

The filtering device that existing wavelength channel bandwidth dynamic is tuning, mainly utilize fiber grating, Mach-Zender interferometer (MZI), microelectromechanical-systems (MEMS) and micro-ring resonator technology, the shortcoming of prior art mainly contain that size is large, complex structure, bandwidth affected by noise serious, exciting voltage is high.Immediate with the utility model is technology (the Yao Jin combined based on microelectromechanical-systems (MEMS) technology and micro-ring resonator, Wu Ming C, based on the bandwidth tuning add/drop filter of the micro-anchor ring resonator of silicon materials that microelectromechanical-systems drives, Optics Letters, 2009,34 (17): 2557-2559), it utilizes MEMS technology to regulate the coupling coefficient of micro-ring, thus achieving the bandwidth tuning of about 0.12nm, just such tuning methods needs the exciting voltage close to 40V.For meeting the active demand of application.

Summary of the invention

In order to overcome the deficiency that existing bandwidth tuning device size is large, complex structure, exciting voltage are high, the utility model provides the single channel bandwidth tuned filter based on micro-ring that a kind of dynamic is tuning, integrated level is high, structure is simple, exciting voltage is little.

The utility model solves the technical scheme that its technical matters adopts:

A kind of single channel bandwidth tuned filter based on micro-ring, comprise waveguide substrate, input straight wave guide, micro-ring waveguide, straight wave guide output, separation layer and METAL HEATING PROCESS sheet, described input straight wave guide, micro-ring waveguide and straight wave guide output are positioned in waveguide substrate side by side successively, described separation layer is positioned on input straight wave guide, micro-ring waveguide and straight wave guide output, and described METAL HEATING PROCESS sheet is deposited on separation layer; Have between described input straight wave guide, micro-ring waveguide and meet narrow slit wave-guide condition and the highest input interval of slit coupled zone energy, have between described micro-ring waveguide and straight wave guide output and meet narrow slit wave-guide condition and the highest output gap of slit coupled zone energy, described METAL HEATING PROCESS sheet is positioned at the top of described input interval and output gap.

Further, described METAL HEATING PROCESS sheet has two panels, and be respectively input heating plate and export heating plate, described input heating plate is positioned at the top at described input interval, and described output heating plate is positioned at the top of described output gap.

Technical conceive of the present utility model is: utilize narrow slit wave-guide and thermo-optic effect to combine, carry out single-channel bandwidth tuning.When meeting narrow slit wave-guide condition, the energy of input straight wave guide light signal can gather to the slit coupled zone between input straight wave guide and micro-ring waveguide when being coupled into micro-ring waveguide, utilize thermo-optic effect dynamically to change the refractive index of waveguide section silicon materials, thus change the luminous energy in slit coupled zone.In slit coupled zone, by sheet metal heating, silicon refractive index is increased, cause the refringence between slit coupled zone and waveguide to increase.And the change of refringence, can change again the energy loss in slit coupled zone, further, the change of energy loss in slit coupled zone, will change the coupling efficiency in slit coupled zone, by formula $\mathrm{\Δ\λ}={\left[{2n}_g({\mathrm{\πRn}}_{\mathrm{eff}}+2L{\mathrm{\Δn}}_{\mathrm{eff}})\right]}^{-1}{\mathrm{\λ}}^2{n}_{\mathrm{eff}}((1-\mathrm{\α}(1-K^2))/\left(\mathrm{\π}\sqrt{\mathrm{\α}\left({1-K}^2\right)}\right))$ Known, the change of coupling efficiency, by changing the size of bandwidth, therefore reaches the object of bandwidth tuning.

The utility model proposes a kind of Novel Filter part of the dynamic tuning bandwidth in conjunction with narrow slit wave-guide and thermo-optic effect, there is the advantage that size is little, integrated level is high, exciting voltage is little, namely based on the single channel bandwidth tuned filter of micro-ring.

The beneficial effects of the utility model are mainly manifested in: 1, utilize the technology that narrow slit wave-guide and thermo-optic effect combine, and can obtain larger bandwidth tuning amount, when exciting voltage is low, obtain large bandwidth tuning than independent based on thermo-optic effect; 2, the device based on narrow slit wave-guide and micro-ring resonator technology has the advantage that size is little, integrated level is high; 3, with wave filter in the past and based on compared with its optical add/drop multiplexer, there is the advantage that dynamic is tuning, integrated level is high, structure is simple, easy to make, with low cost.

Accompanying drawing explanation

Fig. 1 is a kind of vertical view of the single channel bandwidth tuned filter based on micro-ring.

Fig. 2 is a kind of cut-open view of the single channel bandwidth tuned filter based on micro-ring.

Embodiment

Below in conjunction with accompanying drawing, the utility model is further described.

See figures.1.and.2, a kind of single channel bandwidth tuned filter based on micro-ring, comprise waveguide substrate 6, input straight wave guide 1, micro-ring waveguide 2, straight wave guide output 3, separation layer 5 and METAL HEATING PROCESS sheet 4, described input straight wave guide 1, micro-ring waveguide 2 and straight wave guide output 3 are positioned in waveguide substrate 6, described separation layer 5 is positioned at input straight wave guide 1, on micro-ring waveguide 2 and straight wave guide output 3, described METAL HEATING PROCESS sheet 4 is deposited on separation layer 5, described input straight wave guide 1, have between micro-ring waveguide 2 and meet narrow slit wave-guide condition and the highest input interval of slit coupled zone energy, have between described micro-ring waveguide 2 and straight wave guide output 3 and meet narrow slit wave-guide condition and the highest output gap of slit coupled zone energy, described METAL HEATING PROCESS sheet 4 is positioned at the top of described input interval and output gap.

Further, described METAL HEATING PROCESS sheet 4 has two panels, and be respectively input heating plate and export heating plate, described input heating plate is positioned at the top at described input interval, and described output heating plate is positioned at the top of described output gap.

Described input straight wave guide 1 two ends all can input multiplexing optical signal, described multiplexing optical signal is by coupled transfer ring waveguide 2 in a subtle way, described micro-ring waveguide 2 is as micro-ring resonant cavity, to meet the harmonic wavelength light signal screening of condition of resonance out as mono signal wavelength, described resonance wavelength light signal is by being coupled into straight wave guide output 3 and exporting.Described waveguide substrate 6 is as the substrate of the utility model bandwidth tuning wave filter, described separation layer 5 isolates heat and as the backing material of METAL HEATING PROCESS sheet 4, described METAL HEATING PROCESS sheet 4 passes into current heating, and regulate the refractive index contrast between waveguide and waveguide substrate by thermo-optic effect, complete thus single-channel bandwidth tuning.

Described waveguide substrate 6 and separation layer 5 are earth silicon material; Described input straight wave guide 1, micro-ring waveguide 2, straight wave guide output 3 are silicon materials; Described METAL HEATING PROCESS sheet 4 is aluminum;

Between described input straight wave guide 1 and micro-ring waveguide 2 for inputting interval, be output gap between micro-ring waveguide 2 and straight wave guide output 3, described input interval and output gap are 60nm, meet narrow slit wave-guide condition and slit coupled zone energy is the highest.

Described separation layer thickness is 1 micron;

Described METAL HEATING PROCESS sheet is of a size of long 4 microns, wide 1 micron;

The bandwidth tuning amount formula that described dynamic regulates $\mathrm{\Δ\λ}={\left[{2n}_g({\mathrm{\πRn}}_{\mathrm{eff}}+2L{\mathrm{\Δn}}_{\mathrm{eff}})\right]}^{-1}{\mathrm{\λ}}^2{n}_{\mathrm{eff}}((1-\mathrm{\α}(1-K^2))/\left(\mathrm{\π}\sqrt{\mathrm{\α}\left({1-K}^2\right)}\right))$ Calculate, wherein Δ λ represents bandwidth tuning amount, n _grepresent group index, n _effrepresent effective refractive index, radius that R represents micro-ring waveguide, cross-coupling coefficient when L represents heating plate length, α represents attenuation coefficient, K representative meets narrow slit wave-guide condition, λ represent resonance wavelength.

Single channel bandwidth tuned filter described in the present embodiment, the principle realizing Bandwidth Dynamic tuning is as follows:

Utilize narrow slit wave-guide and thermo-optic effect to combine, carry out single-channel bandwidth tuning.When meeting narrow slit wave-guide condition, the energy of input straight wave guide light signal can gather to the slit coupled zone between input straight wave guide and micro-ring waveguide when being coupled into micro-ring waveguide, utilize thermo-optic effect dynamically to change the refractive index of waveguide section silicon materials, thus change the luminous energy in slit coupled zone.In slit coupled zone, by sheet metal heating, silicon refractive index is increased, cause the refringence between slit coupled zone and waveguide to increase.And the change of refringence, can change again the energy loss in slit coupled zone, further, the change of energy loss in slit coupled zone, will change the coupling efficiency in slit coupled zone, by formula $\mathrm{\Δ\λ}={\left[{2n}_g({\mathrm{\πRn}}_{\mathrm{eff}}+2L{\mathrm{\Δn}}_{\mathrm{eff}})\right]}^{-1}{\mathrm{\λ}}^2{n}_{\mathrm{eff}}((1-\mathrm{\α}(1-K^2))/\left(\mathrm{\π}\sqrt{\mathrm{\α}\left({1-K}^2\right)}\right))$ Known, the change of coupling efficiency, by changing the size of bandwidth, therefore reaches the object of bandwidth tuning.

The tuning effect of Bandwidth Dynamic that the present embodiment obtains is: when METAL HEATING PROCESS sheet power is 3.18mW, can obtain the bandwidth tuning amount of 1nm.

Claims (2)

1. the single channel bandwidth tuned filter based on micro-ring, it is characterized in that: comprise waveguide substrate, input straight wave guide, micro-ring waveguide, straight wave guide output, separation layer and METAL HEATING PROCESS sheet, described input straight wave guide, micro-ring waveguide and straight wave guide output are positioned in waveguide substrate side by side successively, described separation layer is positioned on input straight wave guide, micro-ring waveguide and straight wave guide output, and described METAL HEATING PROCESS sheet is deposited on separation layer; Have between described input straight wave guide, micro-ring waveguide and meet narrow slit wave-guide condition and the highest input interval of slit coupled zone energy, have between described micro-ring waveguide and straight wave guide output and meet narrow slit wave-guide condition and the highest output gap of slit coupled zone energy, described METAL HEATING PROCESS sheet is positioned at the top of described input interval and output gap.

2. as claimed in claim 1 based on the single channel bandwidth tuned filter of micro-ring, it is characterized in that: described METAL HEATING PROCESS sheet has two panels, be respectively input heating plate and export heating plate, described input heating plate is positioned at the top at described input interval, and described output heating plate is positioned at the top of described output gap.