CN204118461U - A kind of micro-dish resonant cavity based on fiber optical corrosive - Google Patents
A kind of micro-dish resonant cavity based on fiber optical corrosive Download PDFInfo
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- CN204118461U CN204118461U CN201420699977.2U CN201420699977U CN204118461U CN 204118461 U CN204118461 U CN 204118461U CN 201420699977 U CN201420699977 U CN 201420699977U CN 204118461 U CN204118461 U CN 204118461U
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- optical fiber
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- support bar
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- 239000000835 fiber Substances 0.000 title claims abstract description 14
- 230000003287 optical effect Effects 0.000 title claims abstract description 12
- 239000013307 optical fiber Substances 0.000 claims abstract description 48
- 238000005253 cladding Methods 0.000 claims abstract description 17
- 239000000463 material Substances 0.000 claims abstract description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 7
- 239000011521 glass Substances 0.000 claims description 6
- 239000005365 phosphate glass Substances 0.000 claims description 6
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 abstract description 16
- 230000007797 corrosion Effects 0.000 abstract description 5
- 238000005260 corrosion Methods 0.000 abstract description 5
- 230000009286 beneficial effect Effects 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 6
- 239000011241 protective layer Substances 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 101100008048 Caenorhabditis elegans cut-4 gene Proteins 0.000 description 2
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 239000008367 deionised water Substances 0.000 description 2
- 229910021641 deionized water Inorganic materials 0.000 description 2
- 238000004506 ultrasonic cleaning Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 238000001069 Raman spectroscopy Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 238000005459 micromachining Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910000029 sodium carbonate Inorganic materials 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
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- Mechanical Coupling Of Light Guides (AREA)
Abstract
The utility model relates to a kind of micro-dish resonant cavity based on fiber optical corrosive, it is characterized in that being made up of micro-dish and optical fiber pillar, micro-dish is the disc of the complete inner cladding of thickness 15-25 micro belt, the support bar that pillar corrodes into kidney-shaped by the base with coat and inner cladding forms, micro-dish is supported by optical fiber pillar, the vertical section parabolically shape of described support bar, post upper and micro-coil one, lower end and base one, optical fiber runs through micro-dish, support bar and base and with micro-dish, the axes coincide of support bar and base, the beneficial effects of the utility model one are that the hydrofluoric acid solution corrosion utilizing cost low makes micro-dish resonant cavity, therefore processing step is simple, equipment investment is low, two is that micro-its material of dish resonant cavity is identical with optical fiber, may be used for the model selection of narrow linewidth and single frequency optical fiber laser.
Description
Technical field
The invention belongs to optical fiber and laser technology field, particularly relate to a kind of micro-dish resonant cavity based on fiber optical corrosive.
Background technology
Micro-dish resonant cavity is a kind of echo wall die (Whispering Gallery Mode, WGM) resonant cavity, has many very important application, such as bio-sensing, Raman laser, laser reflector and just caused the frequency comb of concern recently.As a kind of plane micro-resonant cavity, micro-dish resonant cavity not only has the Q value of superelevation, and can well suppress high order azimuthal pattern, and this characteristic is suitable as the model selection of narrow linewidth laser and single frequency laser very much.Obtain the Q value of superelevation, micro-dish resonant cavity must possess low surface roughness, low absorptivity and optimized size simultaneously.Nearly 20 years after echo wall die resonant cavity finds, large quantity research mainly concentrated on semiconductor base and etches micro-dish resonant cavity, and this all proposes very high requirement to Material selec-tion and lithographic technique.The micro-dish resonant cavity having scholar to utilize pure quartz material successfully to obtain Q value for 2006 to be, has widened the suitable material of micro-dish resonant cavity.By 2013, have article to report to utilize femtosecond laser parallel micromachining technology in addition electrode discharge obtain micro-dish resonant cavity that Q value is, but this kind of method processing cost is higher, the processing request that same needs are higher.
Summary of the invention
The object of the invention is to overcome the deficiencies in the prior art, provide the micro-dish resonant cavity based on fiber optical corrosive that a kind of processing cost is low, it can realize optics comb frequently, can also be used for the model selection of narrow linewidth laser and single frequency laser.
The present invention is realized by the following technical programs:
A kind of micro-dish resonant cavity based on fiber optical corrosive, it is characterized in that being made up of micro-dish 1 and optical fiber pillar 2, micro-dish 1 is the disc of the complete inner cladding of thickness 15-25 micro belt, pillar 2 is made up of with the support bar that inner cladding corrodes into kidney-shaped the base of band coat, and micro-dish 1 is supported by optical fiber pillar 2.
The vertical section parabolically shape of support bar of the present invention, post upper and micro-ly coil one, lower end and base integrally, optical fiber run through micro-dish, support bar and base and with the axes coincide of micro-dish, support bar and base.
Described micro-dish diameter is 80 μm-600 μm.
Described micro-dish material can be quartz glass, can be germanate glass, also can be phosphate glass.
Described optical fiber pillar can be quartz glass optical fiber, can be germanate glass optical fiber, also can be phosphate glass optical fiber.
Micro-dish resonant cavity in the present invention is positioned at optical fiber connector, obtain carrying out corrosion treatment with optical fiber connector a distance hydrofluoric acid solution to covering, optical fiber connector is not by the edge of the circular micro-dish of inner cladding formation of any process, micro-dish material is identical with optical fiber, micro-plate edge is smooth forms the resonant cavity with the higher quality factor, beneficial effect one is that the hydrofluoric acid solution corrosion utilizing cost low makes micro-dish resonant cavity, and therefore processing step is simple, and equipment investment is low; Two is that micro-its material of dish resonant cavity is identical with optical fiber, may be used for the model selection of narrow linewidth and single frequency optical fiber laser.
Accompanying drawing explanation
Fig. 1 a kind of structural representation of the present invention.
The schematic diagram of Fig. 2 embodiments of the invention step one.
The schematic diagram of Fig. 3 embodiments of the invention step 2.
The schematic diagram of Fig. 4 embodiments of the invention step 3.
The schematic diagram of Fig. 5 embodiments of the invention step 4.
The schematic diagram of Fig. 6 embodiments of the invention step 5.
The schematic diagram of Fig. 7 embodiments of the invention step 6.
Mark in figure: micro-dish 1; Optical fiber pillar 2; Optical fiber 21; Optical fiber coating 22; Optical fiber inner cladding 23 after corrosion; Optical fiber inner cladding 24 before corrosion; Fiber end face 25; Protective layer 26; Hydrofluoric acid solution 3; Line of cut 4; Electrode 5.
Embodiment
Below in conjunction with accompanying drawing, the invention will be further described:
A kind of micro-dish resonant cavity based on fiber optical corrosive, it is characterized in that being made up of micro-dish 1 and optical fiber pillar 2, micro-dish 1 is the disc of the complete inner cladding of thickness 15-25 micro belt, pillar 2 is made up of with the support bar that inner cladding corrodes into kidney-shaped the base of band coat, micro-dish 1 is supported by optical fiber pillar 2, the vertical section parabolically shape of described support bar, post upper and micro-dish 1 one, lower end and base one, optical fiber runs through micro-dish 1, support bar and base and with micro-dish, the axes coincide of support bar and base, described micro-dish 1 diameter is 80 μm-600 μm, micro-dish material can be quartz glass, can be germanate glass, also can be phosphate glass, described optical fiber pillar can be quartz glass optical fiber, can be germanate glass optical fiber, also can be phosphate glass optical fiber.
Embodiment:
The present embodiment does for the optical fiber that inner cladding diameter is 400 microns and specifically implements to describe.Embodiment, as shown in Fig. 2, Fig. 3, Fig. 4, Fig. 5 and Fig. 6, is removed optical fiber 21 end coat as shown in Figure 2, is cut by optical fiber connector flat, as shown in Figure 3, optical fiber inner cladding 24 part is applied again obtain protective layer 26, as shown in Figure 4, the optical fiber handled well is statically placed in hydrofluoric acid solution 3, hydrofluoric acid solution 3 will carry out chemical reaction with fiber cladding 24 thus corrode it, hydrofluoric acid solution can infiltrate along the intersection of inner cladding 24 with protective layer 26 and reacts with inner cladding thus corrode it simultaneously, utilize optical fiber radial erosion speed difference, optical fiber inner cladding is made to corrode as parabolic shape, leave standstill and after 500 minutes, optical fiber is taken out from hydrofluoric acid solution 3, with deionized water rinsing, and be placed in the sodium carbonate liquor one minute of 1mol/L, and then use deionized water ultrasonic cleaning, continue with soaked in absolute ethyl alcohol ultrasonic cleaning again after 48 hours, namely protective layer 26 can be removed, as shown in Figure 5, axially retain 20 microns of optical fiber be not corroded at line of cut 4, cutting is removed other parts and is guaranteed that ends cutting angle is 0 degree, namely obtains micro-dish resonant cavity, as shown in Figure 6, electrode 5 discharges to micro-dish resonant cavity, and the part surface that can make to be corroded is smooth, thus improves the Q value of cavity, Figure 1 shows that the micro-dish resonant cavity of the optical fiber of making.
That more than enumerates is only specific embodiments of the invention, obviously, the invention is not restricted to above embodiment.All distortion that those of ordinary skill in the art can directly derive from content disclosed by the invention or associate, all should belong to protection scope of the present invention.
Claims (5)
1. the micro-dish resonant cavity based on fiber optical corrosive, it is characterized in that being made up of micro-dish (1) and optical fiber pillar (2), micro-dish (1) is the disc of the complete inner cladding of thickness 15-25 micro belt, pillar (2) is made up of with the support bar that inner cladding corrodes into kidney-shaped the base of band coat, and micro-dish (1) is supported by optical fiber pillar (2).
2. a kind of micro-dish resonant cavity based on fiber optical corrosive according to claim 1, it is characterized in that the vertical section parabolically shape of support bar, post upper and micro-coil one, lower end and base one, optical fiber run through micro-dish, support bar and base and with the axes coincide of micro-dish, support bar and base.
3. a kind of micro-dish resonant cavity based on fiber optical corrosive according to claim 1, is characterized in that micro-dish diameter is 80 μm-600 μm.
4. a kind of micro-dish resonant cavity based on fiber optical corrosive according to claim 1, is characterized in that micro-dish material is quartz glass or germanate glass or phosphate glass.
5. a kind of micro-dish resonant cavity based on fiber optical corrosive according to claim 1, is characterized in that optical fiber pillar is quartz glass optical fiber or germanate glass optical fiber or phosphate glass optical fiber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420699977.2U CN204118461U (en) | 2014-11-20 | 2014-11-20 | A kind of micro-dish resonant cavity based on fiber optical corrosive |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420699977.2U CN204118461U (en) | 2014-11-20 | 2014-11-20 | A kind of micro-dish resonant cavity based on fiber optical corrosive |
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| CN204118461U true CN204118461U (en) | 2015-01-21 |
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| CN201420699977.2U Withdrawn - After Issue CN204118461U (en) | 2014-11-20 | 2014-11-20 | A kind of micro-dish resonant cavity based on fiber optical corrosive |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104466641A (en) * | 2014-11-20 | 2015-03-25 | 山东海富光子科技股份有限公司 | Micro-disk resonant cavity based on optical fiber corrosion and manufacturing method thereof |
| CN108808433A (en) * | 2017-04-26 | 2018-11-13 | 中国科学院化学研究所 | A kind of Whispering-gallery-mode photonic device and its preparation method and application with pillar support |
| CN112217089A (en) * | 2020-10-13 | 2021-01-12 | 电子科技大学 | Tunable soliton frequency comb based on surface rare earth ion doped microcavity |
-
2014
- 2014-11-20 CN CN201420699977.2U patent/CN204118461U/en not_active Withdrawn - After Issue
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104466641A (en) * | 2014-11-20 | 2015-03-25 | 山东海富光子科技股份有限公司 | Micro-disk resonant cavity based on optical fiber corrosion and manufacturing method thereof |
| CN104466641B (en) * | 2014-11-20 | 2018-03-06 | 山东海富光子科技股份有限公司 | A kind of micro- disk resonator based on fiber optical corrosive and preparation method thereof |
| CN108808433A (en) * | 2017-04-26 | 2018-11-13 | 中国科学院化学研究所 | A kind of Whispering-gallery-mode photonic device and its preparation method and application with pillar support |
| CN112217089A (en) * | 2020-10-13 | 2021-01-12 | 电子科技大学 | Tunable soliton frequency comb based on surface rare earth ion doped microcavity |
| CN112217089B (en) * | 2020-10-13 | 2022-09-20 | 电子科技大学 | Tunable soliton frequency comb generating device based on surface rare earth ion doped microcavity |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: Micro-disk resonant cavity based on optical fiber corrosion and manufacturing method thereof Effective date of registration: 20151016 Granted publication date: 20150121 Pledgee: Weihai commercial bank Limited by Share Ltd Pledgor: Shandong Haifu Photon Technology Co., Ltd. Registration number: 2015990000870 |
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| PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
| PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20171107 Granted publication date: 20150121 Pledgee: Weihai commercial bank Limited by Share Ltd Pledgor: Shandong Haifu Photon Technology Co., Ltd. Registration number: 2015990000870 |
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| PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: Micro-disk resonant cavity based on optical fiber corrosion and manufacturing method thereof Effective date of registration: 20171107 Granted publication date: 20150121 Pledgee: Weihai City Commercial Bank Limited by Share Ltd high tech branch Pledgor: Shandong Haifu Photon Technology Co., Ltd. Registration number: 2017990001036 |
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| AV01 | Patent right actively abandoned |
Granted publication date: 20150121 Effective date of abandoning: 20180306 |
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| AV01 | Patent right actively abandoned |
Granted publication date: 20150121 Effective date of abandoning: 20180306 |
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| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned | ||
| PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
| PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20211014 Granted publication date: 20150121 Pledgee: Weihai City Commercial Bank Limited by Share Ltd. high tech branch Pledgor: HFB Photonics Co.,Ltd. Registration number: 2017990001036 |