CN104466641B - A kind of micro- disk resonator based on fiber optical corrosive and preparation method thereof - Google Patents

A kind of micro- disk resonator based on fiber optical corrosive and preparation method thereof Download PDF

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Publication number
CN104466641B
CN104466641B CN201410666893.3A CN201410666893A CN104466641B CN 104466641 B CN104466641 B CN 104466641B CN 201410666893 A CN201410666893 A CN 201410666893A CN 104466641 B CN104466641 B CN 104466641B
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micro
optical fiber
disk
inner cladding
fiber
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CN104466641A (en
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史伟
张起航
房强
齐亮
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SHANDONG HAIFU PHOTON TECHNOLOGY Co Ltd
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SHANDONG HAIFU PHOTON TECHNOLOGY Co Ltd
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Abstract

The present invention relates to a kind of micro- disk resonator based on fiber optical corrosive and preparation method thereof, it is characterized in that it is made up of micro- disk and optical fiber pillar, micro- disk is the disc of the complete inner cladding of the micro belt of thickness 15 25, pillar by the base with coat and inner cladding corrosion into kidney-shaped support bar group into, micro- disk is supported by optical fiber pillar, and preparation method is:Remove one section of coat of optical fiber connector and cut flat with end face;It is again armor coated to fiber terminal end faces and an end part;Optical fiber connector is vertically statically placed in concentration in hydrofluoric acid solution;Remove protective layer;The cutting of 15 25 microns of end obtains micro- disk resonator;12 centimetres of front end band coat fiber cut obtains base, and beneficial effects of the present invention one are to be corroded using the low hydrofluoric acid solution of cost to make micro- disk resonator, therefore processing step is simple, and equipment investment is low;Second, micro- its material of disk resonator is identical with optical fiber, it can be used for the model selection of narrow linewidth and single frequency optical fiber laser.

Description

A kind of micro- disk resonator based on fiber optical corrosive and preparation method thereof
Technical field
The invention belongs to optical fiber and laser technology field, more particularly to a kind of micro- disk resonator based on fiber optical corrosive and Its preparation method.
Background technology
Micro- disk resonator is a kind of echo wall die(Whispering Gallery Mode, WGM)Resonator, there is many Very important application, such as bio-sensing, Ramar laser, laser reflector and the optical frequency for just having caused concern recently Comb.As a kind of planar microresonator, micro- disk resonator not only has the Q values of superelevation(), and can be very good to suppress high-order Azimuthal modes, this characteristic are highly suitable as the model selection of narrow linewidth laser and single-frequency laser.Obtain superelevation Q values, micro- disk resonator must be provided simultaneously with the size of low surface roughness, low absorptivity and optimization.Echo wall die is humorous The chamber that shakes find after nearly 20 years, numerous studies are concentrated mainly on semiconductor base and etch micro- disk resonator, this material is selected and Lithographic technique all proposes very high requirement.There is within 2006 scholar successfully to obtain micro- disk resonance that Q values are using pure quartz material Chamber, the suitable material of micro- disk resonator is widened.By 2013, there is article report in addition electric using femtosecond laser parallel micromachining technology Pole discharges to obtain micro- disk resonator that Q values are, but this kind of method processing cost is higher, needs also exist for higher processing request.
The content of the invention
It is low based on fiber optical corrosive it is an object of the invention to overcome the deficiencies of the prior art and provide a kind of processing cost Micro- disk resonator and preparation method thereof, it can realize that optics frequency is combed, can be also used for narrow linewidth laser and single-frequency laser Model selection.
The present invention is to be realized by the following technical programs:
A kind of micro- disk resonator based on fiber optical corrosive, it is characterised in that be made up of micro- disk 1 and optical fiber pillar 2, micro- disk 1 is The disc of the complete inner cladding of thickness 15-25 micro belts, pillar 2 are corroded the branch into kidney-shaped by the base with coat and inner cladding Strut forms, and micro- disk 1 is able to support by optical fiber pillar 2
The vertical section of support bar of the present invention parabolically shape, post upper and micro- disk one, lower end and bottom Seat one, optical fiber coincide through micro- disk, support bar and base and with the axis of micro- disk, support bar and base.
A diameter of 80 μm -600 μm of micro- disk.
Micro- disk material can be quartz glass, can be germanate glass or phosphate glass.
The optical fiber pillar can be quartz glass optical fiber, can be germanate glass optical fiber or phosphate glass Glass optical fiber.
A kind of preparation method of micro- disk resonator based on fiber optical corrosive, comprises the following steps:
Step 1: taking one section of optical fiber, one section of coat of optical fiber connector is removed, and optical fiber connector end face is cut flat with, end is stayed There is the optical fiber that 100-1000 microns get rid of coat;
Step 2: it is again armor coated to the optical fiber inner cladding of fiber terminal end faces and terminal part 100-1000 microns, its The optical fiber inner cladding of 200-400 microns is not coated by protective layer among end;
Step 3: optical fiber connector is vertically statically placed in concentration in hydrofluoric acid solution, the liquid level of hydrofluoric acid solution is no more than Protective layer, hydrofluoric acid solution carry out chemical reaction so as to corrode to inner cladding with inner cladding, while hydrofluoric acid solution can edge The intersection for inner cladding and protective layer penetrates into protective layer, and carries out chemical reaction with possessing the inner cladding in sheath so as to it Corroded, etching time about 3-10 hours, using optical fiber radial erosion speed difference, make inner cladding corrosion into parabolic shape;
Step 4: optical fiber is taken out from hydrofluoric acid solution, with deionized water rinsing, washing time is one minute, then is put Soak one minute in 1mol/L sodium carbonate liquor, be then cleaned by ultrasonic again with deionized water, washing time is one to two points Clock, then with after soaked in absolute ethyl alcohol 48 hours again through being cleaned by ultrasonic, you can to remove protective layer;
Step 5: retain optical fiber and the perpendicular cuts that 15-25 microns are not corroded along shaft axis of optic fibre to optical fiber connector direction, Remove optical fiber connector part and ensure that ends cutting vertical angle is 0 degree, that is, obtain micro- disk resonator;
Step 6: retaining 1-2 centimetres of band coat optical fiber and perpendicular cuts along extreme direction before optical fiber axial direction optical fiber, that is, obtain Micro- disk resonator base.
The present invention the micro- disk resonance cavity discharging of electrode pair, discharge voltage and discharge time can be used different with micro- disk diameter and Difference, it is smooth by the electric discharge part surface that can make to be corroded, micro- disk resonator quality factor can be improved.
Micro- disk resonator in the present invention is located at optical fiber connector, is with using hydrofluoric acid solution at a certain distance from optical fiber connector Corrosion treatment is carried out to covering to obtain, optical fiber connector forms the edge of the micro- disk of circle, micro- disk for the inner cladding not by any processing Material is identical with optical fiber, and micro- plate edge is smooth to may make up the resonator with the higher quality factor, beneficial effect one be utilize into This low hydrofluoric acid solution corrodes to make micro- disk resonator, therefore processing step is simple, and equipment investment is low;Second, micro- disk resonance Its material of chamber is identical with optical fiber, can be used for the model selection of narrow linewidth and single frequency optical fiber laser.
Brief description of the drawings
A kind of structural representation of Fig. 1 present invention.
The schematic diagram of Fig. 2 embodiments of the invention step 1.
The schematic diagram of Fig. 3 embodiments of the invention step 2.
The schematic diagram of Fig. 4 embodiments of the invention step 3.
The schematic diagram of Fig. 5 embodiments of the invention step 4.
The schematic diagram of Fig. 6 embodiments of the invention step 5.
The schematic diagram of Fig. 7 embodiments of the invention step 6.
Marked in figure:Micro- disk 1;Optical fiber pillar 2;Optical fiber 21;Optical fiber coating 22;Optical fiber inner cladding 23 after corrosion;It is rotten Optical fiber inner cladding 24 before erosion;Fiber end face 25;Protective layer 26;Hydrofluoric acid solution 3;Line of cut 4;Electrode 5.
Embodiment
The invention will be further described below in conjunction with the accompanying drawings:
A kind of micro- disk resonator based on fiber optical corrosive, it is characterised in that be made up of micro- disk 1 and optical fiber pillar 2, micro- disk 1 is The disc of the complete inner cladding of thickness 15-25 micro belts, pillar 2 are corroded the branch into kidney-shaped by the base with coat and inner cladding Strut is formed, and micro- disk 1 supported by optical fiber pillar 2, the vertical section of described support bar parabolically shape, on support bar End and the one of micro- disk 1, lower end and base one, optical fiber through micro- disk 1, support bar and base and with micro- disk, support bar and base Axis coincide, micro- 1 a diameter of 80 μm -600 μm of disk;Micro- disk material can be quartz glass, can be germanate glass Glass or phosphate glass;The optical fiber pillar can be quartz glass optical fiber, can be germanate glass optical fiber, Can be phosphate glass optical fiber.
A kind of preparation method of micro- disk resonator based on fiber optical corrosive, comprises the following steps:
Step 1: taking one section of optical fiber, one section of coat of optical fiber connector is removed, and optical fiber connector end face is cut flat with, end is stayed There is the optical fiber that 100-1000 microns get rid of coat;
Step 2: it is again armor coated to the optical fiber inner cladding of fiber terminal end faces and terminal part 100-1000 microns, its The optical fiber inner cladding of 200-400 microns is not coated by protective layer among end;
Step 3: optical fiber connector is vertically statically placed in concentration in hydrofluoric acid solution, the liquid level of hydrofluoric acid solution is no more than Protective layer, hydrofluoric acid solution carry out chemical reaction so as to corrode to inner cladding with inner cladding, while hydrofluoric acid solution can edge The intersection for inner cladding and protective layer penetrates into protective layer, and carries out chemical reaction with possessing the inner cladding in sheath so as to it Corroded, etching time about 3-10 hours, using optical fiber radial erosion speed difference, make inner cladding corrosion into parabolic shape;
Step 4: optical fiber is taken out from hydrofluoric acid solution, with deionized water rinsing, washing time is one minute, then is put Soak one minute in 1mol/L sodium carbonate liquor, be then cleaned by ultrasonic again with deionized water, washing time is one to two points Clock, then with after soaked in absolute ethyl alcohol 48 hours again through being cleaned by ultrasonic, you can to remove protective layer;
Step 5: retain optical fiber and the perpendicular cuts that 15-25 microns are not corroded along shaft axis of optic fibre to optical fiber connector direction, Remove optical fiber connector part and ensure that ends cutting vertical angle is 0 degree, that is, obtain micro- disk resonator;
Step 6: retaining 1-2 centimetres of band coat optical fiber and perpendicular cuts along extreme direction before optical fiber axial direction optical fiber, that is, obtain Micro- disk resonator base.
The present invention the micro- disk resonance cavity discharging of electrode pair, discharge voltage and discharge time can be used different with micro- disk diameter and Difference, it is smooth by the electric discharge part surface that can make to be corroded, micro- disk resonator quality factor can be improved.
Embodiment:
The present embodiment does specific implementation description so that inner cladding diameter is 400 microns of optical fiber as an example.Implement such as Fig. 2, figure 3rd, shown in Fig. 4, Fig. 5 and Fig. 6, the end coat of optical fiber 21 is removed as shown in Figure 2, optical fiber connector is cut flat with;It is as shown in figure 3, right Again coating obtains protective layer 26 to the part of optical fiber inner cladding 24;As shown in figure 4, it is molten that the optical fiber handled well is statically placed in into hydrofluoric acid In liquid 3, hydrofluoric acid solution 3 will carry out chemical reaction so as to corrode to it with fibre cladding 24, while hydrofluoric acid solution meeting Penetrate into and reacted with inner cladding so as to corrode to it along the intersection of inner cladding 24 and protective layer 26, using optical fiber radially Corrosion rate is poor, and it is parabolic shape to make the corrosion of optical fiber inner cladding, takes optical fiber from hydrofluoric acid solution 3 after standing 500 minutes Go out, with deionized water rinsing, be placed in 1mol/L sodium carbonate liquor one minute, be then cleaned by ultrasonic again with deionized water, after It is continuous to be cleaned by ultrasonic again after 48 hours with soaked in absolute ethyl alcohol, you can to remove protective layer 26;As shown in figure 5, it is micro- axially to retain 20 In line of cut 4, cutting removes other parts and ensures that ends cutting angle is 0 degree the optical fiber that meter Wei is corroded, that is, obtains micro- disk Resonator;As shown in fig. 6, electrode 5 to micro- disk resonance cavity discharging, can make to be corroded, part surface is smooth, so as to improve resonator Q Value;Fig. 1 show the micro- disk resonator of optical fiber of making.
Listed above is only the specific embodiment of the present invention, it is clear that the embodiment the invention is not restricted to more than.This area The those of ordinary skill's all deformations that directly can export or associate from present disclosure, all should belong to the present invention's Protection domain.

Claims (7)

1. a kind of micro- disk resonator based on fiber optical corrosive, it is characterised in that be made up of micro- disk and pillar, micro- disk is thickness 15- The disc of the complete inner cladding of 25 micro belts, pillar are corroded the support bar group into kidney-shaped by the base with coat and inner cladding Into micro- disk is supported by pillar.
2. a kind of micro- disk resonator based on fiber optical corrosive according to claim 1, it is characterised in that support bar is indulged Parabolically micro- disk, support bar and bottom are run through in shape, post upper and micro- disk one, lower end to section with base one, optical fiber Seat simultaneously coincides with the axis of micro- disk, support bar and base.
3. a kind of micro- disk resonator based on fiber optical corrosive according to claim 1, it is characterised in that micro- disk is a diameter of 80μm-600μm。
4. a kind of micro- disk resonator based on fiber optical corrosive according to claim 1, it is characterised in that micro- disk material is Quartz glass germanate glass or phosphate glass.
5. a kind of micro- disk resonator based on fiber optical corrosive according to claim 1, it is characterised in that pillar is quartz Glass optical fiber germanate glass optical fiber or phosphate glass optical fiber.
6. a kind of preparation method of micro- disk resonator based on fiber optical corrosive, it is characterised in that comprise the following steps:
Step 1: taking one section of optical fiber, one section of coat of optical fiber connector is removed, and optical fiber connector end face is cut flat with, end is left 100-1000 microns get rid of the optical fiber of coat;
Step 2:, its end again armor coated to the optical fiber inner cladding of fiber terminal end faces and terminal part 100-1000 microns The optical fiber inner cladding of 200-400 microns is not coated by protective layer among end;
Step 3: optical fiber connector is vertically statically placed in hydrofluoric acid solution, hydrofluoric acid solution and inner cladding chemically reacted from And inner cladding is corroded, while hydrofluoric acid solution can along the intersection of inner cladding and protective layer penetrate into protective layer, and with Inner cladding in protective layer carries out chemical reaction so as to corrode to it, etching time 3-10 hours, radially rotten using optical fiber Speed difference is lost, makes inner cladding corrosion into parabolic shape;
Step 4: optical fiber is taken out from hydrofluoric acid solution, with deionized water rinsing, washing time is one minute, then is placed in Soak one minute in 1mol/L sodium carbonate liquor, be then cleaned by ultrasonic again with deionized water, washing time is one to two points Clock, then with, again through being cleaned by ultrasonic, removing protective layer after soaked in absolute ethyl alcohol 48 hours;
Step 5: retaining optical fiber and the perpendicular cuts that 15-25 microns are not corroded along optical fiber axial direction optical fiber connector direction, obtain Micro- disk resonator;
Step 6: retaining 1-2 centimetres of band coat optical fiber and perpendicular cuts along extreme direction before optical fiber axial direction optical fiber, that is, obtain micro- Disk resonator base.
A kind of 7. preparation method of micro- disk resonator based on fiber optical corrosive according to claim 6, it is characterised in that Using the micro- disk resonance cavity discharging of electrode pair.
CN201410666893.3A 2014-11-20 2014-11-20 A kind of micro- disk resonator based on fiber optical corrosive and preparation method thereof Active CN104466641B (en)

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1729599A (en) * 2002-12-18 2006-02-01 罗斯蒙德公司 Tunable optical filter
CN101386403A (en) * 2008-09-13 2009-03-18 中北大学 Micro optical fibre voltage sensor based on ring micro-cavity
CN103606809A (en) * 2013-08-20 2014-02-26 无锡成电光纤传感科技有限公司 Manufacturing method and device for optical fiber micro-ring resonator
CN204118461U (en) * 2014-11-20 2015-01-21 山东海富光子科技股份有限公司 A kind of micro-dish resonant cavity based on fiber optical corrosive

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050163185A1 (en) * 2002-10-02 2005-07-28 Vahala Kerry J. Surface functionalization of micro-resonators

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1729599A (en) * 2002-12-18 2006-02-01 罗斯蒙德公司 Tunable optical filter
CN101386403A (en) * 2008-09-13 2009-03-18 中北大学 Micro optical fibre voltage sensor based on ring micro-cavity
CN103606809A (en) * 2013-08-20 2014-02-26 无锡成电光纤传感科技有限公司 Manufacturing method and device for optical fiber micro-ring resonator
CN204118461U (en) * 2014-11-20 2015-01-21 山东海富光子科技股份有限公司 A kind of micro-dish resonant cavity based on fiber optical corrosive

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