CN204118052U - Sapphire Substrate laying rack - Google Patents
Sapphire Substrate laying rack Download PDFInfo
- Publication number
- CN204118052U CN204118052U CN201420597263.0U CN201420597263U CN204118052U CN 204118052 U CN204118052 U CN 204118052U CN 201420597263 U CN201420597263 U CN 201420597263U CN 204118052 U CN204118052 U CN 204118052U
- Authority
- CN
- China
- Prior art keywords
- support body
- sapphire substrate
- block
- laying rack
- wireway
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model relates to Sapphire Substrate and produces corollary equipment field, especially a kind of Sapphire Substrate laying rack, and it comprises support body, and described support body is regular shape; Linearly type or the ring-like block being provided with several and raising up on support body, the interval between block is identical; And block is linear pattern when arranging, outermost two pieces of blocks are positioned at the side of support body.This Sapphire Substrate laying rack, can effectively separate Sapphire Substrate one by one, avoids its laminating to put in process the situations such as electrostatic bonding occurs, and taking when facilitating subsequent processing operations, improves working (machining) efficiency.Sapphire Substrate can be avoided in the process of putting to receive damage simultaneously, improve the fail safe of process of putting.
Description
Technical field
The Sapphire Substrate that relates to of the present utility model produces corollary equipment field, especially a kind of Sapphire Substrate laying rack.
Background technology
At present, in sapphire process of manufacture, generally all be placed on laying rack for putting of Sapphire Substrate, stacked placement, easy like this causing between Sapphire Substrate is easily adsorbed, and causes in following process process and is difficult to separately, affect normal process, reduce working (machining) efficiency, and in separation process, easily cause Sapphire Substrate impaired.
Utility model content
The purpose of this utility model is deficiency in order to solve above-mentioned technology and provides a kind of structure simple, effectively Sapphire Substrate can be separated and be convenient to the Sapphire Substrate laying rack of taking of Sapphire Substrate when putting Sapphire Substrate.
In order to achieve the above object, the Sapphire Substrate laying rack designed by the utility model, it comprises support body, and described support body is regular shape; Linearly type or the ring-like block being provided with several and raising up on support body, the interval between block is identical; And block is linear pattern when arranging, outermost two pieces of blocks are positioned at the side of support body.
Technique scheme, support body is provided with some blocks, Sapphire Substrate is put between block, effectively can avoid Sapphire Substrate generation electrostatic adhesion each other or cause negative pressure adhesion because fitting closely and be difficult to separately, thus convenient Sapphire Substrate is separated of this structure, be also convenient to follow-up taking; Simultaneously can select difform support body according to the demand of different using function, when support body be ring-type or disc or other non-stripe shape time, be then ring-like surface disposed thereon by block; And when support body be linear pattern or other linear structures time, block then becomes linear and is arranged on support body; Above-mentioned method to set up can impel block to coordinate with the function of support body.
As optimization, the two sides of described block are to centroclinal; The cross section of block is just putting trapezoidal or the isosceles triangle just put.The side that this structure can make block contact with Sapphire Substrate is inclined-plane, Sapphire Substrate when putting run-off the straight can with the whole contacts side surfaces of block, avoid linear contact lay and cause the side of Sapphire Substrate to be damaged occurs.
Between two blocks in support body front, be provided with arc concave shape structure, arc concave shape structure is less than the frontal width of support body at the width of the opening in support body front; The central angle of arc concave shape structure is less than 180 °.The setting of this structure, when support body is put rectangle Sapphire Substrate, directly can be shelved on the front of the support body in the outside of arc concave shape structure, stable in placement; And when needs put circle or similar round Sapphire Substrate on support body, can be shelved in arc concave shape structure, make its putting on support body more stable, the situation such as can not drop in moving process.
Be provided with escape pipe straight up in the inside of each block, escape pipe is all communicated with wireway, and the one or both ends of wireway are connected with air inlet source.This structure utilizes air inlet source to find out tracheal strips conveying compressed air, and vertically spray from the upper side, thus make above block, to be built into one gas column, and form fan-shaped higher pressure airstrip, impel Sapphire Substrate vertical support body surface between block all the time, and the contact between itself and block can be avoided, the possibility that Sapphire Substrate is damaged can be reduced as much as possible, improve the utility model of equipment.
Described support body inside is hollow tubular structure, and described hollow tubular structure is wireway, is provided with the looped pipeline of wireway in the end of the hollow tubular structure of support body, and the looped pipeline of wireway is connected with air inlet source.This structure can make wireway and support body be structure as a whole, and facilitates moving integrally of equipment, can improve the serviceability of equipment simultaneously, reduce its failure rate.
Be provided with multiple escape pipe straight up in each block inside, the escape pipe on same block is arranged side by side at the Width interval of support body; Each escape pipe is all communicated with wireway.This structure can form air wall above block, and it is more stable to the support of Sapphire Substrate, the serviceability of further raising equipment.
The looped pipeline at the two ends of wireway is provided with flow control valve, controls air inlet, by the control of air inlet, the pressure of air wall can be realized, to adapt to the support of the Sapphire Substrate to different-thickness and weight, improve the applicability of equipment.
The end of described looped pipeline is provided with fast connection interface, and looped pipeline is connected with air inlet source by fast connection interface.With the connection in air inlet source when position changed by the conveniently laying frame of this structure, connect more simply, good airproof performance.
The Sapphire Substrate laying rack that the utility model obtains, can effectively separate Sapphire Substrate one by one, avoids its laminating to put in process the situations such as electrostatic bonding occurs, and taking when facilitating subsequent processing operations, improves working (machining) efficiency.Sapphire Substrate can be avoided in the process of putting to receive damage simultaneously, improve the fail safe of process of putting.
Accompanying drawing explanation
Fig. 1 is front view of the present utility model;
Fig. 2 is vertical view of the present utility model.
Embodiment
Below by embodiment, the utility model will be further described by reference to the accompanying drawings.
Embodiment 1:
As shown in Figure 1 and Figure 2, the Sapphire Substrate laying rack that the present embodiment describes, it comprises support body 1, and described support body 1 is list structure; On support body 1, linearly type is provided with several blocks 2 raised up, and the interval between block 2 is identical, and outermost two pieces of blocks 2 are positioned at the side of support body 1.The two sides of described block 2 are to centroclinal; The cross section of block 2 is just putting trapezoidal, and Sapphire Substrate 3 is shelved on the support body 1 between block 2.Between two blocks 2 in support body 1 front, be provided with arc concave shape structure 4, arc concave shape structure 4 is less than the frontal width of support body 1 at the width of the opening in support body 1 front; The central angle of arc concave shape structure 4 is less than 180 °.
Be provided with escape pipe 6 straight up in the inside of each block 2, escape pipe 6 is all communicated with wireway 5, and the one or both ends of wireway 5 are connected with air inlet source 9.Be provided with multiple escape pipe 6 straight up in each block 2 inside, the escape pipe 6 on same block 2 is arranged side by side at the Width interval of support body 1; Each escape pipe 6 is all communicated with wireway 5.Described support body 1 inside is hollow tubular structure, and described hollow tubular structure is wireway 5, is provided with the looped pipeline 7 of wireway 5 in the end of the hollow tubular structure of support body 1, and the looped pipeline 7 of wireway 5 is connected with air inlet source 9.The looped pipeline 7 at the two ends of wireway 5 is provided with flow control valve 10, controls air inlet.The end of described looped pipeline 7 is provided with fast connection interface 8, and looped pipeline 7 is connected with air inlet source 9 by fast connection interface 8.
Claims (8)
1. a Sapphire Substrate laying rack, is characterized in that: it comprises support body, and described support body is regular shape; Linearly type or the ring-like block being provided with several and raising up on support body, the interval between block is identical; And block is linear pattern when arranging, outermost two pieces of blocks are positioned at the side of support body.
2. a kind of Sapphire Substrate laying rack according to claim 1, is characterized in that: the two sides of described block are to centroclinal; The cross section of block is just putting trapezoidal or the isosceles triangle just put.
3. a kind of Sapphire Substrate laying rack according to claim 1 and 2, is characterized in that: between two blocks in support body front, be provided with arc concave shape structure, arc concave shape structure is less than the frontal width of support body at the width of the opening in support body front; The central angle of arc concave shape structure is less than 180 °.
4. a kind of Sapphire Substrate laying rack according to claim 3, it is characterized in that: be provided with escape pipe straight up in the inside of each block, escape pipe is all communicated with wireway, the one or both ends of wireway are connected with air inlet source.
5. a kind of Sapphire Substrate laying rack according to claim 4, it is characterized in that: described support body inside is hollow tubular structure, described hollow tubular structure is wireway, is provided with the looped pipeline of wireway in the end of the hollow tubular structure of support body, and the looped pipeline of wireway is connected with air inlet source.
6. a kind of Sapphire Substrate laying rack according to claim 5, is characterized in that: be provided with multiple escape pipe straight up in each block inside, the escape pipe on same block is arranged side by side at the Width interval of support body; Each escape pipe is all communicated with wireway.
7. a kind of Sapphire Substrate laying rack according to claim 6, is characterized in that: on the looped pipeline at the two ends of wireway, be provided with flow control valve, controls air inlet.
8. a kind of Sapphire Substrate laying rack according to claim 5, is characterized in that: the end of described looped pipeline is provided with fast connection interface, and looped pipeline is connected with air inlet source by fast connection interface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420597263.0U CN204118052U (en) | 2014-10-16 | 2014-10-16 | Sapphire Substrate laying rack |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420597263.0U CN204118052U (en) | 2014-10-16 | 2014-10-16 | Sapphire Substrate laying rack |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204118052U true CN204118052U (en) | 2015-01-21 |
Family
ID=52335340
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420597263.0U Expired - Fee Related CN204118052U (en) | 2014-10-16 | 2014-10-16 | Sapphire Substrate laying rack |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204118052U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108198781A (en) * | 2018-01-15 | 2018-06-22 | 江苏冠达通电子科技有限公司 | Sapphire Substrate laying rack |
-
2014
- 2014-10-16 CN CN201420597263.0U patent/CN204118052U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108198781A (en) * | 2018-01-15 | 2018-06-22 | 江苏冠达通电子科技有限公司 | Sapphire Substrate laying rack |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150121 Termination date: 20161016 |