CN204028106U - Comb capacitance type micro-acceleration gauge - Google Patents
Comb capacitance type micro-acceleration gauge Download PDFInfo
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- CN204028106U CN204028106U CN201420476590.0U CN201420476590U CN204028106U CN 204028106 U CN204028106 U CN 204028106U CN 201420476590 U CN201420476590 U CN 201420476590U CN 204028106 U CN204028106 U CN 204028106U
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- movable electrode
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Abstract
The utility model discloses a kind of comb capacitance type micro-acceleration gauge, comprise the substrate layer, insulation course, structural sheet and the basalis that arrange from top to bottom, insulation course is located between substrate layer and structural sheet; Substrate layer and basalis are equipped with metal lead electrode.The utility model makes Detection capacitance be multiplied when not increasing device area, and increase mass weight, add the dirigibility of design, can improve measuring accuracy, and can utilize dry etching, size Control is good, and technique is simple, can realize manufacture in enormous quantities.
Description
Technical field
The utility model relates to technical field of microelectronic mechanical systems, especially a kind of comb capacitance type micro-acceleration gauge.
Background technology
The minisize condenser type accelerometer adopting microelectromechanical systems (MEMS) technology to realize, has that volume is little, lightweight, precision is high and cost is low etc. advantage, has the application prospect of wide in fields such as military affairs, automobile technology, consumer electronics products.Capacitance microaccelerator generally has two kinds of structures: " sandwich " structure and " comb " structure.
1, " sandwich " structure, can do very large no matter mass is thickness or area, therefore Detection capacitance area is large, noise is little, can meet the requirement of high-acruracy survey, but the job operation of general wet etching prepares, wet etching control accuracy is poor and need extra chip area to realize 54.5 ° of skewed slots (54.5 ° is arrive the angle required for crystal face), in addition, also need double-sided alignment photoetching and etching, technique is relatively complicated.
2, " comb " formula structure, general dry etching is to obtain fast etch rate and vertical sidewall, size Control precision is high, chip structure area is less, but due to the restriction of dry etching etching depth-to-width ratio, its mass thickness is less, and the area of Detection capacitance is little, noise is comparatively large, and measuring accuracy is lower.If increase mass by increasing area, and by increasing comb length increasing detection capacitance, decrease on the one hand the number of device on whole silicon chip, on the other hand because the angularity of silicon chip reduces the symmetry of device, be difficult to the requirement meeting high-acruracy survey.
As can be seen from the above, the micro-acceleration gauge of sandwich structure can meet the requirement of high-acruracy survey, but needs to improve size Control precision, reduce process complexity; Multi-finger Micro-accelerometer processability is good, but needs further increase mass and Detection capacitance to improve measuring accuracy.
Utility model content
The utility model is for the deficiencies in the prior art, and propose a kind of comb capacitance type micro-acceleration gauge, structure is ingenious, and measuring accuracy is high.
In order to realize above-mentioned utility model object, the utility model provides following technical scheme: a kind of comb capacitance type micro-acceleration gauge, and comprise the substrate layer, insulation course, structural sheet and the basalis that arrange from top to bottom, insulation course is located between substrate layer and structural sheet; Substrate layer and basalis are equipped with metal lead electrode; This substrate layer is provided with the first mass, the first movable electrode and the first fixed electorde, one end of first fixed electorde is connected with insulation course by the first anchor point, the other end is free end, and one end of the first movable electrode connects with the first mass, and the other end is free end; First movable electrode formation plane-parallel capacitor alternate with the first fixed electorde; This structural sheet is provided with the second mass, the second movable electrode, the second fixed electorde and brace summer, and one end of the second fixed electorde is connected with basalis with insulation course respectively by the second anchor point, and the other end is free end; One end of second movable electrode is connected on the second mass, and the other end is free end; Brace summer one end is connected on the second mass, and the other end is connected with basalis by the 3rd anchor point; Second movable electrode formation plane-parallel capacitor alternate with the second fixed electorde.
Further, the first anchor point and the second anchor point are on the same vertical direction of basalis.
Further, insulating layer material comprises silicon dioxide.
Compared with prior art, the utility model has the following advantages: 1) can Detection capacitance area be made to be multiplied when not increasing area, increases mass quality, improves measuring accuracy; 2) adopt dry etch process, size Control precision is high; 3) preparation method of the present utility model can adopt conventional MEMS technology equipment, realizes manufacturing in enormous quantities, and technological process is simple.
Accompanying drawing explanation
Fig. 1 is the utility model comb capacitance type micro-acceleration gauge longitudinal profile schematic diagram;
Fig. 2 is the structural principle schematic diagram of the utility model comb capacitance type micro-acceleration gauge;
Fig. 3 is each functional unit structural representation on structural sheet in Fig. 1;
Fig. 4 is each functional unit structural representation on substrate layer in Fig. 1.
Embodiment
Be described in detail the utility model below in conjunction with accompanying drawing, the description of this part is only exemplary and explanatory, should not have any restriction to protection domain of the present utility model.
A kind of comb capacitance type micro-acceleration gauge as shown in Figure 1, be made up of structural sheet 1, insulation course 2, substrate layer 3 and basalis 4, structural sheet 1 and substrate layer 3 arrange functional unit, structural sheet 1 is connected by anchor point 5 with basalis 4, structural sheet 1 is connected by insulation course 2 with substrate layer 3, on basalis 4 He on substrate layer 3, be provided with metal lead electrode 6.Insulation course 2 material comprises silicon dioxide.
In order to realize sensing function, as shown in Figure 2, structural sheet 1 is provided with fixed electorde 21, movable electrode 22, mass 23, brace summer 24, fixed electorde 21 one end is connected with basalis 4 by anchor point 25, the other end is free end, and movable electrode 22 one end is connected on mass 23, and the other end is free end, brace summer 24 one end is connected on mass 23, and the other end is connected with basalis 4 by anchor point 26; Fixed electorde 21 formation plane-parallel capacitor alternate with movable electrode 22.
In order to increase Detection capacitance, as shown in Figure 3, substrate layer 3 is provided with fixed electorde 31, movable electrode 32, mass 33, fixed electorde 31 one end is connected with basalis 4 by anchor point 35, the other end is free end, movable electrode 32 one end connects with mass 33, and the other end is free end, and mass 33 is connected with mass 23 by insulation course 2; Fixed electorde 31 formation plane-parallel capacitor alternate with movable electrode 32.
Convenient in order to describe, as shown in Figure 4, total is divided into fixed electorde 11, movable electrode 12, mass 13, brace summer 14, anchor point 15 and anchor point 16, fixed electorde 11 is made up of fixed electorde 21 and fixed electorde 31, movable electrode 12 is made up of movable electrode 22 and movable electrode 32, mass 13 is made up of the insulation course 2 of mass 23 and mass 33 and centre, brace summer 14 is made up of brace summer 24, anchor point 15 is made up of the insulation course 2 of anchor point 25 and anchor point 35 and centre, anchor point 15 is connected with basalis 4 by anchor point 5, anchor point 16 is made up of the insulation course 2 of anchor point 26 and anchor point 36 and centre, anchor point 16 is connected with basalis 4 by anchor point 5.
The principle of work of the utility model device is as follows: when non-measured state, mass mediates, upper and lower comb gap is equal, the capacitance size formed is equal, output signal is 0, when there being acceleration upwards, mass moves upward under acceleration effect, mass upper movable electrode and fixed electorde gap reduce, electric capacity increases, mass lower movable electrode and fixed electorde gap increase, electric capacity reduces, in like manner, when there being downward acceleration, mass upper movable electrode and fixed electorde gap increase, electric capacity reduces, mass lower movable electrode and fixed electorde gap reduce, electric capacity increases, utilize the difference size of the already very ripe upper and lower electric capacity of difference measurement commercial measurement and positive negative direction, the size and Orientation of known acceleration.
Owing to adding the comb structure of a times on substrate layer 3, therefore, under same acceleration effect, differential capacitance doubles, thus can improve the sensitivity of accelerometer.
The above is only preferred implementation of the present utility model; it should be pointed out that for those skilled in the art, under the prerequisite not departing from the utility model principle; can also make some improvements and modifications, these improvements and modifications also should be considered as protection domain of the present utility model.
Claims (3)
1. a comb capacitance type micro-acceleration gauge, is characterized in that: comprise the substrate layer, insulation course, structural sheet and the basalis that arrange from top to bottom, insulation course is located between substrate layer and structural sheet; Substrate layer and basalis are equipped with metal lead electrode;
This substrate layer is provided with the first mass, the first movable electrode and the first fixed electorde, one end of first fixed electorde is connected with insulation course by the first anchor point, the other end is free end, and one end of the first movable electrode connects with the first mass, and the other end is free end; First movable electrode formation plane-parallel capacitor alternate with the first fixed electorde;
This structural sheet is provided with the second mass, the second movable electrode, the second fixed electorde and brace summer, and one end of the second fixed electorde is connected with basalis with insulation course respectively by the second anchor point, and the other end is free end; One end of second movable electrode is connected on the second mass, and the other end is free end; Brace summer one end is connected on the second mass, and the other end is connected with basalis by the 3rd anchor point; Second movable electrode formation plane-parallel capacitor alternate with the second fixed electorde.
2. comb capacitance type micro-acceleration gauge as claimed in claim 1, is characterized in that: the first anchor point and the second anchor point are on the same vertical direction of basalis.
3. comb capacitance type micro-acceleration gauge as claimed in claim 1, is characterized in that: insulating layer material comprises silicon dioxide.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420476590.0U CN204028106U (en) | 2014-08-22 | 2014-08-22 | Comb capacitance type micro-acceleration gauge |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420476590.0U CN204028106U (en) | 2014-08-22 | 2014-08-22 | Comb capacitance type micro-acceleration gauge |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204028106U true CN204028106U (en) | 2014-12-17 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420476590.0U Expired - Fee Related CN204028106U (en) | 2014-08-22 | 2014-08-22 | Comb capacitance type micro-acceleration gauge |
Country Status (1)
| Country | Link |
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| CN (1) | CN204028106U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104133080A (en) * | 2014-08-22 | 2014-11-05 | 中国工程物理研究院电子工程研究所 | Comb tooth capacitance-typed micro-accelerometer |
| CN114354976A (en) * | 2022-03-21 | 2022-04-15 | 成都华托微纳智能传感科技有限公司 | MEMS accelerometer for reducing edge effect |
-
2014
- 2014-08-22 CN CN201420476590.0U patent/CN204028106U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104133080A (en) * | 2014-08-22 | 2014-11-05 | 中国工程物理研究院电子工程研究所 | Comb tooth capacitance-typed micro-accelerometer |
| CN104133080B (en) * | 2014-08-22 | 2017-12-12 | 中国工程物理研究院电子工程研究所 | Comb capacitance type micro-acceleration gauge |
| CN114354976A (en) * | 2022-03-21 | 2022-04-15 | 成都华托微纳智能传感科技有限公司 | MEMS accelerometer for reducing edge effect |
| CN114354976B (en) * | 2022-03-21 | 2022-05-20 | 成都华托微纳智能传感科技有限公司 | MEMS accelerometer for reducing edge effect |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20141217 Termination date: 20150822 |
|
| EXPY | Termination of patent right or utility model |