CN203981101U - Silicon chip eccentric tester - Google Patents
Silicon chip eccentric tester Download PDFInfo
- Publication number
- CN203981101U CN203981101U CN201420328729.7U CN201420328729U CN203981101U CN 203981101 U CN203981101 U CN 203981101U CN 201420328729 U CN201420328729 U CN 201420328729U CN 203981101 U CN203981101 U CN 203981101U
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- China
- Prior art keywords
- support
- bearing part
- silicon chip
- tester
- head
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- Withdrawn - After Issue
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Abstract
Silicon chip eccentric tester, comprise clock gauge, bearing part, supporting seat, gauge head and tester instrument body, bearing part is arranged on supporting seat, tester instrument body is positioned at a side of bearing part, and clock gauge is fixed on it tester instrument, and side head is arranged on bottom the vertical center of pointing to bearing part of clock gauge, bearing part is 3-foot form, comprise fixed head, support A, support B and support C, fixed head is hollow type fixed head, and support A, support B and support C are installed in hollow part.Adopt the utility model to measure the offset of silicon chip, need not adopt the equipment of external import costliness just can run away with the offset of silicon chip, equipment is simple, cheap, measuring method is also very convenient, for ease of maintenaince, is suitable for the use of a large amount of common production optical device companies.
Description
Technical field
The utility model relates to optical element processing technique field, is specifically related to a kind of silicon chip eccentric tester for the offset of silicon chip is measured.
Background technology
In recent years, along with scientific and technological progress and development, in the various optical systems for digital camera, video camera etc., often adopt silicon chip to be used for improving optical property and make optical system miniaturization.With it together, need a kind of method of the offset of measuring silicon chip.
Thereby traditional eccentric measurer adopts source emissioning light bundle via the transparent optical element refraction refract light that produces, the offset of this type of optical element to be measured, but silicon chip is as the opaque solid of one, can not adopt in this way and measure.And the plant equipment that the offset of this traditional measurement optical element adopts mostly is external import, price is very expensive, and common optical device company is difficult to bear and use.Therefore, need to adopt a kind of new equipment to realize and can carry out the test of good offset to silicon chip.
Therefore, the problems referred to above are the problems that should pay attention to and solve in the design and use process to silicon chip eccentric tester.
Utility model content
For the problem of above-mentioned existence, the utility model provides silicon chip eccentric tester.
Technical solution of the present utility model is: silicon chip eccentric tester, comprise clock gauge, bearing part, supporting seat, gauge head and tester instrument body, described bearing part is arranged on described supporting seat, described tester instrument body is positioned at a side of described bearing part, described clock gauge is fixed on it described tester instrument, described side head be arranged on described clock gauge bottom the vertical center of pointing to described bearing part, described bearing part is 3-foot form, comprise fixed head, support A, support B and support C, described fixed head is hollow type fixed head, described support A, support B and support C are installed in hollow part.
Further improvement of the utility model is: described support A, support B are identical with the structure of support C, include fixed knob, slide block and back shaft, described fixed knob is arranged on described slide block, described back shaft is positioned at the top of described slide block, and the center of described bearing part is all pointed on the top of the back shaft of described support A, support B and support C.
Further improvement of the utility model is: described fixed head all offers the chute that can slide for slide block in the position of described support A, described support B and described support C installation.
Further improvement of the utility model is: on described bearing part, be also provided with the fastening button A that can move up and down on described supporting seat, described clock gauge also can move up and down by described tester instrument fastening button B with it.
The utility model silicon chip eccentric tester, by fastening button A and fastening button B, bearing part and clock gauge being moved to good position fixes, in the chute of offering on fixed head, moving slider flocks together the support the tip of the axis of support A, support B and support C, habitat is the center of bearing part, fixes the position of slide block in chute by the fixed knob on slide block.Then by gauge head is up pulled out, silicon slice under test is placed on to the habitat of the back shaft end of support A, support B and support C, the end of gauge head props up the upper surface of silicon chip, measure by clock gauge, again by after 180 ° of silicon slice rotatings, duplicate measurements, can accurately measure the offset of silicon chip.
The beneficial effects of the utility model are: silicon chip is placed in the central point of support A, support B and support C back shaft composition, and silicon chip putting position is steady.The utility model has designed a kind of silicon chip eccentric tester, need not adopt the equipment of external import costliness just can run away with the offset of silicon chip, equipment is simple, cheap, measuring method is also very convenient, and reading is directly perceived, and common laborer just can operate, and for ease of maintenaince, be suitable for the use of a large amount of common production optical device companies.
Brief description of the drawings
Fig. 1 is the structural representation of the utility model silicon chip eccentric tester.
Wherein, 1-clock gauge, 2-bearing part, 3-supporting seat, 4-gauge head, 5-tester instrument body, 6-fixed head, 7-support A, 8-support B, 9-support C, 10-fixed knob, 11-slide block, 12-back shaft, 13-chute, the fastening button A of 14-, the fastening button B of 15-.
Embodiment
In order to deepen, to understanding of the present utility model, below in conjunction with drawings and Examples, the utility model to be described in further detail, this embodiment, only for explaining the utility model, does not form and limits protection domain of the present utility model.
The present embodiment provides silicon chip eccentric tester, comprise clock gauge 1, bearing part 2, supporting seat 3, gauge head 4 and tester instrument body 5, described bearing part 2 is arranged on described supporting seat 3, described tester instrument body 5 is positioned at a side of described bearing part 2, described clock gauge 1 is fixed on described tester instrument body 5, described side head be arranged on described clock gauge 1 bottom the vertical center of pointing to described bearing part 2, described bearing part 2 is 3-foot form, comprise fixed head 6, support A7, support B8 and support C9, described fixed head 6 is hollow type fixed head 6, described support A7, support B8 and support C9 are installed in hollow part.Described support A7, support B8 are identical with the structure of support C9, include fixed knob 10, slide block 11 and back shaft 12, described fixed knob 10 is arranged on described slide block 11, described back shaft 12 is positioned at the top of described slide block 11, and the center of described bearing part 2 is all pointed on the top of the back shaft 12 of described support A7, support B8 and support C9.Described fixed head 6 all offers the chute 13 that can slide for slide block 11 in the position of described support A7, described support B8 and described support C9 installation.On described bearing part 2, be also provided with the fastening button A14 that can move up and down on described supporting seat 3, described clock gauge 1 also can move up and down by the fastening button B15 on described tester instrument body 5.
The present embodiment silicon chip eccentric tester, by fastening button A14 and fastening button B15, bearing part 2 and clock gauge 1 being moved to good position fixes, in the chute 13 of offering on fixed head 6, moving slider 11 flocks together the end of the back shaft 12 of support A7, support B8 and support C9, habitat is the center of bearing part 2, fixes the position of slide block 11 in chute 13 by the fixed knob 10 on slide block 11.Then by gauge head 4 is up pulled out, silicon slice under test is placed on to the habitat of back shaft 12 ends of support A7, support B8 and support C9, the end of gauge head 4 props up the upper surface of silicon chip, measure by clock gauge 1, again by after 180 ° of silicon slice rotatings, duplicate measurements, can accurately measure the offset of silicon chip.
The beneficial effect of the present embodiment is: silicon chip is placed in the central point of support A, support B and support C back shaft composition, and silicon chip putting position is steady.The utility model has designed a kind of silicon chip eccentric tester, need not adopt the equipment of external import costliness just can run away with the offset of silicon chip, equipment is simple, cheap, measuring method is also very convenient, and reading is directly perceived, and common laborer just can operate, and for ease of maintenaince, be suitable for the use of a large amount of common production optical device companies.
Claims (4)
1. silicon chip eccentric tester, it is characterized in that: comprise clock gauge (1), bearing part (2), supporting seat (3), gauge head (4) and tester instrument body (5), described bearing part (2) is arranged on described supporting seat (3), described tester instrument body (5) is positioned at a side of described bearing part (2), described clock gauge (1) is fixed on described tester instrument body (5), described side head be arranged on described clock gauge (1) bottom the vertical center of pointing to described bearing part (2), described bearing part (2) is 3-foot form, comprise fixed head (6), support A(7), support B(8) and support C(9), described fixed head (6) is hollow type fixed head (6), described support A(7), support B(8) and support C(9) be installed in hollow part.
2. silicon chip eccentric tester according to claim 1, it is characterized in that: described support A(7), support B(8) with support C(9) structure identical, include fixed knob (10), slide block (11) and back shaft (12), described fixed knob (10) is arranged on described slide block (11), described back shaft (12) is positioned at the top of described slide block (11), described support A(7), support B(8) and support C(9) the top of back shaft (12) all point to the center of described bearing part (2).
3. silicon chip eccentric tester according to claim 1, is characterized in that: described fixed head (6) is at described support A(7), described support B(8) and described support C(9) position of installing all offers the chute (13) that can supply slide block (11) slip.
4. silicon chip eccentric tester according to claim 1, it is characterized in that: on described bearing part (2), be also provided with the fastening button A(14 that can move up and down on described supporting seat (3)), described clock gauge (1) also can be by the fastening button B(15 on described tester instrument body (5)) move up and down.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420328729.7U CN203981101U (en) | 2014-06-19 | 2014-06-19 | Silicon chip eccentric tester |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420328729.7U CN203981101U (en) | 2014-06-19 | 2014-06-19 | Silicon chip eccentric tester |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203981101U true CN203981101U (en) | 2014-12-03 |
Family
ID=51978531
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420328729.7U Withdrawn - After Issue CN203981101U (en) | 2014-06-19 | 2014-06-19 | Silicon chip eccentric tester |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203981101U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104048587A (en) * | 2014-06-19 | 2014-09-17 | 丹阳市鑫烨光学仪器有限公司 | Silicon wafer eccentric tester |
| CN107030911A (en) * | 2017-05-15 | 2017-08-11 | 天津市环欧半导体材料技术有限公司 | The level measurement method and frock of a kind of use multi-line cutting machine secondary cut silicon chip |
-
2014
- 2014-06-19 CN CN201420328729.7U patent/CN203981101U/en not_active Withdrawn - After Issue
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104048587A (en) * | 2014-06-19 | 2014-09-17 | 丹阳市鑫烨光学仪器有限公司 | Silicon wafer eccentric tester |
| CN104048587B (en) * | 2014-06-19 | 2016-08-17 | 丹阳市鑫烨光学仪器有限公司 | silicon chip eccentric tester |
| CN107030911A (en) * | 2017-05-15 | 2017-08-11 | 天津市环欧半导体材料技术有限公司 | The level measurement method and frock of a kind of use multi-line cutting machine secondary cut silicon chip |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20141203 Effective date of abandoning: 20160817 |
|
| C25 | Abandonment of patent right or utility model to avoid double patenting |