CN203964869U - A kind of high-accuracy grating scale rapid measurement device - Google Patents
A kind of high-accuracy grating scale rapid measurement device Download PDFInfo
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- CN203964869U CN203964869U CN201420212991.5U CN201420212991U CN203964869U CN 203964869 U CN203964869 U CN 203964869U CN 201420212991 U CN201420212991 U CN 201420212991U CN 203964869 U CN203964869 U CN 203964869U
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Abstract
The utility model is a kind of high-accuracy grating scale rapid measurement device, includes CMOS/CCD sensor array, optical amplification system, parallel light source, with absolute grating scale, indication grating chi, correlation sensor, FPGA driver element, DSP data processing unit, the rectification building-out unit of absolute encoding and increment type coding.The specific coding of the utility model dicode road grating scale is amplified by optical amplification system and is imaged onto CMOS/CCD sensor array and lists, in shutter speed enough under fast condition, by FPGA driver element, drive one by one in order CMOS/CCD sensor array to carry out Quick Acquisition and obtain image, by the specific coding in image, draw an absolute position distance, and obtain one with the distance of increment of error by incremental code, finally, comprehensive two measuring distances obtain a high-precision positional information.The utility model is reasonable in design, convenient and practical, simple to operate, and measuring accuracy is high.
Description
Technical field
The utility model is a kind of high-accuracy grating scale rapid measurement device, is the rapid measurement device of the high-precision grating scale Quick Acquisition image of a kind of work for the treatment of under fast state, belongs to the innovative technology of high-accuracy grating scale rapid measurement device.
Background technology
The advantages such as pattern displacement measuring technique is the study hotspot of displacement measurement always, can control by closed-loop because of it, improves machining precision, and cost is low become the main linear feedback element of modern machining industry numerically-controlled machine.For grating measuring technology, conventional art is to produce Moire fringe based on grating interference or diffraction, and it is the sine wave of 90 ° that the phase subdivision technology by 4 frequencys multiplication forms phase differential, and uses it for pulse and calculate to obtain displacement and traffic direction.In addition, also there are the microprocessor components of employing and CMOS/CCD sensor image acquisition element to obtain striped displacement calculating, but existing utilizes merely Grating glass to read positional information, reliability is lower, precision is subject to the shortcomings such as impact of the factors such as grating scale linearity, rigidity, temperature, vibration, and the most important is to be difficult to quick shooting.
Subduing at present vibration is mainly the image processing field that concentrates on camera on the technology of the impact of image, and current main two kinds of processing modes are electronic image stabilizator and optical image stabilizer.Wherein, electronic image stabilizator is processed based on software, has shortcomings such as easily causing image degradation, processing time length.And optical image stabilizer is sensor by being arranged on camera lens or body, detect its vibration or direction of motion, can not cause deterioration of image quality, but Existence dependency hardware condition and high in cost of production shortcoming.
Summary of the invention
The purpose of this utility model is to consider the problems referred to above and a kind of high-accuracy grating scale rapid measurement device of displacement measurement accurately of realizing is provided.The utility model is reasonable in design, convenient and practical, simple to operate, and measuring accuracy is high.
The technical solution of the utility model is: high-accuracy grating scale rapid measurement device of the present utility model, include for gathering the CMOS/CCD sensor array of absolute grating striped and increment striped, optical amplification system, parallel light source, for measuring the absolute grating scale with absolute encoding and increment type coding of displacement, indication grating chi, correlation sensor, FPGA driver element, DSP data processing unit, rectification building-out unit, wherein optical amplification system is placed in the top of the dicode road striped of absolute grating scale, parallel light source is placed in the below of absolute grating scale, indication grating chi is placed in the top of the increment type coding of absolute grating scale, correlation sensor is installed in the top of indication grating chi, CMOS/CCD sensor array is the bottom surface that ribbon is arranged on CMOS/CCD sensor fixation plate, and be placed on the position of enlarged image information of optical amplification system, rectification building-out unit is packed in the end face of CMOS/CCD sensor fixation plate, FPGA driver module is connected with CMOS/CCD sensor array and is connected with DSP data processing unit.
The utility model includes the absolute grating scale, indication grating chi, optical amplification system, parallel light source in dicode road, for gathering the structure that is CMOS/CCD array element that ribbon distributes, correlation sensor, FPGA driver element, DSP processing unit, motion correction compensating unit of image.Specific coding in the absolute grating ruler in the utility model dicode road is amplified by optical amplification system and is imaged onto CMOS/CCD sensor array and lists, in shutter speed enough under fast condition, by FPGA driver element, drive one by one in order CMOS/CCD sensor array to carry out Quick Acquisition and obtain image, by the specific coding in image, draw an absolute position distance, and obtaining one with the distance of increment of error by incremental code, comprehensive two measuring distances obtain a high-precision positional information.In addition, motion correction compensating unit of the present utility model adopts the structure that includes gyro sensor and piezoelectric ceramic piece group, utilize gyro sensor to obtain mechanism and be operated in vibration angle and the acceleration under running status, and Real Time Drive piezoelectric ceramic piece group produces Contrary compensation motion, CMOS/CCD array is entered in effective field depth of optical texture.The utility model is that a kind of design is ingenious, function admirable, convenient and practical high-accuracy grating scale rapid measurement device.
Accompanying drawing explanation
Fig. 1 is the member picture group of quick reading code of the present utility model and antihunting device;
Fig. 2 is the axonometric drawing that waits of rectification building-out module of the present utility model;
Fig. 3 is the axonometric drawing (removing top panel) such as grade of rectification building-out module of the present utility model;
Fig. 4 is the front view of rectification building-out module of the present utility model;
Fig. 5 is the left view of rectification building-out module of the present utility model.
Embodiment
Embodiment:
Structural representation of the present utility model as shown in Figure 1, high-accuracy grating scale rapid measurement device of the present utility model, include for gathering the CMOS/CCD sensor array 1 of absolute grating striped and increment striped, 2, 3, 4, optical amplification system 5, parallel light source 6, for measuring the absolute grating scale 9 with absolute encoding 7 and increment type coding 8 of displacement, indication grating chi 10, correlation sensor 11, FPGA driver element 12, DSP data processing unit 13, rectification building-out unit 14, wherein optical amplification system 5 is placed in the top of the dicode road striped of absolute grating scale 9, parallel light source 6 is placed in the below of absolute grating scale 9, indication grating chi 10 is placed in the top of the increment type coding 8 of absolute grating scale 9, correlation sensor 11 is installed in the top of indication grating chi 10, CMOS/CCD sensor array 1～4 is the bottom surface that ribbon is arranged on CMOS/CCD sensor fixation plate 15, and be placed on the position of enlarged image information of optical amplification system 5, rectification building-out unit 16 is packed in the end face of CMOS/CCD sensor fixation plate 15, FPGA driver module 12 is connected with CMOS/CCD sensor array 1～4, drive one by one in an orderly manner CMOS/CCD sensor array 1～4 to gather four road light and form four width images, rectification building-out unit 16 detects Vibration Condition and produces Contrary compensation motion, the absolute encoding 7 of absolute grating scale 9 amplifies by optical amplification system 5 and is imaged on CMOS/CCD sensor array 1～4, the fringe count that the increment type coding 8 that utilizes correlation sensor 11 to gather absolute grating scale 9 produces under 10 effects of indication grating chi, FPGA driver module 12 is connected with DSP data processing unit 13.Above-mentioned FPGA driver module 12 drives the above-mentioned banded CMOS/CCD sensor array collection image that is, and the mode of driving is orderly driving one by one, realizes the snap of " Jia Telin " machine gun formula.
In the present embodiment, above-mentioned correlation sensor 11 is that infrared electro is to pipe or other correlation sensors.
In the present embodiment, above-mentioned rectification building-out unit 16 includes and utilizes gyro sensor 17 and piezoelectric ceramic piece group 18～21, gyro sensor 17 is arranged on the geometric center of CMOS/CCD sensor fixation plate 15 end faces, piezoelectric ceramic piece group 18～21 is arranged symmetrically in the surrounding of gyro sensor 17, between compensation mechanism top panel 27 and CMOS/CCD sensor fixation plate 15, rectification building-out unit 16 utilizes gyro sensor 17 to detect Vibration Condition, detect in real time the vibration twisting angle of the CMOS/CCD sensor array 1～4 in motion process, change frequency and mechanism's acceleration, by piezoelectric ceramic piece group 18～21, producing Contrary compensation moves, utilize the character of piezoelectric ceramic piece, according to above-mentioned twisting angle, drive piezoelectric ceramic piece generation to beat accordingly and move the vibration of compensation mechanism, make in hopping process CMOS/CCD sensor array 1～4 enter and in effective field depth, obtain image clearly.
In the present embodiment, four cornerwise positions of above-mentioned compensation mechanism top panel 27 and CMOS/CCD sensor fixation plate 15 are set on four guide rails, compensation mechanism top panel 27 and CMOS/CCD sensor fixation plate 15 can move up and down along four guide rails, in addition, on four guide rails, be equiped with respectively spring 23～26, by spring 23～26, come moving-limiting scope and weakening.
In the present embodiment, above-mentioned CMOS/CCD sensor array 1～4 is arranged symmetrically in the lower surface of CMOS/CCD array fixed head 15.
In the present embodiment, high-accuracy grating scale rapid measurement device is also provided with mechanical damper unit 22, machinery damper unit 22 is the flexible anti-vibration unit that are installed on high-accuracy grating scale rapid measurement device bottom surface, includes spring device and is filled in spring device flexible material around.In addition, above-mentioned mechanical damper unit 22 also can be installed on other places of high-accuracy grating scale rapid measurement device, or is installed on lathe or other places, and mechanical damper unit 22 is mechanical damper mechanisms of whole detection system.
In the present embodiment, the coded system of above-mentioned absolute grating scale is to use bright fringe representative " 1 ", and the light and shade striped of dark fringe representative " 0 " is encoded.
In the present embodiment, the absolute encoding 7 of above-mentioned absolute grating scale 9 adopts binary pseudo-random sequence code, an absolute position of the unique sign grating scale of each basic code, the increment type coding 8 of absolute grating scale 9 is light and dark " 01 " sequence codes, the code of two kinds of codes is wide identical, and definitely alignment up and down.
In the present embodiment, above-mentioned CMOS/CCD sensor array 1～4 is ribbon and distributes, and the center of each CMOS/CCD sensor array element is consistent to the height of the middle of the absolute encoding 7 of absolute grating scale 9, and each unit each other definitely side by side.
In the present embodiment, the above-mentioned FPGA of utilization driver module drives the above-mentioned banded CMOS/CCD sensor array collection image that is, and the mode of driving is orderly driving one by one, realizes the snap of " Jia Telin " machine gun formula.
The measuring method of the high-accuracy grating scale rapid measurement device of the utility model is to obtain positional information accurately in conjunction with incremental code and basic code, wherein, by infrared electro, pipe or other correlation sensors are obtained the incremental code of grating scale and the positional information of the striped that indication grating forms in dicode road, utilize the basic code image of CMOS/CCD array collection to obtain positional information more accurately.
Claims (7)
1. a high-accuracy grating scale rapid measurement device, it is characterized in that including for gathering the CMOS/CCD sensor array (1～4) of absolute grating striped and increment striped, optical amplification system (5), parallel light source (6), for measuring the absolute grating scale (9) with absolute encoding (7) and increment type coding (8) of displacement, indication grating chi (10), correlation sensor (11), FPGA driver element (12), DSP data processing unit (13), rectification building-out unit (14), wherein optical amplification system (5) is placed in the top of the dicode road striped of absolute grating scale (9), parallel light source (6) is placed in the below of absolute grating scale (9), indication grating chi (10) is placed in the top of the increment type coding (8) of absolute grating scale (9), correlation sensor (11) is installed in the top of indication grating chi (10), CMOS/CCD sensor array (1～4) is the bottom surface that ribbon is arranged on CMOS/CCD sensor fixation plate (15), and be placed on the position of enlarged image information of optical amplification system (5), rectification building-out unit (16) is packed in the end face of CMOS/CCD sensor fixation plate (15), FPGA driver module (12) is connected with CMOS/CCD sensor array (1～4) and is connected with DSP data processing unit (13).
2. high-accuracy grating scale rapid measurement device according to claim 1, it is characterized in that high-accuracy grating scale rapid measurement device is also provided with mechanical damper unit (22), machinery damper unit (22) is the flexible anti-vibration unit that is installed on high-accuracy grating scale rapid measurement device bottom surface, includes spring device and is filled in spring device flexible material around.
3. high-accuracy grating scale rapid measurement device according to claim 1, is characterized in that above-mentioned correlation sensor (11) is for infrared electro is to pipe.
4. high-accuracy grating scale rapid measurement device according to claim 1, it is characterized in that above-mentioned rectification building-out unit (16) includes utilizes gyro sensor (17) and piezoelectric ceramic piece group (18～21), gyro sensor (17) is arranged on the geometric center of CMOS/CCD sensor fixation plate (15) end face, piezoelectric ceramic piece group (18～21) is arranged symmetrically in the surrounding of gyro sensor (17), be positioned between compensation mechanism top panel (27) and CMOS/CCD sensor fixation plate (15), compensation mechanism top panel (27) and CMOS/CCD sensor fixation plate (15) can move up and down.
5. high-accuracy grating scale rapid measurement device according to claim 1, it is characterized in that four positions on above-mentioned compensation mechanism top panel (27) and CMOS/CCD sensor fixation plate (15) diagonal line are set on four guide rails, compensation mechanism top panel (27) and CMOS/CCD sensor fixation plate (15) can move up and down along four guide rails, are equiped with the spring (23～26) being equiped with respectively for moving-limiting scope and weakening on four guide rails.
6. high-accuracy grating scale rapid measurement device according to claim 1, is characterized in that above-mentioned CMOS/CCD sensor array (1～4) is arranged symmetrically in the lower surface of CMOS/CCD array fixed head (15).
7. according to the high-accuracy grating scale rapid measurement device described in claim 1 to 6 any one, it is characterized in that above-mentioned CMOS/CCD sensor array (1～4) is ribbon and distributes, the center of each CMOS/CCD sensor array element is consistent to the height of the middle of the absolute encoding (7) of absolute grating scale (9), and each unit each other definitely side by side.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201420212991.5U CN203964869U (en) | 2014-04-28 | 2014-04-28 | A kind of high-accuracy grating scale rapid measurement device |
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| CN201420212991.5U CN203964869U (en) | 2014-04-28 | 2014-04-28 | A kind of high-accuracy grating scale rapid measurement device |
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| CN203964869U true CN203964869U (en) | 2014-11-26 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103983195A (en) * | 2014-04-28 | 2014-08-13 | 广东工业大学 | Device and method for rapid measurement of high-precision grating rulers |
| CN106533249A (en) * | 2016-12-05 | 2017-03-22 | 同济大学 | Online miniature vibration table |
| CN108827163A (en) * | 2018-09-10 | 2018-11-16 | 安徽工程大学 | Displacement measuring device based on image recognition |
-
2014
- 2014-04-28 CN CN201420212991.5U patent/CN203964869U/en not_active Withdrawn - After Issue
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103983195A (en) * | 2014-04-28 | 2014-08-13 | 广东工业大学 | Device and method for rapid measurement of high-precision grating rulers |
| CN103983195B (en) * | 2014-04-28 | 2016-03-23 | 广东工业大学 | A kind of high-accuracy grating scale rapid measurement device and method thereof |
| CN106533249A (en) * | 2016-12-05 | 2017-03-22 | 同济大学 | Online miniature vibration table |
| CN108827163A (en) * | 2018-09-10 | 2018-11-16 | 安徽工程大学 | Displacement measuring device based on image recognition |
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| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20141126 Effective date of abandoning: 20160323 |
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| C25 | Abandonment of patent right or utility model to avoid double patenting |