CN203274764U - Test platform for absolute grating ruler - Google Patents
Test platform for absolute grating ruler Download PDFInfo
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- CN203274764U CN203274764U CN 201220745523 CN201220745523U CN203274764U CN 203274764 U CN203274764 U CN 203274764U CN 201220745523 CN201220745523 CN 201220745523 CN 201220745523 U CN201220745523 U CN 201220745523U CN 203274764 U CN203274764 U CN 203274764U
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Abstract
The invention relates to a test platform for an absolute grating ruler. The test platform for the absolute grating ruler comprises a COMS sensor used for acquiring grating stripes, an optical focus lens, a COMS eye lens, a collimated light source, a grating ruler support, a double-grating-strip grating ruler, a grating ruler support, a mobile platform, a linear slide rail, a linear propulsion system, a stepping motor and a base, wherein a linear movement system is composed of the stepping motor, the linear propulsion system and the linear slide rail, and an acquiring system for processing images is composed of the COMS sensor, the optical focus lens, the COMS eye lens, the collimated light source and the double-grating-strip grating ruler. According to the test platform for the absolute grating ruler, accuracy and reliability of encoding measurement are improved, so that accurate positioning can be achieved. The test platform for the absolute grating ruler has the advantages of high accuracy, high controllability and high reliability. By adopting the structure of double encoding strips with optical enlargement, in addition, through reasonable and reliable image analysis and closed-loop control, mobility, reliability and accuracy of the grating ruler are greatly improved.
Description
Technical field
The utility model is a kind of absolute grating ruler test platform, belongs to the innovative technology of absolute grating ruler test platform.
Background technology
The principle of grating scale all is based on the Moire fringe that grating scale is interfered or diffraction produces.At first English physicist L.Rayleigh proposed the construction value of this pattern in 1874.The measuring principle of grating scale can be divided into based on image principle and principle of interference.Based on the grating scale of based on image principle, its pitch is generally larger, is 100 μ m to 20 μ m, much larger than the light source optical wavelength.Produce the low-frequency beat phenomenon and form Moire fringe when two blocks of gratings relatively move, the resolution of this grating scale is at micron order and submicron order.The grating scale that so no matter is based on based on image principle also is based on the grating scale of principle of interference, and both mentalities of designing all are based on 4 frequency multiplication mirror as technology.4 frequencys multiplication mirror are the 4 phase signals systems that nineteen fifty-three Britain Ferranti company proposes as technology, can realize 4 frequencys multiplication segmentations a Moire fringe cycle, and can differentiate moving direction, and it is the basis of optical grating measuring system, and widespread use always so far.4 this methods for designing of frequency doubling technology develop so far, although quite ripe, the part that comes with some shortcomings, such as principle is more numerous and diverse, the design comparison of circuit is complicated, requires also higher.
The development of China's grating digital readout technology is transformed traditional machine industry and is starting point from the eighties in last century take digital display technology, at present, be installed on the whole dependence on import of absolute grating scale that the advanced CNC closed-loop is used, this has become one of technology " bottleneck " that restricts China's high-grade, digitally controlled machine tools development.It is 3m that the maximum of domestic closed glass grating scale is measured length, accuracy has ± 15 μ m, ± 10 μ m, ± 5 μ m and ± 3 μ m, resolving power has 5 μ m, 1 μ m and 0.1 μ m, and speed is 60m/min, is mainly used in the hand digit display lathe.Realize the displacement measurement of range millimeters up to a hundred, nanometer resolution, only have part laser interference class and grating class displacement measuring instrument to be competent at.But laser interferometer is harsh to the requirement of environmental baseline, causes application limited.Though and the raster pattern length measuring apparatus has shaped article, mainly from offshore company, these products are not only expensive, and the high-precision product of part exists many restrictions to the sale of CHINESE REGION.
The grating scale technology begins to be partial to the absolute grating future development at present, because the specific coding technology that only possesses, the lathe of absolute grating scale or production line are installed be need not to carry out reference point and returns Z-operation after start again, just regain at once the current absolute position value of each axle and the spatial direction of cutter, therefore can begin to continue original job sequence from interruptions, improve widely effective process time of numerically-controlled machine at once.Simultaneously, in order to improve feeding speed, precision, the deformation of reply High-speed machining.Must take the lathe grating displacement sensor (grating scale) of closed loop to carry out position control.Adopting the position control of the lathe grating scale of closed-loop is the basis of Precision Machining platform, and closed loop system can improve machine tool accuracy and retentivity, makes industrialization be achieved.
Due to the complicacy of absolute position grating encoding, the complicacy of closed loop control algorithm, make the dual coding bar encode grating chi of closed-loop fail to develop on a large scale at home.
Summary of the invention
The purpose of this utility model is to consider the problems referred to above and the absolute grating ruler test platform of a kind of high precision, high controlled, high reliability is provided.The utility model is reasonable in design, and is convenient and practical.
the technical solution of the utility model is: absolute grating ruler test platform of the present utility model includes for the COMS sensor that gathers grating fringe, the optical focus mirror, the COMS eyepiece, source of parallel light, the grating scale support, double grating bar grating scale, the grating scale support, mobile platform, line slide rail, the linear advancement device, stepper motor, pedestal, wherein stepper motor, the linear advancement device, line slide rail forms linear motion system, COMS sensor, the optical focus mirror, the COMS eyepiece, the sampling system that source of parallel light and double grating bar grating scale composition diagram picture are processed, the COMS sensor that is used for the collection grating fringe is fixed on the upper end of COMS sensor stand, and source of parallel light is fixed on the lower end of COMS sensor stand, the optical focus mirror, the COMS eyepiece forms optical amplification system, optical focus mirror, the COMS eyepiece is placed in the top of the source of parallel light that directional light can be provided, and the COMS sensor is placed in and can collects through the optical focus mirror, on the position of COMS eyepiece enlarged image information, double grating bar grating scale is installed on the grating scale support, and double grating bar grating scale is placed between optical focus mirror and source of parallel light, the COMS sensor stand is installed on mobile platform, and mobile platform is placed on slide rail, slide rail and grating scale support are installed on pedestal, and line slide rail is connected with the driven member of linear advancement device, and the driving link of linear advancement device is connected with the output shaft of stepper motor.
Include two encoding strips on above-mentioned double grating bar grating scale, comprise incremental encoding bar and absolute position encoder bar; Above-mentioned incremental encoding bar is the large equidistant width gratings strips that waits of gap ratio absolute position encoder rod density.
Above-mentioned absolute position encoder bar comprises the L2 sequence reference position that the L1 sequence of primary importance location reference position is provided and second place location is provided; In above-mentioned L1 sequence reference position and L2 sequence reference position, each sequential coding bar comprises initial identification code, the efficient coding of specific coding bar and finishes identification code.
Above-mentioned initial identification code is that image is processed start signal, finishing identification code is to finish code identification, the efficient coding of specific coding bar is in initial identification code and finish between identification code, and width coding is used in the efficient coding of specific coding bar, comes mark different position by the width difference.
Above-mentioned absolute position encoder bar before through optical focus mirror, COMS eyepiece, will will form dark line striped and bright line striped in the lower end of optical focus mirror under the irradiation of source of parallel light, effective width is △ d1; On state the line striped clearly and finish the identification code left side and align, dark line striped with finish the identification code right-justification, to initial identification code no requirement (NR).
The utility model is owing to adopting stepper motor, linear advancement device, line slide rail to consist of linear motion system, cmos sensor, optical amplification system, source of parallel light and double grating bar grating scale are as the structure of the hardware sampling section of image processing, directional light arrives the COMS sensor through optical amplification system after seeing through grating scale, form light and dark dual coding stripe on the COMS sensor, comprising absolute position grating fringe and increment grating fringe.After the process Digital Image Processing, as the input signal of PID, PID exports to the straight line control system, forms a closed-loop and controls network.Locate as one-level owing to using absolute grating, the incremental optical grizzly bar is the secondary location, optical amplification system amplifies as signal lossless, locate as the third level, the COMS photosensitive unit fourth stage of operation maturation is located and is subdivided into picture, improve precision and the reliability of encoding measurement, made device accurately to locate.
The utility model compared with prior art has following advantage:
1) the utility model uses absolute position encoder bar encode grating chi, makes to collect at an arbitrary position image, and the location aware scope avoids getting back to original point position, response speed is promoted greatly and the reliability enhancing.
2) the utility model segments grating scale with the equidistant incremental optical grizzly bar of width that waits, accurate positioning, and precision improves.
3) the utility model has adopted optical amplification system, with the harmless amplification of grating, has made up the technologic deficiency of COMS, makes the graphical analysis input signal have the larger quantity of information of quantity of information, has improved resolving accuracy.
4) the utility model adopts the defective of having crossed COMS technique through the image after amplifying, and therefore uses the small size of semiconductor devices, further segments grating scale, obtains the high position encoded information of precision.
5) the utility model adopts the PID closed-loop to control, and makes grating scale system motion speed, acceleration, and response cycle and answering system deformation, external factor etc. have good characteristic.Improved the performance of grating scale.
6) the utility model provides a kind of image cutting mode of efficient error correction, can get rid of a large amount of interference, improves correct recognition rata.
7) the utility model is from principle, cleverly design and data process, signal analysis, make whole device have the premium properties such as high precision, height are controlled, high reliability.
The utility model is that a kind of design is ingenious, function admirable, convenient and practical absolute grating ruler test platform.
Description of drawings
Fig. 1 is the utility model absolute grating ruler test platform schematic diagram;
Fig. 2 is the utility model optical amplification system schematic diagram;
Fig. 3 is the utility model dual coding grating schematic diagram;
Fig. 4 is the utility model absolute position encoder structural representation;
Fig. 5 is the utility model incremental optical grizzly bar schematic diagram;
Fig. 6 is gratings strips and the COMS photosensitive unit distribution schematic diagram of the utility model optical amplifier.
Embodiment
Embodiment:
structural representation of the present utility model such as Fig. 1, 2, 3, shown in 4, absolute grating ruler test platform of the present utility model includes for the COMS sensor 1 that gathers grating fringe, optical focus mirror 2, COMS eyepiece 3, source of parallel light 4, grating scale support 5, double grating bar grating scale 6, grating scale support 7, mobile platform 8, line slide rail 9, linear advancement device 10, stepper motor 13, pedestal 14, wherein stepper motor 13, linear advancement device 10, line slide rail 9 forms linear motion system, COMS sensor 1, optical focus mirror 2, COMS eyepiece 3, the sampling system that source of parallel light 4 and double grating bar grating scale 6 composition diagram pictures are processed, the COMS sensor 1 that is used for the collection grating fringe is fixed on the upper end of COMS sensor stand 5, and source of parallel light 4 is fixed on the lower end of COMS sensor stand 5, optical focus mirror 2, COMS eyepiece 3 forms optical amplification system, optical focus mirror 2, COMS eyepiece 3 is placed in the top of the source of parallel light 4 that directional light can be provided, and COMS sensor 1 is placed in and can collects through optical focus mirror 2, on the position of COMS eyepiece 3 enlarged image information, double grating bar grating scale 6 is installed on grating scale support 7, and double grating bar grating scale 6 is placed between optical focus mirror 2 and source of parallel light 4, COMS sensor stand 5 is installed on mobile platform 8, and mobile platform 8 is placed on slide rail 9, slide rail 9 and grating scale support 7 are installed on pedestal 14, and line slide rail 9 is connected with the driven member of linear advancement device 10, and the driving link of linear advancement device 10 is connected with the output shaft of stepper motor 13.
Above-mentioned line slide rail 9 is helicoidal gear, and the screw rod of helicoidal gear is connected with the output shaft of stepper motor 13, and the nut of helicoidal gear is connected with line slide rail 9.
The screw rod of above-mentioned helicoidal gear is supported by bearing 11, and screw rod is connected with the output shaft of stepper motor 13 by shaft coupling 12.
Include two encoding strips on above-mentioned double grating bar grating scale 6, comprise incremental encoding bar 15 and absolute position encoder bar 16; Above-mentioned incremental encoding bar 15 is the large equidistant width gratings strips that wait of gap ratio absolute position encoder bar 16 density.
Above-mentioned absolute position encoder bar 16 comprises the L2 sequence reference position 18 that the L1 sequence of primary importance location reference position 17 is provided and second place location is provided; In above-mentioned L1 sequence reference position 17 and L2 sequence reference position 18, each sequential coding bar comprises initial identification code 19, specific coding bar efficient coding 20 and finishes identification code 21.
Above-mentioned initial identification code 19 is that image is processed start signal, finishing identification code 21 is to finish code identification, specific coding bar efficient coding 20 is between initial identification code 19 and end identification code 21, width codings are used in specific coding bar efficient coding 20, come mark different position by the width difference.
Above-mentioned incremental encoding bar 15 before through optical focus mirror 2, COMS eyepiece 3, will will form dark line striped 23 and bright line striped 24 in the lower end of optical focus mirror 2 under the irradiation of source of parallel light 4, effective width is △ d1; On state line striped 24 clearly and finish identification code 21 left sides and align, dark line striped 23 with finish identification code 21 right-justifications, to initial identification code 19 no requirement (NR)s.
The method of testing of absolute grating ruler test platform of the present utility model comprises the steps:
1) as shown in Figure 2, source of parallel light 4 parallel projection light will produce the picture of parallel primary optical axis during by double grating bar grating scale 6, at first this picture is dispersed after burnt f point place's formation optically focused again through optical focus mirror 2, therefore the picture through overfocus is amplified by COMS eyepiece 3 again, forms on the second plane of parallel primary optical axis the picture that amplifies.This step is tried to achieve the optical amplification system enlargement factor
2) COMS sensor 1 collects original image, and original image also has a large amount of noises, is unfavorable for the identification of image, and directly uses the second order laplace transform intolerable susceptibility to be arranged to noise.The use Gassian low-pass filter is soft and smooth, noise reduction.
3) after image noise reduction, in order to calculate the grating scale positional information by the pixel number, need to obtain the image border through laplace transform.
4) also exist after getting rid of noise can be by the damaged mistake that causes of grating scale part, we proposed the image error correction and the method for identification:
The image that gathers is carried out data projection in the grating scale parallel direction, and the section of the width maximum of fetching data is effectively district of coding, does not effectively enter subordinate's computing beyond the district, has interference will not affect system works.
Again data are gone projection in vertical raster chi direction, forward threshold values T+ is set, oppositely threshold values T-, only have data for projection thinking in the dark line of grating district more than T+, data for projection just thinks below T-in the bright line of grating district, detects to be mistake between T+T-, and system will give a warning.
By the error correcting system of this step, can realize the disturbed conditions such as slight damage or dust are carried out correcting data error, warn for the grating scale excessive damage.
5) obtain discernible image sequence through Nogata paddy thresholding image binaryzation again, finally identify the positional information in visible range.
6) as shown in Figure 3, COMS sensor 1 identifies L1 sequence reference position 17 and L2 sequence reference position 18, because these these positions have uniqueness in whole grating scale, therefore recognize the scope that to know the present position after the coding of adjacent encoder bar, do not need from returning the zero position calibration.Calculate the accuracy of detection 22 that is spaced apart the first order between L1 sequence reference position 17 and L2 sequence reference position 18.This step is tried to achieve the accuracy of detection 22 of the first order:
△L=L2-L1
7) as shown in Figure 3 and Figure 5, due to bright line striped 24 with finish identification code 21 left sides and align, dark line striped 23 with finish identification code 21 right-justifications, therefore after identifying L1 sequence reference position 17, what incremental optical grizzly bars are arranged, can obtain the position encoded of precision improvement.In adjacent L1 sequence reference position 17, insert n1 bright line striped 24 and n1 dark line striped 23 between L2 sequence reference position 18, in L1 sequence reference position 17, the lineal measure that effectively can differentiate between L2 sequence reference position is △ d1.This step is tried to achieve △ d1:
8) as shown in Figure 6, in order to increase the line measuring accuracy, the dark line striped 23 of increment grating and bright line striped 24 will amplify through optical amplification system, amplify dark line striped 25 in the formation of COMS eyepiece end, amplify dark line striped 26.The length of amplifying the picture of plaintext striped 26 and the dark line striped 25 of amplification becomes △ d2, and this step is tried to achieve △ d2:
9) as shown in Figure 6, after above-mentioned two encoding strips amplify in optical amplification system, segment the dark line striped 25 of amplification of an increment grating or amplify expressly striped 26 with COMS photosensitive unit 27, identifying position encoded that precision further promotes again.The dimension of COMS photosensitive unit is x, has n2 unit to drop on to amplify dark line striped 25 or to amplify the picture of striped 26 expressly upper, and this step is tried to achieve n2:
10) by above level Four segmentation, will greatly improve resolving accuracy.Detecting minimum dimension is △ d, and this step is tried to achieve △ d:
The dark line striped 23 that N black is arranged between the end identification code 21 of L1 sequence reference position 17 and L2 sequence reference position 18 detected when 11) image is processed, if shelter drops on dark line striped 23, and detecting to amplify between dark line striped 25 has K COMS photosensitive unit 27, the position of this moment
If shelter drops on bright line striped 24, and detect to amplify between bright line striped 26 and have K COMS photosensitive unit shelter to be detected, at this moment position
12) by the PID closed-loop control, feed back to motor control card, be used for controlling feeding rate.
Above-mentioned L1 sequence reference position 17 and L2 sequence reference position 18 and limited coded sequence not doing sign all comprise initial identification code 19, specific coding bar efficient coding 20 and finish identification code 21, use initial identification code 19 to process start signal to image, finish identification code 21 and finish code identification, thereby the specific coding bar efficient coding 20 in the middle of identifying, width coding is used in middle specific coding bar efficient coding 20.
Above-mentioned in adjacent L1 sequence reference position 17, insert n1 dark line striped 23 and n1 bright line striped 24 between L2 sequence reference position 18, in L1 sequence reference position 17, the lineal measure that effectively can differentiate between L2 sequence reference position 18 is
The dark line striped 23 that N black is arranged between the end identification code 21 of the above-mentioned L1 of detecting sequence reference position 17 and L2 sequence reference position 18, if shelter drops on dark line striped 23, and detecting to amplify between dark line striped 25 has K COMS photosensitive unit 27, the position of this moment
If shelter drops on bright line striped 24, and detect to amplify between bright line striped 26 and have K COMS photosensitive unit shelter to be detected, at this moment position
Claims (4)
1. an absolute grating ruler test platform, is characterized in that including the COMS sensor (1) for gathering grating fringe, optical focus mirror (2), COMS eyepiece (3), source of parallel light (4), grating scale support (5), double grating bar grating scale (6), grating scale support (7), mobile platform (8), line slide rail (9), linear advancement device (10), stepper motor (13), pedestal (14), wherein stepper motor (13), linear advancement device (10), line slide rail (9) forms linear motion system, COMS sensor (1), optical focus mirror (2), COMS eyepiece (3), the sampling system that source of parallel light (4) and double grating bar grating scale (6) composition diagram picture are processed, the COMS sensor (1) that is used for the collection grating fringe is fixed on the upper end of COMS sensor stand (5), source of parallel light (4) is fixed on the lower end of COMS sensor stand (5), optical focus mirror (2), COMS eyepiece (3) forms optical amplification system, optical focus mirror (2), COMS eyepiece (3) is placed in the top of the source of parallel light (4) that directional light can be provided, and COMS sensor (1) is placed in and can collects through optical focus mirror (2), on the position of COMS eyepiece (3) enlarged image information, double grating bar grating scale (6) is installed on grating scale support (7), and double grating bar grating scale (6) is placed between optical focus mirror (2) and source of parallel light (4), COMS sensor stand (5) is installed on mobile platform (8), and mobile platform (8) is placed on slide rail (9), slide rail (9) and grating scale support (7) are installed on pedestal (14), line slide rail (9) is connected with the driven member of linear advancement device (10), the driving link of linear advancement device (10) is connected with the output shaft of stepper motor (13).
2. absolute grating ruler test platform according to claim 1, it is characterized in that above-mentioned line slide rail (9) is helicoidal gear, the screw rod of helicoidal gear is connected with the output shaft of stepper motor (13), and the nut of helicoidal gear is connected with line slide rail (9).
3. absolute grating ruler test platform according to claim 2, it is characterized in that the screw rod of above-mentioned helicoidal gear is supported by bearing (11), and screw rod is connected with the output shaft of stepper motor (13) by shaft coupling (12).
4. the described absolute grating ruler test platform of according to claim 1 to 3 any one, is characterized in that including two encoding strips on above-mentioned double grating bar grating scale (6), comprises incremental encoding bar (15) and absolute position encoder bar (16); Above-mentioned incremental encoding bar (15) is the large equidistant width gratings strips that waits of gap ratio absolute position encoder bar (16) density.
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| CN 201220745523 CN203274764U (en) | 2012-12-28 | 2012-12-28 | Test platform for absolute grating ruler |
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| CN 201220745523 CN203274764U (en) | 2012-12-28 | 2012-12-28 | Test platform for absolute grating ruler |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103063239A (en) * | 2012-12-28 | 2013-04-24 | 广东工业大学 | Test platform and test method for absolute grating ruler |
| CN104048974A (en) * | 2014-05-28 | 2014-09-17 | 苏州科技学院 | Sheet-shaped shading material light leakage detection device based on avalanche diodes |
| CN108214620A (en) * | 2016-12-15 | 2018-06-29 | 浙江海洋大学 | Position correcting device again |
-
2012
- 2012-12-28 CN CN 201220745523 patent/CN203274764U/en not_active Withdrawn - After Issue
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103063239A (en) * | 2012-12-28 | 2013-04-24 | 广东工业大学 | Test platform and test method for absolute grating ruler |
| CN103063239B (en) * | 2012-12-28 | 2016-03-23 | 广东工业大学 | A kind of absolute grating ruler test platform and method of testing thereof |
| CN104048974A (en) * | 2014-05-28 | 2014-09-17 | 苏州科技学院 | Sheet-shaped shading material light leakage detection device based on avalanche diodes |
| CN108214620A (en) * | 2016-12-15 | 2018-06-29 | 浙江海洋大学 | Position correcting device again |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20131106 Effective date of abandoning: 20160323 |
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| C25 | Abandonment of patent right or utility model to avoid double patenting |