CN203960390U - A kind of furnace chamber for drawing silicon core - Google Patents
A kind of furnace chamber for drawing silicon core Download PDFInfo
- Publication number
- CN203960390U CN203960390U CN201420209095.3U CN201420209095U CN203960390U CN 203960390 U CN203960390 U CN 203960390U CN 201420209095 U CN201420209095 U CN 201420209095U CN 203960390 U CN203960390 U CN 203960390U
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- China
- Prior art keywords
- furnace chamber
- silicon core
- valve
- motor
- secondary furnace
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- Expired - Lifetime
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 49
- 230000000740 bleeding effect Effects 0.000 claims abstract description 11
- 239000002826 coolant Substances 0.000 claims description 5
- 230000008878 coupling Effects 0.000 claims description 4
- 238000010168 coupling process Methods 0.000 claims description 4
- 238000005859 coupling reaction Methods 0.000 claims description 4
- 239000003921 oil Substances 0.000 claims description 3
- 239000000446 fuel Substances 0.000 abstract description 12
- 238000010438 heat treatment Methods 0.000 abstract description 8
- 238000000034 method Methods 0.000 abstract description 6
- 208000002925 dental caries Diseases 0.000 abstract description 4
- 230000001681 protective effect Effects 0.000 abstract description 4
- 238000007664 blowing Methods 0.000 abstract description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 239000013078 crystal Substances 0.000 description 7
- 239000007789 gas Substances 0.000 description 5
- 239000007788 liquid Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000010791 quenching Methods 0.000 description 1
- 230000000171 quenching effect Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000013022 venting Methods 0.000 description 1
Landscapes
- Silicon Compounds (AREA)
Abstract
A kind of furnace chamber for drawing silicon core, relate to artificial lens field, the utility model by being provided with bleeding point (4) on described secondary furnace chamber (1), between secondary furnace chamber (1) and main furnace chamber (3), be provided with valve, realized in silicon core pulling process, the in the situation that of not blowing out, secondary furnace chamber and main furnace chamber are formed to two airtight cavitys, after secondary furnace chamber complete operation, again but to secondary furnace chamber is vacuumized, fill protective gas, when the pressure of main furnace chamber and secondary furnace chamber reaches balance, Open valve, make main furnace chamber and secondary furnace chamber form an airtight cavity, the utlity model has simple in structure, the feature such as easy to use, can complete operation without stopping the fuel rod just heating when needs take out the silicon core has drawn and change seed chuck, greatly improved the production efficiency of silicon core etc.
Description
[technical field]
The utility model relates to artificial lens field, relates in particular to a kind of furnace chamber, is specifically related to a kind of furnace chamber for drawing silicon core.
[background technology]
Known, silicon core stove is widely used in artificial lens field as the drawing device of silicon core, and the drawing of silicon core need to be carried out in airtight furnace chamber, because the height of furnace chamber is higher, in order to facilitate processing, installation and the transportation of furnace chamber, as shown in Figure 1, furnace chamber need to be divided into secondary furnace chamber 1 and main furnace chamber 3, secondary furnace chamber 1 and main furnace chamber 3 are connected to form to an airtight cavity, then wear ring A2 are set between secondary furnace chamber 1 and main furnace chamber 3 and form an airtight cavity, before drawing silicon core, to complete shove charge, vacuumize, fill protective gas, to operations such as fuel rod heating, then after melt fuel rod termination, utilize seed chuck to drive seed crystal to decline, seed crystal is inserted into the liquid that melts of fuel rod through the drawing hole of radio-frequency coil, when the termination of seed crystal with melt liquid and combine together after, by seed chuck, drive seed crystal rising, make to melt drawing hole the crystallization that liquid departs from radio-frequency coil gradually, yet in the process of actual drawing silicon core, because seed crystal is loosening, or drawn after one group of silicon core need to take out silicon core and changed seed chuck, or the upper axle jacking system of the silicon core stove situation such as break down, in order to prevent that fuel rod is because quenching is burst apart, all need first to reduce gradually the Heating temperature of radio-frequency coil to fuel rod, after radio-frequency coil stops fuel rod heating, after the upper end naturally cooling of fuel rod, just can open furnace chamber, then carry out the fastening of seed crystal or take out the silicon core drawn or upper axle jacking system overhauled etc., when carrying out secondary drawing, need to again vacuumize, fill protective gas, to operations such as fuel rod heating, reduced production efficiency etc.
[summary of the invention]
In order to realize described goal of the invention, the utility model provides a kind of furnace chamber for drawing silicon core, the utility model by arranging valve between secondary furnace chamber and main furnace chamber, realized in silicon core pulling process, the in the situation that of not blowing out, fast secondary furnace chamber and main furnace chamber are formed to two airtight cavitys, the utlity model has the features such as simple in structure, easy to use.
For achieving the above object, the utility model adopts following technical scheme:
For a furnace chamber for drawing silicon core, comprise secondary furnace chamber, main furnace chamber, bleeding point and valve, on described secondary furnace chamber, be provided with bleeding point, between secondary furnace chamber and main furnace chamber, be provided with valve and form the described furnace chamber for drawing silicon core.
The described furnace chamber for drawing silicon core, is provided with wear ring A between described valve and main furnace chamber and secondary furnace chamber.
The described furnace chamber for drawing silicon core, is provided with lower rebound between described valve and main furnace chamber, and described lower rebound is provided with through hole, between lower rebound and main furnace chamber, is provided with wear ring A.
The described furnace chamber for drawing silicon core, is provided with cooling medium pass in described lower rebound.
The described furnace chamber for drawing silicon core, is provided with rebound between described valve and secondary furnace chamber, and described upper rebound is provided with through hole, between upper rebound and secondary furnace chamber, is provided with wear ring A.
The described furnace chamber for drawing silicon core, is provided with cushion block between described upper rebound and lower rebound.
The described furnace chamber for drawing silicon core, the handle of described valve connects electro-motor or pneumatic motor or oil motor or handwheel.
The described furnace chamber for drawing silicon core, described electro-motor is motor, and one end of described motor connects the handle of valve, and the other end of motor connects handwheel, between described handwheel and motor, is provided with clutch coupling.
The described furnace chamber for drawing silicon core, described valve comprises push-pull valve or butterfly valve or flap valve.
Owing to adopting technical scheme as above, the utlity model has following beneficial effect:
A kind of furnace chamber for drawing silicon core described in the utility model, the utility model by arranging valve between secondary furnace chamber and main furnace chamber, realized in silicon core pulling process, the in the situation that of not blowing out, secondary furnace chamber and main furnace chamber are formed to two airtight cavitys, after secondary furnace chamber complete operation, again but to secondary furnace chamber is vacuumized, fill protective gas, when the pressure of main furnace chamber and secondary furnace chamber reaches balance, Open valve, make main furnace chamber and secondary furnace chamber form an airtight cavity, the utlity model has simple in structure, the feature such as easy to use, can complete operation without stopping the fuel rod just heating when needs take out the silicon core has drawn and change seed chuck, greatly improved the production efficiency of silicon core etc.
[accompanying drawing explanation]
Fig. 1 is the structural representation of existing silicon core furnace chamber;
Fig. 2 is structural representation of the present utility model;
In figure: 1, secondary furnace chamber; 2, wear ring A; 3, main furnace chamber; 4, bleeding point; 5, push-pull valve; 6, cushion block; 7, cooling medium pass; 8, upper rebound; 9, wear ring B; 10, motor; 11, clutch coupling; 12, handwheel; 13, lower rebound.
[embodiment]
By the following examples, can explain in more detail the utility model, open the purpose of this utility model is intended to protect all changes and improvements within the scope of the utility model, and the utility model is not limited to the following examples;
A kind of furnace chamber for drawing silicon core described in 2 by reference to the accompanying drawings, comprise secondary furnace chamber 1, main furnace chamber 3, bleeding point 4 and valve, described valve comprises push-pull valve 5 or butterfly valve or flap valve, preferred push-pull valve 5 wherein, take push-pull valve 5 as example, on described secondary furnace chamber 1, be provided with bleeding point 4, described bleeding point 4 connects vacuum pump by pipeline, on the top of secondary furnace chamber 1, be provided with the fire door with folding function, on described main furnace chamber 3, be respectively equipped with the fire door with folding function, for the concentric cable entrance of concentric cable is installed, for observing the sight glass of fuel rod melting state and silicon core as drawn condition, venting port for exhaust, for the inflation inlet inflated with for the bleeding point of bleeding etc.,
Further, in order to realize the switching that furnace chamber is realized to an airtight furnace chamber and two airtight furnace chambers, between secondary furnace chamber 1 and main furnace chamber 3, be provided with push-pull valve 5, then between push-pull valve 5 and main furnace chamber 3 and secondary furnace chamber 1, be provided with wear ring A2;
In order better to implement the utility model, the utility model is provided with lower rebound 13 between push-pull valve 5 and main furnace chamber 3, described lower rebound 13 is provided with the through hole of corresponding push-pull valve 5 openings, wherein due to lower rebound 13 and push-pull valve 5 from the heating zone of radio-frequency coil close to, now in order to protect push-pull valve 5, in lower rebound 13, be provided with cooling medium pass 7, in described cooling medium pass 7, pass into mobile heat-eliminating medium; The utility model, in implementation process, in order to make furnace chamber have better sealing, is provided with wear ring A2 between described lower rebound 13 and main furnace chamber 3, between lower rebound 13 and push-pull valve 5, wear ring B9 is set;
Further, between push-pull valve 5 described in the utility model and secondary furnace chamber 1, be provided with rebound 8, described upper rebound 8 is provided with the through hole of corresponding push-pull valve 5 openings, in order to make furnace chamber there is better sealing, between described upper rebound 8 and secondary furnace chamber 1, be provided with wear ring A2, between upper rebound 8 and push-pull valve 5, wear ring B9 be set;
Further, in order to improve the strength of joint between secondary furnace chamber 1 and main furnace chamber 3, reduce the stressed of push-pull valve 5 simultaneously, between upper rebound 8 and lower rebound 13, be provided with cushion block 6;
Further, the handle of push-pull valve 5 described in the utility model connects electro-motor or pneumatic motor or oil motor or handwheel 12, wherein said electro-motor is motor 10, one end of described motor 10 connects the handle of push-pull valve 5, the other end of motor 10 connects handwheel 12, is provided with clutch coupling 11 and forms the described furnace chamber for drawing silicon core between described handwheel 12 and motor 10.
Concrete operation method of the present utility model is:
The first step, after silicon core has drawn, in the situation that not stopping fuel rod heating, close the valve between main furnace chamber 3 and secondary furnace chamber 1, make main furnace chamber 3 and secondary furnace chamber 1 form two airtight cavitys;
Second step, on the basis of the first step, gas in secondary furnace chamber 1 is discharged, the fire door on open auxiliary furnace chamber 1 then, takes out and reapposes one group of new seed crystal after the silicon core having drawn and arrive in secondary furnace chamber 1, closes fire door;
The 3rd step, on the basis of second step, to secondary furnace chamber 1 vacuumize, applying argon gas, when secondary furnace chamber 1 and pressure in main furnace chamber 3 reach balance, Open valve, make secondary furnace chamber 1 and main furnace chamber 3 form a whole cavity, now can again start the drawing of silicon core.
In above content, carefully do not state part for prior art, therefore run business into particular one, do not state.
The embodiment selecting in this article for open the purpose of this utility model, currently thinks suitablely, still, will be appreciated that, the utility model is intended to comprise that all belong to all changes and the improvement of the embodiment in this design and invention scope.
Claims (9)
1. the furnace chamber for drawing silicon core, comprise secondary furnace chamber (1), main furnace chamber (3), bleeding point (4) and valve, it is characterized in that: on described secondary furnace chamber (1), be provided with bleeding point (4), between secondary furnace chamber (1) and main furnace chamber (3), be provided with valve and form the described furnace chamber for drawing silicon core.
2. the furnace chamber for drawing silicon core according to claim 1, is characterized in that: between described valve and main furnace chamber (3) and secondary furnace chamber (1), be provided with wear ring A (2).
3. the furnace chamber for drawing silicon core according to claim 1, it is characterized in that: between described valve and main furnace chamber (3), be provided with lower rebound (13), described lower rebound (13) is provided with through hole, between lower rebound (13) and main furnace chamber (3), is provided with wear ring A (2).
4. the furnace chamber for drawing silicon core according to claim 3, is characterized in that: in described lower rebound (13), be provided with cooling medium pass (7).
5. the furnace chamber for drawing silicon core according to claim 1, it is characterized in that: between described valve and secondary furnace chamber (1), be provided with rebound (8), described upper rebound (8) is provided with through hole, between upper rebound (8) and secondary furnace chamber (1), is provided with wear ring A (2).
6. the furnace chamber for drawing silicon core according to claim 5, is characterized in that: between described upper rebound (8) and lower rebound (13), be provided with cushion block (6).
7. the furnace chamber for drawing silicon core according to claim 1, is characterized in that: the handle of described valve connects electro-motor or pneumatic motor or oil motor or handwheel (12).
8. the furnace chamber for drawing silicon core according to claim 7, it is characterized in that: described electro-motor is motor (10), one end of described motor (10) connects the handle of valve, the other end of motor (10) connects handwheel (12), between described handwheel (12) and motor (10), is provided with clutch coupling (11).
9. the furnace chamber for drawing silicon core according to claim 1, is characterized in that: described valve comprises push-pull valve (5) or butterfly valve or flap valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420209095.3U CN203960390U (en) | 2014-04-21 | 2014-04-21 | A kind of furnace chamber for drawing silicon core |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420209095.3U CN203960390U (en) | 2014-04-21 | 2014-04-21 | A kind of furnace chamber for drawing silicon core |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203960390U true CN203960390U (en) | 2014-11-26 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420209095.3U Expired - Lifetime CN203960390U (en) | 2014-04-21 | 2014-04-21 | A kind of furnace chamber for drawing silicon core |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203960390U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103993350A (en) * | 2014-04-21 | 2014-08-20 | 洛阳金诺机械工程有限公司 | Silicon core drawing furnace chamber |
-
2014
- 2014-04-21 CN CN201420209095.3U patent/CN203960390U/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103993350A (en) * | 2014-04-21 | 2014-08-20 | 洛阳金诺机械工程有限公司 | Silicon core drawing furnace chamber |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20141126 |
|
| CX01 | Expiry of patent term |