CN203960318U - A kind of equipment of Vacuum Deposition combined type polyphenylene ethyl functional membrane - Google Patents
A kind of equipment of Vacuum Deposition combined type polyphenylene ethyl functional membrane Download PDFInfo
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- CN203960318U CN203960318U CN201420343149.5U CN201420343149U CN203960318U CN 203960318 U CN203960318 U CN 203960318U CN 201420343149 U CN201420343149 U CN 201420343149U CN 203960318 U CN203960318 U CN 203960318U
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Abstract
The utility model relates to electroplating technology field, refers in particular to a kind of equipment of Vacuum Deposition combined type polyphenylene ethyl functional membrane, includes sediment chamber, and described sediment chamber at least connects a road evaporation cracking feeding sedimentation unit He Yi road powder atomization feeding sedimentation unit; Described evaporation cracking feeding sedimentation unit is at least comprised of evaporator room, cracking room and the first vacuum pump, and the output terminal of cracking room connects sediment chamber; Described powder atomization feeding sedimentation unit is at least comprised of fluidized-bed and nozzle, and nozzle is arranged in sediment chamber, and sediment chamber is communicated with the second vacuum pump.The utility model designs connection sediment chamber, multiple feed unit side by side, need not carry out modification to raw material, product is directly compounded in nano-powder in parylene film by suction type in sediment chamber, form combined type polyphenylene ethyl functional membrane, make it have anti-microbial property, far infrared and resistance to marquis's function etc.; Simple in structure, scientific and reasonable, to make easily, cost of investment is low, meets industry utilization, widely applicable.
Description
Technical field
The utility model relates to electroplating technology field, refers in particular to a kind of polyphenylene ethyl functional membrane deposition apparatus.
Background technology
Polyphenylene ethyl (parylene) has good protective and insulativity and biocompatibility, and it is complete coated prod in vacuum environment, forms a complete protection.For current processing procedure, the method that forms parylene film is generally chemical Vapor deposition process.First, pulverous polyphenylene ethyl is placed in to evaporator room, and is heated to 150 ℃ so that the vaporization of pulverous polyphenylene ethyl.Then, polyphenylene ethyl gas is sent to cracking room, and is heated to 650 ℃ to carry out cracking.Afterwards, polyphenylene ethyl monomer is transmitted to sediment chamber, and be deposited on substrate.But traditional polyphosphazene polymer only has an evaporation cavity to dimethyl benzene depositing system, generally can only deposit the poly-to dimethyl benzene film of a kind of molecular structure, can not deposit compound poly-to dimethyl benzene waterproof membrane.Conventional polyphenylene ethyl raw material model is divided into N-type, C type and D type at present, these various types of molecule substituting groups are different, determined the difference of the aspects such as its thermal stability and insulating property, but they do not possess anti-microbial property, far infrared and resistance to marquis's function.
Along with the requirement of Application Areas is more and more tighter, having functional parylene film becomes a kind of trend.People have carried out a large amount of research for this reason, are mainly by polyphenylene ethyl raw material is carried out to modification at present, make it be with specific functional group, obtain certain specific character, but this is to raw material, preparation proposes harsh requirement, and R&D costs are high and the cycle is long.
For this reason, the spirit that the applicant is adhering to research and innovation, keeping on improving, utilizes its professional eye and expertise, works out a kind of equipment of Vacuum Deposition combined type polyphenylene ethyl functional membrane.
Summary of the invention
The purpose of this utility model is to overcome the defect of prior art, provide a kind of simple in structure, the equipment of easy-operating Vacuum Deposition combined type polyphenylene ethyl functional membrane, need not carry out modification to raw material, product is directly compounded in nano-powder in parylene film by suction type in sediment chamber, form combined type polyphenylene ethyl functional membrane, make it have anti-microbial property, far infrared and resistance to marquis's function etc.
For achieving the above object, the utility model adopts following technical scheme:
An equipment for Vacuum Deposition combined type polyphenylene ethyl functional membrane, includes sediment chamber, and described sediment chamber at least connects a road evaporation cracking feeding sedimentation unit He Yi road powder atomization feeding sedimentation unit; Described evaporation cracking feeding sedimentation unit is at least comprised of evaporator room, cracking room and the first vacuum pump, and the output terminal of cracking room connects sediment chamber; Described powder atomization feeding sedimentation unit is at least comprised of fluidized-bed and nozzle, and nozzle is arranged in sediment chamber, and sediment chamber is communicated with the second vacuum pump.
Such scheme is further: in described sediment chamber, be provided with pivoted frame, nozzle stationary distribution is in pivoted frame periphery.
The utility model designs connection sediment chamber, multiple feed unit side by side, need not carry out modification to raw material, product is directly compounded in nano-powder in parylene film by suction type in sediment chamber, form combined type polyphenylene ethyl functional membrane, make it have anti-microbial property, far infrared and resistance to marquis's function etc.Simple in structure, scientific and reasonable, to make easily, cost of investment is low, easy to use, meets industry utilization, widely applicable.
accompanying drawing explanation:
Accompanying drawing 1 is the utility model preferred embodiment structural representation.
embodiment:
Below in conjunction with accompanying drawing, the utility model is further illustrated:
Consult shown in Fig. 1, the utility model, about a kind of equipment of Vacuum Deposition combined type polyphenylene ethyl functional membrane, includes sediment chamber 1, and described sediment chamber 1 at least connects road evaporation cracking feeding sedimentation unit 2 He Yi road powder atomization feeding sedimentation units 3; Described evaporation cracking feeding sedimentation unit 2 is at least comprised of evaporator room 21, cracking room 22 and the first vacuum pump 23, and the output terminal of cracking room 22 connects sediment chamber 1; Described powder atomization feeding sedimentation unit 3 is at least comprised of fluidized-bed 31 and nozzle 32, and nozzle 32 is arranged in sediment chamber 1, and sediment chamber 1 is communicated with the second vacuum pump 4.In the present embodiment, in described sediment chamber 1, be provided with pivoted frame 11, facilitate workpiece to place deposition process, nozzle 32 stationary distribution, in pivoted frame 11 peripheries, obtain multi-angle and spray deposition, make workpiece surface deposition more even.
During work, sediment chamber 1 is by the second vacuum pump 4 acquisition vacuum state of bleeding, 21 pairs of corresponding polyphenylene ethyls heating vaporizations of the evaporator room of evaporation cracking feeding sedimentation unit 2; Then flow to cracking room 22, the polyphenylene ethyl of 22 pairs of vaporizations of cracking room carries out cracking, afterwards, polyphenylene ethyl monomer is transmitted in sediment chamber 1 and deposits film forming, and the first 23, vacuum pump vacuumizes evaporator room 21 and cracking room 22, to work under vacuum environment.And powder atomization feeding sedimentation unit 3 is to utilize fluidized-bed 31 by nano-powder particles steam state, then spray by nozzle 32, be deposited on film forming on workpiece surface.
The utility model designs connection sediment chamber, multiple feed unit side by side, need not carry out modification to raw material, product is directly compounded in nano-powder in parylene film by suction type in sediment chamber, form combined type polyphenylene ethyl functional membrane, make it have anti-microbial property, far infrared and resistance to marquis's function etc.Simple in structure, scientific and reasonable, to make easily, cost of investment is low, easy to use, meets industry utilization, widely applicable.
Certainly; above combination embodiment describes in detail the utility model; be only explanation technical conceive of the present utility model and feature; its object is to allow person skilled in the art understand content of the present utility model and implemented; can not limit protection domain of the present utility model with this; all equivalences of doing according to the utility model spirit change or modify, and all should be encompassed in protection domain of the present utility model.
Claims (2)
1. an equipment for Vacuum Deposition combined type polyphenylene ethyl functional membrane, includes sediment chamber (1), it is characterized in that: described sediment chamber (1) at least connects road evaporation cracking feeding sedimentation unit (2) He Yi road powder atomization feeding sedimentation unit (3); Described evaporation cracking feeding sedimentation unit (2) is at least comprised of evaporator room (21), cracking room (22) and the first vacuum pump (23), and the output terminal of cracking room (22) connects sediment chamber (1); Described powder atomization feeding sedimentation unit (3) is at least comprised of fluidized-bed (31) and nozzle (32), and nozzle (32) is arranged in sediment chamber (1), and sediment chamber (1) is communicated with the second vacuum pump (4).
2. the equipment of a kind of Vacuum Deposition combined type polyphenylene ethyl functional membrane according to claim 1, is characterized in that: in described sediment chamber (1), be provided with pivoted frame (11), nozzle (32) stationary distribution is in pivoted frame (11) periphery.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420343149.5U CN203960318U (en) | 2014-06-26 | 2014-06-26 | A kind of equipment of Vacuum Deposition combined type polyphenylene ethyl functional membrane |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420343149.5U CN203960318U (en) | 2014-06-26 | 2014-06-26 | A kind of equipment of Vacuum Deposition combined type polyphenylene ethyl functional membrane |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203960318U true CN203960318U (en) | 2014-11-26 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201420343149.5U Expired - Fee Related CN203960318U (en) | 2014-06-26 | 2014-06-26 | A kind of equipment of Vacuum Deposition combined type polyphenylene ethyl functional membrane |
Country Status (1)
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| CN (1) | CN203960318U (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104878345A (en) * | 2015-06-16 | 2015-09-02 | 广东易能纳米科技有限公司 | Nano-material vacuum coating machine |
| CN105369219A (en) * | 2015-10-30 | 2016-03-02 | 北京自动化控制设备研究所 | Relaxation resistance coating method for magnetic resonance air chamber |
| CN106811723A (en) * | 2015-12-29 | 2017-06-09 | 广东易能纳米科技有限公司 | A kind of preparation method of automobile nano water-proof film |
| CN106811720A (en) * | 2015-12-29 | 2017-06-09 | 广东易能纳米科技有限公司 | A kind of preparation method of circuit board nano water-proof film |
| CN106811733A (en) * | 2015-12-29 | 2017-06-09 | 广东易能纳米科技有限公司 | A kind of preparation method of the nano water-proof film of Intelligent worn device |
| CN109621015A (en) * | 2019-01-09 | 2019-04-16 | 上海派拉纶生物技术股份有限公司 | A kind of production method of the multifunctional protection coating of medical instrument and medical supplies |
| CN112055623A (en) * | 2018-04-27 | 2020-12-08 | 雷神公司 | Uniform thin film deposition for parylene |
| CN114246026A (en) * | 2021-11-25 | 2022-03-29 | 北京胜泰东方科技有限公司 | Method and apparatus for coating and storing low-moisture seeds |
-
2014
- 2014-06-26 CN CN201420343149.5U patent/CN203960318U/en not_active Expired - Fee Related
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104878345A (en) * | 2015-06-16 | 2015-09-02 | 广东易能纳米科技有限公司 | Nano-material vacuum coating machine |
| CN105369219B (en) * | 2015-10-30 | 2018-07-10 | 北京自动化控制设备研究所 | A kind of anti-relaxation film plating process of magnetic resonance gas chamber |
| CN105369219A (en) * | 2015-10-30 | 2016-03-02 | 北京自动化控制设备研究所 | Relaxation resistance coating method for magnetic resonance air chamber |
| CN106811723B (en) * | 2015-12-29 | 2019-02-05 | 广东易能纳米科技有限公司 | A kind of preparation method of automobile nano water-proof film |
| CN106811733A (en) * | 2015-12-29 | 2017-06-09 | 广东易能纳米科技有限公司 | A kind of preparation method of the nano water-proof film of Intelligent worn device |
| CN106811720A (en) * | 2015-12-29 | 2017-06-09 | 广东易能纳米科技有限公司 | A kind of preparation method of circuit board nano water-proof film |
| CN106811723A (en) * | 2015-12-29 | 2017-06-09 | 广东易能纳米科技有限公司 | A kind of preparation method of automobile nano water-proof film |
| CN106811720B (en) * | 2015-12-29 | 2019-05-17 | 广东易能纳米科技有限公司 | A kind of preparation method of circuit board nano water-proof film |
| CN106811733B (en) * | 2015-12-29 | 2019-07-16 | 广东易能纳米科技有限公司 | A kind of preparation method of the nano water-proof film of intelligent wearable device |
| CN112055623A (en) * | 2018-04-27 | 2020-12-08 | 雷神公司 | Uniform thin film deposition for parylene |
| CN112055623B (en) * | 2018-04-27 | 2023-07-25 | 雷神公司 | Uniform film deposition for parylene |
| CN109621015A (en) * | 2019-01-09 | 2019-04-16 | 上海派拉纶生物技术股份有限公司 | A kind of production method of the multifunctional protection coating of medical instrument and medical supplies |
| CN114246026A (en) * | 2021-11-25 | 2022-03-29 | 北京胜泰东方科技有限公司 | Method and apparatus for coating and storing low-moisture seeds |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20141126 Termination date: 20190626 |