CN203954987U - The device of comprehensive utilization MOCVD equipment tail gas - Google Patents
The device of comprehensive utilization MOCVD equipment tail gas Download PDFInfo
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- CN203954987U CN203954987U CN201420277522.1U CN201420277522U CN203954987U CN 203954987 U CN203954987 U CN 203954987U CN 201420277522 U CN201420277522 U CN 201420277522U CN 203954987 U CN203954987 U CN 203954987U
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Abstract
The utility model provides a kind of device of the MOCVD of comprehensive utilization equipment tail gas, the tail gas of MOCVD enters low pressure buffer tank by pipeline, low pressure buffer tank is connected in high-pressure buffering pot by compressor, high-pressure buffering pot pipeline is connected on pre-cool exchanger, pre-cool exchanger lower channel is connected with low-temperature condenser, low-temperature condenser below pipeline is connected with gas-liquid separator, the lower end of gas-liquid separator is connected with liquefied ammonia storage tank by ammonia pump, top pipeline is connected on molecular sieve adsorption post, molecular sieve adsorption post upper end is connected on pressure-variable adsorption post, pressure-variable adsorption column jecket road is connected in hydrogen-holder.The utility model is simple in structure, can effectively separate MOCVD tail gas, and liquefied ammonia and hydrogen are recovered, and can be applied directly to other industry, and nitrogen can directly discharge, and comprehensive utilization ratio is high, and there is no the problem of safety and environmental protection.
Description
Technical field
The utility model relates to a kind of gas fractionation unit, relates in particular to a kind of device for the separation of MOCVD equipment tail gas and integrated application.
Background technology
MOCVD equipment has wide application at aspects such as LED illumination, blue-green Laser, solar cells.The MOCVD equipment of present stage need to be applied a large amount of gas, comprises hydrogen, nitrogen, high-purity ammonia etc.Because equipment is extremely low to the comprehensive utilization ratio of gas, general 99% gas, all by exhaust emissions, is made a low multiple use, and hydrogen has inflammable and explosive characteristic, and ammonia has corrosivity and toxicity, large to ambient influnence, and potential safety hazard is high, and vent gas treatment difficulty is large.
Existing using method shortcoming: conventional method is with the ammonia in diluted acid or pure water absorption tail gas at present, forms ammoniacal liquor or ammonium salt.The method forms a large amount of waste water containing ammonia nitrogen, large to ambient influnence.And hydrogen directly discharges by chimney, there is potential safety hazard.
Utility model content
The purpose of this utility model is to provide a kind of device of the MOCVD of comprehensive utilization equipment tail gas, by the effective separation to MOCVD tail gas, fully utilizes.
The utility model provides a kind of device of the MOCVD of comprehensive utilization equipment tail gas, the tail gas of MOCVD enters low pressure buffer tank by pipeline, low pressure buffer tank is connected in high-pressure buffering pot by compressor, high-pressure buffering pot pipeline is connected on pre-cool exchanger, pre-cool exchanger lower channel is connected with low-temperature condenser, low-temperature condenser below pipeline is connected with gas-liquid separator, the lower end of gas-liquid separator is connected with liquefied ammonia storage tank by ammonia pump, top pipeline is connected on molecular sieve adsorption post, molecular sieve adsorption post upper end is connected on pressure-variable adsorption post, pressure-variable adsorption column jecket road is connected in hydrogen-holder.
Further improvement of the utility model is: between described low pressure buffer tank and compressor, particulate filter is set.
Further improvement of the utility model is: described gas-liquid separator top pipeline is connected in pre-cool exchanger, and precooling exchanger pipe is connected on molecular sieve adsorption post, after gas is heated up, separates again.
The beneficial effect of utility model: high-pressure buffering pot is by pre-cool exchanger, low-temperature condenser, liquefies the component in gas, and by carry out a gas-liquid separation by gas-liquid separator, liquefied ammonia adds liquefied ammonia storage tank through ammonia pump, is applied directly to afterwards by analysis other industry.After gas-liquid separator separates gas by molecular sieve adsorption post enter pressure-variable adsorption post carry out secondary gas gas separate; Gas part is removed a small amount of ammonia in gas through molecular sieve adsorption column after pre-cool exchanger heats up, and then carries out separating of hydrogen and nitrogen through pressure-variable adsorption post, and hydrogen is squeezed into hydrogen-holder after collecting, and nitrogen can directly discharge.By setting up particulate filter at compressor front end, effectively remove the particulate solid in tail gas.Gas is through secondary separation, and the ammonia in main component and hydrogen are effectively collected, and because system is airtight and separative efficiency is high, the gas purity after separation is very high, and the raw material that can be used as other industry directly utilize.
The utility model is simple in structure, can effectively separate MOCVD tail gas, and liquefied ammonia and hydrogen are recovered, and can be applied directly to other industry, and nitrogen can directly discharge, and comprehensive utilization ratio is high, and there is no the problem of safety and environmental protection.
Brief description of the drawings
Fig. 1 is a kind of structural representation of the present utility model.
Fig. 2 is another kind of structural representation of the present utility model.
Wherein: 1-low pressure buffer tank, 2-compressor, 3-high-pressure buffering pot, the pre-cool exchanger of 4-, 5-low-temperature condenser, 6-gas-liquid separator, 7-ammonia pump, 8-liquefied ammonia storage tank, 9-molecular sieve adsorption post, 10-pressure-variable adsorption post, 11-hydrogen-holder, 12-particulate filter.
Detailed description of the invention
In order to deepen understanding of the present utility model, below in conjunction with embodiment, the utility model is described in further detail, and this embodiment only, for explaining the utility model, does not form the restriction to the utility model protection domain.
Embodiment 1
As shown in Figure 1, the present embodiment provides a kind of device of the MOCVD of comprehensive utilization equipment tail gas, the tail gas of MOCVD enters low pressure buffer tank 1 by pipeline, low pressure buffer tank 1 is connected in high-pressure buffering pot 3 by compressor 2, high-pressure buffering pot 3 pipelines are connected on pre-cool exchanger 4, pre-cool exchanger 4 lower channel are connected with low-temperature condenser 5, low-temperature condenser 5 below pipelines are connected with gas-liquid separator 6, the lower end of gas-liquid separator 6 is connected with liquefied ammonia storage tank 8 by ammonia pump 7, top pipeline is connected on molecular sieve adsorption post 9, molecular sieve adsorption post 9 upper ends are connected on pressure-variable adsorption post 10, pressure-variable adsorption post 10 pipelines are connected in hydrogen-holder 11.Between described low pressure buffer tank 1 and compressor 2, particulate filter 12 is set.
Embodiment 2
As shown in Figure 2, the present embodiment provides a kind of device of the MOCVD of comprehensive utilization equipment tail gas, the tail gas of MOCVD enters low pressure buffer tank 1 by pipeline, low pressure buffer tank 1 is connected in high-pressure buffering pot 3 by compressor 2, high-pressure buffering pot 3 pipelines are connected on pre-cool exchanger 4, pre-cool exchanger 4 lower channel are connected with low-temperature condenser 5, low-temperature condenser 5 below pipelines are connected with gas-liquid separator 6, the lower end of gas-liquid separator 6 is connected with liquefied ammonia storage tank 8 by ammonia pump 7, top is connected on molecular sieve adsorption post 9 by pre-cool exchanger 4 pipelines again, after being heated up, gas separates again, molecular sieve adsorption post 9 upper ends are connected on pressure-variable adsorption post 10, pressure-variable adsorption post 10 pipelines are connected in hydrogen-holder 11.Between described low pressure buffer tank 1 and compressor 2, particulate filter 12 is set.
The tail gas of MOCVD enters low pressure buffer tank 1 by pipeline, enter high-pressure buffering pot 3 by particulate filter 12 and compressor 2, after pressurization, gas is fully lowered the temperature by pre-cool exchanger 4 and low-temperature condenser 5, ammonia liquefies in a large number, the ammonia of hydrogen and nitrogen and minute quantity is still in gaseous state, and low-temperature condenser 5 is inputted gas-liquid separator 6 by gas and the liquid of fully cooling by pipeline.The liquefied ammonia that is positioned at bottom in gas-liquid separation pump 6 adds liquefied ammonia storage tank 8 through ammonia pump 7, is applied directly to afterwards by analysis other industry; The gas part that is positioned at top in gas-liquid separation pump 6 enters pre-cool exchanger 4 by pipeline again, after heating up, pre-cool exchanger 4 removes a small amount of ammonia in gas through molecular sieve adsorption column 9, then carry out separating of hydrogen and nitrogen through pressure-variable adsorption post 10, hydrogen is squeezed into hydrogen-holder 11 after collecting, and nitrogen directly discharges.
Claims (3)
1. one kind can fully utilize the device of MOCVD equipment tail gas, it is characterized in that: the tail gas of MOCVD enters low pressure buffer tank (1) by pipeline, low pressure buffer tank (1) is connected in high-pressure buffering pot (3) by compressor (2), high-pressure buffering pot (3) pipeline is connected on pre-cool exchanger (4), pre-cool exchanger (4) lower channel is connected with low-temperature condenser (5), low-temperature condenser (5) below pipeline is connected with gas-liquid separator (6), the lower end of gas-liquid separator (6) is connected with liquefied ammonia storage tank (8) by ammonia pump (7), top pipeline is connected on molecular sieve adsorption post (9), molecular sieve adsorption post (9) upper end is connected on pressure-variable adsorption post (10), pressure-variable adsorption post (10) pipeline is connected in hydrogen-holder (11).
2. the device of comprehensive utilization MOCVD equipment tail gas as claimed in claim 1, is characterized in that: between described low pressure buffer tank (1) and compressor (2), particulate filter (12) is set.
3. the device of comprehensive utilization MOCVD equipment tail gas as claimed in claim 1, it is characterized in that: described gas-liquid separator (6) top pipeline is connected in pre-cool exchanger (4), it is upper that pre-cool exchanger (4) pipeline is connected in molecular sieve adsorption post (9), after gas is heated up, separates again.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420277522.1U CN203954987U (en) | 2014-05-28 | 2014-05-28 | The device of comprehensive utilization MOCVD equipment tail gas |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420277522.1U CN203954987U (en) | 2014-05-28 | 2014-05-28 | The device of comprehensive utilization MOCVD equipment tail gas |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203954987U true CN203954987U (en) | 2014-11-26 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420277522.1U Withdrawn - After Issue CN203954987U (en) | 2014-05-28 | 2014-05-28 | The device of comprehensive utilization MOCVD equipment tail gas |
Country Status (1)
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| CN (1) | CN203954987U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103977666A (en) * | 2014-05-28 | 2014-08-13 | 安徽亚格盛电子新材料有限公司 | Device for comprehensively utilizing tail gas of MOCVD (Metal-Organic Chemical Vapor Deposition) equipment |
| CN110360441A (en) * | 2019-06-28 | 2019-10-22 | 浙江大学 | Space liquid hydrogen storage tank is vented cryogenic energy utilization system |
| CN111232925A (en) * | 2020-04-01 | 2020-06-05 | 常州翊翔炭材科技有限公司 | System for producing hydrogen by using carbon/carbon composite material CVD (chemical vapor deposition) to produce tail gas |
-
2014
- 2014-05-28 CN CN201420277522.1U patent/CN203954987U/en not_active Withdrawn - After Issue
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103977666A (en) * | 2014-05-28 | 2014-08-13 | 安徽亚格盛电子新材料有限公司 | Device for comprehensively utilizing tail gas of MOCVD (Metal-Organic Chemical Vapor Deposition) equipment |
| CN103977666B (en) * | 2014-05-28 | 2016-01-06 | 安徽亚格盛电子新材料有限公司 | The device of comprehensive utilization MOCVD device tail gas |
| CN110360441A (en) * | 2019-06-28 | 2019-10-22 | 浙江大学 | Space liquid hydrogen storage tank is vented cryogenic energy utilization system |
| CN110360441B (en) * | 2019-06-28 | 2020-06-23 | 浙江大学 | Exhaust cold energy utilization system of space liquid hydrogen storage tank |
| CN111232925A (en) * | 2020-04-01 | 2020-06-05 | 常州翊翔炭材科技有限公司 | System for producing hydrogen by using carbon/carbon composite material CVD (chemical vapor deposition) to produce tail gas |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20141126 Effective date of abandoning: 20160106 |
|
| C25 | Abandonment of patent right or utility model to avoid double patenting |