CN203936756U - A kind of rough polishing machine centre wheel - Google Patents
A kind of rough polishing machine centre wheel Download PDFInfo
- Publication number
- CN203936756U CN203936756U CN201420268738.1U CN201420268738U CN203936756U CN 203936756 U CN203936756 U CN 203936756U CN 201420268738 U CN201420268738 U CN 201420268738U CN 203936756 U CN203936756 U CN 203936756U
- Authority
- CN
- China
- Prior art keywords
- centre wheel
- back shaft
- hinge
- polishing machine
- location
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
A kind of rough polishing machine centre wheel, on the polishing machine for the production of monocrystalline silicon buffing sheet.Centre wheel is made up of the location hinge (1) of outer ring and the back shaft (2) of inner ring, and inner ring back shaft (2) adopts integral structure design, has abandoned the somewhat complex design mode of bearing, sealing ring, the possibility of stopped leakage of oil, leaking rust.Location hinge (1) is passed through four assembling modes that silk hole is relative, upper and lower surface is concordant with back shaft base (6), the problem of deflection miter angle while having avoided assembling.Centre wheel entirety is fixed on equipment center axle by mounting flange (3), has changed centre wheel and has been fixed on the mode on deep bid, make centre wheel positioning carrier dish accurate, and centre wheel does not contact with polishing cloth.The utility model structural design is simple, and fitting operation is convenient, for ease of maintenaince, easy to use, overcome the inaccurate and easy generation polished silicon wafer of positioning carrier dish existing in original centre wheel design and stain the problem scratching, reduced use cost, improved product quality and operating efficiency.
Description
Technical field
The utility model belongs to monocrystalline silicon buffing sheet production technical field, relates generally to a kind of rough polishing machine centre wheel.
Background technology
Monocrystalline silicon buffing sheet is the basic material of IC industry, and polishing machine is to produce silicon polished necessaries.At present on market, a kind of SPAW50 polishing machine that SPEEDFAM company produces, IC industry has larger recoverable amount at home.SPAW50 rough polishing machine centre wheel is the important device on rough polishing machine, has accurately located the position of carrier plate on polishing cloth together with guide wheel; Meanwhile, equipment is supplied to polishing fluid on polishing cloth by the hole in the middle of centre wheel.The running status of centre wheel has extremely important impact for the silicon polished quality of produce single crystal.In polishing production process, require centre wheel except the accurate location that can ensure carrier plate, even running, also in running, ensure cleaning, not produce particle, there is good durability, be easy to safeguard, repair, clean, make to produce and can carry out continuously.But in production and application, find, the centre wheel that existing SPAW50 rough polishing machine uses exists following 4 problems:
1, complex structure, fault rate is high, and maintenance difficulty is large.The pintongs that existing centre wheel is mainly played the role of positioning by outer ring moulds anticipates a hinge and the passive bearing of inner ring forms, inner-ring bearing mainly comprises again the parts such as bearing in interior outer metal housing and metal-back, sealing ring, altitude location bolt, set bolt, wherein inner layer metal shell is arranged on deep bid and plays centre of support wheel effect, rotates with deep bid; Outer layer metal shell supporting and location hinge, and be flexible coupling with positioning carrier dish with equipment center axle, do not rotate with deep bid.Because centre wheel is positioned at polishing cloth centre, in high temperature, humidity, mordant environment, and polishing fluid flows on polishing cloth by the hole in the middle of centre wheel, makes centre wheel bearing be easy to get rusty into water, polishing fluid, so produce greasy dirt, metal rust leaks; In centre wheel, metallic packing ring is yielding, altitude location bolt is easily loosening, makes interior outer metal housing relative position change phase mutual friction and produces metal fillings, causes polished silicon wafer contamination, road plan.Centre wheel location hinge is connected by 8 screws with outer metal housing, easily produces the mistake of pintongs shape location hinge and outer metal housing relative position deflection miter angle when assembling.The number of components of centre wheel composition is too much, global facility poor reliability, and while again assembling after damage, outer cover height is difficult to accurate location, need repeatedly assemble, cleans, be placed on the work of locating on polishing cloth, and assembling difficulty is large, and production and quality are had to considerable influence.
2, interior outer metal housing interlayer easily accumulates polishing fluid crystallization, dust, is difficult to cleaning, has and produces the risk that polished silicon wafer scratches;
3, centre wheel and central shaft are flexible coupling by the touch of plastic flower keyed jointing, connect with plastics spline yielding damage, cause the hinge rotation of centre wheel location not in place, and carrier plate location is inaccurate, and then carrier plate swings while being directed at polishing, produces bad polishing;
4, centre wheel is fixed on deep bid center, and centre wheel quality is large, loads and unloads working strength large while changing cloth, and need cut at polishing cloth center the circular hole that a diameter is 250mm when mounting center wheel, has destroyed the globality of polishing cloth, affects polishing cloth practical effect.
Utility model content
In view of the existing problem of SPAW50 rough polishing ray machine centre wheel using in prior art, the utility model design has proposed to use centre wheel on a kind of New type of S PAW50 rough polishing machine.Centre wheel inner ring back shaft adopts without bearing, packingless
onebody simple designs, has solved leakage of oil in original design, has leaked rust, the friction of interior outer metal housing produces metal fillings, it is clean to be difficult to and assemble difficult problem.Location, outer ring hinge adopts 4 modes that screw is connected with inner ring spring bearing, produces the problem of location hinge deflection miter angle while having avoided assembling.Centre wheel and equipment center shaft connection place adopt the fixing hard connecting mode of bolt, so first can ensure that locating hinge deflection puts in place, accurately positioning carrier dish; Secondly equipment center axle can play the effect of fixed center wheel, and centre wheel is no longer fixed on deep bid, contact with deep bid, changes after cloth when mounting center is taken turns and does not need polishing cloth center to cut hole, improves polishing cloth result of use.
For achieving the above object, the technical scheme that the utility model is taked is:
oneplant rough polishing machine centre wheel, be mainly made up of pintongs shape location hinge and back shaft, wherein back shaft is work shape structure, is made up of the back shaft base of lower end, mounting flange and the middle hollow connecting rod of upper end; Cylindrical cavity of location hinge bottom design, the bolt hole of uniform 4 depressed design on cylindrical cavity, the pintongs hinge of corresponding location hinge.Back shaft entirety adopts stainless steel material to make, 10 millimeters of high boss of back shaft base bottom design, and silk hole on uniform 4 back shaft bases on boss, in order to match with location hinge, prevents from locating hinge and in the time of work, produces deformation and cause and come off.Location hinge is assembled into one by interference fit and back shaft base, then fixes with 4 bolts, rear support axle base is installed concordant with location hinge upper and lower surface, is beneficial to hygiene.Back shaft upper end is designed with mounting flange, with bolt by four mounting flanges silk a hole be fixed on the central shaft of equipment, on four mounting flanges, silk hole is corresponding with the bolt hole in the hinge of location, accurate to ensure being connected hinge position, rear location with central shaft, avoid assembling the mistake that deflection miter angle appears in rear location hinge.
A kind of rough polishing machine centre wheel described in the utility model, component count used is little, and processing technology is simple, and fitting operation is convenient, and reliability is strong, effectively solves centre wheel water inlet leakage of oil, leaks rust, is difficult to cleaning and assembling, changes difficult problem.Centre wheel adopts overall construction design, not containing bearing, is easy to cleaning, reduces polished silicon wafer contamination and scratches risk.Centre wheel is fixed on equipment center axle, no longer contacts with deep bid, and positioning carrier dish is accurate, while changing polishing cloth, does not need to cut hole, improves polishing cloth result of use.Reduce use cost, improved product quality, operating efficiency.
Brief description of the drawings
Fig. 1 is structural representation of the present utility model;
Fig. 2 is the structural representation of location hinge;
Fig. 3 is the top view of locating hinge in the utility model.
In figure: 1, location hinge, 2, back shaft, 3, mounting flange, 4, silk hole on mounting flange, 5, hollow connecting rod, 6, back shaft base, 7, silk hole on back shaft base, 8, boss, 9, cylindrical cavity.
Detailed description of the invention
Provide embodiment of the present utility model below in conjunction with accompanying drawing as follows:
As shown in Figure 1, Figure 2, Figure 3 shows, a kind of rough polishing machine centre wheel described in the utility model, be to be mainly made up of pintongs shape location hinge 1 and back shaft 2, wherein back shaft 2 is work shape structure, is made up of the back shaft base 6 of lower end, mounting flange 3 and the middle hollow connecting rod 5 of upper end; Back shaft 2 entirety adopt stainless steel material to make, and back shaft base 6 bottoms are designed with a boss 8 that 10mm is high, and silk hole 7 on uniform four back shaft bases on boss 8, in order to match with location hinge 1.Preventing from locating hinge 1 produces deformation in when work and causes and come off.Locating blades 1 bottom design has a cylindrical cavity 9, the bolt hole of uniform four depressed design on cylindrical cavity 9, the pintongs hinge of corresponding location hinge 1, location hinge 1 is assembled into one by interference fit and back shaft base 6, fixes by silk hole 7 use bolts on back shaft base.Rear support axle base 6 is installed concordant with location hinge 1 upper and lower surface, is conducive to hygiene.The mounting flange 3 use bolts of back shaft 2 upper ends are fixed on the central shaft of equipment by silk hole 4 on four mounting flanges.On four mounting flanges, silk hole 4 is corresponding with the bolt hole of location in hinge 1, with guarantee rough polishing machine centre wheel also the central shaft on equipment connect after fixed page blade 1 position accurate, avoid assembling the mistake that deflection miter angle appears in rear location hinge 1.
Claims (2)
1. a rough polishing machine centre wheel, it is characterized in that: described a kind of rough polishing machine centre wheel, mainly to be formed by pintongs shape location hinge (1) and back shaft (2), wherein back shaft (2) is work shape structure, includes the back shaft base (6) of lower end, the mounting flange (3) of upper end and middle hollow connecting rod (5); Back shaft base (6) bottom is provided with a boss (8), silk hole (7) on upper uniform four the back shaft bases of boss (8); Location hinge (1) bottom is provided with a cylindrical cavity (9), the pintongs hinge of upper uniform four the depressed bolts hole corresponding location hinges (1) of cylindrical cavity (9); On upper four mounting flanges that arrange of mounting flange (3) of back shaft (2) upper end, silk hole (4) is corresponding with upper four the uniform depressed bolts hole of location hinge (1); Location hinge (1) is assembled into one by interference fit and back shaft base (6).
2. a kind of rough polishing machine centre wheel according to claim 1, is characterized in that: back shaft (2) adopts stainless steel material to make.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420268738.1U CN203936756U (en) | 2014-05-26 | 2014-05-26 | A kind of rough polishing machine centre wheel |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420268738.1U CN203936756U (en) | 2014-05-26 | 2014-05-26 | A kind of rough polishing machine centre wheel |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203936756U true CN203936756U (en) | 2014-11-12 |
Family
ID=51856103
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420268738.1U Expired - Fee Related CN203936756U (en) | 2014-05-26 | 2014-05-26 | A kind of rough polishing machine centre wheel |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203936756U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109571155A (en) * | 2019-01-03 | 2019-04-05 | 无锡高晟成型科技有限公司 | A kind of processing jig and the method for processing more claw shape workpiece using the jig |
-
2014
- 2014-05-26 CN CN201420268738.1U patent/CN203936756U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109571155A (en) * | 2019-01-03 | 2019-04-05 | 无锡高晟成型科技有限公司 | A kind of processing jig and the method for processing more claw shape workpiece using the jig |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20141112 Termination date: 20170526 |