CN203895737U - Seed-beam self-injection dual-cavity excimer laser - Google Patents
Seed-beam self-injection dual-cavity excimer laser Download PDFInfo
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- CN203895737U CN203895737U CN201320849917.XU CN201320849917U CN203895737U CN 203895737 U CN203895737 U CN 203895737U CN 201320849917 U CN201320849917 U CN 201320849917U CN 203895737 U CN203895737 U CN 203895737U
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Abstract
The utility model discloses a seed-beam self-injection dual-cavity excimer laser, and the laser comprises a laser discharge cavity, a laser output module, a line width narrowing module, and a broadband feedback module. The laser discharge cavity comprises working gas which can generate laser under the action of an excitation source, wherein the mode of laser output is a winning laser mode in mode competition of the discharge cavity. The laser discharge cavity, the laser output module and the line width narrowing module form a narrow-band resonant cavity which is used for the line-width narrowing of the laser generated by the working gas. The laser discharge cavity, the laser output module and the broadband feedback module form a broadband resonant cavity which is used for resonant amplification output in a mode of the narrow-band resonant cavity after winning in mode competition. The laser provided by the utility model can achieve the output of a narrow line width, can improve the energy and stability of outputted laser, can shorten the size of a system, can reduce the power consumption of the system, is simple in structure, is convenient to machine, and is convenient to tune.
Description
Technical field
The utility model belongs to laser technique field, is specifically related to a kind of two-chamber excimer laser of self-seeding, and particularly a kind of have narrow linewidth and high-energy output, and the two-chamber excimer laser of the self-seeding of compact conformation.
Background technology
Along with the development of semi-conductor industry, the continuous progress of large scale integrated circuit, requires more and more highlyer to photoetching technique, as the excimer laser of photoetching light source, the raising of photoetching technique is had to key effect.This requires excimer laser to reach the output of narrow linewidth and macro-energy simultaneously, but, utilize laser in the past to add the combination of linewidth narrowing module, the output of narrow linewidth be take that the loss of laser energy is cost (with reference to the patent No.: US6590921B208.07.2003).On the other hand, in order to obtain having the narrow-linewidth laser compared with high power output, the double cavity structure of vibration-structure for amplifying is applied in excimer laser.In this structure, narrow linewidth, the output demand of high pulse energy is located away from two-chamber and realizes, wherein, vibration chamber is realized low-yield, the high-quality narrow linewidth seed light output of narrow linewidth, enlarged cavity carries out energy amplification to seed light, as (the reference: Wakabayashi O of MOPO (master oscillator-power oscillator) structure, Ariga T, Kumazaki T, Beam quality of a new-type MOPO laser system for VUV laser lithography[C] .SPIE, 2004, 5377:1772-1780), because this structure needs two separated cavitys, cause systems bulky, energy consumption is higher.To sum up, in order to obtain the excimer laser of narrow linewidth, high-energy and compact conformation simultaneously, need to design a kind of Novel compact structure and the energy of laser and live width be carried out tuning, using and obtain the excimer laser that meets specific demand (for example, as environmental protection photoetching light source).
Utility model content
(1) technical problem that will solve
Technical problem to be solved in the utility model proposes a kind of two-chamber excimer laser of self-seeding, so that when the laser of excimer laser output is carried out linewidth narrowing and improves Laser output energy, the volume of reduction system, reduce power consumption, using and meet the demand as application such as environment-friendly type photoetching light sources.
(2) technical scheme
For solving the problems of the technologies described above, the utility model proposes a kind of two-chamber excimer laser of self-seeding, comprise linewidth narrowing module, broadband feedback module, discharge chamber and Laser output module, wherein, linewidth narrowing module, discharge chamber and Laser output module composition arrowband resonant cavity; Broadband feedback module, discharge chamber and Laser output module composition wideband resonance chamber.
In described discharge chamber, include working gas, this working gas can produce laser under driving source effect; Described Laser output module is for exporting through the laser of linewidth narrowing and energy amplification; Described wideband resonance chamber and described arrowband resonant cavity share discharge chamber and Laser output module, are divided into two again by beam splitting element.
The pattern of the two-chamber excimer laser Output of laser of described self-seeding is the pattern that wideband resonance chamber and arrowband resonant cavity two chamber patterns are won after mode competition, modal loss that quality factor is high is little, it is fast to increase, thereby can suppress the growth of its complementary modul, its competition process is as follows: each pattern in the gain curve of wideband resonance chamber, its quality factor is similar, all from noise states originally, start to increase, if disturb without external factor, the speed of each pattern-growth is also approximate thinks identically, and consequently each pattern is vibrated simultaneously, jointly existed; And when arrowband resonant cavity is a certain pattern in gain curve is added behind wideband resonance chamber, the quality factor of this pattern in the gain curve of wideband resonance chamber has just been enhanced, because population inversion has certain process, so under certain condition, this pattern can surpass threshold value at first and vibrate, according to mode competition effect, (establishing arrowband resonant cavity resonance wavelength is λ within the specific limits
i, the corresponding peak wavelength of gain spectral peak value of gain media is λ
0, i.e. λ
0naturally the gain of mould is maximum, λ
ias long as mould can suppress λ
0mould all the other patterns also can suppress, so this scope is λ
imould can suppress λ
0the scope of mould), all the other patterns just can be suppressed.
The chamber in described wideband resonance chamber is grown up long in the chamber of described arrowband resonant cavity, thereby is beneficial to the first starting of oscillation of arrowband resonant cavity, is then beneficial to arrowband mould and preponderates in mode competition.
Described arrowband resonant cavity carries out linewidth narrowing for the laser that described working gas is produced, described wideband resonance chamber is carried out resonance for the arrowband cavity modes after mode competition is won and is amplified output, operation principle is similar to traditional MOPO chamber, wherein arrowband resonant cavity is equivalent to the MO chamber in traditional MOPO laser, and wideband resonance chamber is equivalent to the PO chamber in traditional MOPO laser.In the excimer laser MOPO of traditional discharge pumped structure, MO chamber is completely separated with PO chamber, independent separately, and the discharge lag in two chambeies can be triggered and be regulated by external electricity; And in the two-chamber excimer laser of self-seeding, because two resonant cavitys share a discharge cavity, so under the long fixing prerequisite in the chamber of arrowband resonant cavity, need by regulating the chamber long (broadband feedback module is apart from the length of Laser output module) in wideband resonance chamber to control the relative discharge lag in two chambeies, and then make wideband resonance chamber complete the resonance amplification output to arrowband cavity modes.
According to a kind of embodiment of the present utility model, described Laser output module is an output coupling mirror, described discharge chamber has two ends, described output coupling mirror is arranged at one end of described discharge chamber, and described linewidth narrowing module and broadband feedback module are arranged at the other end of described discharge chamber.
According to a kind of embodiment of the present utility model, described linewidth narrowing module comprises single prism or prism group, also comprise grating, described single prism or prism group are as described beam splitter, for receiving the laser being sent by discharge chamber, this laser part is reflexed to described wideband resonance chamber, and incide described grating after the remainder of this laser is reflected and expanded; Described grating receives emitting laser from single prism or prism group expand for take its blaze angle as incidence angle, make to incide its lip-deep laser generation effect of dispersion, and the Laser feedback of wavelength that makes to meet blaze of grating condition is to the discharge cavity amplification of vibrating, and realizes narrow-linewidth laser output.
According to a kind of embodiment of the present utility model, described broadband feedback module is speculum, and for receiving the laser partly being reflected by described single prism or prism group, Bing Jiangqiyuan road is reflected back in described discharge chamber.
According to a kind of embodiment of the present utility model, when described linewidth narrowing module comprises single prism, the plane of incidence of this single prism is for the reflectivity 15%～90% of the laser being sent by described discharge chamber.
According to a kind of embodiment of the present utility model, when described linewidth narrowing module comprises prism group, this prism group comprises a plurality of prisms of arranging in light path successively, wherein, first prism that is used for receiving the laser of being launched by described discharge chamber, as described beam splitter, reflexes to described wideband resonance chamber by this laser part.
According to a kind of embodiment of the present utility model, the plane of incidence of described first prism is for the reflectivity 15%～90% of the laser being sent by described discharge chamber.
According to a kind of embodiment of the present utility model, described wideband resonance chamber also can comprise etalon, it is for carrying out linewidth narrowing to a certain degree to being incident to the laser in wideband resonance chamber, and transmission has the laser of specific centre wavelength, thereby reduce to a certain extent wideband resonance chamber modulus order, and then the mode competition opponent of minimizing arrowband resonator mode, be more conducive to arrowband resonator mode and win in mode competition.
According to a kind of embodiment of the present utility model, described etalon receives for direct the laser partly being reflected by single prism or prism group, and the laser of transmission is incided on described speculum.
According to a kind of embodiment of the present utility model, the linewidth narrowing ability of described etalon will be lower than described linewidth narrowing module, be the Output of laser target live width that the transmission laser target live width of etalon is greater than linewidth narrowing module, the centre wavelength of its transmission is identical with the arrowband selected centre wavelength of resonant cavity grating.
(3) beneficial effect
The utility model not only can be realized the output of excimer laser narrow linewidth, and passes through the design of the two-chamber excimer laser of self-seeding, can improve energy and the stability of Output of laser, while compact conformation, volume is little, low in energy consumption, be convenient to processing, tuning convenience.
Accompanying drawing explanation
Fig. 1 is the structural representation of two-chamber excimer laser of the self-seeding of the first embodiment of the present utility model;
Fig. 2 is the structural representation of two-chamber excimer laser of the self-seeding of the second embodiment of the present utility model.
Embodiment
As previously mentioned, the utility model is a compact conformation of design and can regulates excimer laser live width and the mechanism of exporting energy simultaneously for the starting point of the two-chamber excimer laser design of self-seeding, to meet in some application and require excimer laser small size, low-power consumption, and the requirement of output macro-energy and narrow-linewidth laser.
The two-chamber excimer laser of self-seeding of the present utility model comprises linewidth narrowing module, broadband feedback module, discharge chamber and Laser output module, wherein, and linewidth narrowing module, discharge chamber and Laser output module composition arrowband resonant cavity; Broadband feedback module, discharge chamber and Laser output module piece form wideband resonance chamber; Wideband resonance chamber and arrowband resonant cavity share discharge chamber and Laser output module, are divided into two again by beam splitting element, and the pattern of Output of laser is the pattern that two chamber patterns are won after mode competition; The chamber in described wideband resonance chamber is grown up long in the chamber of described arrowband resonant cavity, thereby is beneficial to the first starting of oscillation of arrowband cavity modes, is then beneficial to arrowband mould and preponderates in mode competition.
Arrowband resonant cavity carries out linewidth narrowing for the laser that described working gas is produced, wideband resonance chamber is carried out resonance for the arrowband cavity modes after mode competition is won and is amplified output, wherein arrowband resonant cavity is equivalent to the MO chamber in traditional MOPO laser, and wideband resonance chamber is equivalent to the PO chamber in traditional MOPO laser.In the excimer laser MOPO chamber of traditional discharge pumped, MO chamber is completely separated with PO chamber, independent separately, and the discharge lag in two chambeies can be triggered and be regulated by external electricity; And in the two-chamber excimer laser of self-seeding, because two resonant cavitys share a discharge cavity, so under the long fixing prerequisite in the chamber of arrowband resonant cavity, need, by regulating the chamber long (broadband feedback module is apart from the length of Laser output module) in wideband resonance chamber to control the discharge lag in two chambeies, thereby wideband resonance chamber is completed, the resonance of arrowband cavity modes to be amplified to output.
Visible, the double cavity structure excimer laser system of the self-seeding that described arrowband resonant cavity and wideband resonance chamber form, can share under the prerequisite of a discharge chamber and output coupling module, realizes the Laser output of narrow linewidth, macro-energy.
Laser output module of the present utility model is used for coordinating linewidth narrowing module and broadband feedback module to form laserresonator, be a kind of output coupling mirror of excimer laser system, conventionally can be formed by flat mirror or the very high flat mirror of not plated film of transmitance with certain reflectivity (40%～73%).
The laser spectroscopy that linewidth narrowing module of the present utility model is naturally vibrated and exported for controlling laser, comprise the selection of linewidth narrowing and centre wavelength, can realize the output of needed laser linewidth in practical application and centre wavelength, conventionally can be by the combination of multiple dispersion element, as formations such as prism, grating, etalons.The function of linewidth narrowing module realizes the gain media mating reaction that also needs discharge chamber inside, and gain media is the working gas of excimer laser.
Broadband of the present utility model feedback module, for broad band laser is reflected, can consist of the speculum with certain reflectivity conventionally, and the function of broadband feedback module realizes the gain media mating reaction that also needs discharge chamber inside.
For making the purpose of this utility model, technical scheme and advantage clearer, below in conjunction with specific embodiment, and with reference to accompanying drawing, the utility model is described in further detail.
The first embodiment
Fig. 1 has shown the structural representation of the first embodiment of the present utility model.The two-chamber excimer laser that this first embodiment is self-seeding.As shown in Figure 1, the two-chamber excimer laser of described self-seeding comprises excimer laser discharge cavity 1, output coupling mirror 2, prism 3, speculum 4 and grating 5.Wherein, output coupling mirror 2 has formed aforesaid Laser output module, and prism 3 and grating 5 have formed aforesaid linewidth narrowing module, and speculum 4 has formed aforesaid broadband feedback module.
Excimer laser refers to is excited the laser that dimer produces.When inert gas and halogen gas mix with pressure by a certain percentage, under the effect of driving source, make gas atom from ground state transition to excitation state, be even ionized.Atom in excitation state or ion are easy to be combined into molecule, and only there was tens nanoseconds in the life-span of this molecule.When the molecular number of excitation state is far more than ground state quasi-molecule number, just form population inversion.When quasi-molecule returns ground state from excitation state transition, discharge photon, through internal oscillation, launch laser.Rare gas and halogen gas are dissociated into rapidly 2 atoms from quasi-molecule state simultaneously.Described excimer laser discharge cavity 1 is an integrated modular discharge cavity, by driving source, working gas etc., formed, and be the heart of laser.Described discharge chamber 1 utilizes high voltage electric energy as the operation material (as: ArF etc.) in driving source excitation laser chamber, thereby realizes the reversion of particle, by resonant cavity in the interior formation laser generation of discharge chamber 1, outside Output of laser.Because high-tension electricity can reach several kilovolts, therefore must tightly shield with metallic plate in case leaking outside of electric current causes danger at skin.
Discharge chamber 1 has two ends, described output coupling mirror 2 is arranged near the outgoing window of one end of discharge chamber 1, as shown in fig. 1, output coupling mirror 2 is for coordinating linewidth narrowing module and broadband feedback module to form one of key element of laser generation---resonant cavity, the laser producing in resonant cavity is from output coupling mirror 2 outgoing, by tuning operation coupling mirror 2, make itself and the grating 5 as linewidth narrowing module of the other end or completely parallel as the speculum 4 of broadband feedback module, make laser can come and go vibration between them.Described output coupling mirror 2 is preferably the planar lens with certain reflectivity, and reflectivity is preferably 40%～73%, and more preferably 40%～50%;
Described prism 3 is arranged near the outgoing window of the other end with respect to output coupling mirror 2 of discharge chamber 1, and as shown in fig. 1, upwards, laser is from the hypotenuse incident of prism 3, from a right-angle side outgoing of prism 3 for the drift angle of prism 3.Prism 3 serves as the prism that in linewidth narrowing module, one dimension expands on the one hand, and the length that makes to incide the laser on grating 5 is enough large, thereby further promotes the dispersion of grating 5 to strengthen its selection to laser center wavelength and live width; On the other hand, can be used as beam splitting element, the part laser of its plane of incidence reflection is incided on speculum 4, laser can be vibrated in wideband resonance chamber.The material of prism 3 can be ultraviolet level fused silica material or the good material of ultraviolet light transmission, as CaF
2, MgF
2deng.Prism 3 can be right-angle prism or the prism with special angle, as long as it can realize the effect that expands to light beam.For example drift angle is the prism of 69 °～74 °.Meanwhile, the reflectivity of light beam plane of incidence on prism 3 needs strict design, and according to utility model people's calculating and experiment, according to a kind of preferred embodiment of the present utility model, the reflectivity of the plane of incidence of prism 3 is 65%～85%.
Speculum 4 is also arranged at the position of the other end with respect to output coupling mirror 2 of discharge chamber 1, as shown in fig. 1, it is for receiving the laser by the plane of incidence reflection of prism 3, and Bing Jiangqiyuan road is reflected back in discharge chamber 1, and coordinates formation wideband resonance chamber with output coupling mirror 2.It is more than 90% plane mirror that speculum 4 is preferably reflectivity.
Grating 5 is arranged at the rear of the prism 3 in the light path in linewidth narrowing chamber, reception is emitting laser from prism 3 expands, it is incidence angle that this laser be take the blaze angle of grating 5, incides the lip-deep laser generation effect of dispersion of grating 5, selects thus laser spectroscopy width and centre wavelength.Grating 5 adopts the pattern of putting of Littrow autocollimatics, makes to meet the glitter wavelength laser An Yuan road of condition of grating 5 and reflects back.Due to light path principle of reversibility, the laser returning from grating 5 incides output coupling mirror 2 again, has realized like this reciprocating vibration of laser.Grating 5 is preferably an echelle grating, and more preferably Littrow grating (for common grating equation d (sin α+sin β)=m λ, makes α=β=α
b, α wherein
bfor blaze angle, be Littrow from the grating of quasi-mode).
For excimer laser, when the molecular number of excitation state is far more than ground state quasi-molecule number, just form population inversion, when quasi-molecule returns ground state from excitation state transition, discharge photon, through internal oscillation, amplify, finally become laser emitting.Common excimer laser emitting laser is positioned at ultraviolet band, and as ArF laser produces 193nm laser, KrF laser produces 258nm laser.
For now having two by lasing resonant cavity, they are respectively the linewidth narrowing modules consisting of prism 3, grating 5, and linewidth narrowing module and output coupling mirror 2, discharge chamber 1 have formed arrowband resonant cavity; Meanwhile, speculum 4 is as broadband feedback module, and discharge chamber 1, output coupling mirror 2 and speculum 4 have formed a wideband resonance chamber.
The operation principle of arrowband resonant cavity is such: when the laser in discharge chamber 1 incides the hypotenuse of prism 3, from the light beam of right-angle side outgoing, with respect to incident light, expand multiple and be about 2 times of left and right, light beam after expanding be take the blaze angle of grating 5 and is realized dispersion as incidence angle projects on grating 5, and the light of selected specific wavelength and live width is fed back to the discharge cavity amplification of vibrating.Now, grating 5 and output coupling mirror 2 form described arrowband resonant cavity, for realizing narrow-linewidth laser output.
Meanwhile, due to the reflex of prism 3, speculum 4 has formed again wideband resonance chamber with output coupling mirror 2.Speculum 4 is preferably the speculum with high reflectance.Owing to there is no dispersion element, wideband resonance chamber can be to all starting of oscillations of all laser in excimer laser gain spectral in principle, but, due to wideband resonance chamber and the shared discharge chamber 1 of arrowband resonant cavity and output coupling mirror 2, so finally the zlasing mode through output coupling mirror 2 outputs is the pattern that two cavity modess are won after mode competition, its competition process is as follows: each pattern in the gain curve of wideband resonance chamber, its quality factor is similar, all from noise states originally, start to increase, if disturb without external factor, the speed of each pattern-growth also approximate think identical, consequently each pattern is vibrated simultaneously, common existence, and when arrowband resonant cavity is a certain pattern in gain curve is added behind wideband resonance chamber, the quality factor of this pattern in the gain curve of wideband resonance chamber has just been enhanced, because population inversion has certain process, so under certain condition, this pattern can surpass threshold value at first and vibrate, according to mode competition effect, (establishing arrowband resonant cavity resonance wavelength is λ within the specific limits
i, the corresponding peak wavelength of gain spectral peak value of gain media is λ
0, i.e. λ
0naturally the gain of mould is maximum, λ
ias long as mould can suppress λ
0mould all the other patterns also can suppress, so this scope is λ
imould can suppress λ
0the scope of mould), all the other patterns just can be suppressed.
Thereby in order to make cavity modes first starting of oscillation in arrowband be beneficial to it, in mode competition, preponderate, it is long in the chamber of arrowband resonant cavity that we select the chamber in wideband resonance chamber to grow up.
Arrowband resonant cavity carries out linewidth narrowing for the laser that described working gas is produced, wideband resonance chamber is carried out resonance for the arrowband cavity modes after mode competition is won and is amplified output, wherein arrowband resonant cavity is equivalent to the MO chamber in traditional MOPO laser, and wideband resonance chamber is equivalent to the PO chamber in traditional MOPO laser.In the MOPO of traditional discharge pumped double cavity structure, MO chamber is completely separated with PO chamber, independent separately, and the discharge lag in two chambeies can be triggered and be regulated by external electricity; And in the two-chamber excimer laser of self-seeding, because two resonant cavitys share a discharge cavity, so regulative mode is as follows: under the long fixing prerequisite in the chamber of arrowband resonant cavity, long by the chamber that regulates broadband feedback module to change wideband resonance chamber apart from the length of Laser output module, and then the discharge lag in control two chambeies, complete wideband resonance chamber the resonance of arrowband cavity modes is amplified to output.Final output has the laser of narrow linewidth, macro-energy.
In addition, can adopt prism group to replace the single prism 3 in above-described embodiment.In prism group, each right-angle prism is arranged in order, and from hypotenuse, receives discharge chamber 1 emitting laser, from right-angle side outgoing, is finally incident upon grating 5.Wherein in prism group, the effect of the prism of the most close discharge cavity 1 is identical with the single prism 3 in above-described embodiment, for receiving the laser of being launched by described discharge chamber, and this laser part is reflexed to wideband resonance chamber, reflectivity 15%～90%.
The prism group of using a plurality of prisms to form, can more easily realize the requirement to specific output wavelength narrow-linewidth laser output.But the two-chamber excimer laser that can increase self-seeding by increasing of number of prisms, to the absorption of light energy and loss, is unfavorable for the output of high energy laser.
The second embodiment
Fig. 2 is the structural representation of the second embodiment of the two-chamber excimer laser of self-seeding of the present utility model.As shown in Figure 2, the basic structure of this second embodiment is also identical with the first embodiment, and difference is in wideband resonance chamber, to have increased an etalon 6.So-called etalon is the dispersion element that a kind of multiple-beam interference principle is made.At optical technical field, Fabry-Perot interferometer (Fabry-P é rot interferometer) is a kind of multi-beam interferometer being comprised of two parallel glass plates, and wherein two relative inner surfaces of glass plate all have high reflectance.Fabry-Perot interferometer is also often called Fabry Perot resonator, and when coming interval fixedly with the hollow sept of regular length between two glass plates, it is also known as Fabry-Perot etalon, or directly referred to as etalon.
As shown in Figure 2, in this embodiment, linewidth narrowing module comprises single prism 3, but also can substitute single prism 3 by prism group.Prism 3 is right-angle prism in this second embodiment, its hypotenuse receives discharge chamber 1 emitting laser, and take this hypotenuse and this laser part is reflexed to etalon 6 as the plane of incidence, the remainder of this laser reflects and expands in prism 3, and shines grating 5 from its right-angle side.
The linewidth narrowing ability of etalon 6 is lower than linewidth narrowing module, and the transmission laser score of etalon 6 is wider than the Output of laser target live width of linewidth narrowing module, and the centre wavelength of its transmission is identical with arrowband resonant cavity grating 5 selected centre wavelengths.
Etalon 6 is placed in wideband resonance chamber, for receiving the laser by prism 3 part reflections, and carry out linewidth narrowing to a certain degree to being incident to the laser in wideband resonance chamber, thereby reduce to a certain extent wideband resonance chamber modulus order, and then the mode competition opponent of minimizing arrowband resonator mode, be more conducive to arrowband resonator mode and in mode competition, win and lock, be finally easy to the Laser output of narrow linewidth, macro-energy.
Use etalon 6 more stably export for target live width and centre wavelength, but because it belongs to a kind of losser, being placed in the two-chamber excimer laser of self-seeding also can affect the raising of laser energy when interior.
Embodiment described above realizes particular embodiment of the present utility model, and according to the utility model, energy amplification module, linewidth narrowing module can also consist of other optical elements that meet excimer laser feature.In each embodiment, for interpolation or the deletion of each optics, person of ordinary skill in the field can carry out according to actual needs under the condition that does not depart from purport of the present utility model.Therefore above-described embodiment does not form the restriction to protection range of the present utility model, all within spirit of the present utility model and principle, any modification of making, is equal to replacement, improvement etc., within all should being included in protection range of the present utility model.
Claims (10)
1. the two-chamber excimer laser of a self-seeding, comprise linewidth narrowing module, broadband feedback module, discharge chamber and Laser output module, in described discharge chamber, include working gas, this working gas can produce laser by internal oscillation under driving source effect; It is characterized in that:
Described linewidth narrowing module, discharge chamber and Laser output module composition arrowband resonant cavity;
Described broadband feedback module, discharge chamber and Laser output module composition wideband resonance chamber;
Described arrowband resonant cavity carries out linewidth narrowing for the laser that described working gas is produced, and wideband resonance chamber is carried out resonance for the arrowband cavity modes after mode competition is won and amplified output;
Described Laser output module is for exporting through the laser of linewidth narrowing and energy amplification;
Laser optical path in described wideband resonance chamber and described arrowband resonant cavity is divided into two by beam splitting element, and the pattern of Output of laser is the pattern that wideband resonance chamber and described arrowband resonant cavity are won after mode competition;
If arrowband resonant cavity resonance wavelength is λ
i, the corresponding peak wavelength of gain spectral peak value of wideband resonance chamber gain media is λ
0, λ
imould can suppress λ
0mould;
The chamber in described wideband resonance chamber is grown up long in the chamber of described arrowband resonant cavity.
2. the two-chamber excimer laser of self-seeding as claimed in claim 1, it is characterized in that, described Laser output module is an output coupling mirror (2), described discharge chamber (1) has two ends, described output coupling mirror (2) is arranged at one end of described discharge chamber (1), and described linewidth narrowing module and laser amplifying module are arranged at the other end of described discharge chamber (1).
3. the two-chamber excimer laser of self-seeding as claimed in claim 2, is characterized in that, described linewidth narrowing module comprises single prism (3) or prism group, also comprises grating (5);
Described single prism (3) or prism group are as beam splitter, for receiving the laser being sent by discharge chamber (1), this laser part is reflexed to described wideband resonance chamber, and shine described grating (5) after the remainder of this laser is reflected and expanded;
Described grating (5) receives emitting laser from single prism (3) or prism group expand for take its blaze angle as incidence angle, make to incide its lip-deep laser generation effect of dispersion, and the Laser feedback that makes to meet the wavelength of blaze of grating condition is returned discharge chamber (1) vibration and is amplified.
4. the two-chamber excimer laser of self-seeding as claimed in claim 3, it is characterized in that, described broadband feedback module is speculum (4), for receiving the laser partly being reflected by described single prism (3) or prism group, Bing Jiangqiyuan road is reflected back in described discharge chamber (1).
5. the two-chamber excimer laser of self-seeding as claimed in claim 4, it is characterized in that, when described linewidth narrowing module comprises single prism (3), the plane of incidence of this prism (3) is for the reflectivity 15%～90% of the laser being sent by described discharge chamber.
6. the two-chamber excimer laser of self-seeding as claimed in claim 4, it is characterized in that, when described linewidth narrowing module comprises prism group, this prism group comprises a plurality of prisms of arranging in light path successively, wherein, for receiving first prism of the laser of being launched by described discharge chamber (1), as described beam splitter, this laser part is reflexed to described wideband resonance chamber.
7. the two-chamber excimer laser of self-seeding as claimed in claim 6, is characterized in that, the plane of incidence of described first prism is for the reflectivity 15%～90% of the laser being sent by described discharge chamber.
8. the two-chamber excimer laser of self-seeding as claimed in claim 3, it is characterized in that, described enlarged cavity also comprises etalon (6), and it is for carrying out linewidth narrowing to a certain degree to being incident to the laser in wideband resonance chamber, and transmission has the laser of specific centre wavelength.
9. the two-chamber excimer laser of self-seeding as claimed in claim 8, it is characterized in that, described etalon (6) receives for direct the laser partly being reflected by single prism (3) or prism group, and the laser of transmission is incided on described speculum (4).
10. the two-chamber excimer laser of self-seeding as claimed in claim 9, it is characterized in that, the linewidth narrowing ability of described etalon will be lower than described linewidth narrowing module, and the transmission laser score of etalon is wider than the Output of laser target live width of linewidth narrowing module.
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| CN201320849917.XU CN203895737U (en) | 2012-12-20 | 2013-12-20 | Seed-beam self-injection dual-cavity excimer laser |
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| CN 201210558478 CN102969649A (en) | 2012-12-20 | 2012-12-20 | Composite cavity of excimer laser |
| CN201210558478.7 | 2012-12-20 | ||
| CN201320849917.XU CN203895737U (en) | 2012-12-20 | 2013-12-20 | Seed-beam self-injection dual-cavity excimer laser |
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| CN201320849917.XU Expired - Lifetime CN203895737U (en) | 2012-12-20 | 2013-12-20 | Seed-beam self-injection dual-cavity excimer laser |
| CN201310712625.6A Active CN103701025B (en) | 2012-12-20 | 2013-12-20 | Self-seeding double cavity structure excimer laser system |
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| KR101804551B1 (en) * | 2012-12-20 | 2017-12-04 | 레인보우 소스 레이저 (RSLaser) | Excimer laser composite cavity |
| CN105048262B (en) * | 2015-08-03 | 2018-10-19 | 中国科学院光电研究院 | A kind of narrow linewidth excimer laser for improving resonant cavity |
| US9819136B2 (en) * | 2016-01-08 | 2017-11-14 | Cymer, Llc | Gas mixture control in a gas discharge light source |
| CN105655855A (en) * | 2016-02-26 | 2016-06-08 | 中国科学院光电研究院 | Sound wave and shock wave control device |
| WO2018061098A1 (en) | 2016-09-27 | 2018-04-05 | ギガフォトン株式会社 | Laser device |
| CN108493751A (en) * | 2018-01-19 | 2018-09-04 | 北京科益虹源光电技术有限公司 | A kind of Wavelength stability controller |
| CN112490825B (en) * | 2020-11-06 | 2021-11-09 | 中国科学院微电子研究所 | Line width narrowing module and excimer laser |
| CN113437631A (en) * | 2021-06-28 | 2021-09-24 | 北京科益虹源光电技术有限公司 | Excimer laser and line width narrowing device and method |
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| CN1050234C (en) * | 1996-01-05 | 2000-03-08 | 中国科学院物理研究所 | Compound cavity modulating light parameter oscillator |
| JP3365500B2 (en) * | 2000-01-19 | 2003-01-14 | ウシオ電機株式会社 | Narrow band ArF excimer laser device |
| JP2007005538A (en) * | 2005-06-23 | 2007-01-11 | Komatsu Ltd | Multiple wavelength oscillation narrow band laser device |
| CN101145669A (en) * | 2007-10-25 | 2008-03-19 | 中国科学院上海光学精密机械研究所 | Narrow cable and wide optical fiber laser |
| DE102009010560A1 (en) * | 2009-02-17 | 2010-08-26 | Carl Zeiss Smt Ag | Projection exposure method, projection exposure apparatus, laser radiation source and bandwidth narrowing module for a laser radiation source |
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| CN103701025B (en) | 2016-08-24 |
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