CN203180306U - Composite cavity for improving output energy of excimer laser - Google Patents
Composite cavity for improving output energy of excimer laser Download PDFInfo
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- CN203180306U CN203180306U CN 201220708635 CN201220708635U CN203180306U CN 203180306 U CN203180306 U CN 203180306U CN 201220708635 CN201220708635 CN 201220708635 CN 201220708635 U CN201220708635 U CN 201220708635U CN 203180306 U CN203180306 U CN 203180306U
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Abstract
The utility model discloses a composite cavity for improving output energy of an excimer laser. The composite cavity for improving output energy of the excimer laser includes an excimer laser discharging cavity, a laser output module, a line width narrowing module and a laser amplifying module. The laser discharging cavity contains working gas. The working gas produces laser under an effect of an excitation source. A line width narrowing cavity is formed by the laser discharging cavity, the laser output module and the line width narrowing module and is used for performing line width narrowing of the laser produced by the working gas. An amplifying cavity is formed by the laser discharging cavity, the laser output module and the laser amplifying module and is used for realizing energy amplification of the laser through line width narrowing. The utility model can realize narrow line width output of the excimer laser and can also improve energy and stability of output laser through the design of the composite cavity for improving output energy of the excimer laser. At the same time, the composite cavity for improving output energy of the excimer laser provided by the utility model is simple in structure, convenient to process and convenient for tuning.
Description
Technical field
The utility model belongs to the laser technique field, is specifically related to a kind of Compound Cavity for excimer laser, and is particularly a kind of for the Compound Cavity that improves excimer laser output energy.
Background technology
Along with the development of semi-conductor industry, the continuous progress of large scale integrated circuit requires more and more highlyer to photoetching technique, as the excimer laser of photoetching light source the raising of photoetching technique is had key effect.This requires excimer laser to reach the output of narrow linewidth and macro-energy simultaneously, still, utilizes laser in the past to add the combination that live width is pressed narrow module, and the output of narrow linewidth is that loss with laser energy is cost.Therefore, in order to obtain narrow linewidth and high-octane output simultaneously, it is tuning to need a kind of mechanism of design that the energy of laser and live width are carried out, to obtain to satisfy the excimer laser of specific demand (for example as the photoetching light source).
The utility model content
(1) technical problem that will solve
Technical problem to be solved in the utility model proposes a kind of Compound Cavity, in order to press and improve laser output energy in narrow in the live width of carrying out to the laser of excimer laser output, to satisfy as demands of applications such as photoetching light sources.
(2) technical scheme
For solving the problems of the technologies described above, the utility model proposes a kind of Compound Cavity, comprise excimer laser discharge cavity and laser output module, described laser discharge includes working gas in the chamber, this working gas can produce laser under the driving source effect, also comprise live width pressure narrow module and laser amplification module, wherein, described laser discharge chamber, laser output module and live width are pressed narrow module to constitute a live width and are pressed narrow chamber, are used for that the laser that described working gas produces is carried out live width and press narrow; Described laser discharge chamber, laser output module and laser amplification module constitute an enlarged cavity, are used for that described laser after the live width pressure is narrow is carried out energy and amplify; And described laser output module is used for and will will press laser narrow and that energy amplifies to export through live width.
According to a kind of embodiment of the present utility model, described laser output module is an output coupling mirror, described laser discharge chamber has two ends, described output coupling mirror is arranged at an end in described laser discharge chamber, and described live width presses narrow module and laser amplification module to be arranged at the other end in described laser discharge chamber.
According to a kind of embodiment of the present utility model, described live width presses narrow module to comprise single prism or prism group, also comprise grating, described single prism or prism group are used for receiving the laser that is sent by the laser discharge chamber, this laser part is reflexed to described enlarged cavity, and to the remainder of this laser reflect with expand after incide described grating; It is that the incidence angle reception expands the back emitting laser from single prism or prism group that described grating is used for its blaze angle, makes and incides its lip-deep laser generation effect of dispersion, and the laser of the wavelength that satisfies blaze of grating condition is reflected back by former road.
According to a kind of embodiment of the present utility model, described laser amplification module is speculum, be used for receiving by described single prism or prism group part laser light reflected, and with in its described laser discharge of reflected back chamber, former road.
According to a kind of embodiment of the present utility model, when described live width pressed narrow module to comprise single prism, the plane of incidence of this single prism was 4.8%～24% for the reflectivity of the laser that is sent by described laser discharge chamber.
According to a kind of embodiment of the present utility model, when described live width presses narrow module to comprise the prism group, this prism group comprises a plurality of prisms of arranging in light path successively, wherein, for first prism that receives the laser of being launched by described laser discharge chamber this laser part is reflexed to described enlarged cavity.
According to a kind of embodiment of the present utility model, the plane of incidence of described first prism is 4.8%～24% for the reflectivity of the laser that is sent by described laser discharge chamber.
According to a kind of embodiment of the present utility model, described enlarged cavity also comprises etalon, and it is used for that the laser of incident on it is carried out live width and presses laser narrow and that transmission has specific centre wavelength.
According to a kind of embodiment of the present utility model, described etalon is used for directly receiving by single prism or prism group part laser light reflected, and the laser of transmission is incided on the described speculum.
According to a kind of embodiment of the present utility model, the live width of the spectrum line of the laser of described etalon institute transmission is identical with the live width of described Compound Cavity.
(3) beneficial effect
The utility model not only can be realized the output of excimer laser narrow linewidth, and the design by Compound Cavity, can improve energy and the stability of output laser, and is simultaneously simple in structure, is convenient to processing, tuning convenience.
Description of drawings
Fig. 1 is the structural representation of the Compound Cavity of first embodiment of the present utility model;
Fig. 2 is the structural representation that the live width of the Compound Cavity of second embodiment of the present utility model is pressed narrow module;
Fig. 3 is the structural representation of the Compound Cavity of the 3rd embodiment of the present utility model.
Embodiment
As previously mentioned, the utility model is that one of design can be regulated the live width of excimer laser and the mechanism of output energy simultaneously for the starting point of the design of Compound Cavity, require the excimer laser emitting laser to have the requirement of macro-energy and narrow linewidth output simultaneously in some application in order to satisfy, improve the energy of exporting laser when being implemented in narrow linewidth output.
Compound Cavity of the present utility model comprises excimer laser discharge cavity, laser output module, live width pressure narrow module and laser amplification module, wherein laser discharge chamber, laser output module and live width are pressed narrow module to constitute a live width and are pressed narrow resonant cavity, it is narrow that this resonant cavity can carry out the live width pressure to the laser that working gas in the laser discharge chamber produces, and is also referred to as live width and presses narrow chamber; Simultaneously, laser discharge chamber, laser output module and laser amplification module constitute a laser and amplify resonant cavity, also claim enlarged cavity.Laser after live width presses the live width pressure of narrow chamber output narrow is injected in enlarged cavity, along with the reciprocating vibration in laser amplifies resonant cavity is amplified gradually, because mode competition effect, the zlasing mode of this narrow linewidth can replace the wide range laser in the enlarged cavity, at this moment, this Compound Cavity can be exported the laser of narrow linewidth macro-energy.As seen, the Compound Cavity that described live width presses narrow chamber and enlarged cavity to constitute can realize the laser output of narrow linewidth, macro-energy, and the laser that this kind Compound Cavity produces is by the outgoing of laser output module.
Laser output module of the present utility model is used for cooperating live width to press narrow module and laser amplification module to constitute laserresonator, be a kind of output coupling mirror of excimer laser system, can be constituted by the flat mirror with certain reflectivity (20%～73%) or the very high flat mirror of not plated film of transmitance usually.
Live width of the present utility model presses narrow module to be used for the laser spectroscopy that the control laser vibrates naturally and exports, comprise that live width presses selection narrow and centre wavelength, can realize the output of needed laser linewidth in the practical application and centre wavelength, usually can be by multiple chromatic dispersion combination of elements, as formations such as prism, grating, etalons.Live width presses the function of narrow module also needing to realize the gain media mating reaction of inside, laser discharge chamber, and gain media is the working gas of excimer laser.
Laser amplification module of the present utility model is realized the amplification of energy for the laser after narrow to the live width pressure, be equivalent to another laserresonator, usually can cooperate output coupling mirror to constitute by the speculum with certain reflectivity, the function of laser amplification module also needing to realize the gain media mating reaction of inside, laser discharge chamber.
For making the purpose of this utility model, technical scheme and advantage clearer, below in conjunction with specific embodiment, and with reference to accompanying drawing, the utility model is described in further detail.
First embodiment
Fig. 1 has shown the structural representation of first embodiment of the present utility model.This first embodiment is Compound Cavity.As shown in Figure 1, described Compound Cavity comprises excimer laser discharge cavity 1, output coupling mirror 2, prism 3, speculum 4 and grating 5.Wherein, output coupling mirror 2 has constituted aforesaid laser output module, and prism 3 and grating 5 have constituted aforesaid live width and pressed narrow module, and speculum 4 has constituted aforesaid laser amplification module.
Excimer laser refers to be excited the laser that dimer produces.When inert gas and halogen gas mix with pressure by a certain percentage, under the effect of driving source, make gas atom from the ground state transition to excitation state, even be ionized.The atom or the ion that are in excitation state are easy to be combined into molecule, and only there was tens nanoseconds in the life-span of this molecule.When the molecular number of excitation state far more than ground state quasi-molecule number, just form the number of ions counter-rotating.When quasi-molecule returns ground state from the excitation state transition, discharge photon, launch laser through internal oscillation.Rare gas and halogen gas are dissociated into 2 atoms rapidly from the quasi-molecule state simultaneously.Described excimer laser discharge cavity 1 is an integrated modular discharge cavity, formed by pumping source, working media and sparking electrode etc., and be the laser most important parts.Described laser discharge chamber 1 can produce laser under pumping condition, utilize high voltage electric energy as the operation material (ArF etc.) in the driving source excitation laser chamber, thereby realizes the counter-rotating of particle, forms laser generation in laser discharge chamber 1, outwards exports laser.
Described prism 3 is arranged near the outgoing window with respect to the other end of output coupling mirror 2 in laser discharge chamber 1, as shown in fig. 1, the drift angle of prism 3 upwards, laser is from the hypotenuse incident of prism 3, from a right-angle side outgoing of prism 3.Prism 3 serves as live width on the one hand and presses the prism that expands in the narrow module, make that the length that incides the laser on the grating 5 is enough big, further promote the selection of 5 pairs of centre wavelengths of grating and live width, on the other hand, part laser in the reflection of the plane of incidence of prism 3 incides on the speculum 4, makes laser to vibrate in enlarged cavity.The material of prism 3 can be ultraviolet level fused silica material or the good material of ultraviolet light transmission, as CaF
2, MgF
2Deng.Prism 3 can be right-angle prism or prism with special angle, as long as it can realize the effect that expands to light beam.For example drift angle is 69 °～76 ° prism, and simultaneously, the reflectivity of light beam plane of incidence on prism 3 needs strict design, and the principle of design is to make that the laser energy that is injected into live width pressure narrow module is close with the laser energy that is injected into enlarged cavity.According to inventor's of the present utility model calculating and experiment, according to a kind of preferred embodiment of the present utility model, the reflectivity of the plane of incidence of prism 3 is 4.8%～24%.The reflection of the plane of incidence of prism 3 more preferably 10%～20%.
For excimer laser, when the molecular number of excitation state far more than ground state quasi-molecule number, just form the number of ions counter-rotating, when quasi-molecule returns ground state from the excitation state transition, discharge photon, the light that sends in the discharge cavity this moment is called the laser of laser, and laser amplifies through internal oscillation, becomes laser emitting at last.Common excimer laser emitting laser is positioned at ultraviolet band, produces 193nm laser as the ArF laser, and the KrF laser produces 248nm laser.
For having two by lasing resonant cavity this moment, they press narrow module by the live width that prism 3, grating 5 constitute, and live width is pressed narrow module and output coupling mirror 2, laser discharge chamber 1 to constitute live width and pressed narrow chamber; Simultaneously, speculum 4 is as the laser amplification module, and laser discharge chamber 1, output coupling mirror 2 and speculum 4 have constituted an enlarged cavity.As seen, enlarged cavity does not contain dispersion element.
It is such that live width is pressed the operation principle in narrow chamber: when the laser in the laser discharge chamber 1 incides the hypotenuse of prism 3, expanding multiple from the light beam of right-angle side outgoing with respect to incident light is about about 10 times, light beam after expanding is that incidence angle projects on the grating 5 with the blaze angle of grating 5, because grating 5 is that Littrow is from quasi-mode, return from the former road of laser of the generation chromatic dispersion of grating 5 reflected backs, at this moment, grating 5 and output coupling mirror 2 have constituted a resonant cavity, this resonant cavity is described live width and presses narrow chamber, it presses the live width of narrow module to press narrow chamber from the laser of output coupling mirror 2 output narrow linewidths 2 by the live width that comprises prism 3 and grating 5 combinations, because this live width is pressed narrow chamber, expanded by 3 pairs of light of prism, light after expanding incides on the grating, utilize dispersion interaction to select spectrum and live width, press narrow chamber emitting laser to become the laser of narrow linewidth from live width.
Meanwhile, after laser produces, press the reciprocal process of propagating in narrow chamber from live width, when inciding the hypotenuse face of prism 3, some laser is reflected on the speculum 4.This speculum 4 is preferably the speculum with high reflectance.At this moment, the resonant cavity that laser amplifies, i.e. an enlarged cavity have been constituted by speculum 4 and output coupling mirror 2.
Laser in above-mentioned two resonant cavitys, namely the laser of narrow linewidth through mode competition, is constantly amplified in enlarged cavity.The process of mode competition is such, has at least two kinds of zlasing modes in the Compound Cavity, and a kind of is that live width is pressed narrow laser, is called v
1, a kind of is the interior wideer laser of high-energy live width of enlarged cavity, is called v
2During beginning, the gain of these two kinds of laser is all greater than threshold value, thereby the light intensity of two patterns all increases gradually.When gain curve descends when reaching v gradually
2The laser gain of pattern equals loss, thereby energy no longer increases, but this moment v
1The gain of pattern is still greater than threshold value, and energy also continues to increase, and makes v so soon
2The gain coefficient of pattern is less than threshold value, so the light intensity of this pattern weakens very soon, even extinguishes.Has only a v in the last resonant cavity
1Pattern forms stable vibration.The vibration in the enlarged cavity just will be pressed the mode locking of the narrow-linewidth laser in the narrow chamber by live width, thereby realize the laser generation of high-energy, narrow linewidth, and cause finally exporting laser thus and have narrow linewidth, high-octane characteristics.
Second embodiment
Second embodiment is identical on overall structure with first embodiment, and difference is, second embodiment has adopted the prism group to replace single prism 3 among first embodiment.That is to say that the live width in the Compound Cavity of second embodiment presses narrow module different with first embodiment.
Fig. 2 is the structural representation that the live width among second embodiment of Compound Cavity of the present utility model is pressed narrow module.As shown in Figure 2, the prism group is made up of a plurality of right- angle prisms 31,32,33 that are arranged in order, and prism 31 receives laser discharge chamber 1 emitting laser from hypotenuse, from the right-angle side outgoing; Prism 32 receives prism 31 emitting lasers from hypotenuse, and from the right-angle side outgoing, prism 33 receives prism 32 emitting lasers from hypotenuse, shines on the grating 5 from right-angle side.
The effect of prism 31 is identical with prism 3 among first embodiment, and the requirement of the reflectivity of its plane of incidence is also identical with prism 3, and namely the reflectivity of the plane of incidence is 4.8%～24%, and more preferably 10%～20%.
The prism group of using a plurality of prisms to constitute can more easily realize the requirement to the beam expander multiple, therefore can promote the output of narrow linewidth.But also can increase Compound Cavity to absorption and the loss of light energy by increasing of number of prisms, be unfavorable for the output of high energy laser.
The 3rd embodiment
Fig. 3 is the structural representation of the 3rd embodiment of Compound Cavity of the present utility model.As shown in Figure 3, the basic structure of the 3rd embodiment is also identical with first embodiment, and difference is to have increased an etalon 6 in enlarged cavity.So-called etalon is the dispersion element that a kind of multiple-beam interference principle is made.At optical technical field, Fabry-Perot interferometer (Fabry-P é rot interferometer) is a kind of multi-beam interferometer of being made up of two parallel glass plates, and wherein two glass plate interior surface opposing all have high reflectance.Fabry-Perot interferometer also often is called Fabry Perot resonator, and when coming fixed interval with the hollow sept of regular length between two glass plates, it also is known as Fabry-Perot etalon, or directly abbreviates etalon as.
As shown in Figure 3, in this embodiment, live width presses narrow module to comprise single prism 3, but also can substitute single prism 3 by the prism group shown in Fig. 2.Prism 3 is right-angle prism in this second embodiment, its hypotenuse receives laser discharge chamber 1 emitting laser, and be that the plane of incidence reflexes to etalon 6 with this laser part with this hypotenuse, the remainder of this laser reflects in prism 3 and expands, and shines on the grating 5 from its right-angle side.
Etalon 6 is used for receiving by prism 3 part laser light reflected, and carry out live width and press laser narrow and that transmission has specific centre wavelength being incident to laser on it, etalon 6 is placed in the enlarged cavity, can in enlarged cavity, realize the selection to laser linewidth and centre wavelength, to assist live width to press the function of narrow module, therefore more be conducive to the outgoing of narrow linewidth, intensity laser.The live width of the spectrum line of 6 transmission lasers of etalon is consistent with the desired live width of whole Compound Cavity.
Use etalon 6 more stably to export at target live width and centre wavelength, but because it belongs to a kind of losser, also can influence the raising of laser energy when placing in the Compound Cavity.
Embodiment described above realizes particular embodiment of the present utility model, and according to the utility model, energy amplification module, live width press narrow module to be made of other optical elements that meet the excimer laser characteristics.The quantity of prism in the prism group among second embodiment, and among each embodiment for interpolation or the deletion of other opticses, the person of ordinary skill in the field can carry out under the condition that does not break away from purport of the present utility model according to actual needs.Therefore above-described embodiment does not constitute the restriction to protection range of the present utility model, and is all within spirit of the present utility model and principle, any modification of making, is equal to replacement, improvement etc., all should be included within the protection range of the present utility model.
Claims (10)
1. a Compound Cavity comprises excimer laser discharge cavity and laser output module, and described laser discharge includes working gas in the chamber, this working gas can produce laser under the driving source effect, it is characterized in that, also comprises live width pressure narrow module and laser amplification module, wherein
Described laser discharge chamber, laser output module and live width are pressed narrow module to constitute a live width and are pressed narrow chamber, are used for that the laser that described working gas produces is carried out live width and press narrow; And
Described laser discharge chamber, laser output module and laser amplification module constitute an enlarged cavity, are used for that described laser after the live width pressure is narrow is carried out energy and amplify.
2. Compound Cavity as claimed in claim 1, it is characterized in that, described laser discharge chamber (1) has two ends, described Compound Cavity also comprises an output coupling mirror (2), this output coupling mirror (2) is arranged at an end in described laser discharge chamber (1), and described live width presses narrow module and laser amplification module to be arranged at the other end in described laser discharge chamber (1).
3. Compound Cavity as claimed in claim 2 is characterized in that, described live width presses narrow module to comprise single prism (3) or prism group, also comprises grating (5),
Described single prism (3) or prism group be used for to receive the laser that is sent by laser discharge chamber (1), and this laser part is reflexed to described enlarged cavity, and to the remainder of this laser reflect with expand after shine described grating (5);
It is that the incidence angle reception expands the back emitting laser from single prism (3) or prism group that described grating (5) is used for its blaze angle, make and incide its lip-deep laser generation effect of dispersion, and the laser of the wavelength that satisfies blaze of grating condition is reflected back by former road.
4. Compound Cavity as claimed in claim 3 is characterized in that, described laser amplification module is speculum (4), be used for receiving by described single prism (3) or prism group part laser light reflected, and with in its described laser discharge of reflected back chamber, former road (1).
5. Compound Cavity as claimed in claim 4 is characterized in that, when described live width pressed narrow module to comprise single prism (3), the plane of incidence of this prism (3) was 4.8%～24% for the reflectivity of the laser that is sent by described laser discharge chamber.
6. Compound Cavity as claimed in claim 5 is characterized in that, the plane of incidence of described prism (3) is 10%～20% for the reflectivity of the laser that is sent by described laser discharge chamber.
7. Compound Cavity as claimed in claim 4, it is characterized in that, when described live width presses narrow module to comprise the prism group, this prism group comprises a plurality of prisms of arranging in light path successively, wherein, for first prism that receives the laser of being launched by described laser discharge chamber (1) this laser part is reflexed to described enlarged cavity.
8. Compound Cavity as claimed in claim 7 is characterized in that, the plane of incidence of described first prism is 4.8%～24% for the reflectivity of the laser that is sent by described laser discharge chamber.
9. Compound Cavity as claimed in claim 3, it is characterized in that, described enlarged cavity also comprises etalon (6), and described etalon (6) is used for directly receiving by single prism (3) or prism group part laser light reflected, and the laser of transmission is incided on the described speculum (4).
10. Compound Cavity as claimed in claim 9 is characterized in that, the live width of the spectrum line of the laser of described etalon (6) institute transmission is identical with the live width of described Compound Cavity.
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| Application Number | Priority Date | Filing Date | Title |
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| CN 201220708635 CN203180306U (en) | 2012-12-20 | 2012-12-20 | Composite cavity for improving output energy of excimer laser |
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| CN 201220708635 CN203180306U (en) | 2012-12-20 | 2012-12-20 | Composite cavity for improving output energy of excimer laser |
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| CN203180306U true CN203180306U (en) | 2013-09-04 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104092090A (en) * | 2014-07-25 | 2014-10-08 | 中国科学院光电研究院 | Laser system of double-cavity structure and energy controllable tuning method thereof |
| CN104485574A (en) * | 2014-12-03 | 2015-04-01 | 西北核技术研究所 | Laser line width compressing module and narrow-line-width laser |
| CN105655870A (en) * | 2015-12-11 | 2016-06-08 | 中国人民解放军国防科学技术大学 | Tunable-grating external cavity semiconductor laser based on prism beam expanding |
-
2012
- 2012-12-20 CN CN 201220708635 patent/CN203180306U/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104092090A (en) * | 2014-07-25 | 2014-10-08 | 中国科学院光电研究院 | Laser system of double-cavity structure and energy controllable tuning method thereof |
| CN104485574A (en) * | 2014-12-03 | 2015-04-01 | 西北核技术研究所 | Laser line width compressing module and narrow-line-width laser |
| CN105655870A (en) * | 2015-12-11 | 2016-06-08 | 中国人民解放军国防科学技术大学 | Tunable-grating external cavity semiconductor laser based on prism beam expanding |
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| TR01 | Transfer of patent right |
Effective date of registration: 20200902 Address after: 100029 Beijing city Chaoyang District Beitucheng West Road No. 3 Patentee after: Institute of Microelectronics, Chinese Academy of Sciences Address before: 100190, No. 19 West Fourth Ring Road, Beijing, Haidian District Patentee before: Research Institute of aerospace information innovation, Chinese Academy of Sciences Effective date of registration: 20200902 Address after: 100190, No. 19 West Fourth Ring Road, Beijing, Haidian District Patentee after: Research Institute of aerospace information innovation, Chinese Academy of Sciences Address before: 100094, No. 9 Deng Nan Road, Beijing, Haidian District Patentee before: Academy of Opto-Electronics, Chinese Academy of Sciences |
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Granted publication date: 20130904 |