CN203884139U - Element mounting device - Google Patents

Element mounting device Download PDF

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Publication number
CN203884139U
CN203884139U CN201420287928.8U CN201420287928U CN203884139U CN 203884139 U CN203884139 U CN 203884139U CN 201420287928 U CN201420287928 U CN 201420287928U CN 203884139 U CN203884139 U CN 203884139U
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CN
China
Prior art keywords
light
filter
illumination light
led element
fluorophor
Prior art date
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Active
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CN201420287928.8U
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Chinese (zh)
Inventor
加藤秀明
大塚俊英
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Panasonic Holdings Corp
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Matsushita Electric Industrial Co Ltd
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Abstract

The utility model provides an element mounting device which can mount a lens element onto a phosphor-coated LED element with low cost and high positioning precision. A substrate identification camera unit which photographs the phosphor coated on the LED device installed after a lighting substrate is arranged to be a structure having a plane lighting unit (a lighting portion) and a camera (an image capturing portion). The plane lighting unit is equipped with a first light filter, and irradiates illumination light on a photographic object part of the substrate through the first light filter. The first light filter has a light filtering characteristic of converting the light emitted by a light source portion into illumination light in a specific wavelength domain. The camera is equipped with a second light filter, and receives the reflected light of the illumination light reflected from the photographic object part through the second light filter. The second filter has a light filtering characteristic that activation light generated by the phosphor which is activated by the illumination light that strikes the phosphor is allowed to pass and the reflected light of the illumination light from a non-phosphor-coated plastic mold portion of the LED element is not allowed to pass.

Description

Element fixing apparatus
Technical field
The utility model relates to the element fixing apparatus that lens element is installed on to the LED element that is coated with fluorophor.
Background technology
Light supply apparatus as the light supply apparatus of the use backlight of display floater or general lighting device, is widely used LED element is installed on to the LED illuminating board that substrate forms.In light supply apparatus, according to the requirement of cutting down cost, require to obtain uniform illumination by the LED element of the least possible quantity, therefore use the lens that light is spread to use to be installed on the structure of LED element.In the mode of this mounted lens, in order to obtain uniform light diffusion effect, requirement makes the optical axis of lens carry out exactly contraposition with respect to LED element, therefore in the element fixing apparatus that lens element is installed on to LED element, use the structure that possesses recognition process unit, described recognition process unit carries out location recognition (for example, with reference to patent documentation 1) to being installed on the fluorophor applying on the LED element of state of illuminating board.In the prior art example shown in this patent documentation 1, make the reverberation producing to the irradiation of LED element ultraviolet light as illumination light to substrate, identify video camera incident via filter, by image recognition, only extract the fluorophor that is coated on LED element thus.
Prior art document
Patent documentation
Patent documentation 1: TOHKEMY 2013-77648 communique
Utility model content
Yet, in above-mentioned prior art example, due to the structure of carrying out image recognition to being coated on the fluorophor of LED element using ultraviolet light as illumination light, when universal element fixing apparatus is applicable to the production line of LED illuminating board, there is such as described below difficult point.That is, in the pattern recognition device of universal element fixing apparatus, the general white illumination light using White LED etc. as light source, therefore in the situation that identifying object is the LED element that is coated with the state of fluorophor, is difficult to guarantee required accuracy of identification.The mold portion of LED element is generally white, in mold portion, covers LED element and the fluorophor that applies is faint yellow, is therefore difficult to clearly identify them obtaining on image.So, there are the following problems in the prior art: in the location recognition of the LED element after coating fluorophor, need special-purpose pattern recognition device, by possessing the element fixing apparatus of general, the low-cost type of the pattern recognition device that uses white illumination light, be difficult to carry out installing to the element of the LED element after coating fluorophor with high position precision.
Therefore, the purpose of this utility model is to provide a kind of and can carries out lens element to the element fixing apparatus of the installation of the LED element after coating fluorophor with low cost and high position precision.
Element fixing apparatus of the present utility model is installed on lens element the illuminating board that LED element is installed, wherein, described element fixing apparatus possesses: recognition unit, and by filming apparatus, the fluorophor that is formed at the substrate identification mark of described illuminating board and is coated on described LED element is taken and carried out location recognition, and positioning unit, installation location when the result of the location recognition based on described recognition unit carries out described lens element to be installed on described illuminating board, described filming apparatus has: Lighting Division, be provided with the first filter, and to irradiating described illumination light in the reference object position of described illuminating board, described the first filter has the light-filtering characteristic that the light that light source portion is sent is converted to the illumination light in specific wavelength territory via this first filter, and image obtaining section, be provided with the second filter, and thereby the reverberation that receives the described illumination light reflecting from described reference object position via described the second filter is obtained the image at this reference object position, described the second filter has makes the light-filtering characteristic that excites exciting light that described fluorophor produces to see through and do not make the reverberation of the described illumination light of the mold portion of fluorophor described in comfortable described LED element uncoated to see through by described illumination light incident, the result of the location recognition of the described fluorophor that described positioning unit detects according to the image based on being obtained by described image obtaining section, described lens element is positioned with respect to described LED element.
Utility model effect
According to the utility model, to be made as the structure that possesses Lighting Division and image obtaining section to being installed on the filming apparatus that the fluorophor that applies on the LED element after illuminating board takes, described Lighting Division is provided with the first filter and the reference object position irradiating illumination light to illuminating board via this first filter, described the first filter has the light-filtering characteristic that the light that light source portion is sent is converted to the illumination light in specific wavelength territory, described image obtaining section is provided with the second filter and receives the reverberation of the illumination light reflecting from reference object position and obtain image via the second filter, described the second filter has to be made to carry out by illumination light the light-filtering characteristic that incident comes exciting light that excited fluophor produces to see through and do not make the reverberation of illumination light of the mold portion of comfortable LED element uncoated fluorophor to see through, can with high accuracy, identify fluorophor by having used the universal pattern recognition device of white illumination light thus, can carry out lens element to the installation that applies the LED element after fluorophor with low cost and high position precision.
Accompanying drawing explanation
Fig. 1 is the vertical view of the element fixing apparatus of an execution mode of the present utility model.
Fig. 2 is the end view of the mounting head in the element fixing apparatus of an execution mode of the present utility model.
Fig. 3 is the structure key diagram for the filming apparatus of the element fixing apparatus of an execution mode of the present utility model.
Fig. 4 is the key diagram of the component recognition in the element fixing apparatus of an execution mode of the present utility model.
Fig. 5 is the structure key diagram of the Lighting Division for shooting in the element fixing apparatus of an execution mode of the present utility model.
Fig. 6 is the function declaration figure of the Lighting Division for shooting in the element fixing apparatus of an execution mode of the present utility model.
Fig. 7 is the specification figure of the component mounting method of an execution mode of the present utility model.
Label declaration
7 Y-axis travelling carriages
8 X-axis travelling carriages
9 mounting heads
16 LED elements
17 resins
19 lens elements
20 substrate identification camera units
21 light accepting parts
22 optical units
23 video cameras
24 co-axial illumination units
26 second filters
30 flat lighting units
31 illuminating board
32 light source portion
32a the first illumination light source portion
32b the second illumination light source portion
32c the 3rd illumination light source portion
33 first filters
Embodiment
Then, with reference to the accompanying drawings of execution mode of the present utility model.First, with reference to Fig. 1, Fig. 2, the structure of element fixing apparatus is described.In the present embodiment, this element fixing apparatus is configured on the LED illuminating board production line of manufacturing LED illuminating board, for lens element being installed on to the purposes of the illuminating board that LED element is installed.
In Fig. 1, on base station 1, along directions X, dispose carrying channel 2.Carrying channel 2 conveyances have been installed the illuminating board 3 of LED element and (have been sketched as " substrate 3 " below, in front operation.), and in the installation site being set on carrying channel 2, substrate 3 is positioned.In the both sides of carrying channel 2, be provided with component feeding portion 4, in component feeding portion 4, a plurality of element loaders 5 be installed.In the present embodiment, these element loaders comprise the element loader of supplying with the lens element 19 (with reference to Fig. 2) that covers LED element and install.
The Y-axis travelling carriage 7 that possesses straight line driving mechanism is flatly disposed at an end of the directions X of base station 1 along Y-direction.At Y-axis travelling carriage 7, in the mode moving along Y-direction freely, two X-axis travelling carriages 8 are installed, at each X-axis travelling carriage 8, in the mode moving along directions X freely, mounting head 9 are installed.As shown in Figure 2, X-axis travelling carriage 8, by usining beam parts 8a that elongated shape arranges along directions X as main body, disposes line slideway 13 at beam parts 8a along continuous straight runs.At line slideway 13, in the mode of sliding freely along directions X, be embedded with linear slider 14, linear slider 14 via the combination bracket 9a of the rectangular shape with vertical position configuration with mounting head 9 combinations.In conjunction with bracket 9a, be combined with the movable piece 12 that forms straight line driving mechanism, movable piece 12 slides with respect to the part 11 that is relatively fixed.
Mounting head 9 is the multistation formula heads that possess a plurality of units holding head 10, by being arranged on the suction nozzle 10a (with reference to Fig. 2) of the bottom of each unit holding head 10, by suction nozzle 10a, from element loader 5 taking-ups of component feeding portion 4, comprise the electronic component of lens element, and be installed on by the substrate 3 behind carrying channel 2 conveyances location.Between component feeding portion 4 and carrying channel 2, dispose component recognition video camera 6, when the mounting head 9 from component feeding portion 4 taking-up electronic components moves above component recognition video camera 6,6 pairs, component recognition video camera is held in the electronic component of the state of mounting head 9 and takes and identify.When electronic component is installed on to substrate 3, the position correction while carrying element based on this recognition result.
In mounting head 9, the mobile identification of the substrate as filming apparatus camera unit 20 location and installation are in the below of X-axis travelling carriage 8 integratedly.As shown in Figure 2, substrate is identified camera unit 20 so that shooting optical axis a posture is down installed in conjunction with bracket 9a, and to the top of substrate 3, move together with mounting head 9, and the LED element 16 that is formed at the substrate identification mark (omit diagram) of substrate 3 and is installed in advance substrate 3 is taken.And, the position probing result of the LED element 16 of obtaining based on this shooting results is carried out to identifying processing, the lens element 19 that absorption is held in to suction nozzle 10a is installed on LED element 16.Surrounding at LED element 16 is coated with in advance for engaging the resin 18 for joint of lens element 19.
As shown in Fig. 3 (a), LED element 16 forms following structure: the round dyke 16b projection that is provided with recess 16c is arranged to the upper surface of the 16a of flat base portion, covering is installed on the LED element 15 of recess 16c and is coated with resin 17.At this, LED element 15 is blue leds, uses the resin that comprises the fluorophor (for example YAG fluorophor) that sends the blueness of sending with LED element 15 and have the yellow fluorescence of complementary color relation as resin 17.
At the blue light sending from LED element 15, see through resin 17 and the process of irradiating, with the yellow colour mixture that the interior contained fluorophor of resin 17 sends, become white light and irradiate.And the white light irradiating is spread by lens element 19 and the scope of Xiang Gengkuan is irradiated.Now, in order to obtain good diffusion effect, need to make lens element 19 carry out exactly contraposition with respect to LED element 16.
In the present embodiment, by taking LED element 16 by substrate identification camera unit 20, guarantee that lens element 19 is with respect to the aligning accuracy of LED element 16.; as shown in Fig. 3 (b); the plane picture of the LED element 16 of obtaining taking LED element 16 carries out identifying processing; identify thus the center C of resin 17; when You unit's holding head 10 is installed on LED element 16 by lens element 19, the lens element 19 that makes absorption be held in suction nozzle 10a carries out contraposition with respect to identified center C.
The structure of substrate identification camera unit 20 then, is described with reference to Fig. 4.As shown in Figure 4, substrate identification camera unit 20 forms following structure: using the light accepting part 21 that is built-in with photo detector 21a and the optical unit 22 that possesses lens 22a, 22b and prism 22c in conjunction with and as video camera 23, co-axial illumination units 24 is combined with the lower face side of video camera 23, and at the lower surface of co-axial illumination units 24, flat lighting unit 30 is installed.
Light accepting part 21 is to be made as shooting optical axis a posture and optical unit 22 combinations of level, via the lens 22b in reference object thing side after the pickup light of lower direction vertical direction incident reflects into horizontal direction by prism 22c via lens 22a to photo detector 21a incident, make the image imaging of reference object thing of the focal position in regulation in photo detector 21a.And, by 27 pairs of picture signals that obtained by photo detector 21a of identifying processing portion, carry out identifying processing, detect thus the center C shown in Fig. 3 (b).When lens element 19 is installed on to LED element 16, recognition result based on identifying processing portion 27, by control part (omitting diagram), Y-axis travelling carriage 7, X-axis travelling carriage 8 are controlled, made thus absorption be held in the lens element 19 and center C contraposition of suction nozzle 10a.
Therefore, identifying processing portion 27 becomes following recognition unit: the resin 17 (fluorophor) that 20 pairs of the camera units of substrate identification by as filming apparatus are formed at the substrate identification mark of substrate 3 (illuminating board) and are coated on LED element 16 is taken and carried out location recognition.And, the positioning unit of the installation location when result of the location recognition of Y-axis travelling carriage 7, X-axis travelling carriage 8 and the recognition unit of control part formation based on above-mentioned carries out lens element 19 to be installed on substrate 3.
Co-axial illumination units 24 has and possesses the coaxial-illuminating light source portion 25 of a plurality of LED25a and the semi-transparent semi-reflecting lens 24a that the illumination light from coaxial-illuminating light source portion 25 is reflected downwards, the illumination light being reflected see through and the upper surface of flat lighting unit 30 between the second filter 26 of configuring and with respect to substrate 3 from vertical direction incident, and from taking the coaxial direction of optical axis a, reference object thing is thrown light on.
Flat lighting unit 30 has the function to the substrate 3 irradiating illumination light of the reference object as video camera 23 in the element fixing apparatus as electronic component apparatus for mounting, using the flat illuminating board 31 that disposes light source portion 32 in lower face side and be provided with at central portion the peristome 31a connecting for shooting optical axis a as main body.Below illuminating board 31, be provided with abreast diffuser plate 34 with illuminating board 31, on diffuser plate 34, in the position corresponding with peristome 31a, be provided with peristome 34a.In addition, between illuminating board 31 and diffuser plate 34, at assigned position, dispose the first filter 33 of the shape shown in Fig. 5 (c).
By being incorporated with under 20 pairs of states of taking as the substrate 3 of reference object of substrate identification camera unit of flat lighting unit 30, flat lighting unit 30 is in the relative position substantially in parallel of the substrate 3 with as reference object.Therefore, under this state, illuminating board 31 is located substantially in parallel with respect to the surface of substrate 3 between substrate 3 and video camera 23, and light source portion 32 is configured in substrate 3 across diffuser plate 34 and relative lower face side.In the flat lighting unit 30 shown in present embodiment, light source portion 32 consists of a plurality of independent light source portion that can control individually by lighting control section 35.
When lighting control section 35 is controlled light source portion 32, with reference to presetting according to the characteristic of reference object the illumination data that is stored in illumination data storage part 36.; using realize with the surface texture characteristic of reference object thing of reference object as substrate identification camera unit 20, the kind of identification of photographed data, the mode of optimum illumination condition corresponding to the object of identification, the light illumination mode that setting combines the break-make of each independent light source portion, illumination intensity.
Fig. 5 be illustrated in illuminating board 31 lower surface configuration light source portion 32 structure and at the first filter 33 and second filter 26 of the upper and lower surface configuration of illuminating board 31.As shown in Fig. 5 (b), in the surrounding of peristome 31a, dispose 3 kinds of independent light source portion, i.e. the first illumination light source portion 32a, the second illumination light source portion 32b, the 3rd illumination light source portion 32c.These independent light source portion form by a plurality of LED, and the kind of these LED is suitably selected according to reference object, object.At this, as the first illumination light source portion 32a, the second illumination light source portion 32b, use the LED that sends red light, as the 3rd illumination light source portion 32c, use the LED that sends white light in addition.
The first illumination light source portion 32a is configured in the position of the most close shooting optical axis a, and the second illumination light source portion 32b is configured to the outside around the first illumination light source portion 32a.And, the 3rd illumination light source portion 32c be only configured in the outside of the second illumination light source portion 32b and the rectangular extent (A represents with dotted line frame) put centered by taking optical axis a in four diagonal positions.
As shown in Fig. 5 (c), at the lower surface of illuminating board 31, in the scope corresponding with the 3rd illumination light source portion 32c, dispose the first filter 33.The first filter 33 has the light-filtering characteristic that the light that the 3rd illumination light source portion 32c of light source portion 32 is sent is converted to the illumination light in specific wavelength territory.At this, use and there is the filter that the white light that the 3rd illumination light source portion 32c is sent is converted to the light-filtering characteristic of blue light.And, by making flat lighting unit 30 action, flat lighting unit 30 via the first filter 33 to the reference object position of substrate 3, be that the upper surface of LED element 16 irradiates illumination light for shooting.; flat lighting unit 30 becomes following Lighting Division: arrange and to there is the first filter 33 of light-filtering characteristic that the light that light source portion 32 is sent is converted to the illumination light in specific wavelength territory, and via this first filter 33 the reference object position irradiating illumination light to substrate 3.
As shown in Fig. 5 (a), above peristome 31a, be provided with the second filter 26.The second filter 26 has following light-filtering characteristic: the exciting light that the fluorophor that illumination light incident by irradiating via the first filter 33 is excited contain in resin 17 produces sees through, and does not make the reverberation of illumination light of the mold portions such as the 16a of flat base portion, circle dyke 16b of comfortable LED element 16 uncoated resins 17 to see through.
Illumination light when Fig. 6 (a), (b) represent the shooting of the LED element 16 that undertaken by substrate identification camera unit 20 and this illumination light are reflected and are taken into the pickup light of video camera 23.At this, with the characteristic of reference object accordingly, only make the 3rd illumination light source portion 32c in a plurality of independent light source portion of light source portion 32 light.First, with reference to Fig. 6 (a), the reverberation irradiating from flat lighting unit 30 and produced by the 16a of flat base portion of LED element 16, the 16b reflection of circle dyke is described.
That is, the white illumination light of irradiating from the 3rd illumination light source portion 32c is converted into blue illumination light owing to seeing through the first filter 33, and to 16 incidents of LED element (arrow b).Now, because the mold portion of LED element 16 (16a of flat base portion, circle dyke 16b) is white in color, therefore from these parts reflect blue light and to the second filter 26 incidents (arrow c) upward.At this, the second filter 26 has the light-filtering characteristic that the reverberation from the illumination light of mold portion is seen through as described above, so these reverberation are blocked by the second filter 26 and are not taken into video camera 23.
Then, as shown in Fig. 6 (b), owing to irradiating and seeing through reverberation that the first filter 33 is converted into blue illumination light from the 3rd illumination light source portion 32c also to resin 17 incidents (arrow d) that are coated on LED element 16.And, utilize this incident light to excite the fluorophor containing in resin 17, yellow exciting light reflects and upward to the second filter 26 incidents (arrow e).At this, because the second filter 26 has the light-filtering characteristic that the exciting light that makes to excite the fluorophor in resin 17 to produce sees through as described above, so these reverberation see through the second filter 26 and are taken into video camera 23.
Thus, by video camera 23, obtain the recognition image shown in Fig. 6 (c).At this, obtain in image 23a, the background portion that comprises mold portion is shown as dark-coloured background portion 16*, and the partial display of the resin 17 that the comprises fluorophor resin portion 17* that is light tone.That is, in the present embodiment, video camera 23 passes through to receive from the reverberation of the illumination light of LED element 16 reflections as reference object position via the second filter 26, and brings into play function as the image obtaining section that obtains the image at this reference object position.In this image is obtained, and as video camera 23 use monochrome camera and only compare by the situation that common white light source is taken LED element 16, obtain the clearer recognition image in scope/position of resin 17.
Recognition image based on so obtaining of Fig. 7 explanation and lens element 19 is installed on to the installation method of substrate 3.First, as shown in Fig. 7 (a), by identifying processing portion 27 (recognition unit), the image of obtaining shown in Fig. 6 (c) is carried out to identifying processing, in LED element 16, detect thus the center C of resin 17.Now, due to the scope, position that obtain resin 17 image clearly, therefore can be with the position C of high accuracy inspection center.
Then,, as shown in Fig. 7 (b), by the positioning unit being formed by Y-axis travelling carriage 7, X-axis travelling carriage 8 and control part, the lens element 19 being kept by suction nozzle 10a absorption is positioned with respect to LED element 16.The result of the location recognition of the recognition unit of this location based on above-mentioned is by making lens element 19 center align and carry out with the center C of resin 17.Thus, the top from lens element 19 joint that the teat 19a of outstanding joint use is positioned at the surrounding that is coated in advance LED element 16 downwards with resin 18, the recess 19b that is located at the lower surface of lens element 19 is positioned at the top of LED element 16.
And the unit's of making holding head 10 declines, and lens element 19 is landed in the top of LED element 16, thus, as shown in Fig. 7 (c), LED element 16 is chimeric with the recess 19b of lens element 19, and teat 19a contacts and engages with substrate 3 with resin 18 with joint.Thus, lens element 19 is to the installation of substrate 3.
As described above, in the element fixing apparatus shown in present embodiment, to be made as the structure that possesses flat lighting unit 30 (Lighting Division) and video camera 23 (image obtaining section) to being installed on the substrate identification camera unit 20 that the resin 17 (fluorophor) of coating on the LED element 16 after substrate 3 takes, described flat lighting unit 30 is provided with the first filter 33 and the reference object position irradiating illumination light to substrate 3 via this first filter 33, described the first filter 33 has the light-filtering characteristic that the light that light source portion 32 is sent is converted to the illumination light in specific wavelength territory, described video camera 23 is provided with the second filter 26 and receives the reverberation of the illumination light reflecting from reference object position and obtain image via the second filter 26, described the second filter 26 has makes the light-filtering characteristic that comes exciting light that excited fluophor produces to see through and do not make the reverberation of illumination light of the mold portion of comfortable LED element 16 uncoated fluorophor to see through by illumination light incident.
Thus, can with high accuracy identification fluorophor, can carry out lens element 19 to the installation that applies the LED element 16 after fluorophor with low cost and high position precision by having used the universal pattern recognition device of white illumination light.
Industrial applicability
Element fixing apparatus of the present utility model has can carry out with low cost and high position precision the such effect of installation of lens element LED element after fluorophor to coating, is coated with the LED element of fluorophor and is useful in manufacturing the field of illuminating board lens element is installed on.

Claims (2)

1. an element fixing apparatus, is installed on lens element the illuminating board that LED element is installed,
Described element fixing apparatus is characterised in that to possess:
Recognition unit, is taken and carries out location recognition the fluorophor that is formed at the substrate identification mark of described illuminating board and is coated on described LED element by filming apparatus; And
Positioning unit, the installation location when result of the location recognition based on described recognition unit carries out described lens element to be installed on described illuminating board,
Described filming apparatus has:
Lighting Division, is provided with the first filter, and to irradiating described illumination light in the reference object position of described illuminating board, described the first filter has the light-filtering characteristic that the light that light source portion is sent is converted to the illumination light in specific wavelength territory via this first filter; And
Image obtaining section, be provided with the second filter, and thereby the reverberation that receives the described illumination light reflecting from described reference object position via described the second filter is obtained the image at this reference object position, described the second filter has makes the light-filtering characteristic that excites exciting light that described fluorophor produces to see through and do not make the reverberation of the described illumination light of the mold portion of fluorophor described in comfortable described LED element uncoated to see through by described illumination light incident
The result of the location recognition of the described fluorophor that described positioning unit detects according to the image based on being obtained by described image obtaining section, makes described lens element position with respect to described LED element.
2. element fixing apparatus according to claim 1, is characterized in that,
The illumination light in described specific wavelength territory is blue light.
CN201420287928.8U 2013-08-19 2014-05-30 Element mounting device Active CN203884139U (en)

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JP2013169525A JP5903563B2 (en) 2013-08-19 2013-08-19 Component mounting equipment

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CN104400177A (en) * 2014-12-04 2015-03-11 苏州大学 Device and method for quickly acquiring element for manual welding
CN109287110A (en) * 2017-07-20 2019-01-29 日本梅克特隆株式会社 Substrate position identification device, position identification processing unit (plant) and manufacture of substrates
CN112292024A (en) * 2015-02-26 2021-01-29 松下知识产权经营株式会社 Component mounting device and component mounting method

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CN112292024A (en) * 2015-02-26 2021-01-29 松下知识产权经营株式会社 Component mounting device and component mounting method
CN112292024B (en) * 2015-02-26 2022-02-25 松下知识产权经营株式会社 Component mounting device and component mounting method
CN109287110A (en) * 2017-07-20 2019-01-29 日本梅克特隆株式会社 Substrate position identification device, position identification processing unit (plant) and manufacture of substrates
CN109287110B (en) * 2017-07-20 2021-05-11 日本梅克特隆株式会社 Substrate position recognition device, position recognition processing device, and substrate manufacturing method

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JP2015038929A (en) 2015-02-26

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