CN203855681U - 一种热交换法蓝宝石生长炉系统及其电源控制系统 - Google Patents
一种热交换法蓝宝石生长炉系统及其电源控制系统 Download PDFInfo
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- CN203855681U CN203855681U CN201420225987.2U CN201420225987U CN203855681U CN 203855681 U CN203855681 U CN 203855681U CN 201420225987 U CN201420225987 U CN 201420225987U CN 203855681 U CN203855681 U CN 203855681U
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- 230000012010 growth Effects 0.000 title claims abstract description 29
- 229910052594 sapphire Inorganic materials 0.000 title claims abstract description 24
- 239000010980 sapphire Substances 0.000 title claims abstract description 24
- 238000001514 detection method Methods 0.000 claims abstract description 5
- 238000000034 method Methods 0.000 claims description 24
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 11
- 229910002804 graphite Inorganic materials 0.000 claims description 11
- 239000010439 graphite Substances 0.000 claims description 11
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 6
- 239000013078 crystal Substances 0.000 abstract description 15
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 11
- 229910052710 silicon Inorganic materials 0.000 abstract description 11
- 239000010703 silicon Substances 0.000 abstract description 11
- 238000004519 manufacturing process Methods 0.000 abstract description 7
- 230000000694 effects Effects 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 description 12
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 10
- 230000005669 field effect Effects 0.000 description 6
- 229910052742 iron Inorganic materials 0.000 description 5
- 238000005265 energy consumption Methods 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 238000009776 industrial production Methods 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 230000003698 anagen phase Effects 0.000 description 1
- 238000009529 body temperature measurement Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000005034 decoration Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000035484 reaction time Effects 0.000 description 1
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CN201420225987.2U CN203855681U (zh) | 2014-05-05 | 2014-05-05 | 一种热交换法蓝宝石生长炉系统及其电源控制系统 |
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CN201420225987.2U CN203855681U (zh) | 2014-05-05 | 2014-05-05 | 一种热交换法蓝宝石生长炉系统及其电源控制系统 |
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CN203855681U true CN203855681U (zh) | 2014-10-01 |
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CN201420225987.2U Expired - Lifetime CN203855681U (zh) | 2014-05-05 | 2014-05-05 | 一种热交换法蓝宝石生长炉系统及其电源控制系统 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105350076A (zh) * | 2015-11-06 | 2016-02-24 | 山西晶科光电材料有限公司 | 一种蓝宝石晶体生长温度的监测方法 |
CN107815727A (zh) * | 2017-11-16 | 2018-03-20 | 浙江晶盛机电股份有限公司 | 一种用于单晶炉的快捷化料机构 |
-
2014
- 2014-05-05 CN CN201420225987.2U patent/CN203855681U/zh not_active Expired - Lifetime
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105350076A (zh) * | 2015-11-06 | 2016-02-24 | 山西晶科光电材料有限公司 | 一种蓝宝石晶体生长温度的监测方法 |
CN107815727A (zh) * | 2017-11-16 | 2018-03-20 | 浙江晶盛机电股份有限公司 | 一种用于单晶炉的快捷化料机构 |
CN107815727B (zh) * | 2017-11-16 | 2023-11-17 | 浙江晶盛机电股份有限公司 | 一种用于单晶炉的快捷化料机构 |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C56 | Change in the name or address of the patentee | ||
CP01 | Change in the name or title of a patent holder |
Address after: 321037 No. 2111 Huafeng East Road, Jindong Economic Development Zone, Jinhua, Zhejiang Patentee after: ZHEJIANG YUNFENG NEW ENERGY TECHNOLOGY CO.,LTD. Address before: 321037 No. 2111 Huafeng East Road, Jindong Economic Development Zone, Jinhua, Zhejiang Patentee before: ZHEJIANG YUNFENG NEW ENERGY TECHNOLOGY Co.,Ltd. |
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CP02 | Change in the address of a patent holder | ||
CP02 | Change in the address of a patent holder |
Address after: 321000 4th floor, complex building, 1378 Kangji North Street, Jindong District, Jinhua City, Zhejiang Province Patentee after: ZHEJIANG YUNFENG NEW ENERGY TECHNOLOGY Co.,Ltd. Address before: 321037 No. 2111 Huafeng East Road, Jindong Economic Development Zone, Jinhua, Zhejiang Patentee before: ZHEJIANG YUNFENG NEW ENERGY TECHNOLOGY Co.,Ltd. |
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CX01 | Expiry of patent term | ||
CX01 | Expiry of patent term |
Granted publication date: 20141001 |