CN203840296U - Micromechanical disk resonator with electrodes being capable of moving transversely - Google Patents

Abstract

The utility model discloses a micromechanical disk resonator with electrodes being capable of moving transversely, which is characterized in that a vibration disk is supported by a bottom surface anchor, and a bias voltage welding point is arranged above the disk; an AC voltage welding point and an AC current welding point are introduced above an input electrode and an output electrode respectively; the other end of the input electrode and the other end of the output electrode are connected to rectangular electrode bars respectively and connected to rectangular elastic arms respectively which are fixed by spot supports; the rectangular elastic arms and the spot supports are connected by electrode arms; the surfaces of the rectangular elastic arms and the electrode arms are provided with electrically insulating layer silicon dioxide, and metal wires are laid above; an external gold wire ball bonding technology is adopted so as to connect driving current welding points at two ends of the metal wires to pins of a packaging tube shell by using gold wires, and a constant-current source is connected. The micromechanical disk resonator disclosed by the utility model enables the electrodes to generate fixed transverse movements under the action of an ampere force, and optimizes the electrode structure. The micromechanical disk resonator makes up mismatching of the electrode gaps at the two ends caused by machining errors through the transversely movable electrodes, thereby reducing motion resistance, and improving the performance of the resonator.

Description

A kind of electrode is movable micromechanical disk resonator laterally

Technical field

The utility model relates to a kind of micromechanical resonator structure, and especially a kind of electrode is movable micromechanical disk resonator laterally.

Background technology

MEMS (micro electro mechanical system) (Micro Electro Mechanical Systems is called for short MEMS), is widening and extending of microelectric technique, and it is that microelectric technique and precise machine machining are merged mutually, and the system that microelectronics and machinery are combined together.The relatively macroscopical electromechanical assembly of MEMS, it is advantageous that size is small, and thickness is not super many 1cm generally.In addition, MEMS device can with integrated circuit mutually compatible technique carry out in enormous quantities, low-cost production, so cost performance has largely raising with respect to traditional manufacturing technology.MEMS technology is the technology that is suitable for developing intellectual resource product most, and it can improve the computing capability of microelectronic product and the perception of microsensors and microactuators and control ability.

Micromechanical disk resonator is a kind of novel micro electronmechanical components and parts in recent years.Compare with Liang Shi, comb-tooth-type resonator, it has the advantages such as frequency is high, integrated level is high, Q value is high, power consumption is little, is therefore widely used in the wireless communication systems such as oscillator, filter.In disk resonator, the gap between input and output electrode and vibrating disk is determining the motion resistance of resonator, thereby affects output current size.In addition, disk resonator can be connected to form resonator array by tie-beam and other disks, thereby reduces linearly motion resistance.But, although input and output electrode adopts the identical techniques such as chemical wet etching to be made with the primary clearance between vibrating disk, due to the imperfection of technique, can make the electrode gap on both sides produce slight error.This error will cause resonator actual motion resistance higher than theoretical value, and the motion resistance of resonator array can not linearly be reduced with respect to single resonator.Therefore, optimize electrode structure, compensation, because does not mate in the two end electrodes gap that technique causes, is the problem of needing solution badly.

Summary of the invention

In order to overcome the existing deficiency of above-mentioned background technology, the utility model provides laterally movable micromechanical disk resonator of a kind of electrode.This resonator can change input and output electrode and disk primary clearance size, improves not mating of electrode gap, thereby reduces motion resistance.

The utility model solves the technical scheme that its technical problem adopts:

The utility model involving vibrations disk, electrode, electrode stem, Rectangular Elastic arm, horn, point-like supporting, plain conductor and substrate.

Vibrating disk bilateral symmetry is provided with electrode, and one of them electrode is that input electrode, another electrode are output electrode; One end of electrode stem is connected with electrode, and the other end is connected with Rectangular Elastic arm, and the two ends of Rectangular Elastic arm are fixing by horn and point-like supporting respectively, and point-like supporting below is substrate; Rectangular Elastic arm and horn surface arrange silicon dioxide electric insulation layer, and spread up plain conductor.

The beneficial effects of the utility model are: by the effect of Ampere force, make electrode produce fixing transverse shifting, optimized electrode structure.By transversely movable electrodes, make up the two end electrodes gap that fabrication error causes and do not mated, thereby reduced motion resistance, improve resonator behavior.

Accompanying drawing explanation

Fig. 1 is structure vertical view of the present utility model.

Fig. 2 is one side electrode structure left view in Fig. 1.

Fig. 3 is disc structure front view in Fig. 1.

In figure 1: vibrating disk, 2: disk anchor point, 3.1: input electrode, 3.2: output electrode, 4.1: alternating voltage solder joint, 4.2: alternating current solder joint, 5.1,5.2: electrode stem, 6.1,6.2: Rectangular Elastic arm, 7.1,7.2,7.3,7.4: horn, 8.1,8.2,8.3,8.4: point-like supporting, 9.1,9.2: plain conductor, 10.1,10.2,10.3,10.4: drive current solder joint, 11: bias voltage solder joint, 12: substrate.

Embodiment

Below in conjunction with drawings and Examples, the utility model is further illustrated.

In Fig. 1, vibrating disk 1 is unsettled on substrate 12, and disk anchor point 2 support disk 1 of its bottom center make it and substrate 12 isolation.Circular arc input electrode 3.1, output electrode 3.2 one end surround disk 1, and the other end connects a rectangular electrode bar 5.1,5.2, and are connected to by the fixing Rectangular Elastic arm 6.1,6.2 of point-like supporting 8.1,8.2,8.3,8.4.Between Rectangular Elastic arm 6.1,6.2 and point-like supporting 8.1,8.2,8.3,8.4, by horn 7.1,7.2,7.3,7.4, connected.Rectangular Elastic arm 6.1,6.2 and horn 7.1,7.2,7.3,7.4 surfaces arrange electric insulation layer silicon dioxide, and spread up plain conductor 9.1,9.2.Plain conductor 9.1,9.2 is by drive current solder joint 10.1,10.2,10.3,10.4 access constant-current sources.When plain conductor 9.1,9.2 is subject to uniform magnetic field inwards of vertical paper, if constant-current source direction that left side plain conductor 9.1 adds is for from top to bottom, the right plain conductor 9.2 senses of current are for from bottom to up time, the Ampere force producing on plain conductor 9.1,9.2 drives Rectangular Elastic arm 6.1,6.2 transverse shifting to the inside, and electrode 3.1,3.2 is also moved to the inside.

In Fig. 2, point-like supporting 8.1,8.2 makes horn, Rectangular Elastic arm, electrode stem and input and output electrode unsettled.Horn and Rectangular Elastic arm surface arrange electric insulation layer silicon dioxide, and spread up plain conductor 9.1.Plain conductor two ends arrange drive current solder joint 10.1,10.2 for inputting constant-current source.

In Fig. 3, Yi Bian cylindrical anchor 2 connects substrate 12, Yi Bian clutch disk 1 makes it unsettled on substrate 12.Disk top arranges bias voltage solder joint 11 and is connected on encapsulating package pin with gold thread.

Claims (1)

1. the horizontal movable micromechanical disk resonator of electrode, involving vibrations disk, electrode, electrode stem, Rectangular Elastic arm, horn, point-like supporting, plain conductor and substrate, is characterized in that:

Vibrating disk bilateral symmetry is provided with electrode, and one of them electrode is that input electrode, another electrode are output electrode; One end of electrode stem is connected with electrode, and the other end is connected with Rectangular Elastic arm, and the two ends of Rectangular Elastic arm are fixing by horn and point-like supporting respectively, and point-like supporting below is substrate; Rectangular Elastic arm and horn surface arrange silicon dioxide electric insulation layer, and spread up plain conductor.