CN203825365U - 一种新型高速数字扫描直写光刻装置 - Google Patents
一种新型高速数字扫描直写光刻装置 Download PDFInfo
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CN201410190903.0A Active CN104007620B (zh) | 2014-02-18 | 2014-05-08 | 一种新型高速数字扫描直写光刻装置 |
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Cited By (2)
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CN104007620A (zh) * | 2014-02-18 | 2014-08-27 | 苏州微影光电科技有限公司 | 一种新型高速数字扫描直写光刻装置 |
CN110187607A (zh) * | 2019-05-08 | 2019-08-30 | 苏州源卓光电科技有限公司 | 一种直写光刻机构及其曝光方法 |
Families Citing this family (4)
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CN106403903A (zh) * | 2016-08-30 | 2017-02-15 | 浙江启昊科技有限公司 | 一种激光数字高精度成像装置 |
US20190129308A1 (en) * | 2017-11-02 | 2019-05-02 | Taiwan Green Point Enterprises Co., Ltd. | Digital masking system, pattern imaging apparatus and digital masking method |
CN112808549A (zh) * | 2021-02-02 | 2021-05-18 | 北京梦之墨科技有限公司 | 一种光处理设备 |
CN113589658A (zh) * | 2021-07-30 | 2021-11-02 | 深圳市鹏基光电有限公司 | 基于lcd技术的曝光工艺以及uv光刻机 |
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US5082755A (en) * | 1989-10-02 | 1992-01-21 | General Electric Company | Liquid crystal programmable photoresist exposure method for making a set of masks |
AUPR323401A0 (en) * | 2001-02-22 | 2001-03-15 | Norseld Pty Ltd | Image amplification for laser systems |
JP2006108212A (ja) * | 2004-10-01 | 2006-04-20 | Canon Inc | 露光装置 |
CN100492176C (zh) * | 2007-05-29 | 2009-05-27 | 芯硕半导体(合肥)有限公司 | 数字光刻技术的相位控制和补偿方法 |
JP2009277903A (ja) * | 2008-05-15 | 2009-11-26 | Panasonic Corp | 電子部品形成装置および電子部品 |
CN203825365U (zh) * | 2014-02-18 | 2014-09-10 | 苏州微影光电科技有限公司 | 一种新型高速数字扫描直写光刻装置 |
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- 2014-05-08 CN CN201420232691.3U patent/CN203825365U/zh active Active
- 2014-05-08 CN CN201410190903.0A patent/CN104007620B/zh active Active
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104007620A (zh) * | 2014-02-18 | 2014-08-27 | 苏州微影光电科技有限公司 | 一种新型高速数字扫描直写光刻装置 |
CN104007620B (zh) * | 2014-02-18 | 2016-04-06 | 苏州微影光电科技有限公司 | 一种新型高速数字扫描直写光刻装置 |
CN110187607A (zh) * | 2019-05-08 | 2019-08-30 | 苏州源卓光电科技有限公司 | 一种直写光刻机构及其曝光方法 |
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CN104007620B (zh) | 2016-04-06 |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: Novel high-speed digital-scanning direct-writing photoetching device Effective date of registration: 20141223 Granted publication date: 20140910 Pledgee: Anhui state finance Company limited by guarantee Pledgor: Advaced Microlitho Instrument, Inc. Registration number: 2014340000009 |
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PLDC | Enforcement, change and cancellation of contracts on pledge of patent right or utility model | ||
PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20160128 Granted publication date: 20140910 Pledgee: Anhui state finance Company limited by guarantee Pledgor: Advaced Microlitho Instrument, Inc. Registration number: 2014340000009 |
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PLDC | Enforcement, change and cancellation of contracts on pledge of patent right or utility model | ||
CP01 | Change in the name or title of a patent holder | ||
CP01 | Change in the name or title of a patent holder |
Address after: 215636 Zhangjiagang City, Jiangsu Province, the new town of the sea dam road, Suzhou, micro shadow Photoelectric Technology Co., Ltd. Patentee after: Suzhou lithography Laser Technology Co., Ltd. Address before: 215636 Zhangjiagang City, Jiangsu Province, the new town of the sea dam road, Suzhou, micro shadow Photoelectric Technology Co., Ltd. Patentee before: Advaced Microlitho Instrument, Inc. |