CN203778253U - coating device for substrate side - Google Patents
coating device for substrate side Download PDFInfo
- Publication number
- CN203778253U CN203778253U CN201420146046.XU CN201420146046U CN203778253U CN 203778253 U CN203778253 U CN 203778253U CN 201420146046 U CN201420146046 U CN 201420146046U CN 203778253 U CN203778253 U CN 203778253U
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- moving mechanism
- axial moving
- axis direction
- coating apparatus
- substrate
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- 239000000758 substrate Substances 0.000 title claims abstract description 66
- 239000011248 coating agent Substances 0.000 title claims abstract description 53
- 238000000576 coating method Methods 0.000 title claims abstract description 53
- 230000007246 mechanism Effects 0.000 claims abstract description 143
- 238000001514 detection method Methods 0.000 claims description 31
- 230000008901 benefit Effects 0.000 abstract description 8
- 239000007921 spray Substances 0.000 abstract description 4
- 238000005507 spraying Methods 0.000 description 8
- 238000000034 method Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005457 optimization Methods 0.000 description 2
- 241001269238 Data Species 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
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- Spray Control Apparatus (AREA)
- Coating Apparatus (AREA)
Abstract
The utility model relates to a coating equipment for substrate side, this coating equipment includes a first XY axial moving mechanism, a Z axial rotary mechanism, a second XY axial moving mechanism, a plummer and a shower nozzle device, Z axial rotary mechanism connects on first XY axial moving mechanism and follows first XY axial moving mechanism to move; the second XY axial moving mechanism is fixed on the Z axial rotating mechanism and rotates along with the Z axial rotating mechanism; the bearing table is connected to the second XY axial moving mechanism and moves along with the second XY axial moving mechanism; the spray head device comprises a Z-axis moving mechanism and a spray head assembly arranged on the Z-axis moving mechanism, and the spray head assembly moves along with the Z-axis moving mechanism and is configured corresponding to the side face. Therefore, the utility model discloses can reach advantages such as film forming quality is excellent and thickness is even.
Description
Technical field
The utility model is relevant for a kind of coating apparatus, espespecially a kind of coating apparatus for substrate side surfaces.
Background technology
Traditional substrate thin film-forming method comprises a mechanical arm and a shower nozzle, shower nozzle is arranged on mechanical arm, re-use moving around of automatic controlling system mechanical arm, and make shower nozzle directly to substrate, spray action, and coordinate the surface configuration of substrate and area to move.
Yet, aforesaid substrate thin film-forming method is coated with operation for wide area surface such as the front of substrate, the back sides mostly, if but aforesaid substrate thin film-forming method is used on the small size surfaces such as side or ring shape face of substrate, easily there is the inhomogeneous and flash of coating to other surperficial problems of substrate, cause the shortcomings such as coating quality of forming film is not good, in uneven thickness.
Utility model content
The purpose of this utility model is to provide a kind of coating apparatus for substrate side surfaces, it utilizes the 2nd XY axial moving mechanism to drive the axle center of shape center and Z-axis direction rotating mechanism overlapping, Z-axis direction rotating mechanism drives plummer rotation again, and the one XY axial moving mechanism in order to adjust the spacing distance between nozzle component and side, make the utility model coating apparatus in the small size surfaces such as the side of substrate or ring shape face, to be coated with operation, to reach the advantages such as the good and even thickness of quality of forming film.
In order to reach above-mentioned object, the utility model provides a kind of coating apparatus for substrate side surfaces, and described substrate has a side and a shape center, and this coating apparatus comprises:
One support;
One the one XY axial moving mechanism, is fixed on this support;
One Z-axis direction rotating mechanism, is connected on an XY axial moving mechanism and follows an XY axial moving mechanism and move;
One the 2nd XY axial moving mechanism, is fixed on this Z-axis direction rotating mechanism and follows this Z-axis direction rotating mechanism rotation;
One plummer, is connected on the 2nd XY axial moving mechanism and follows the 2nd XY axial moving mechanism and move, and described substrate orientation is in this plummer; And
One ejecting device, comprises a Z-axis direction travel mechanism and is arranged on a nozzle component of this Z-axis direction travel mechanism, and this nozzle component follows that this Z-axis direction travel mechanism moves and corresponding described side configuration;
Wherein, the 2nd XY axial moving mechanism drives the axle center of described shape center and this Z-axis direction rotating mechanism overlapping, and an XY axial moving mechanism is adjusted the spacing distance between this nozzle component and described side.
Also comprise calculating an arithmetic unit of the described shape center of described substrate, this arithmetic unit be take described shape center and is produced one first Mobile data and one second Mobile data as benchmark.
Wherein this arithmetic unit and the 2nd XY axial moving mechanism are electrically connected and control the 2nd XY axial moving mechanism and move along this first Mobile data, and according to this first Mobile data so that the axle center of described shape center and this Z-axis direction rotating mechanism is overlapping.
Wherein this arithmetic unit and an XY axial moving mechanism are electrically connected and control an XY axial moving mechanism and move along this second Mobile data, and according to this second Mobile data to adjust the spacing distance between this nozzle component and described side.
Also comprise a feed zone and a discharge zone, an XY axial moving mechanism moves between this feed zone and this discharge zone.
Also comprise a detection components, this detection components is to should nozzle component and the configuration of described substrate.
Wherein this detection components is installed on this Z-axis direction travel mechanism and follows this Z-axis direction travel mechanism and move.
Wherein this detection components comprises one first video camera and one second video camera, the top configuration of the corresponding described substrate of this first video camera, and this second video camera is to should nozzle component and the configuration of described side.
Wherein this detection components also comprises a light fixture, and this light fixture is to should nozzle component and the configuration of described substrate.
Wherein this first video camera, this second video camera and this light fixture are installed on this Z-axis direction travel mechanism and follow this Z-axis direction travel mechanism and move, and this light fixture is configured in a side of this first video camera.
The utility model also has the following advantages:
The first, the utility model coating apparatus is by Path selection correcting mode, makes within spacing distance between side and nozzle component maintains certain numerical value, to allow spraying effect reach optimization, thereby reaches the advantages such as the good and even thickness of quality of forming film.
The second, the axle center of shape center and Z-axis direction rotating mechanism is overlapping, make substrate take shape center under pivot rotation, allow the utility model coating apparatus can adopt the continuous continual mode of spraying to carry out, after substrate revolves and turns around, complete spraying operation, the advantage improving to reach spraying homogenising and operating efficiency.
Three, the utility model coating apparatus also comprises detection components, the corresponding nozzle component of detection components, substrate top and side configuration, make operating personnel can understand by detection components the situation of coating operation at present, arithmetic unit also can carry out by detection components the adjustment of the first Mobile data and the second Mobile data, and then promotes operating efficiency and the operation ease of coating apparatus.
Accompanying drawing explanation
Fig. 1: the three-dimensional combination figure of the utility model coating apparatus.
Fig. 2: the combination schematic diagram of the utility model coating apparatus.
Fig. 3: the block diagram of the utility model coating apparatus.
Fig. 4: the use view of the utility model coating apparatus.
Fig. 5: another block diagram of the utility model coating apparatus.
Fig. 6: another of the utility model coating apparatus used view.
Fig. 7: the another use view of the utility model coating apparatus.
In figure:
10 ... coating apparatus
1 ... support;
2 ... the one XY axial moving mechanism;
3 ... Z-axis direction rotating mechanism;
4 ... the 2nd XY axial moving mechanism;
5 ... plummer;
6 ... ejecting device;
61 ... Z-axis direction travel mechanism;
62 ... nozzle component;
7 ... arithmetic unit;
71 ... the first Mobile data;
72 ... the second Mobile data;
81 ... feed zone;
82 ... discharge zone;
9 ... detection components;
91 ... the first video camera;
91 ' ... the second video camera;
92 ... light fixture;
100 ... substrate;
101 ... side;
102 ... shape center;
200 ... rete;
L ... axle center;
S ... spacing distance.
The specific embodiment
Below in conjunction with the drawings and specific embodiments, the utility model is described in further detail, so that those skilled in the art can better understand the utility model being implemented, but illustrated embodiment is not as to restriction of the present utility model.
Please refer to shown in Fig. 1 to Fig. 7, the utility model provides a kind of coating apparatus for substrate side surfaces, and this coating apparatus 10 mainly comprises a support 1, one the one XY axial moving mechanism 2, a Z-axis direction rotating mechanism 3, one the 2nd XY axial moving mechanism 4, a plummer 5 and an ejecting device 6.
As shown in Figure 1 to Figure 2, substrate 100 can be how much external forms such as circle, triangle, rectangle, polygonal, and the outer peripheral edges of substrate 100 have a side 101 and 101 shape definition that enclose go out a shape center 102 along side.
As shown in Figure 1 to Figure 2, an XY axial moving mechanism 2 is fixed on support 1, and this XY axial moving mechanism 2 can carry out the movement of X-direction and Y direction on support 1.
As shown in Figure 1 to Figure 2, Z-axis direction rotating mechanism 3 is connected on an XY axial moving mechanism 2 and follows an XY axial moving mechanism 2 and carry out the movement of X-direction and Y direction.
As shown in Figure 1 to Figure 2, the 2nd XY axial moving mechanism 4 is fixed on Z-axis direction rotating mechanism 3 and follows 3 rotations of Z-axis direction rotating mechanism, and this 2nd XY axial moving mechanism 4 can carry out the movement of X-direction and Y direction on Z-axis direction rotating mechanism 3.
As shown in Figure 1 to Figure 2, plummer 5 is connected on the 2nd XY axial moving mechanism 4 and follows the 2nd XY axial moving mechanism 4 and carry out the movement of X-direction and Y direction, and substrate 100 is positioned plummer 5.
As shown in Figure 1 to Figure 2, ejecting device 6 comprises a Z-axis direction travel mechanism 61 and is arranged on a nozzle component 62 of Z-axis direction travel mechanism 61, and nozzle component 62 is followed Z-axis direction travel mechanism 61 and carried out that Z-direction moves and corresponding side surface 101 configuration.
Wherein, the 2nd XY axial moving mechanism 4 drives shape center 102 overlapping with the axle center L of Z-axis direction rotating mechanism 3, and an XY axial moving mechanism 2 is in order to adjust the spacing distance S between nozzle component 62 and side 101.
As shown in Fig. 1 to Fig. 2, Fig. 3 and Fig. 5, the utility model coating apparatus 10 also comprises an arithmetic unit 7, arithmetic unit 7 detects the shape that sides 101 enclose the position that calculates shape center 102, and produces one first Mobile data 71 and one second Mobile data 72 according to shape center 102 for benchmark.
Further illustrate as follows, arithmetic unit 7 and the 2nd XY axial moving mechanism 4 are electrically connected and control the 2nd XY axial moving mechanism 4 and move along the first Mobile data 72, and foundation the first Mobile data 71 is so that shape center 102 is overlapping with the axle center L of Z-axis direction rotating mechanism 3.
In addition, arithmetic unit 7 and an XY axial moving mechanism 2 are electrically connected and control an XY axial moving mechanism 2 and move along the second Mobile data 72, and foundation the second Mobile data 72 is to adjust the spacing distance S between nozzle component 62 and side 101.
As shown in Figure 1 to Figure 2, the utility model coating apparatus 10 also comprises that a feed zone 81 and discharge zone 82, the one XY axial moving mechanisms 2 move between feed zone 81 and discharge zone 82.
As shown in Figure 1 to Figure 2, the utility model coating apparatus 10 also comprises a detection components 9, and detection components 9 is installed on Z-axis direction travel mechanism 61 and follows Z-axis direction travel mechanism 61 and move, the corresponding nozzle component 62 of this detection components 9 and substrate 100 configurations.
Be described in detail as follows, detection components 9 comprises one first video camera 91, one second video camera 91 ' and a light fixture 92, the top configuration of the first video camera 91 counterpart substrates 100, the corresponding nozzle component 62 of the second video camera 91 ' and side 101 configurations, the corresponding nozzle component 62 of light fixture 92 and substrate 100 configurations.
In addition, the first video camera 91, the second video camera 91 ' and light fixture 92 are installed in Z-axis direction travel mechanism 61 and follow Z-axis direction travel mechanism 61 and move, and light fixture 92 is configured in a side of the first video camera 91.
In addition, the detection components 9 of the utility model most preferred embodiment comprises the first video camera 91 and the second video camera 91 ', but detection components 9 also can be other detection components such as infrared detection assembly, not take the present embodiment as restriction.
As shown in Figure 1 to Figure 2, the combination of coating apparatus 10 of the present utility model, it utilizes an XY axial moving mechanism 2 to be fixed on support 1; Z-axis direction rotating mechanism 3 is connected on an XY axial moving mechanism 2 and follows an XY axial moving mechanism 2 and move; The 2nd XY axial moving mechanism 4 is fixed on Z-axis direction rotating mechanism 3 and follows 3 rotations of Z-axis direction rotating mechanism; Plummer 5 is connected on the 2nd XY axial moving mechanism 4 and follows the 2nd XY axial moving mechanism 4 and move, and substrate 100 is positioned plummer 5; Ejecting device 6 comprises Z-axis direction travel mechanism 61 and is arranged on the nozzle component 62 of Z-axis direction travel mechanism 61, and nozzle component 62 is followed Z-axis direction travel mechanism 61 and moved also corresponding side surface 101 configurations; Wherein, the 2nd XY axial moving mechanism 4 drives shape center 102 overlapping with the axle center L of Z-axis direction rotating mechanism 3, and an XY axial moving mechanism 2 is in order to adjust the spacing distance S between nozzle component 62 and side 101.Whereby, the 2nd XY axial moving mechanism 4 drives shape center 102 overlapping with the axle center L of Z-axis direction rotating mechanism 3, Z-axis direction rotating mechanism 3 drives plummer 5 rotations again, and the one XY axial moving mechanism 2 in order to adjust the spacing distance between nozzle component 62 and side 101, make the utility model coating apparatus 10 in 101 small sizes such as the grade surfaces, side of substrate 100 or ring shape face, to be coated with operation, to reach the features such as the good and even thickness of quality of forming film.
As shown in Fig. 3 to Fig. 7, the use state of coating apparatus 10 of the present utility model, first, as shown in Figure 3 to Figure 4, the shape that arithmetic unit 7 detection sides 101 enclose the position that calculates shape center 102, and produce the first Mobile data 71 according to shape center 102 for benchmark, arithmetic unit 7 is electrically connected and controls the 2nd XY axial moving mechanism 4 with the 2nd XY axial moving mechanism 4 again and moves along the first Mobile data 72, and the 2nd XY axial moving mechanism 4 moves according to the first Mobile data 71, and then drive shape center 102 overlapping with the axle center L of Z-axis direction rotating mechanism 3.
Moreover, as shown in Figures 5 to 7, nozzle component 62 is followed Z-axis direction travel mechanism 61 and is carried out that Z-direction moves and corresponding side surface 101 configuration, the shape that arithmetic unit 7 detection sides 101 enclose the position that calculates shape center 102, and produce the second Mobile data 72 according to shape center 102 for benchmark, arithmetic unit 7 and an XY axial moving mechanism 2 are electrically connected and control an XY axial moving mechanism 2 and move along the second Mobile data 72, and XY axial moving mechanism 2 foundation second Mobile datas 72 are to adjust the spacing distance S between nozzle component 62 and side 101.
Therefore, when the utility model coating apparatus 10 is coated with operation, the 2nd XY axial moving mechanism 4 is located and is not moved after driving the axle center L of shape center 102 and Z-axis direction rotating mechanism 3 overlapping, and Z-axis direction rotating mechanism 3 can drive the 2nd XY axial moving mechanisms 4, plummer 5 and substrate 100 to rotate together.
And, overlapping with the axle center L of Z-axis direction rotating mechanism 3 because of shape center 102, make substrate 100 in rotating the process of a circle, the variation that the spacing distance S between side 101 and nozzle component 62 produces is minimum; Be described in detail as follows, substrate 100 can be how much external forms such as circle, triangle, rectangle, polygonal, therefore the external form of substrate 100 asymmetric under, substrate 100 is when rotating, spacing distance S between side 101 and nozzle component 62 also can change, but minimum to the change of distance at shape center 102 because of side 101 each points, so substrate 100 be take shape center 102 under pivot rotation, the variation that the spacing distance S between side 101 and nozzle component 62 produces also can be minimum.
Afterwards, the one XY axial moving mechanism 2 drives Z-axis direction rotating mechanism 3, the 2nd XY axial moving mechanism 4, plummer 5 and substrate 100 move together, to adjust the spacing distance S between nozzle component 62 and side 101, make substrate 100 take shape center 102 when pivot rotates, under the variation minimum that spacing distance S between side 101 and nozzle component 62 produces, the one XY axial moving mechanism 2 can drive again substrate 100 to approach or away from nozzle component 62, with the spacing distance S between fine setting nozzle component 62 and side 101, allow in coating operation, within spacing distance S maintains certain numerical value, so that the coating of nozzle component 62 ejections is covered in side 101 equably, and on side 101, be formed with even thickness and the second best in quality rete 200.Whereby, the utility model coating apparatus 10 is by Path selection correcting mode, make within spacing distance S between side 101 and nozzle component 62 maintains certain numerical value, to allow spraying effect reach optimization, thereby reach the advantages such as the good and even thickness of quality of forming film.
In addition, shape center 102 is overlapping with the axle center L of Z-axis direction rotating mechanism 3, make substrate 100 take shape center 102 under pivot rotation, allow the utility model coating apparatus 10 can adopt the continuous continual mode of spraying to carry out, after substrate 100 revolves and turns around, complete spraying operation, allow rete 200 evenly and stably be coated on side 101, the advantage improving to reach spraying homogenising and operating efficiency.
The utility model coating apparatus 10 also comprises detection components 9, detection components 9 comprises the first video camera 91 and the second video camera 91 ', the top configuration of the first video camera 91 counterpart substrates 100, this first video camera 91 is for providing arithmetic unit 7 to calculate the side-play amount of substrate 100, to finely tune the first Mobile data 71, to help 102Yu axle center, shape center L overlapping exactly.
Moreover, the corresponding nozzle component 62 of the second video camera 91 ' and side 101 configurations, this first video camera 91 is for detection of surface appearance and the nozzle component 62 and the difference of height of side 101 on Z axis of side 101, to finely tune the second Mobile data 72, to promote the uniform advantage of operating efficiency, accuracy and film forming thickness of nozzle component 62.
Therefore, operating personnel can understand by detection components 9 situation of coating operation at present, arithmetic unit 7 also can carry out by detection components 9 adjustment of the first Mobile data 71 and the second Mobile data 72, and then promotes operating efficiency and the operation ease of coating apparatus 10.
Wherein, detection components 9 also comprises light fixture 92, light fixture 92 is configured in a side of the first video camera 91, it is the top that light fixture 92 is configured in substrate 100, make light fixture 92 illuminate top, nozzle component 62 and 101 places, side of substrate 100, to allow light fixture 92 improve the brightness at nozzle component 62, substrate 100 and 101 places, side, more convenient the first video camera 91 and the second video camera 91 ' photography are coated with the situation of operation.
In addition, the utility model coating apparatus 10 also comprises that feed zone 81 and discharge zone 82, the one XY axial moving mechanisms 2 move between feed zone 81 and discharge zone 82, makes an XY axial moving mechanism 2 for the operation of auxiliary charging and discharging.
The above embodiment is only the preferred embodiment for absolutely proving that the utility model is lifted, and protection domain of the present utility model is not limited to this.Being equal to that those skilled in the art do on the utility model basis substitutes or conversion, all within protection domain of the present utility model.Protection domain of the present utility model is as the criterion with claims.
Claims (10)
1. for a coating apparatus for substrate side surfaces, described substrate has a side and a shape center, it is characterized in that, this coating apparatus comprises:
One support;
One the one XY axial moving mechanism, is fixed on this support;
One Z-axis direction rotating mechanism, is connected on an XY axial moving mechanism and follows an XY axial moving mechanism and move;
One the 2nd XY axial moving mechanism, is fixed on this Z-axis direction rotating mechanism and follows this Z-axis direction rotating mechanism rotation;
One plummer, is connected on the 2nd XY axial moving mechanism and follows the 2nd XY axial moving mechanism and move, and described substrate orientation is in this plummer; And
One ejecting device, comprises a Z-axis direction travel mechanism and is arranged on a nozzle component of this Z-axis direction travel mechanism, and this nozzle component follows that this Z-axis direction travel mechanism moves and corresponding described side configuration;
Wherein, the 2nd XY axial moving mechanism drives the axle center of described shape center and this Z-axis direction rotating mechanism overlapping, and an XY axial moving mechanism is adjusted the spacing distance between this nozzle component and described side.
2. the coating apparatus for substrate side surfaces according to claim 1, it is characterized in that, also comprise calculating an arithmetic unit of the described shape center of described substrate, this arithmetic unit be take described shape center and is produced one first Mobile data and one second Mobile data as benchmark.
3. the coating apparatus for substrate side surfaces according to claim 2, it is characterized in that, wherein this arithmetic unit and the 2nd XY axial moving mechanism are electrically connected and control the 2nd XY axial moving mechanism and move along this first Mobile data, and according to this first Mobile data so that the axle center of described shape center and this Z-axis direction rotating mechanism is overlapping.
4. the coating apparatus for substrate side surfaces according to claim 2, it is characterized in that, wherein this arithmetic unit and an XY axial moving mechanism are electrically connected and control an XY axial moving mechanism and move along this second Mobile data, and according to this second Mobile data to adjust the spacing distance between this nozzle component and described side.
5. the coating apparatus for substrate side surfaces according to claim 1, is characterized in that, also comprises a feed zone and a discharge zone, and an XY axial moving mechanism moves between this feed zone and this discharge zone.
6. the coating apparatus for substrate side surfaces according to claim 1, is characterized in that, also comprises a detection components, and this detection components is to should nozzle component and the configuration of described substrate.
7. the coating apparatus for substrate side surfaces according to claim 6, is characterized in that, wherein this detection components is installed on this Z-axis direction travel mechanism and follows this Z-axis direction travel mechanism and move.
8. the coating apparatus for substrate side surfaces according to claim 6, it is characterized in that, wherein this detection components comprises one first video camera and one second video camera, the top configuration of the corresponding described substrate of this first video camera, and this second video camera is to should nozzle component and the configuration of described side.
9. the coating apparatus for substrate side surfaces according to claim 8, is characterized in that, wherein this detection components also comprises a light fixture, and this light fixture is to should nozzle component and the configuration of described substrate.
10. the coating apparatus for substrate side surfaces according to claim 9, it is characterized in that, wherein this first video camera, this second video camera and this light fixture are installed on this Z-axis direction travel mechanism and follow this Z-axis direction travel mechanism and move, and this light fixture is configured in a side of this first video camera.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW103203443 | 2014-02-27 | ||
| TW103203443 | 2014-02-27 | ||
| TW103204910U TWM483127U (en) | 2014-02-27 | 2014-03-21 | Coating equipment for lateral surface of substrate |
| TW103204910 | 2014-03-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203778253U true CN203778253U (en) | 2014-08-20 |
Family
ID=51314481
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420146046.XU Expired - Lifetime CN203778253U (en) | 2014-02-27 | 2014-03-28 | coating device for substrate side |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203778253U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105772350A (en) * | 2016-05-11 | 2016-07-20 | 广东省科力智能装备及机器人研究院 | Dispensing operating platform for coating machine |
| CN108176561A (en) * | 2018-02-08 | 2018-06-19 | 深圳市鑫三力自动化设备有限公司 | A kind of continuous uninterrupted point glue equipment in three sides |
| CN110152916A (en) * | 2018-02-14 | 2019-08-23 | 邑富有限公司 | Spray module uses the side spray automatic double surface gluer of this spray module and the operating method of side spray automatic double surface gluer |
-
2014
- 2014-03-28 CN CN201420146046.XU patent/CN203778253U/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105772350A (en) * | 2016-05-11 | 2016-07-20 | 广东省科力智能装备及机器人研究院 | Dispensing operating platform for coating machine |
| CN108176561A (en) * | 2018-02-08 | 2018-06-19 | 深圳市鑫三力自动化设备有限公司 | A kind of continuous uninterrupted point glue equipment in three sides |
| CN110152916A (en) * | 2018-02-14 | 2019-08-23 | 邑富有限公司 | Spray module uses the side spray automatic double surface gluer of this spray module and the operating method of side spray automatic double surface gluer |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20140820 |