CN203772218U - System error compensation apparatus for quadratic element measuring equipment - Google Patents
System error compensation apparatus for quadratic element measuring equipment Download PDFInfo
- Publication number
- CN203772218U CN203772218U CN201420101054.2U CN201420101054U CN203772218U CN 203772218 U CN203772218 U CN 203772218U CN 201420101054 U CN201420101054 U CN 201420101054U CN 203772218 U CN203772218 U CN 203772218U
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- CN
- China
- Prior art keywords
- vertical beam
- line rail
- error compensation
- girder
- system error
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- Expired - Fee Related
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- Length Measuring Devices By Optical Means (AREA)
Abstract
A system error compensation apparatus for quadratic element measuring equipment is composed of a main line rail, an auxiliary line rail, a work platform, a grating ruler, an upper crossbeam, a middle crossbeam, a lower crossbeam, a middle vertical beam, a right vertical beam, a left vertical beam and a main beam. The system error compensation apparatus is characterized in that the main beam is arranged on the work platform, the main line rail and the auxiliary line rail are positioned at two ends of the main beam, and the grating ruler is disposed in the middle of the main beam. The apparatus of the utility model helps to solve problems that a conventional system error compensation apparatus is poor in compensation effect for large-stroke gantry type quadratic element measuring equipment.
Description
Technical field
The utility model relates to measuring equipment, relates in particular to a kind of Quadratic Finite Element measurement equipment systematic error compensation device.
Background technology
At present, planer-type Quadratic Finite Element measurement equipment on the market, particularly large stroke gantry type Quadratic Finite Element measurement equipment, due to the reason of the aspect such as device structure and mechanical erection, in operating measurement process along with the growth of measuring distance, can produce larger Abbe error and machine error, wherein more representational phenomenon is along the linear measurement precision difference of main line rail direction workbench both sides clearly.Existing systematic error compensation device mainly contains face correction, fast face correction and the linear correction of optical ruler.These three kinds of compensation systems are relatively good to a kind of Quadratic Finite Element measurement equipment of the planer-type of medium and small stroke systematic error compensation device effect, to large stroke gantry type Quadratic Finite Element measurement equipment systematic error correction, face correction is limited to the factors such as technique and realizes that difficulty is large, cost is higher, the linear correction of face correction and optical ruler is because of the reason in its compensation system principle fast, and compensation system effect is poor.Therefore, design a kind of Quadratic Finite Element measurement equipment of a kind of novel planer-type systematic error compensation device and become those skilled in the art's problem demanding prompt solution.
Utility model content
The utility model is in order to solve above-mentioned deficiency, and a kind of Quadratic Finite Element measurement equipment systematic error compensation device is provided.
The utility model solves technical scheme that its technical matters is taked: a kind of Quadratic Finite Element measurement equipment systematic error compensation device, is made up of main line rail, subordinate line rail, workbench, grating scale, entablature, middle cross beam, sill, middle vertical beam, right vertical beam, left vertical beam and girder.
Described girder is on workbench.
Described main line rail and subordinate line rail are positioned at the two ends of girder.
Described grating scale is positioned at the centre of girder.
Described entablature, middle cross beam and sill is parallel with girder to be fallen down to be arranged in order from above.
Described middle vertical beam, right vertical beam and left vertical beam is parallel with grating scale to be from left to right arranged in order.
The compensation system shelves that this device adopts quick face correction or the linear correction of optical ruler to generate, design a kind of new proportional compensation device mode, choose 2 according to the size of Quadratic Finite Element measurement equipment stroke in its single shaft direction (girder direction and main line rail direction) lateral attitude, 3 points, according to after compensation system this in the linear measurement precision of corresponding axial direction, it is carried out to linear scaling compensation system, according to the coordinate of these points and linear scaling compensation system coefficient, realize the proportional compensation device to each position of whole workbench by algorithm, realize to systematic error second compensation device.
The utility model beneficial effect is: the utility model is on the basis of the compensation system shelves that adopt prior art to generate, use fairly simple mode to gather the linear measurement information that can not simultaneously take into account position in existing compensation system principle, realize the second compensation device to systematic error, solved legacy system error-compensating apparatus to the poor problem of large stroke gantry type Quadratic Finite Element measurement equipment compensation system effect.
Brief description of the drawings
Fig. 1 is that schematic diagram is chosen in the position that the utility model carries out information acquisition.
Wherein, 1-main line rail; 2-subordinate line rail; 3-workbench; 4-grating scale; 5-entablature, 6-middle cross beam, 7-sill; 8-middle vertical beam, 9-right vertical beam, 10-left vertical beam, 11-girder.
Embodiment
Below in conjunction with accompanying drawing, the utility model is described in further detail:
As shown in Figure 1, a kind of Quadratic Finite Element measurement equipment systematic error compensation device,
A kind of Quadratic Finite Element measurement equipment systematic error compensation device, is made up of main line rail 1, subordinate line rail 2, workbench 3, grating scale 4, entablature 5, middle cross beam 6, sill 7, middle vertical beam 8, right vertical beam 9, left vertical beam 10 and girder 11.
Described girder 11 is on workbench 3.
Described main line rail 1 and subordinate line rail 2 are positioned at the two ends of girder 11.
Described grating scale 4 is positioned at the centre of girder 11.
Described entablature 5, middle cross beam 6 and sill 7 is parallel with girder 11 to be fallen down to be arranged in order from above.
Described middle vertical beam 8, right vertical beam 9 and left vertical beam 10 is parallel with grating scale 4 to be from left to right arranged in order.
On the basis of the compensation system shelves that adopt prior art to generate, gather y axial coordinate and middle vertical beam 8, right vertical beam 9, the x axial coordinate of left vertical beam 10 positions and the linear scaling compensation system coefficient of each position of entablature 5, middle cross beam 6, sill 7 positions, realize the second compensation device to systematic error by algorithm.
As shown in Figure 1, principle of work of the present utility model is: enable by the compensation system shelves that quick face makes corrections or the linear correction of optical ruler generates, gather compensation system mode used and can not take into account the relevant information of position simultaneously, comprise that the y direction of principal axis coordinate of x direction of principal axis upper, middle and lower position and each position carry out separately the compensation system coefficient of linear scaling compensation system and the x direction of principal axis coordinate of position, y direction of principal axis left, center, right and each position and carry out separately the compensation system coefficient of linear scaling compensation system, what institute's Information Monitoring input was generated by algorithm carries out in the formula of second compensation device systematic error, operation can realize the second compensation device to systematic error.
The foregoing is only embodiment of the present utility model; not thereby limit the scope of the claims of the present utility model; every equivalent structure or conversion of equivalent flow process that utilizes the utility model instructions and accompanying drawing content to do; or be directly or indirectly used in other relevant technical fields, be all in like manner included in scope of patent protection of the present utility model.
Claims (3)
1. a Quadratic Finite Element measurement equipment systematic error compensation device, formed by main line rail, subordinate line rail, workbench, grating scale, entablature, middle cross beam, sill, middle vertical beam, right vertical beam, left vertical beam and girder, it is characterized in that: described girder is on workbench; Described main line rail and subordinate line rail are positioned at the two ends of girder; Described grating scale is positioned at the centre of girder.
2. a kind of Quadratic Finite Element measurement equipment systematic error compensation device according to claim 1, is characterized in that: described entablature, middle cross beam and sill is parallel with girder to be fallen down to be arranged in order from above.
3. a kind of Quadratic Finite Element measurement equipment systematic error compensation device according to claim 1, is characterized in that: described middle vertical beam, right vertical beam and left vertical beam is parallel with grating scale to be from left to right arranged in order.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420101054.2U CN203772218U (en) | 2014-03-07 | 2014-03-07 | System error compensation apparatus for quadratic element measuring equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420101054.2U CN203772218U (en) | 2014-03-07 | 2014-03-07 | System error compensation apparatus for quadratic element measuring equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203772218U true CN203772218U (en) | 2014-08-13 |
Family
ID=51289401
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420101054.2U Expired - Fee Related CN203772218U (en) | 2014-03-07 | 2014-03-07 | System error compensation apparatus for quadratic element measuring equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203772218U (en) |
-
2014
- 2014-03-07 CN CN201420101054.2U patent/CN203772218U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140813 |